• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.107-107
• /
• 2000

최근 반도체 소자의 고집적화 및 대용량화의 경향에 다라 MOSFET 소자 제작에 이동되는 게이트 산화막의 두께가 수 nm 정도까지 점점 얇아지는 추세이고 Giga-DRAM급 차세대 UNSI소자를 제작하기 위해 5nm이하의 게이트 절연막이 요구된다. 이런 절연막의 두께감소는 게이트 정전용량을 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압동작을 가능하게 하기 때문에 게이트 산화막의 두께는 MOS공정세대가 진행되어감에 따라 계속 감소할 것이다. 따라서 절연막 두께는 소자의 동작 특성을 결정하는 중요한 요소이므로 이에 대한 정확한 평가 방법의 확보는 공정 control 측면에서 필수적이다. 그러나, 절연막의 두께가 작아지면서 게이트 산화막과 crystalline siliconrksm이 계면효과가 박막의 두께에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵고 계측방법에 따라서 두께 계측의 차이가 난다. 따라서 차세대 반도체 소자의 개발 및 양산 체계를 확립하기 위해서는 산화막의 두께가 10nm보다 작은 1nm-5nm 수준의 박막 시료에 대한 두께 계측 방법이 확립이 되어야 한다. 따라서, 본 연구에서는 습식 산화 공정으로 제작된 3nm-7nm 의 게이트 절연막을 현재까지 알려진 다양한 두께 평가방법을 비교 연구하였다. 절연막을 MEIS (Medim Energy Ion Scattering), 0.015nm의 고감도를 가지는 SE (Spectroscopic Ellipsometry), XPS, 고분해능 전자현미경 (TEM)을 이용하여 측정 비교하였다. 또한 polysilicon gate를 가지는 MOS capacitor를 제작하여 소자의 Capacitance-Voltage 및 Current-Voltage를 측정하여 절연막 두께를 계산하여 가장 좋은 두께 계측 방법을 찾고자 한다.다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다

• Journal of the Korean Society of Radiology
• /
• v.4 no.2
• /
• pp.21-25
• /
• 2010

Recently, various semiconductor compounds as radiation detection material have been researched for a diagnostic x-ray detector application. In this paper, we have fabricated the CdS detecton sensor that has good photosensitivity and high x-ray absorption efficiency among other semiconductor compounds, and evaluated the application feasibility by investigating the detection properties about energy range of diagnostic x-ray generator. We have fabricated the line voltage selector(LCV) for a signal acquisition and quantities of CdS sensor, and designed the voltage detection circuit and rectifying circuit. Also, we have used a relative relation algorithm according to x-ray exposure condition, and fabricated the interface board with DAC controller. Performance evaluation was investigated by data processing using ANOVA program from voltage profile characteristics according to resistive change obtained by a tube voltage, tube current, and exposure time that is a exposure condition of x-ray generator. From experimental results, an error rates were reduced according to increasing of a tube voltage and tube current, and a good properties of 6%(at 90 kVp) and 0.4%(at 320 mA) ere showed. and coefficient of determination was 0.98 with relative relation of 1:1. The error rate according to x-ray exposure time showed exponential reduction because of delayed response velocity of CdS material, and the error rate has 2.3% at 320 msec. Finally, the error rate according to x-ray dose is below 10%, and a high relative relation was showed with coefficient of determination of 0.9898.

• Korean Journal of Food Science and Technology
• /
• v.42 no.2
• /
• pp.136-141
• /
• 2010

This study attempted to determine whether Photostimulated Luminescence (PSL) is applicable for the detection of post-irradiated foods by measuring the PSL photon counts of unirradiated and irradiated dried spices and herbs. A total of 19 dried spices and herbs was irradiated with a $^{60}Co$ $\gamma$-ray source at 1, 5 and 10 kGy followed by measurement of PSL photon. The photon counts of unirradiated samples below 700 correspond to negative. Fifteen samples irradiated over 1 kGy showed photon counts of more than 5,000, indicating irradiation treatment. Intermediate counts (photon count 700-5,000) were observed in irradiated white/black pepper, nutmeg and cinnamon bark at 10 kGy. These results suggest that it is possible to detect whether dried spices and herbs were irradiated by analyzing PSL, with the exception of white/black pepper, nutmeg and cinnamon bark. Irradiated white/black pepper, nutmeg and cinnamon bark containing low levels of minerals were not sensitive to PSL. Therefore, further investigation is sugguested to be performed by Thermoluminescence (TL) analysis or another validated or standardized method.

