• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.247-251
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• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• The Korean Journal of Nuclear Medicine Technology
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• v.14 no.1
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• pp.101-104
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• 2010

Purpose: Raynaud scan is divided to flow, blood pool and local-delay image. Usually, we evaluate comparison through blood pool and local-delay image. We will evaluate about usability when comparative observe blood image and local-delay image in Raynaud scan that used $^{201}Tl$ as making flow image to one sheet of images. Materials and Methods: We have selected 29 Raynaud phenomenon patients aged 14~68 years who visited department of vascular surgery between Feb. 2008 and Aug. 2009. An intravenous injection $^{201}Tl$ of 111 MBq (3 mCi) to opposite side diagonal line limbs above an internal auditing department. Equipment used Philips gamma camera forte A-Z, and collimator used LEHR. Matrix size set up to each $64{\times}64$, $128{\times}128$, $256{\times}256$ and zoom factor used to full field. Protocol of dynamic is 2 second to 155 frames. Blood pool and delay count to 300 second. We set up ROI by a foundation to data acquired in PEGASYS processing program. Each results were analyzed with the SPSS 12.0 statistical software. Results: Each averages of count ratio (Rt / Lt) to have been given at composite image, a blood pool image, delay images analyzed at Raynaud phenomenon patients is $1.25{\pm}0.39$, $1.20{\pm}0.33$, $1.11{\pm}0.17$. The sample analysis results of blood pool image and delay image contented itself with p<0.029. Also, there don't have been each difference, and blood pool image, delay image regarding composite image was able to know. Conclusion: We were able to give help for comparison to evaluate a blood pool image and a local delay image at the Raynaud scan which used $^{201}Tl$ while making a flow image to one sheet image. Identification to be visual too was possible. If you are proceeded a researcher that there was further depth, you are more appropriate for, and you may get useful information.

• Journal of radiological science and technology
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• v.32 no.3
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• pp.285-291
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• 2009

The aim of the present study was undertaken to investigate the association between diagnostic indices of metabolic syndrome(MetS) with carotid intima-media thickness using ultrasonography. The participants in the study were 315 male employees without carotid atherosclerosis and other cardiovascular disease. This study was approved by the Institutional Review Board of Occupational Safety and Health Research Institute. Written informed consent for the participants in this study was obtained from all individuals. Anthropometric parameters and biochemical characteristics were done using each specific equipments and the NCEP-ATP III criteria were used to define MetS. They were examined by B-mode ultrasound to measure the carotid intima-media thickness(carotid IMT) at the near and far walls of common carotid and bifurcation(bulb). The mean carotid IMT was $0.739{\pm}0.137\;mm$ and it's thickness significantly increased with the increase in age. Also, amounts of systolic and diastolic blood pressure, triglyceride and fasting glucose were significantly increased with the increase in age. Carotid IMT were significantly correlated with BMI(r=0.170, p=0.004), systolic(r=0.148, p=0.011) and diastolic blood pressure(r=0.123, p=0.036) and HDL-cholesterol(r=-0.164, p=0.005). On multiple logistic regression analysis for the diagnostic indices of MetS, carotid IMT were significantly associated with blood pressure(OR=4.220, p<0.01) and MetS(OR=1.301, p<0.05). The results indicate that blood pressure and MetS are important risk factors for carotid atherosclerosis.

• Korean Journal of Remote Sensing
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• v.37 no.6_1
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• pp.1757-1766
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• 2021

The green coverage ratio is the ratio of the land area to green coverage area, and it is used as a practical urban greening index. The green coverage ratio is calculated based on the land cover map, but low spatial resolution and inconsistent production cycle of land cover map make it difficult to calculate the correct green coverage area and analyze the precise green coverage. Therefore, this study proposes a new method to calculate green coverage area using aerial images and deep neural networks. Green coverage ratio can be quickly calculated using manned aerial images acquired by local governments, but precise analysis is difficult because components of image such as acquisition date, resolution, and sensors cannot be selected and modified. This limitation can be supplemented by using an unmanned aerial vehicle that can mount various sensors and acquire high-resolution images due to low-altitude flight. In this study, we proposed a method to calculate green coverage ratio from manned or unmanned aerial images, and experimentally verified the proposed method. Aerial images enable precise analysis by high resolution and relatively constant cycles, and deep learning can automatically detect green coverage area in aerial images. Local governments acquire manned aerial images for various purposes every year and we can utilize them to calculate green coverage ratio quickly. However, acquired manned aerial images may be difficult to accurately analyze because details such as acquisition date, resolution, and sensors cannot be selected. These limitations can be supplemented by using unmanned aerial vehicles that can mount various sensors and acquire high-resolution images due to low-altitude flight. Accordingly, the green coverage ratio was calculated from the two aerial images, and as a result, it could be calculated with high accuracy from all green types. However, the green coverage ratio calculated from manned aerial images had limitations in complex environments. The unmanned aerial images used to compensate for this were able to calculate a high accuracy of green coverage ratio even in complex environments, and more precise green area detection was possible through additional band images. In the future, it is expected that the rust rate can be calculated effectively by using the newly acquired unmanned aerial imagery supplementary to the existing manned aerial imagery.

