• Title/Summary/Keyword: 결함 주입

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The Electrical Characteristics of MOSFET having Deuterium implanted Gate Oxide (중수소 이온 주입된 게이트 산화막을 갖는 MOSFET의 전기적 특성)

  • Lee, Jae-Sung
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.47 no.4
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    • pp.13-19
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    • 2010
  • MOSFET with deuterium-incorporated gate oxide shows enhanced reliability compared to conventional MOSFET. We present an alternative process whereby deuterium is delivered to the location where the gate oxide reside by an implantation process. Deuterium ions were implanted using two different energies to account for the topography of the overlaying layers and placing the D peak at the top of gate oxide. A short anneal at forming gas was performed to remove the D-implantation damage. We have observed that deuterium ion implantation into the gate oxide region can successfully remove the interface states and the bulk defects. But the energy and the dose of the deuterium implant need to be optimized to maintain the Si substrates dopant activation, while generating deuterium bonds inside gate oxide. CV and IV characteristics studies also determined that the deuterium implant dose not degrade the transistor performance.

Evaluation of High-Viscosity Grouting Injection Perfomance for Reinforcement of Rock Joint in Deep -Depth Tunnels (대심도 터널 암반 절리 보강을 위한 고점도 그라우팅 주입 성능 평가)

  • Inkook Yoon;Junho Moon;Younguk Kim
    • Journal of the Korean GEO-environmental Society
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    • v.25 no.5
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    • pp.15-19
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    • 2024
  • This study aimed to develop high-efficiency grouting techniques under deep-depth conditions by experimentally verifying the applicability of various injection materials. Particle size analysis and injection model experiments were conducted with Ordinary Portland Cement (OPC) and Micro Cement (MC) to evaluate the injection performance of each material. Using Barton's Cubic Network theory, the rock fracture spacing was calculated for domestic deep-depth standards, specifically below 40 meters underground. The analysis of particle size passability under selected conditions showed that MC could pass through the rock fracture gaps, while OPC could not. According to the results of the injection model experiments using experimental devices and area calculation software, OPC failed in injection due to its larger particle size, whereas MC was capable of injection even under high-viscosity conditions. Based on these findings, the study quantitatively and visually derived the applicability of grouting materials under deep-depth conditions, and high-viscosity MC material is expected to be effective for waterproofing enhancement in deep-depth rock fracture surfaces.

울릉도 대수층 저장 및 회수기술의 현장 적용성 평가

  • Kim Man-Il;Seok Hui-Jun;Kim Hyeong-Su;Barry Jeffrey
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2005.04a
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    • pp.415-419
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    • 2005
  • 대수층 저장 및 회수(ASR)기술의 현장 적용성을 평가하기 위하여 경상북도 울릉군 울릉읍 저동천 상류부근에서 양수시험 및 주입시험을 실시하였다. 양수시험결과 투수계수는 $48.7m^2/day$ 이고, 저류계수는 0.009이며, 비양수량은 $158.2m^2/day$로 계산되었다. 또한 시험정과 관측정은 거의 위상차 없이 같은 수위강하 경향을 보여주며 취수정은 관측정보다 평균적으로 10cm 정도 더 높은 수위강하 폭을 보여주는 것으로 미루어 볼 때 시험정과 관측정의 두 지점은 서로 수리지질학적으로 긴밀히 연결되어 있는 하나의 시스템임을 강하게 시사한다. 이외에도 주입시험 결과 암반구간 대수층은 낮은 투수계수를 가질 뿐만 아니라 낮은 저류계수를 가지기 때문에 ASR에 불리한 조건을 가짐을 알 수 있다. 그러나 상부 충적층 구간에서 실시한 주입시험 결과, 두 지점은 긴밀히 연결된 하나의 시스템으로 두 지점의 심부 암반층과의 연결성은 없고, 대신 상부의 높은 투수계수를 가지는 충적층 구간이 두 지점사이에 서로 긴밀히 연결되어 있는 것으로 파악된다. 또한 잔류 수위가 0으로 떨어지는 것으로 볼 때 주입된 주입수는 저장되지 않고 인근의 저동천으로 빠져나가는 것으로 사료된다. 이상의 사실로 볼 때 본 연구지역은 ASR에 불리한 조건을 가지는 지역으로 최종적으로 판단된다.

