Microstructure and Interfacial Reaction of $SrRuO_3$ Thin Film for a Bottom Electrode of BST
($Ba_{X}Sr_{1-X}$ $TiO_3$ (BST)용 하부전극 $SrRuO_3$ 박막의 미세구조와 계면반응에 관한 연구)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1998.11a
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- pp.57-57
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- 1998