• Korean Journal of Remote Sensing
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• v.37 no.6_3
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• pp.1985-1999
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• 2021

The purpose of this study is to apply urban heat island reduction techniques(green roof, cool roof, and cool pavements using heat insulation paint or blocks) recommended by the Environmental Protection Agency (EPA) to our study area and determine their actual effects through a comparative analysis between land cover objects. To this end, the area of Mugye-ri, Jangyu-myeon, Gimhae, Gyeongsangnam-do was selected as a study area, and measurements were taken using a drone DJI Matrice 300 RTK, which was equipped with a thermal infrared sensor FLIR Vue Pro R and a visible spectrum sensor H20T 1/2.3" CMOS, 12 MP. A total of nine heat maps, land cover objects (711) as a control group, and heat island reduction technique-applied land covering objects (180) were extracted every 1 hour and 30 minutes from 7:15 am to 7:15 pm on July 27. After calculating the effect values for each of the 180 objects extracted, the effects of each technique were integrated. Through the analysis based on daytime hours, the effect of reducing heat islands was found to be 4.71℃ for cool roof; 3.40℃ for green roof; and 0.43℃ and -0.85℃ for cool pavements using heat insulation paint and blocks, respectively. Comparing the effect by time period, it was found that the heat island reduction effect of the techniques was highest at 13:00, which is near the culmination hour, on the imaging date. Between 13:00 and 14:30, the efficiency of temperature reduction changed, with -8.19℃ for cool roof, -5.56℃ for green roof, and -1.78℃ and -1.57℃ for cool pavements using heat insulation paint and blocks, respectively. This study was a case study that verified the effects of urban heat island reduction techniques through the use of high-resolution images taken with drones. In the future, it is considered that it will be possible to present case studies that directly utilize micro-satellites with high-precision spatial resolution.

• Anatomy & Biological Anthropology
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• v.31 no.4
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• pp.133-142
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• 2018

3D histology is a imaging system for the 3D structural information of cells or tissues. The synchrotron radiation propagation phase contrast micro-CT has been used in 3D imaging methods. However, the simple phase contrast micro-CT did not give sufficient micro-structural information when the specimen contains soft elements, as is the case with many biomedical tissue samples. The purpose of this study is to develop a new technique to enhance the phase contrast effect for soft tissue imaging. Experiments were performed at the imaging beam lines of Pohang Accelerator Laboratory (PAL). The biomedical tissue samples under frozen state was mounted on a computer-controlled precision stage and rotated in $0.18^{\circ}$ increments through $180^{\circ}$. An X-ray shadow of a specimen was converted into a visual image on the surface of a CdWO4 scintillator that was magnified using a microscopic objective lens(X5 or X20) before being captured with a digital CCD camera. 3-dimensional volume images of the specimen were obtained by applying a filtered back-projection algorithm to the projection images using a software package OCTOPUS. Surface reconstruction and volume segmentation and rendering were performed were performed using Amira software. In this study, We found that synchrotron phase contrast imaging of frozen tissue samples has higher contrast power for soft tissue than that of non-frozen samples. In conclusion, synchrotron radiation propagation phase contrast cryo-microCT imaging offers a promising tool for non-destructive high resolution 3D histology.

• The Journal of Engineering Geology
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• v.32 no.3
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• pp.411-420
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• 2022

Recently, research using remote sensing has been active in various fields such as environment, science, and society. The results of research using remote sensing are not only numerical results, but also play an important role in solving and preventing social and scientific problems. The purpose of this thesis is to tell the correlation between the data provided and each data by using remote sensing technology for the tidal flat environment. The purpose of this study is to obtain high-resolution data using artificial satellites during remote sensing to find out information on tidal flat currents. Tidal flats created by erosion, sedimentation, low tide, and high tide contain information about the tidal flat slope and information about the ecosystem. Therefore, it can be considered as one of the very important studies to analyze the overall tidal flow channel. This paper creates a DEM (Digital Elevation Model) through TanDEM-X, and DEM is used as the most basic data to create a tidal channel. The research area is a tidal flat located in the middle of the west coast of Ganghwado tidal flat. By analyzing the tidal channel created, various information such as the slope direction of Ganghwado tidal flat and the shape of the tidal channel can be grasped. It is expected that the results of this study will increase the importance and necessity of using DEM data for tidal flat research in the future, and that high-quality results can be obtained.

