• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.197-198
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• 2005

본 논문에서는 p-type (100)Si. (100)MgO 그리고 MgO/Si 기판 위에 RF Magnetron sputtering 법으로 $Ba_{0.5}Sr_{0.5}TiO_3$(BST) 박막을 증착 후 $600^{\circ}C$ 의 질소분위에서 RTA(Rapid Thermal Annealing)를 이용한 1 분간의 고온 급속열처리를 하였다. XRD 측정결과 모든 기판에서 (110) $Ba_{0.5}Sr_{0.5}TiO_3$의 주피크가 관찰되어졌고, 열처리 후 피크 세기가 증가함을 확인할 수 있었다. C-V 특성에서 각각의 기판에서 측정된 커패시턴스 값으로 계산된 유전율은 120(bare Si), 305(MgO/Si) 그리고 310(MgO)이었다. 누설 전류 특성에서는 150KV/cm이내의 인가전계에서 0.1$uA/cm^2$이하의 안정된 누설전류값을 보여주었다. 결론적으로 MgO 버퍼층을 이용한 기판이 BST 박막의 증착을 위한 기판으로써 효과적임을 알 수 있었다.

• Korean Journal of Materials Research
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• 제25권10호
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• pp.566-570
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• 2015

$Bi_{0.5}Na_{0.5}TiO_3$ (BNT) based ceramics are considered potential lead-free alternatives for $Pb(Zr,Ti)O_3$(PZT) based ceramics in various applications such as sensors, actuators and transducers. However, BNT-based ceramics have lower electromechanical performance as compared with PZT based ceramics. Therefore, in this work, lead-free bulk $0.99[(Bi_{0.5}Na_{0.5})_{0.935}Ba_{0.065}]_{(1-x)}La_xTiO_3-0.01SrZO_3$ (BNBTLax-SZ, with x = 0, 0.01, 0.02) ceramics were synthesized by a conventional solid state reaction The crystal structure, dielectric response, degree of diffuseness and electric-field-induced strain properties were investigated as a function of different La concentrations. All samples were crystallized into a single phase perovskite structure. The temperature dependent dielectric response of La-modified BNBT-SZ ceramics showed lower dielectric response and improved field-induced strain response. The field induced strain increased from 0.17%_for pure BNBT-SZ to 0.38 % for 1 mol.% La-modified BNBT-SZ ceramics at an applied electric field of 6 kV/mm. These results show that La-modified BNBT-SZ ceramic system is expected to be a new candidate material for lead-free electronic devices.

• Proceedings of the Materials Research Society of Korea Conference
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• 한국재료학회 2006년도 춘계학술발표대회 및 제10회 신소재 심포지엄 논문개요집
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• pp.29.1-29.1
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• 2006

• Journal of the Microelectronics and Packaging Society
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• 제11권3호
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• pp.63-70
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• 2004

The structural, electrical properties of $(Ba, Sr)TiO_3[BSTO]/RuO_2$ thin films were examined by the addition of amorphous BSTO layer between crystlline BSTO film and $RuO_2$ substrate. We prepared BSTO films with double-layered structure, that is, amorphous layers deposited at $60^{\circ}C$ and crystalline films. Crystalline films were prepared at 550 on amorphous BSTO layer. The thickness of the amorphous layers was varied from 0 to 170 nm. During the deposition of crystalline films, the crystallization of the amorphous layers occurred and the structure was changed to circular while crystalline BSTO films showed columnar structure. Due to insufficient annealing effect, amorphous BSTO phase was observed when the thickness of the amorphous layers exceeded 30 nm. Amorphous BSTO layer could also prevent the formation of oxygen deficient region in $RuO_2$ surface. Leakage current of total BSTO films decreased with increasing amorphous layer thickness due to structural modifications. Dielectric constant showed maxi-mum value of 343 when amorphous layer thickness was 30 nm at which the improvement by grain growth and the degradation by amorphous phase were balanced.

• Journal of the Korean Institute of Telematics and Electronics D
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• 제36D권6호
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• pp.44-51
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• 1999

The electrical conduction mechanism of high dielectric $(Ba,Sr)TiO_3$ (BST) thin film capacitor, which is the promising cell capacitor for high density DRAM, was investigated in low field region (<0.2MV/cm). It is known that the current in the low field region consists of dielectric relaxation current and leakage current. The current-time (I-t) measurement technique under the constant voltage was used for extracting successfully each current component. The conduction mechanism of the BST capacitor was deduced from the dependency of the current on the measurement temperature, strength of electric field, the polarity of applied electric field and post annealing process. From these results, it was suggested that the dielectric relaxation current and the leakage current are originated from the redistribution of internally trapped electron by hopping process and Pool-Frenkel conduction mechanism, respectively. It was also concluded that traps causing these two current components are due to oxygen vacancies within the BST film.