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Modeling of 3D Monte Carlo Ion Implantation in the Ultra-Low Energy for the Fabrication of Giga-Bit Devices (기가 비트급 소자 제작을 위한 3차원 몬테카를로 극 저 에너지 이온 주입 모델링)

  • Ban, Yong-Chan;Kwon, Oh-Seob;Won, Tae-Young
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.10
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    • pp.1-10
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    • 2000
  • A rigorous modeling of ultra-low energy implantation is becoming increasingly more important as devices shrink to deep submicron dimensions. In this paper, we have developed an efficient three-dimensional Monte Carlo ion implantation model based on a modified Binary Collision Approximation(BCA). To this purpose, the modified electronic stopping model and the multi-body collision model have been taken into account in this simulator. The dopant and damage profiles show very good agreement with SIMS(Secondary Ion Mass Spectroscopy) data and RBS(Rutherford Backscattering Spectroscopy) data, respectively. Moreover, the ion distribution replica method has been implemented into the model to get a computational efficiency in a 3D simulation, and we have calculated the 3D Monte Carlo simulation into the topographically complex structure.

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Slow Positron Beam 기술에 의한 반도체 재료의 격자결함분석 연구현황

  • Lee, Jong-Ram
    • ETRI Journal
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    • v.10 no.1
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    • pp.64-75
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    • 1988
  • GaAs 등 화합물 반도체는 그 표면구조가 아직 확립되어 있지 않고, 표면조건이 소자특성에 큰 영향을 미친다. 소자공정중 이온주입 공정은 self-aligned MESFET(Metal Semiconductor Field Effect Transistor) 제작에 필수적인 기술이나, 이온 주입시 수 $\AA$ 크기의 vacancy 등 격자결함이 발생하며 이들 결함을 제어할 수 있는 기술이 필요하다. 에너지 가변 양전자 소멸기술은 표면에서 $1\mum$정도내에 존재하는 vacancy 형태의 격자결함을 감지해 낼 수 있으며 이들 격자결함의 depth profiling을 할 수 있는 기술이다. 본 고에서는 에너지 가변 양전자 소멸기술의 원리 및 최근 연구결과에 대해서 살펴보기로 한다.

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CROSS-LINKED COLLAGEN IMPLANT INJECTION AND REHABILITATION OF GLOTTIC INCOMPETENCE (Cross-linked collagen 주입에 의한 성문폐쇄부전의 개선)

  • 이정구
    • Proceedings of the KSLP Conference
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    • 1993.12a
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    • pp.18-18
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    • 1993
  • 성문폐쇄부전의 개선을 위해 후두내에 주입하여온 여러 재료 중 현재에는 teflon만이 가장 흔히 사용되어지고 있다. 그러나 teflon은 점막하와 가동성 성대 내에 주입할 수 없어 경도 성문 폐쇄부전의 미세 조정과 성대의 작은 결손에는 부적합하다. 성문폐쇄부전을 개선하기 위하여 9명의 환자에서 17회 cross-linked collagen을 주입한 결과 이 방법은 환자의 음성을 개선하고 성문폐쇄부전을 교정하는데 성공적이었다. (중략)

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A Fault Analysis Attack on SEED (SEED에 대한 오류 분석 공격)

  • 하재철;김창균;문상재;박일환
    • Proceedings of the Korea Institutes of Information Security and Cryptology Conference
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    • 2003.12a
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    • pp.39-44
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    • 2003
  • 오류분석 공격은 암호시스템에 오류를 주입한 후 그 출력 결과를 분석하여 비밀키를 찾아내는 물리적 공격 방법으로서 RSA, ECC를 포함한 공개 키 시스템을 비롯하여 DES, AES와 같은 대칭 키 암호시스템에도 공격이 시도되고 있다. 본 논문에서는 기존 DES 공격에 사용된 오류 주입의 가정만 있으면 국내 표준 블록 암호 알고리듬인 SEED 역시 오류 주입 공격이 가능함을 증명한다. 또한, 오류 주입 공격에 의해 SEED의 라운드 키 두개만 공격되면 원 암호 키가 모두 노출될 수 있음을 검증한다.