• Korean Journal of Food Science and Technology
• /
• v.46 no.3
• /
• pp.276-282
• /
• 2014

An accurate and sensitive analytical method was established for the simultaneous determination of synephrine and n-methyltyramine contents by ultra-performance liquid chromatography (UPLC) with a fluorescence detector (FLD). A 70:30 (v/v) mixture of 10 mM sodium dodecyl sulfate (SDS) and acetonitrile was used as the mobile phase. The coefficient of correlation ($r^2$) was 0.9999 for both synephrine and n-methyltyramine, and their limits of detection (LOD) were 0.02 and 0.01 mg/kg, respectively. The percentage recoveries for synephrine and n-methyltyramine were 96.4% and 100.9%, respectively, from bitter orange (Citrus aurantium) samples. The synephrine and n-methyltyramine contents were 38.07-118.21 mg/kg and 0.27-0.56 mg/kg, respectively, in the orange fruit samples, while they were 14.61-120.39 mg/kg and up to 3.34 mg/kg, respectively, in the tested commercial orange juice samples. The differences in synephrine and n-methyltyramine content between orange fruit and commercial orange juice were not significant (p<0.05). These results suggest that UPLC-FLD can be applied to develop an analytical method of quality control for commercial orange juice.

• Korean Journal of Clinical Laboratory Science
• /
• v.53 no.4
• /
• pp.309-316
• /
• 2021

Sepsis is a physiological response to a source of infection that triggers mechanisms that compromise organ function, leading to death if not treated early. Biomarkers with high sensitivity, specificity, speed, and accuracy that could differentiate sepsis from non-infectious systemic inflammatory response syndrome (SIRS) could bring about a revolution in sepsis treatment. Given the limitations and time required for microbial verification of pathogens, the accurate diagnosis of infection before employing antibiotic therapy is important and clinically necessary. Procalcitonin (PCT), lactate, C-reactive protein (CRP), cytokines, and proadrenomedullin (ProADM) are the common biomarkers used for diagnosis. The procalcitonin (PCT)-guided antibiotic treatment in patients with acute respiratory infections effectively reduces antibiotic exposure and side effects while improving survival rates. The evidence regarding sepsis screening in hospitalized patients is limited. Clinicians, researchers, and healthcare decision-makers should consider these findings and limitations when implementing screening tools, future research, or policy on sepsis recognition in hospitalized patients. The use of biomarkers in pediatric sepsis is promising, although such use should always be correlated with clinical evaluation. Biomarkers may also improve the prediction of mortality, especially in the early phase of sepsis, when the levels of certain pro-inflammatory cytokines and proteins are elevated.

• Journal of Environmental Impact Assessment
• /
• v.30 no.1
• /
• pp.1-12
• /
• 2021

This study focused on verifying the identification of freshwater fish species in Korea using Environmental DNA (eDNA) technique. The research of DNA is increasing in the field of ecology, since this is more sensitive of identify rather than traditional investigation method. Which is difficult to detect species hidden in water and be easily influenced by diverse factors (sites, bad weather, researchers and so on). We applied the pilot test in aquarium (Freshwater Fish Ecological Learning Center in Yangpyeong, Gyeonggi Do), where freshwater fish species are inhabits. We conducted to sampling and analyzing the sixteen water samples (50 species from 7 orders and 13 families) using MiFish primer set. The results showed that 45 species (90%) was investigated by eDNA. It highlight that eDNA with universal primer is possible to detect freshwater fish species of Korean. However, the errors on species identification seems to be caused by the primer that be not suited perfectly and the pollution such as aquarium, sampling collectors.

• Journal of IKEEE
• /
• v.25 no.4
• /
• pp.782-785
• /
• 2021

In this paper, we propose a personalized cooling management system with thermal imaging camera. The proposed equipment uses a thermal imaging camera to control the amount of cold air and the system according to the difference between the user's skin temperature before and after the procedure. When the skin temperature is abnormally low, the cold air supply is cut off to prevent the possibility of a safety accident. It is economical by replacing the skin temperature sensor with a thermal imaging camera temperature measurement, and it can be visualized because the temperature can be checked with the thermal image. In addition, the proposed equipment improves the sensitivity of the sensor that measures the distance to the skin by calculating the focal length by using a dual laser pointer for the safety of a personalized cooling management system to which a thermal imaging camera is applied. In order to evaluate the performance of the proposed equipment, it was tested in an externally accredited testing institute. The first measured temperature range was -100℃~-160℃, indicating a wider temperature range than -150~-160℃(cryo generation/USA), which is the highest level currently used in the field. In addition, the error was measured to be ±3.2%~±3.5%, which showed better results than ±5%(CRYOTOP/China), which is the highest level currently used in the field. The second measured distance accuracy was measured as below ±4.0%, which was superior to ±5%(CRYOTOP/China), which is the highest level currently used in the field. Third, the nitrogen consumption was confirmed to be less than 0.15 L/min at the maximum, which was superior to the highest level of 6 L/min(POLAR BEAR/USA) currently used in the field. Therefore, it was determined that the performance of the personalized cooling management system applied with the thermal imaging camera proposed in this paper was excellent.

