• 제목/요약/키워드: (111) orientation

검색결과 353건 처리시간 0.023초

전자빔 증착법에 의해 형성된 MgO 박막의 증착 및 특성 (A Study on the Characteristics of MgO Thin Films Prepared by Electron Beam)

  • 이춘호;김선일;신호식
    • 한국세라믹학회지
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    • 제39권12호
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    • pp.1171-1176
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    • 2002
  • MgO 박막은 성장용 기판 또는 완충층으로 이용되고 있으며, 근래에는 AC PDP의 유전체 보호막으로써 그 활용도가 넓어지고 있다. 본 연구에서는 전자빔증착법에 의해 MgO 박막을 증착시켜 증착변수에 따른 MgO 박막의 성장특성을 연구하였다. 실험은 증착기판, 증착속도, 기판온도 등의 변화에 따른 MgO 박막의 우선배향성, 표면형상을 통하여 MgO 박막의 물성을 알아보았다. 실험결과, Si 기판에서는 증착속도가 빠를수록 (111)우선배향된 박막을 얻을 수 있었고, 기판온도가 상온일때는 (200)에서 기판온도가 증가할수록 (220)의 peak이 관찰되었다. 비정질인 slide galss 기판일 경우에는 상온에서 MgO 박막의 (200)면의 우선배향을 얻을수 있었고, 온도에 의해 배향성이 (200)면에서 (111)면으로 바뀌는 것을 알 수 있었다. 또한 MgO 박막의 배향성과 특성에 대한 관계를 조사하였다.

Excellent Crystallinity of Ba Ferrite Layers Deposited on Pt(111) Underlayers

  • Matsushita, Nobuhiro;Feng, Jie;Watanabe, Koh;Ichinose, Makoto;Nakagawa, Shigeki;Naoe, Masahiko
    • The Korean Journal of Ceramics
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    • 제6권3호
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    • pp.315-317
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    • 2000
  • A magnetoplumbite type of Ba ferrite(BaM) layers were deposited on Pt(111) and Pt(200) layers, and their c-axis orientation and magnetic characteristics were compared each other. The as-deposited BaM layer on Pt(111) one at the substrate temperature $T_s$ above $500^{\circ}C$ revealed remarkable c-axis orientation. The saturation magnetization 4$\piM_s$ and the perpendicular coercivity $H_{c⊥}$ of the films as-deposited at $T_s$ of $600^{\circ}C$ were 4.0kG and 2.5kOe, respectively. On the other hand, BaM ferrite layer deposited on Pt(200) layer at $T_s$ as relatively low as $500^{\circ}C$ also revealed weak c-axis orientation as well as (107) one and the films as-deposited at $T_s$ of $600^{\circ}C$ exhibited 4$\piMs_{and}$ $H_{c⊥}$ of 2.8kG and 2.5kOe, respectively. It was suggested that although chemical activity of Pt surface was effective for the formation of BaM crystallites, the lattice matching was also important for obtaining BaM layer with good c-axis orientation and large perpendicular anisotropy.sotropy.

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시안화 황동도금욕을 사용한 黃銅電着層의 현미경조직 (Microstructure of brass electrodeposits in cyanide solution)

  • 예길촌;김종관
    • 한국표면공학회지
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    • 제17권4호
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    • pp.106-119
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    • 1984
  • Brass was electrodeposited over the range of the current densities from 2 to 8 A/$dm^2$ in cyanide bath at 20 and 40$^{\circ}C$. The cathode overpotential increased and the cathode efficiency was decreased respectively with decreasing temperature, increasing current density and addition of organic substance. The perferred orientation of the deposits were associated with the cathode overpotential and the nucleation energy of lattice planes. The (111) preferred orientation developed at the low current density and low cathode overpotential (440-520mV). On the other hand, the (111)+(100) preferred orientation developed at higher cathode overpotential (528-680mV). The (111)+(100) preferred orientation developed over the whole range of overpotential in the cyanide solution with organic additive. The copper content of deposit decreased with increasing current density and decreasing temperature. The morphology of the deposits with no additive was the polygonal body type of structure and the structure of the cross section was columnar structure. The morphology of the deposits with additive, on the other hand, was fine crystallite type of structure. And the structure of the cross section of them was the finer granular structure.

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A real-time X-ray scattering study of sputtering growth of TiN films

  • J.H.Je;Noh, D.Y.;Kim, H.K.;K.S.Liang
    • 한국진공학회지
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    • 제4권S1호
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    • pp.97-101
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    • 1995
  • We report the results of a real-time synchrotron x-ray scattering study of the growth of TiN thin films on Si(001) substrates by RF sputtering. Our experiemnts show that the morphology of the TiN films strongly depends on growth conditions. After the nucleation and growth takes place with random crystallographic orientation at the very early stage, the films grow with a preferred orientation. Such preferred orientation was found to depend on both the sputtering power and the carrier gases used in the sputtering. Generally, the final morphology assumes either(111) or (002) crystallographic orientation. Using Ar sputtering, a cross-over effect from(002) to (111) was observed at intermediate time. The nature of the observed morphological changes is discussed.

