Effect of Deposition Temperatures of $BaTiO_3$ Thin Films by MOCVD Using Ultrasonic Spraying
(초음파분무 MOCVD로 제조한 $BaTiO_3$ 박막의 증착온도의 영향)
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- Korean Journal of Materials Research
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- v.6 no.5
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- pp.475-482
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- 1996