• Journal of The Korean Society of Inherited Metabolic disease
• /
• v.24 no.1
• /
• pp.17-25
• /
• 2024

Fabry disease (FD) is an X-linked lysosomal storage disorder. It is caused by mutations in the α-galactosidase A gene, which results in deficient or absent activity of α-galactosidase A (α-Gal A). This leads to a progressive accumulation of globotriaosylceramide (Gb3) in various tissues. Manifestations of Fabry disease include serious and progressive impairment of renal and cardiac function. In addition, patients experience pain, gastrointestinal disturbance, transient ischaemic attacks, and strokes. Additional effects on the skin, eyes, ears, lungs, and bones are often seen. Reduced life expectancy and deadly consequences are being caused by cardiac involvement. Chaperone therapy or enzyme replacement therapy (ERT) are two disease-specific treatments for FD. Thus, early detection of FD is critical for decreasing morbidity and mortality. Globotriaosysphingosine (lyso-Gb3) for identifying atypical FD variants and highly sensitive troponin T (hsTNT) for detecting cardiac involvement are both significant diagnostic indicators. This review aimed to offer a basic resource for the early diagnosis and update on the diagnosis of having FD. We will also provide a general diagnostic algorithm and information on ERT and its accompanying treatments.

• Journal of Nutrition and Health
• /
• v.50 no.6
• /
• pp.565-577
• /
• 2017

Purpose: There have been limited studies investigating the relationship between high-sensitivity C-reactive protein (hsCRP), metabolic diseases, and dietary factors in Korean adults. Here, we examined the association between nutrient intake and serum hsCRP among Korean adults. Methods: Using data on 2,624 healthy Korean adults (1,537 women and 1,087 men) from the 2015 Korea National Health and Nutrition Examination Survey, demographic, anthropometric, biochemical, and dietary factors were analyzed once the subjects were grouped into either sex, age, or BMI. Nutrient intake was evaluated using the dietary data obtained by one-day 24-hour recall. Based on the guidelines of the US Centers for Disease Control and Prevention and the American Heart Association, hsCRP level was classified as HCRPG (High CRP Group, hsCRP > 1 mg/L) and LCRPG (Low CRP Group, hsCRP ${\leq}1mg/L$). Proc surveyreg procedure was performed to examine the associations between nutrient intake and hsCRP after adjustment for potential confounding variables. Results: The average hsCRP level of healthy Korean adults was $0.95{\pm}0.03mg/L$ ($0.97{\pm}0.04mg/L$ in men, $0.92{\pm}0.05mg/L$ in women). Obese subjects had significantly higher hsCRP than non-obese subjects in both sexes. The hsCRP level was positively associated with current smoking, physical inactivity, BMI, waist circumference, fasting blood glucose, triglycerides, total cholesterol, LDL-cholesterol, and blood pressure and inversely associated with HDL-cholesterol. LCRPG had significantly higher intake of dietary fiber compared to HCRPG in women. High hsCRP level was associated with more dietary cholesterol intake but less omega-3 fatty acid intake among subjects aged ${\geq}50y$. HCRPG of obese subjects had higher intakes of fat and saturated fatty acid than LCRPG. Conclusion: The hsCRP level is closely associated with several lifestyle variables and nutrient intake in healthy Korean adults. Individuals with high hsCRP level show low intakes of dietary fiber and omega-3 fatty acids but high intakes of dietary fat and cholesterol. Our findings suggest that a potential anti-inflammatory role for nutrients and lifestyle in the Korean adult population.

• Investigative Magnetic Resonance Imaging
• /
• v.1 no.1
• /
• pp.109-113
• /
• 1997

Purpose: To evaluate the differences of functional imaging patterns between conventional spoiled gradient echo (SPGR) and echo planar imaging (EPI) methods in cerebral motor cortex activation. Materials and Methods: Functional MR imaging of cerebral motor cortex activation was examined on a 1.5T MR unit with SPGR (TRfrE/flip angle=50ms/4Oms/$30^{\circ}$, FOV=300mm, matrix $size=256{\times}256$, slice thickness=5mm) and an interleaved single shot gradient echo EPI (TRfrE/flip angle = 3000ms/40ms/$90^{\circ}$, FOV=300mm, matrix $size=128{\times}128$, slice thickness=5mm) techniques in five male healthy volunteers. A total of 160 images in one slice and 960 images in 6 slices were obtained with SPGR and EPI, respectively. A right finger movement was accomplished with a paradigm of an 8 activation/ 8 rest periods. The cross-correlation was used for a statistical mapping algorithm. We evaluated any differences of the time series and the signal intensity changes between the rest and activation periods obtained with two techniques. Also, the locations and areas of the activation sites were compared between two techniques. Results: The activation sites in the motor cortex were accurately localized with both methods. In the signal intensity changes between the rest and activation periods at the activation regions, no significant differences were found between EPI and SPGR. Signal to noise ratio (SNR) of the time series data was higher in EPI than in SPGR by two folds. Also, larger pixels were distributed over small p-values at the activation sites in EPI. Conclusions: Good quality functional MR imaging of the cerebral motor cortex activation could be obtained with both SPGR and EPI. However, EPI is preferable because it provides more precise information on hemodynamics related to neural activities than SPGR due to high sensitivity.