• Economic and Environmental Geology
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• 제40권1호
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• pp.47-66
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• 2007

The Sitting Buddha Carved on Rockcliff (National treasure No. 201) in Bukjiri consists of porphyritic biotite granite, which was fractured by three joint sets of NE-SW, EW and NS directions. They produced a physical weathering that broke many parts of the Buddha and background. The chemical index of alteration is 59 to 61 from the major elements in the granite that was weathered into producing kaolin minerals from alteration of feldspars and biotite. With weathering degree, major element compositions increase in $SiO_2$ and MnO, whereas decrease in $TiO_2,\;{Fe_2O_3}^t,\;MgO,\;CaO\;and\;K_2O$. Change proporations of trace elements to $Al_2O_3$ increase in all transition elements, Rb and Y, whereas decrease in Li, Sr and Ba. REE pattern increases only in HREE. Particularly, a decrease in CaO, $K_2O$, Sr and Ba results in what they are effluxed to dissolve from feldspars by groundwater. The Buddha image has been deteriorated into joints, color changes, brown rusts, granular decay, microorganic smears by the such weathering causes as deformation, moisture, temperature variation and microorganic living. The moisture, which leaks along the joints in the granite, not only dissolve to decompose minerals but also grows many microorganism and is frozen over during winter. NE-SW and NS joint sets affect to seep in water during rainy days to deteriorate the image because they extend outward.

• Fire Science and Engineering
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• 제19권2호
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• pp.75-80
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• 2005

This dissertation is about the development of PTC(Positive Temperature Coefficient) thermistor by composition method. A multilayer-type PTC samples were fabricated under optimal conditions after setting the experimental composition equation as $(0.90Ba+0.05Sr+0.05Ca)TiO_3+0.01TiO_3+0.01SiO_2+0.0008MnO_2+0.0018Nb_2O_5$ and their testing results were analyzed. The fabrication method of SMD(Surface Mounted Device) multilayer -type sample based on the composition ratio has the advantages in lowering its resistivity at room temperature, considerably, and increasing maximum current level, as needed. Although there is a disadvantage of peak resistivity drop by the multilayer, causing the increasement of thermal capacity. and thereby, increasing the switching delay time, a high applying voltage can increase the peak resistivity and shorten the switching delay time. The voltage-current characteristic showed that the more multilayers increased the initial maximum current and the transition voltage that increased the resistivity abruptly according to the curie point. The element it could be applied with the sensor for the fire detector.

• Journal of the Institute of Electronics Engineers of Korea SD
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• 제38권5호
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• pp.329-337
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• 2001

It has been known that the leakage current in the low field region consists of the dielectric relaxation current and intrinsic leakage current, which cause the charge loss in dynamic random access memory (DRAM) storage capacitor using (Ba,Sr)TiO$_{3}$ (BST) thin film. Especially, the dielectric relaxation current should be seriously considered since its magnitude is much larger than that of the intrinsic leakage current in giga-bit DRAM operation voltage (~IY). In this study, thermally stimulated current (TSC) measurement was at first applied to investigate the activation energy of traps and relative evaluation of the density of traps according to process change. And, through comparing TSC to early methods of I-V or I-t measurement and analyzing, we identify the origin of the dielectric relaxation current and investigate the reliability of TSC measurement. First, the polarization condition such as electric field, time, temperature and heating rate was investigated for reliable TSC measurement. From the TSC measurement, the energy level of traps in the BST thin film has been investigated and evaluated to be 0.20($\pm$0.01) eV and 0.45($\pm$0.02) eV. Based on the TSC measurement results before and after rapid thermal annealing (RTA) process, oxygen vacancy is concluded to be the origin of the traps. TSC characteristics with thermal annealing in the MIM BST capacitor have shown the same trends with the current-voltage (I-V) and current-time (I-t) characteristics. This means that the TSC measurement is one of the effective methods to characterize the traps in the BST thin film.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.196-196
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• 2008

We have investigated that the effect of post annealing on the structural and electrical properties of $Ba_{0.5}Sr_{0.5}TiO_3$ thin films. The BST thin films were deposited on n-type 4H-silicon carbide(SiC) using pulsed laser deposition (PLD). The deposition was carried out in oxygen ambient 100mTorr for 5 minutes, which results in about 300nm-thick BST films. For the BST/4H-SiC, 200nm thick silver was deposited on the BST films bye-beam evaporation. The X-ray diffraction patterns of the BST films revealed that the crystalline structure of BST thin films has been improved after post-annealing at $850^{\circ}C$ for 1 hour. The root mean square (RMS) surface roughness of the BST film measured by using a AFM was increased after post-annealing from 5.69nm to 11.49nm. The electrical properties of BST thin film were investigated by measuring the capacitance-voltage characteristics of a silver/BST/4H-SiC structure. After the post-annealing, dielectric constant of the film was increased from 159.67 to 355.33, which can be ascribed to the enhancement of the crystallinity of BST thin films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제15권6호
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• pp.504-510
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• 2002

Recently, thin film capacitors of high dielectric constant and low leakage current are applied to integrated devices. In this study, (Ba, Sr)$TiO_3$ (BST) thin films for low cost were prepared by Sol-Gel method. BST solution was spin-coated on Pt/$SiO_2$/Si substrate at 4,000 rpm for 10 seconds. Coating process was repeated 3 times and then sintered at $700^{\circ}C$ for 30 minutes. Structural and electrical characteristics of each specimen were analyzed by TG-DTA, SEM, fractal phenomenon, voltage-current and dielectric factor. Thickness of BST ceramics thin films are about 2,600~2,800 ${\AA}$ at depositing 3 times. Dielectric constant of thin films was decreased in 1 kHz~1 MHz. Dielectric constant and loss to frequency were 250 and 0.02 in $(Ba_{0.7}Sr_{0.3})TiO_3$ (BST3). Leakage current of BST3 was $10^{-9}\sim10^{-11}$/ A under 3 V.