• Title/Summary/Keyword: 공기정화시스템

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반도체 및 Optic Industries 클린룸 배기가스의 오염제어 및 청정화기술

  • 황유성
    • Air Cleaning Technology
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    • v.17 no.4 s.67
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    • pp.39-57
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    • 2004
  • 첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.

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Evaluation of Ventilation System Performance Using Indoor Air Quality Model (실내공기질 모델을 이용한 환기 시스템의 공기 정화 효율성 평가)

  • 최성우
    • Journal of Environmental Health Sciences
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    • v.23 no.4
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    • pp.57-66
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    • 1997
  • Successful energy conservation and good indcfor air quality (IAQ) are highly dependent on ventilation system. Air filtration is a primary solution of indoor air control strategies in terms of reducing energy consumption and improving ihdoor air quality. A conventional system with bypass filter, as it is called variable-air-volume/bypass filtration system (VAV/BPFS), is a variation of the conventional variable air volume (VAV) systems, which is designed to eliminate indoor air pollutant and to save energy. Bypass filtration system equipped with a high-efficiency particulate filter and carbon absorbent provides additional cleaned air into indoor environments and maintain good IAQ for human health. The objectives of this research were to compare the relative total decay rate of indoor air pollutant concentrations, and to develop a mathematical model simulating the performance of VAV/BPFS. All experiments were performed in chamber under the controlled conditions. The specific conclusions of this research are: 1. The VAV/BPFS system is more efficient than the VAV system in removing indoor air pollutant concentration. The total decay rates of aerosol, and total volatile organic compound (TVOC) for the VAV/BPFS system were higher than those of the conventional VAV system. 2. IAQ model predictions of each pollutant agree closely with the measured values. 3. According to IAQ model evaluation, reduction of outdoor supply air results in decreased dilution removal rate and on increased bypass filtration removal rate with the VAV/BPFS. As a results, we recommends the VAV/BPFS as an alternative to conventional VAV systems.

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Parameter Estimation of the Aerated Wetland for the Performance of the Polluted Stream Treatment (오염하천 정화를 위한 호기성 인공습지의 운영인자 평가)

  • Kim, Dul-Sun;Lee, Dong-Keun
    • Clean Technology
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    • v.25 no.4
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    • pp.302-310
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    • 2019
  • A constructed wetland with the aerobic tank and anaerobic/anoxic tank connected in series was employed in order to treat highly polluted stream water. The aerobic tank was maintained aerobic with a continuous supply of air through the natural air draft system. Five pilot plants having different residence times were employed together to obtain parameters for the best performances of the wetland. BOD and COD removals at the aerobic tank followed the first order kinetics. COD removal rate constants were slightly lower than BOD. The temperature dependence of COD (θ = 1.0079) and BOD (θ = 1.0083) was almost the same, but the temperature dependence (θN) of T-N removal was 1.0189. The SS removal rate was as high as 98% and the removal efficiency showed a tendency to increase with increasing hydraulic loading rate (Q/A). The main mechanism of BOD and COD removal at the anaerobic/anoxic tank was entirely different from that of the aerobic tank. BOD and COD were supplied as the carbon source for biological denitrification. T-P was believed to be removed though the cation exchange between orthophosphate and gravels within the anaerobic and anoxic tanks. The wetland could successfully be operated without being blocked by the filtered solid which subsequently decomposed at an extremely fast rate.

