• Title/Summary/Keyword: 가열면적

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A heating apparatus for semiconductor manufacturing using direct heating method (직접가열방식을 이용한 반도체 제조용 히팅장치)

  • Jung, Soon-Won;Kwon, Oh-Joen;Koo, Kyung-Wan
    • Proceedings of the KIEE Conference
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    • 2008.07a
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    • pp.2218-2219
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    • 2008
  • 본 연구는 반도체 기판 히팅 장치의 새로운 구조에 관한 것으로 기판의 바닥면에 밀착된 가열 플레이트층의 직접가열 구조에 따른 빠른 열 응답성 및 열손실 최소화를 이룰 수 있다. 또한 가열 플레이트층에 내장된 히팅 수단인 시즈히터의 접촉면적을 늘려 가열 유효면적 증가와 같은 효과를 갖는다. 이를 위해 감광막이 코팅된 기판과, 상기 기판의 바닥면에 밀착되는 가열 플레이트층, 절연 및 열손실을 최소화하기 위해 상기 가열 플레이트층의 바닥면에 밀착되는 운모층, 상기 운모층의 하부에 밀착되어 바닥 플레이트층으로 이루어지되, 상기 가열 플레이트 층은 바닥면 전체에 걸쳐 연속되는 홈부를 형성하고, 상기 홈부로는 기판을 가열하기 위한 시즈히터가 삽입되어 구성된다. 새로운 기판 히팅 구조를 사용하여 시간 경과에 따른 가열 플레이트의 온도 변화를 확인 한 결과, 간접가열방식인 기존 방식에 비해 약 40 %의 전력 절감효과가 있는 것으로 확인 되었다.

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Analysis of a Double Pipe Heat Exchanger for Waste Solvent Recovery (폐용제 회수용 이중관형 열교환기 특성 해석)

  • 구재현;이재근
    • Resources Recycling
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    • v.9 no.3
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    • pp.13-21
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    • 2000
  • This study describes to analyze the heat transfer characteristics of waste solvent recovery system using a double pipe heat exchanger heating solvent by the hot oil. The solvent recovery system consists of the feeding pump, the double pipe heat exchanger, the vacuum spray chamber, and the condenser. A double pipe heat exchanger consists of the first section to conduct the heating of solvent to the thermal saturated point and the second section to evaporate the saturated solvent. The heat transfer area for vaporization of water, benzene and alkylbenzene was predicted by the heat balance modelling and experimentally measured from the temperature distribution as a function of solvent flow rate and heating temperature. The required heat transfer area for vaporization was increased with increasing solvent flow rates and with decreasing heating temperatures due to decreased quantity of transferred heat per the unit area. Theoretical modelling of the heat transfer area for solvents vaporization in the pipe showed good agreement with experimental results. Results showed to be suitable for the waste solvent recovery using a double pipe heat exchanger.

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The Effect of Heat Loss on the Radial Heat Flow in the Flash Method (반경방향 열흐름 섬광법에서 열손실의 영향)

  • 이홍주;김순규
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.13 no.2
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    • pp.257-264
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    • 1989
  • For the extension of the flash method the heat diffusion equation with heat loss and with an arbitrary heat pulse is mathematically analyzed. In the analysis the heat loss includes the axial and radial directions on the front, rear and peripheral surfaces. The heat pulse is irradiated from the source to the front surface of the sample and the heat receiving area on the front surface is controlled by the apertures of an optical system. From this analysis the thermal diffusivity of the samples can be determined more precisely than before by the data reduction method using various percent time. The data can be obtained by the extended radial flash technique adjusted correctly the heating area on the central part of the front surface with a proper aperture or the conventional axial flash technique heated uniformly all parts of the front surface.

Investigation of the changes in texture of soybean sprout depending on the heating conditions in sous-vide and conventional hot water cooking (Sous-vide가열과 열탕가열 조건에 따른 콩나물 머리와 줄기의 조직감 변화에 관한 연구)

  • Lee, Yun Ju;Jung, Hwabin;Yoon, Won Byong
    • Journal of Applied Biological Chemistry
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    • v.61 no.3
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    • pp.219-226
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    • 2018
  • The purpose of this study was to investigate the effect of thermal treatments, such as a sous-vide and a conventional hot water cooking, on the texture changes of soybean sprout. A novel method to measure texture properties of soybean sprout have been determined because of the irregular geometry of soybean sprout. The shape of cotyledon of bean spout was accurately analyzed using an image processing and a geometry model. To minimize the effect of the contact area on the texture measurement, a blade type of probe was selected for the measurement. True stress was evaluated to reflect the shape changes during deformation, and demonstrated that the measurement accurately distinguished the effect of thermal treatment on the texture. Different heating time (i.e., 0, 10, 20, and 30 min) was applied for both sous-vide and conventional cooking. Thermal processing caused hardening of textures for both cotyledon and hypocotyl of soybean sprout. The conventional cooking method showed higher stress values than those of sous-vide cooking. Sprouts cooked by sous-vide released the moisture after thermal processing while sprout cooked by a conventional water bath method could hold the moisture content during thermal processing. The soybean sprouts treated by conventional cooking method showed a higher score in sensory evaluation.

