• Title/Summary/Keyword: (Ba, Sr)TiO$_3$

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Microstructure and Dielectric Properties of (Ba,Sr)TiO$_3$ Thin Film with Thickness (박막 두께에 따른 (Ba,Sr)TiO$_3$박막의 구조 및 유전특성)

  • 이상철;임성수;정장호;이성갑;배선기;이영희
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.121-124
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    • 1999

  • The (Ba,Sr)TiO$_3$[BST] thin film were fabricated on the Pt/Ti/SiO$_2$/Si substrate by RF sputtering technique. The structural properties of the BST thin films were investigated with deposition time and substrate temperature by XRD. In the case of the BST thin films which has the deposition thin of 20 min, second phases and BST (111) peaks were increased with increasing the temperature of substrate. The capacitance of the BST thin film (deposition time of 20 min.) was decreased with the substrate temperature and was 1500pF with applied voltage of 1V.

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A study on the tunning properties of BST-MgO thick film (BST-MgO 강유전체 후막의 가변 튜닝 특성에 관한 연구)

  • Kim, I.S.;Min, B.K.;Song, J.S.;Jeon, S.Y.
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.15-17
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    • 2005

  • In this study, tunable dielectric materials are important for resonator, variable capacitor, phased array antenna and other devices application. In this paper, Dielectric constant increased and tuning range increased with the increased of $BaSrTiO_3/Li_{2}CO_{3}$ content, which probably can be explained by the substitution of Ba3+, Li1+ on BaTiO3 lattice. The tunability and dielectric loss of the $BaSrTiO_2/Li_{2}CO_{3}$ thick film, sintered at $1150^{\circ}C$, were about 43 % and 0.234 at 10$\sim$15 MHz, respectively. In case of BaSrTi/MgO, Dielectric constant decreased and tenability increased with the added of $BaSrTiO_3/MgO$. The ferroelectrics properties were distinct when adding Li to BST ceramic thick film, and paraelectrics pattern was distinct when adding Mg.

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