Stabilizing Soil Moisture and Indoor Air Quality Purification in a Wall-typed Botanical Biofiltration System Controlled by Humidifying Cycle (가습 주기에 따른 벽면형 식물바이오필터의 토양 수분 안정화 및 실내공기질 정화)

  • Lee, Chang Hee;Choi, Bom;Chun, Man Young
    • Horticultural Science & Technology
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    • v.33 no.4
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    • pp.605-617
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    • 2015
  • The ultimate goal of this research is to develop a botanical biofiltration system that combines a green interior, biofiltering, and automatic irrigation to purify indoor air pollutants according to indoor space and the size of biofilter. This study was performed to compare the stability of air flow characteristics and removal efficiency (RE) of fine dust within a wall-typed (vertical) botanical biofilter depending on humidifying cycle and to investigate RE of volatile organic compounds (VOCs) by the biofilter. The biofilter used in this experiment was designed as an integral form of water metering pump, water tank, blower, humidifier, and multi-level planting space in order to be suitable for indoor space utilization. As a result, relative humidity, air temperature, and soil moisture content (SMC) within the biofilter showed stable values regardless of three different humidifying cycles operated by the metering pump. In particular, SMCs were consistently maintained in the range of 27.1-29.7% during all humidifying cycles; moreover, a humidifying cycle of operating for 15 min and pausing for 45 min showed the best horizontal linear regression (y = 0.0008x + 29.09) on SMC ($29.0{\pm}0.2%$) during 120 hour. REs for number of fine dust (PM10) and ultra-fine dust (PM2.5) particles passed through the biofilter were in the range of 82.7-89.7% and 65.4-73.0%, respectively. RE for weight of PM10 passed through the biofilter was in the range of 58.1-78.9%, depending on humidifying cycle. REs of xylene, ethyl benzene, total VOCs (TVOCs), and toluene passed through the biofilter were in the range of 71.3-75.5%, while REs of benzene and formaldehyde (HCHO) passed through the biofilter were 39.7% and 44.9%, respectively. Hence, it was confirmed that the wall-typed botanical biofilter suitable for indoor plants was very effective for indoor air purification.

$\textrm{NO}_2$ Absorption and Physiological Response of Lettuce in a Semi-closed Plant Production System (부분 밀폐형 식물생산시스템에서 상추의 $\textrm{NO}_2$ 흡수 및 생육반응)

  • Jung Eek Son;Jong Seok Park
    • Journal of Bio-Environment Control
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    • v.10 no.4
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    • pp.207-212
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    • 2001
  • The environmental characteristics, absorption rate of NO$_2$, physiological response, and quality of lettuces were examined in a semi-closed plant production system consisted of human and plant modules. Leaf lettuces were transplanted to 10-cm diameter pots at 4-to 5-leaf stage, and grown in a gas-fumigated plant module. Air containing NO$_2$was circulated 10 min-ON/ 20 min-OFF between the human and plant modules by a diaphragm. At 0.13, 0.30, and 0.45 $\mu$mol.mol$^{-1}$ NO$_2$, NO$_2$ decrements in the chamber during the 10 min were 0.040, 0.109, and 0.149 $\mu$mol.mol$^{-1}$ , respectively. The NO$_2$absorption rate of the plants was estimated to be 0.078 $\mu$mol.mol$^{-1}$ .m$^{-2}$ .min$^{-1}$ at 0.45 $\mu$mol.mol$^{-1}$ NO$_2$ was less than that of the control plant at 4th and 5th days, whereas the respiration rate was the same. The lettuce grown at 0.45 $\mu$mol.mol$^{-1}$ NO$_2$ had similar leaf length, leaf area, dry and fresh weights, and quality to that grown without NO$_2$.

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The Characteristic of Physical properties and Shrinkage of Nano-filament according to the Textured Conditions (사가공 조건에 따른 nano-filament의 물성 및 수축특성)

