• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.119.2-119.2
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• 2016

가열탈기체 처리하면 표면의 물 분자를 빠르게 탈리시켜 단시간에 배기하는 동시에 진공용기 재료 내부의 수소 확산속도를 가속하므로 처리 후 수소 기체방출도 현저하게 낮출 수 있다. 가열탈기체 후의 진공계에서는 물 분자는 일부만 남고 진공용기 재료 내부에서 확산 되어 나온 수소가 잔류가스의 대부분이 된다. 이러한 가열탈기체 처리의 효과에 대해서는 익히 알려져 있으나 정량적으로 예측하기는 쉽지 않았다. 본 연구에서는 가열탈기체 조건이 수소 확산에 미치는 영향에 초점을 맞추어, 진공용기의 재료 및 두께에 따라 목표 진공도에 도달하기 위한 가열탈기체 처리 온도와 시간의 최적 조합을 수치 해석적으로 계산하고 비교하였다.

• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.164-172
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• 2001

We measured the pumpdown curves of an A5083 vacuum chamber and analyzed the outgassing in terms of desorption energies of water. The outgassing curves follow a ~$t^{-1.15}$ behavior before bakeout, which can be described by the first-order desorption of water molecules in the oxide layer. Analysis of the curves reveals that there exist several adsorption sites on the surface for water in the pressure range of ~$10^{-5}\;-\;10^{ -8}$Torr. Measurements utilizing the throughput method show that the room temperature outgassing rate is ~1{\times}10^{-13}$ Torr $\ell$/s $\textrm{cm}^2$ after 24 - h bakeout at $100^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.304-304
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• 2009

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.247-254
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• 2000

The base pressure of vacuum vessel of the KSTAR (Korea Superconducting Tokamak Advanced Research) Tokamak is to be a ultra high vacuum, $10^{-6}{\sim}10^{-7}Pa$, to produce clean plasma with low impurity containments. For this purpose, the KSTAR vacuum vessel and plasma facing components need to be baked up to at least $250^{\circ}C,\;350^{\circ}C$ respectively, within 24 hours by hot nitrogen gas from a separate baking/cooling line system to remove impurities from the plasma-material interaction surfaces before plasma operation. Here by applying the implicit numerical method to the heat balance equations of the system, overall temperature distributions of the KSTAR vacuum vessel and plasma facing components are obtained during the whole baking process. The model for 2-dimensional baking analysis are segmented into 9 imaginary sectors corresponding to each plasma facing component and has up-down symmetry. Under the resulting combined loads including dead weight, baking gas pressure, vacuum pressure and thermal loads, thermal stresses in the vacuum vessel during bakeout are calculated by using the ANSYS code. It is found that the vacuum vessel and its supports are structurally rigid based on the thermal stress analyses.