• 한국자동차공학회논문집
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• 제2권6호
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• pp.94-101
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• 1994

About vibration model of Six-degrees-of-freedom(DOF), in mass load, examined results for knowing dynamic interference and response variation is as follows; In case of putting mass load upon the object, experimented results on two-degrees-of-freedom of the translation-1 direction and the rotation-1 direction at open-loop-control system, about 0.19 arcsed in input of the translation-$0.1{\mu}m$ and $0.022{\mu}m$ on input of the rotation-0.5 arcsec, the justicse of motion equation is acknowledged as confirming the appearance of the interference-$0.022{\mu}m$. In establishing calculation of transformation matrix by using analogue circuit, as simulating results that used incomplete differentiation, interference is $1.7{\times}10^{-3}$ arcsec on input of the translation-$0.1{\mu}m$ and $1.4{\times}10^{4}{\mu}m$ on input of the rotation-0.5 arcsec in open-loop-control system. Also it is $4.2{\times}10^{-4}$ arcsec on input of the translation-$0.1{\mu}m$ and $5.6{\times}10^{-5}{\mu}m$ on input of the rotation-0.5 arcesc in closed-loop-control system. As closed-loop-control system is better than open-loop-control system, equivalent accordance is confirmed on original response. Finally, fundamental validity of this theory is acknowledged.