  • Kang, Ji-Man;Cho, Dae-Hyun;Lee, Jun-Hee;Choi, Jong-Duk
    • Proceedings of the Korean Society of Dyers and Finishers Conference
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    • 2012.03a
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    • pp.92-92
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    • 2012
  • 나노필라멘트 섬유는 직편물 등으로 구조/용도 다양화 가능하다. 나노필라멘트 섬유는 소재특유의 닦음성, 흡착성, 고밀도 특성 등을 활용하여 직편물의 형태로 다양한 용도 개발이 가능하며, 나노기술을 접목시킨 새로운 기능성과 고성능 섬유 소재 개발을 통한 자동차 분야의 개발 트랜드인 고급화, 경량화, 고성능화 추진을 위해 연료전지, 신슐레이터, 고성능 필터, 시트나 도어트림, 헤드라인과 같은 인테리어류와 전자 분야의 제조원가 절감, 공정 단순화를 위해 프린터 토너, 하드디스크 연마제, 다용도 No Dust Cleaner 등의 개발, 의료/바이오 분야의 혈액필터, 수술용 보호제, 창상억제제(유착 방지막), 항균마스크, 의료용 약물전달 시스템 및 환경 분야의 정수/공기 정화 시스템, 건축 토목용 보강제, 고(高)인성 콘크리트, 폐수처리용 슬러리 담체(Matrix) 등 다양한 분야로 용도 개발이 가능하다. 본 연구는 나노필라멘트의 다양한 분야로의 용도 개발 적용의 기초연구로서, 부직포 상으로 얻어지는 나노섬유 제조기술의 단점인 직경의 불균일, 물리적 특성의 한계와 필라멘트가 아닌 단섬유로 인해 발생하는 용도 및 상품 개발에의 제한성을 개선하기 위하여 연속적으로 필라멘트를 생산가능한 해도형 복합방사 방법을 도입하여 개발한 장섬유 필라멘트 형태의 해도형 나노 섬유 소재를 활용하는 것으로 방사된 SDY 형태의 나노필라멘트 섬유를 제직상에서의 작업성 용이 및 직물의 벌키성 증대와 Crimp성을 향상 시켜 터치감 및 후가공에 용이할 수 있도록 DTY를 제조함에 있어 기존 일반 POY사에서의 DTY공정과는 달리 소재의 특성 즉, 해도사의 해성분 및 도성분의 후공정을 감안하여 최적의 Crimp는 발현하되 단면의 형상을 유지할 수 있는 다양한 사가공 조건을 설정 하고 이에 따라 가공사를 생산하여 공정조건에 따른 가공사의 물성 및 수축특성을 비교 분석 하여 염색 및 후가공시 소재의 물성 및 수축특성이 미치는 영향성을 살펴보고자 하였다.

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Development of Air-cell Mattress for Preventing Pressure Ulcer Using Anthropometric Model (인체계측 모델을 이용한 욕창방지용 공기셀 매트리스의 개발)

  • Kang Sung-Jae;Kim Gyu-Seok;Hong Jung-Hwa;Ryu Je-Cheong;Kim Kyung-Hoon;Mun Mu-Seong;Moon Inhyuk
    • Journal of Institute of Control, Robotics and Systems
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    • v.11 no.7
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    • pp.578-586
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    • 2005
  • Air mattress is now used widely to prevent the pressure ulcer by reducing the localized pressure peaks. The pressure control method based on the anthrophometric model of an air-cell mattress developed in this study is presented. The air-cell mattress has 18 cylindrical air cells made of porous material allowing air leakage. Even though the air leakage can contribute to reducing the development of pressure ulcer by lowering the pressure peak, temperature and humidity, the air pressure changes with time and the desired air-cell pressure has to be determined as an optimal value for each user. To select the desired air-cell pressure, we first divide the parts of the body into four sections such as head, trunk, hip, and leg. Then, the pressure of each section grouped with air-cells is calculated from the weight of each part estimated from the individual height and body weight. Air supply system for the air-cell mattress is implemented by using four electronic solenoid valves and an air compressor, and it is driven by a real-time microcontroller. We experimented with five subjects of the contact pressure on skin. The experimental results show that the proposed air-cell mattress is effective for the prevention of the pressure ulcer.