Characterization of LaCrO$_3$ Powders Synthesized by Combustion Process with Different Heating Methods (가열방법에 따른 LaCrO$_3$ 연소합성분말의 특성)

  • 정층환;박홍규;오석진;박지연
    • Journal of the Korean Ceramic Society
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    • v.35 no.10
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    • pp.1078-1084
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    • 1998
  • lanthanum chromite(LaCrO3) powder was synthesized by the combustion of a solution of metal nitrates La(NO3).6H2O and Cr(NO3)3.9H2O and urea. The pH of solution affected a yield of the combustion products but did not influence the morphology of the products. When the pH of the solution was in the range of 0.7-4, the yield of the combustion products was more than 90% The morphology of the combustion products was af-fected by heating methods for the solution. The hot-plate induced heating of the solution yielded powders hav-ing two-dimensionally interconnected agglomerates whereas microwave-induced heating produced a fine and non-agglomerated powders. The specific surface area(BET) of the combustion products using microwave-in-non-agglomerated powders. The specific surface area(BET) of the combustion products using microwave-in-duced heating method were larger(25~32m2/g) than that of hot plate heating method(10-14m2/g)

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울진 1,2호기 Cavity에 대한 노심용융물 고압분출 실험 연구

  • 김상백;박래준;김희동;김도형;이규정
    • Proceedings of the Korean Nuclear Society Conference
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    • 1997.05a
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    • pp.569-574
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    • 1997
  • 프랑스 가압경수형 원전인 울진 1,2호기 cavity의 격납용기 직접가열에 대한 특성을 분석하기 위하여 노심 용융물 고압분출 실험 연구를 수행하였다. 울진 1,2호기 격납건물은 국내의 Westinghouse와 CE형 원전과 달리 원자로용기 하부 cavity내 수평통로에 의한 출구가 없어 원자로용기 외곽의 환형통로를 통해 cavity와 격납건물 상부 대기와 직접 연결되어 있는 특성을 가지고 있다. 본 연구에서는 환형통로 면적, 파손 직경 용융물 질량 등에 따라 원자로용기 압력을 변화시키면서 용융물을 물, 증기를 질소기체로 각각 모의하여 실험을 수행하였다. 실험결과, 노심용융물 고압분출에는 원자로용기 파손 직경이 많은 영향을 미치는 것으로 나타났고 환형통로 면적과 용융물 질량은 큰영향을 미치지 않는 것으로 나타났다. 또한 환형통로 면적의 감소는 노심용융물 고압분출시 cav의 압력을 다소 상승시키는 결과를 보여주었다. 본 실험 연구에서 노심용융물 고압분출에 많은 영향을 미치지 않는 것으로 나타난 환형통로 면적에 대해서는 종합적으로 분석하는 추가 실험 이 필요하다.

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Design Optimization of Heat Exchangers for Solar-Heating Ocean Thermal Energy Conversion (SH-OTEC) Using High-Performance Commercial Tubes (고성능 상용튜브를 사용한 태양열 가열 해양온도차발전용 열교환기 설계 최적화)

  • Zhou, Tianjun;Nguyen, Van Hap;Lee, Geun Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.9
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    • pp.557-567
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    • 2016
  • In this study, the optimal design of heat exchangers, including the evaporator and condenser of a solar-heating ocean thermal energy conversion (SH-OTEC), is investigated. The power output of the SH-OTEC is assumed to be 100 kW, and the SH-OTEC uses the working fluid of R134a and high-performance commercial tubes. The surface heat transfer area and the pressure drop were strongly dependent on the number of tubes, as well as the number of tube passes. To solve the reciprocal tendency between the heat transfer area and pressure drop with respect to the number of tubes, as well as the number of tube passes, a genetic algorithm (GA) with two objective functions of the heat transfer area (the capital cost) and operating cost (pressure drop) was used. Optimal results delineated the feasible regions of heat transfer area and operating cost with respect to the pertinent number of tubes and tube passes. Pareto fronts of the evaporator and condenser obtained from multi-objective GA provides designers or investors with a wide range of optimal solutions so that they can select projects suitable for their financial resources. In addition, the surface heat transfer area of the condenser took up a much higher percentage of the total heat transfer area of the SH-OTEC than that of the evaporator.