• Geophysics and Geophysical Exploration
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• v.13 no.4
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• pp.336-348
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• 2010

The Single-channel seismic survey with the source of bubble pulser and drilling survey was carried out in 2008 and 2009 for the site survey of Daecheon-Wonsando area, which was a proposed area of Korea-China subsea tunnel. The goal of this study is to analyze the depth and characteristics of acoustic basement for the stability assessment and tunnel design in this proposed area through combining drilling data with this single-channel seismic data after detailed processing. For this purpose, among the data processing schemes which are usually applied to multi-channel seismic data, we applied the F-K filtering to eliminate the AC(alternating current) noise and the post-stack depth migration to produce depth section. As a result, we verified that the improved depth section could be obtained from single-channel seismic data, and the distribution and characteristics of basement could be analyzed in survey area through the combined analysis with drilling data. However, we could not interpret the detailed structures, fault and fracture zone, due to the quality of bubble pulser source and single-channel data. We expect that those detailed structures can be analyzed when higher resolution seismic data is provided. Therefore, we recommend some items for future seismic survey of subsea tunnel to obtain the high resolution seismic data.

• Journal of the Korean Arthroscopy Society
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• v.16 no.2
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• pp.160-166
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• 2012

Purpose: The aim of this study was to determine the patterns of the stress distribution within the reconstructed anterior cruciate ligament (ACL) double bundles in response to an anterior tibial load and rotatory load at $45^{\circ}$ flexed knee model by use of a 3-dimensional finite element analysis (FEM). Materials and Methods: The $0^{\circ}$ and $45^{\circ}$ flexed 3-D knee model were reconstructed based on the high resolution computed tomography (CT) images from the right knee of a healthy male subject. To simulate double bundle ACL reconstruction, in $0^{\circ}$ analytic model, four 7 mm diameter tunnels were created at the center of each anteromedial (AM) and posterolateral (PL) footprints on the femur and tibia. The grafts were inserted into the corresponding bone tunnels and then reconstructed knee model was flexed to $45^{\circ}$. As a next step, the 5 mm anterior tibial load and internal rotational load of $10^{\circ}$ were applied on the final Computer aided design (CAD) model. And then stress patterns of each bundle were assessed using a finite element analysis. Results: In response to the 5 mm of anterior tibial load, the AM bundle showed increased stresses around the tibial and femoral attachment sites; especially in the anterior aspect of the bundle. In the PL bundle, the highest stress concentration was also noticed on the anterior aspect of the bundle. Under $10^{\circ}$ internal rotational load, the stress concentration was predominant around the anterior aspect of the tibial attachment site within the AM bundle. The PL bundle also showed highest stress concentration on the anterior aspect of the bundle. Conclusion: Although the stress patterns were not identical among the AM and PL bundle, there were common trends in the stress distribution. The stress concentration was predominant on the anterior aspect of both bundles in response to the anterior tibial load and rotatory load.

• Korean Journal of Remote Sensing
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• v.28 no.2
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• pp.215-226
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• 2012

NASA MODIS GPP provides a useful tool to monitor global terrestrial vegetation productivity. Two major problems of NASA GPP in regional applications are coarse spatial resolution ($1.25^{\circ}{\times}1^{\circ}$) of DAO meteorological data and cloud contamination of MODIS FPAR product. In this study, we improved the NASA GPP by using enhanced input data of high spatial resolution (3 km${\times}$3 km) WRF meteorological data and cloud-corrected FPAR over the North Korea. The improved GPP was utilized to investigate characteristics of GPP interannual variation and spatial patterns from 2000 to 2008. The GPP varied from 645 to 863 $gC\;m^{-2}\;y^{-1}$ in 2000 and 2008, respectively. Mixed forest showed the highest GPP (1,076 $gC\;m^{-2}\;y^{-1}$). Compared to NASA GPP (790 $gC\;m^{-2}\;y^{-1}$);FPAR enhancement increased GPP (861) but utilization of WRF data decreased GPP (710). Enhancements of both FPAR and meteorological input resulted in GPP increase (809) and the improvement was the greatest for mixed forest regions (+10.2%). The improved GPP showed better spatial heterogeneity reflecting local topography due to high resolution WRF data. It is remarkable that the improved and NASA GPPs showed distinctly different interannual variations with each other. Our study indicates improvement of NASA GPP by enhancing input variables is necessary to monitor region-scale terrestrial vegetation productivity.