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The Effect of Steroid Injection of Simple Bone Cyst in Adults (성인에서 발생한 단순성 골 낭종에 대한 스테로이드 주입의 효과)

  • Yang, Jun-Young;Lee, June-Kyu;Kim, Dong-Hee;Kim, Tae-Hoon
    • The Journal of the Korean bone and joint tumor society
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    • v.12 no.1
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    • pp.23-29
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    • 2006
  • Purpose: To evaluate the effectiveness of steroid injection for treatment of simple bone cyst in adults. Materials and Methods: 11 patients who were able to be followed up from February 1998 to February 2003. These lesions were attained by needle aspiration or trepanation and 80 mg to 200 mg of Depo-medrol (methylprednisolone acetate, Shin Poong Pharm. Co., Korea) was injected. The follow-up roentgenograms were done every 2 weeks, and if there were no evidence of recovery, re-injection was done 8 weeks later. Injection has done maximally 5 times, and we evaluated the result with modified Neer, Pentimalli, Scaglietti and Sandra classification. Results: There were no cases in which one Injection was enough for full recovery, and 3 cases after 2 injections, 3 cases after 3 injections, 2 case after 5 injections had good result. but 2 cases after more than 5 injections did not show improvements and are currently under observation. One case showed a increase in size of the bone cyst after 2 injections of steroid and underwent curettage and autogenous bone graft. Overall outcomes by Pentimalli classification were good in One case, fair in 7 cases and poor in 3 cases at final follow-up. Conclusion: Local injection of steroids is effective method in adults and can be considered as a first line treatment modality.

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Fertilization and in vitro Development of Bovine Oocytes Following Round Spermatid Injection (원형정자 미세주입에 의한 소 난자의 수정과 체외 배 발달)

  • Um, J.H.;Do, J.T.;Kim, N.H.;Park, H.D.;Lee, H.T.;Chung, K.S.
    • Clinical and Experimental Reproductive Medicine
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    • v.26 no.2
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    • pp.193-201
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    • 1999
  • In this study we determined fertilization processes and developmental ability of porcine oocytes following injection of round spermatid in the presence of artificial activation. Electrical stimulation at 3 h before spermatid injection significantly increased the incidence of normal fertilization as compared to those following injection without stimulation or with stimulation immediately after injection. The incidences of two pronuclear formation and apposition were not different in oocytes between following intracytoplasmic spermatid and spermatid nucleus injection. Indirect immunocytochemistry and laser scanning confocal microscopy study revealed that micro tubules were organized from the oocyte cortex following round spermatid injection, and this seemed to move both male and female pronuclei into the oocyte center. Paternal mitochondria which are introduced with spermatid have been observed up to 4-cell. Our study indicated that either round spermatid or it's nucleus can be used to produce viable bovine embryos by injection into unfertilized oocytes.

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Fresh Water Injection Test to Mitigate Seawater Intrusion and Geophysical Monitoring in Coastal Area (해수침투 저감을 위한 담수주입시험 및 지구물리 모니터링)

  • Park, Kwon-Gyu;Shin, Je-Hyun;Hwang, Se-Ho;Park, In-Hwa
    • Geophysics and Geophysical Exploration
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    • v.10 no.4
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    • pp.353-360
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    • 2007
  • We practiced fresh water injection test to identify its applibility as a method of seawater intrusion mitigation technique, and monitored the change of borehole fluid conductivity and the behavior of injected fresh water using borehole multichannel electrical conductivity monitoring and well-logging, and DC resistivity and SP monitoring at the surface. Well-logging and multichannel EC monitoring showed the decrease of fluid conductivity due to fresh water injection. We note that such an injection effect lasts more than several month which means the applibility of fresh water injection as a seawater intrusion control technique. Although SP monitoring did not show meaningful results because of weather condition during monitoring and the defects of electrodes due to long operation time, DC resistivity monitoring showed its effectiveness and applicability as a monitoring and assessment techniques of injection test by means of imaging the behavior and the front of fresh water body in terms of the increase of resistivity with reasonable resolution. In conclusion, we note that geophysical techniques can be an effective method of monitoring and evaluation of fresh water injection test, and expect that fresh water injection may be an practical method for the mitigation of seawater intrusion when applied with optimal design of injection well distribution and injection rate based on geophysical evaluation.