신문용지의 소프트 닙 캘린더링

  • Lee, Hak-Rae;Lee, Sa-Yong;Ryu, Hun;Jeon, Dae-Gu;Kim, Chang-Hui
    • Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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    • 1999.04a
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    • pp.44-44
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    • 1999
  • 전적으로 해외기술에 의존하고 있는 소프트 닙 캘린더 피복의 국산화를 위해 시험 제작 된 소프트 닙 캘린더용 연질롤의 캘린더링 효과를 구명하기 위해서 공정 변수에 따른 신문 용지의 물성변화를 평가하였다. 연질 롤로는 (주)광성고무롤에서 시험제작된 경도 90 Shore D의 것을 사용하였으며, 캘린 더링 시의 압력, 가열 롤의 표면온도, 닙 체류 시간, 유입지의 함수율 변화에 따른 신문용지 의 별크, 평활도, 광택도, 인장강도, 인열강도, 불투명도 변화를 조사하였다. 별크는 캘린더링 시 압력, 가열 롤의 표면온도, 닙 체류시간의 증가에 따라 감소하였다. 가열 롤의 표면온도가 높을수록 별크가 크게 감소되었으며, 닙 체류시간이 짧은 경우에는 1 120 226;C 이하에서 캘린더링을 실시하는 것이 별크 유지에 효과적이었다. 평활도는 가열 롤의 표연 온도, 닙 체류시간이 증가함에 따라 개선되었으며, 선압과 함 수율 증가에 의해서도 상승되는 경향을 보였. 인장강도는 유입지의 함수율, 닙 체류시간, 가열 롤의 표면온도가 모두 상승할 경우 증 가하는 결과를 나타내었다. 이는 함수율 증가에 의해 섬유의 유연성이 향상된 상태에서는 칼렌더링 온도와 닙체류 시간 증가에 의한 섬유의 기계적 변형과 열전달에 의한 섬유의 열 변형이 효과적으로 발생하여 섬유간 결합면적이 증가된 결과로 생각되었다. 인열강도는 소프트닙 캘린더링 후 전반적으로 감소하였으나 캘린더링 온도와 닙체류시 간은 인열강도에 미치는 영향은 적은 것으로 나타났다. 소프트 닙 캘린더링 시 발생하는 인 열강도의 저하를 막기 위해서는 닙 체류시간을 짧게 적용하고 섬유의 열변형이 종이의 표변 에서만 일어날 수 있도록 유입지 함수율과 가열롤의 표면온도를 적절히 조절하는 것이 필요 하리라 판단되었다.광택도는 온도와 압력이 증가할수록 증가하였으나, 닙 체류시간에 따라서는 큰 변화를 나타내지 않았으며 120도씨에서는 닙 체류시간의 증가에 따라 광택도가 오히려 감소하기도 하였다. 불투명도는 벌크와 마찬가지로 압력이 높고 가열롤의 표면온도가 높은 경우 낮게 나타 났다 특히 닙 체류시간의 증가에 따라 감소하는 경향을 보였다.보였다.

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Studies for Processing Condition Optimization and Physicochemical Property of Resistant Starch (난소화성 전분 제조공정의 최적화 및 이화학적 특성 연구)

  • 한명륜;김우경;강남이;이수정;김명환
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.32 no.8
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    • pp.1193-1199
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    • 2003
  • As a result of resistant starch yield depending on heating temperature, moisture content, storage temperature and heating-cooling cycle with RSM (response surface methodology), high amylose corn starch (46%) was appeared higher than normal corn starch in the yield (22%). At the high amylose corn starch, optimum conditions for resistant starch formation were 6 times of heating-cooling cycle, 108$^{\circ}C$ heating temperature and 67% moisture content at the 2$0^{\circ}C$ storage temperature, which resulted in 25% yield with these experiment conditions. Affecting factor for the resistant starch formation was arranged according to heating -cooling cycle, moisture content, heating temperature and storage temperature. Raw corn starch granule was destructive and appeared a porous reticular structure by the resistant starch formation. Color became dark and increased yellowness by caramelization during heating processing. Heating-cooling processing was the result of decreased hardness, cohesiveness, springiness and gumminess.

Experimental investigation on the heat transfer characteristics of an oscillatory pipe flow (원관 내 왕복유동에 따른 열전달특성의 실험적 연구)

  • Park, Sang-Jin;Lee, Dae-Yeong;No, Seung-Tak
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.20 no.6
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    • pp.1959-1970
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    • 1996
  • Effects of oscillatory flow upon heat transfer characteristics have been studied experimentally for oscillating flow in a circular tube. The experimental apparatus was designed to simulate the heat exchangers of the Stirling or Vuilleumier cycle machines and the test section consists of heater and cooler. Measurements were presented of heat flux, axial wall temperature distribution, and radial temperature profile of the working fluid for several cases of oscillation frequency and swept distance ratio. The influences of two main parameters, frequency and tidal displacement of the oscillation were investigated. Then the heat transfer coefficient at the heater is obtained. The carried by the authors with a assumption of oscillatory laminar slug flow.