Lumped Parameter Modeling and Analysis of Electromagnetic Vibration Exciter for Vibrating Rapper of Electrostatic Precipitator (전기 집진기의 진동 탈진을 위한 전자기 진동 가진기의 집중매개변수 모델링 및 해석)

  • Kim, Je-Hoon;Lee, Jung-Hun;Kim, Jin-Ho;Jeong, Sang-Hyun;Han, Bang-Woo
    • Journal of the Korean Magnetics Society
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    • v.21 no.2
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    • pp.61-66
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    • 2011
  • The miniaturization of electrostatic precipitator is becoming a key element to the success of the efficient electrostatic precipitator due to the limited space allowed to install electrostatic precipitator in subway tunnel. Nowadays, a research on electrostatic precipitator in urban railroad equipment technology is under an active study. Finite element method has been used one of the most popular techniques, but it consumes a lot of time especially in computation iterations. Accordingly, the lumped parameter analysis can be an alternative tool to FEM because of its computation iteration capability with fair accuracy. In this paper, lumped parameter model and the simulation results are presented. In addition, the result of lumped parameter analysis is compared with those obtained from finite element analysis for verification.

Preparation and Characterization of High-performance Photocatalyst for Photoelectrocatalytic System (PECS) (광전자촉매시스템(PECS) 적용을 위한 고효율 광촉매의 제조와 특성)

  • Park, Seong-Ae;Yu, Dong-Sik;Lee, Ji-Ho;Do, Young-Woong;Ha, Jin-Wook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.6
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    • pp.1302-1307
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    • 2006
  • This study describes the preparation of high-performance photocatalyst and its environmental applications. We prepared visible-light response nano-particle photocatalyst exhibiting the similar photocatalytic activity with $TiO_2$, dispersed $TiO_2$ on $SiO_2$ with an active rutile type titanium oxide prepared at low temperature. The binder and stable photocatalytic $TiO_2$ sol for photocatalytic system were also prepared. Such products were evaluated by UV/Vis spectrometer, X-ray diffraction analysis, SEM, measurement of photocatalytic activities and surface area, mechanical properties of $TiO_2$-coated surfaces. The results obtained can be applied in efficient photocatalytic systems using POF and metal plate for the purification of air.

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Stabilization of Soil Moisture and Improvement of Indoor Air Quality by a Plant-Biofilter Integration System (식물-바이오필터에 의한 토양수분 안정화 및 실내 공기질 향상)

  • Lee, Chang Hee;Choi, Bom;Chun, Man Young
    • Horticultural Science & Technology
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    • v.33 no.5
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    • pp.751-762
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    • 2015
  • This study was performed to investigate the stability of soil moisture in controlling air ventilation rate within a horizontal biofilter, and to compare removal efficiency (RE) of indoor air pollutants including fine dust, volatile organic compounds (VOCs), and formaldehyde (HCHO), depending on whether dieffenbachias (Diffenbachia amoena) were planted in the biofilter. The relative humidity, air temperature, and soil moisture contents showed stable values, regardless of the presence of D. amoena, and the plants grew normally in the biofilter. REs for number of fine dust particles (PM10 and PM2.5) within the biofilter filled with only soil were at least 30% and 2%, respectively. REs for number of fine dust particles (PM10 and PM2.5) within the biofilter including the plants were above 40% and 4%, respectively. RE for fine dust (PM10) weight was above 4% and 20%, respectively, in the biofilter containing only soil or soil together with plants. In the case of the biofilter filled with only soil, REs for xylene, ethylbenzene, toluene or total VOC (T-VOC) were each more than 63%; however, REs for benzene and formaldehyde (HCHO) were above 22% and 38%, respectively. In the biofilter with the plants, REs for xylene, ethylbenzene, toluene, and T-VOC were each above 72%, and REs for benzene and HCHO were above 39%. Thus, RE of the biofilter integrated with plants was found to be higher for volatile organic compounds than for fine dust. Hence, the biofilter was very effective for indoor air quality improvement and the effect was higher when integrated with plants.