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파형전류전해에 의한 은-주석합금 전착층의 조성 및 현미경조직 (The Composition and the Microstructure of Pulse current electrodeposits of SilverTin alloy)

  • 예길촌;김용웅;김진수
    • 한국표면공학회지
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    • 제26권5호
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    • pp.245-254
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    • 1993
  • The effects of pulse current electrolysis conditions on the composition and the microstructure of Ag-Sn alloy were studied by using a pyrophosphate bath. Both cathode current efficiency and throwing power of alloy deposits formed under pulse plating conditions, decreased with increasing mean current density, and lower than those under D.C. electrolysis condition. Tin content of Ag-Sn alloy decreased noticebly with in-creasing the mean current density, while it increased with the increase of On-time from 1 to 10 ms. The pre-ferred orientation of Ag-Sn alloy changed with increasing cathode overpotential in the sequence of (100)longrightarrow(100)+(111)longrightarrow(111) at $20^{\circ}C$ and (110)longrightarrow(111)longrightarrow(111)+(100) at $30^{\circ}C$. The effective crystal grain size of the alloy was decreased by decreasing temperature from $30^{\circ}C$ to $20^{\circ}C$ and the surface structure of them was related to the preferred orientation.

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Orientation Control of $SrBi_2Ta_2O_9$ Thin Films on Pt (111) Substrates

  • Lee, Si-Hyung;Lee, Jeon-Kook;Choelhwyi Bae;Jung, Hyung-Jin;Yoon, Ki-Hyun
    • The Korean Journal of Ceramics
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    • 제6권2호
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    • pp.116-119
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    • 2000
  • The a-axis and c-axis prefer oriented SBT thin films could be deposited on Pt(111)/Ti/$SiO_2$$650^{\circ}C$). The c-axis preferred orientation of SBT film can be obtained by Sr deficiency and high compressive stress. However, the a-axis-oriented grains can be formed under stoichiometric Sr content and nearly stress-free state.

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저압 화학기상증착법을 이용한 β-SiC의 증착 및 결정 성장 방위에 따른 기계적 특성 변화 (Deposition of β-SiC by a LPCVD Method and the Effect of the Crystallographic Orientation on Mechanical Properties)

  • 김대종;이종민;김원주;윤순길;박지연
    • 한국세라믹학회지
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    • 제50권1호
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    • pp.43-49
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    • 2013
  • ${\beta}$-SiC was deposited onto a graphite substrate by a LPCVD method and the effect of the crystallographic orientation on mechanical properties of the deposited SiC was investigated. The deposition was performed at $1300^{\circ}C$ in a cylindrical hot-wall LPCVD system by varying the deposition pressure and total flow rate. The texture and crystallographic orientation of the SiC were evaluated by XRD. The deposition rate increased linearly with the gas flow rate from 800 sccm to 1600 sccm. It also increased with the pressure but became saturated above a total pressure of 3.3 kPa. In the range of 3.3 - 10 kPa, the preferred orientation changed from the (220) and (311) planes to the (111) plane. The hardness and elastic modulus showed maximum values when the SiC had the (111) preferred orientation, though it gradually decreased upon a change to the (220) and (311) preferred orientations.

RF 마그네트론 스퍼터링에 의한 NiO 박막 증착시 산소 유량비가 박막의 결정 배향성에 미치는 영향 (Effects of Oxygen Flow Ratio on the Crystallographic Orientation of NiO Thin Films Deposited by RE Magnetron Sputtering)

  • 류현욱;최광표;노효섭;박용주;박진성
    • 한국세라믹학회지
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    • 제41권2호
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    • pp.106-110
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    • 2004
  • NiO 산화물 타겟을 이용한 RF 마그네트론 스퍼터로 상온에서 Si(100) 기판 위에 NiO 박막을 증착시켜, 스퍼터 가스의 산소 유량비가 NiO 박막의 결정 배향성과 표면 형상에 미치는 영향을 조사하였다. Ar 가스에서 증착된 NiO 박막은 높은결정화도와 (100)면의 우선 배향성을 나타내었으나, $O_2$ 가스에서 증착된 경우에는 (111)면의 우선 배향성을 보였으며 그 증착속도도 감소하였다. 스퍼터 가스의 $O_2$ 함량에 따른 NiO 박막의 결정성과 우선배향성 변화에 대한 요인을 고찰하였으며, 박막의 표면 형상과 거칠기의 변화를 조사하였다.

$BaTiO_3$의 {111}쌍정계면과 강유전 분역의 배향성 (Orientation States of Ferroelectric Domains and {111} Twins in $BaTiO_3$)

  • 박봉모;정수진
    • 한국세라믹학회지
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    • 제33권2호
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    • pp.228-234
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    • 1996
  • 강유전성 BaTiO3의 분역 구조를 이해하는 것은 폴링과정에 있어서 대단히 중요하면 대부분의 BaTiO3 세라믹스에서 흔히 발견되는 구조 쌍정 계면에서의 배향관계는 아직까지 보고된 바 없다. 본 연구에서는 {111} 쌍정을 이루고 있는 길정시편을 이용하여 편광현미경하에서 분역구조를 관찰하고, 열처리에 의하여 상전이되는 동안 {111} 쌍정과 강유전성 분역의 거동을 현미경하에서 직접적으로 관찰하였다. {111} 쌍정면 암측으로 대칭적 분역구조가 발될되며, 그 배열 형태는 'V'자 모양과 수직하게 관통하는 것처럼 직선 모양의 두가지 형으로 분류된다. 열처리에 의하여 새로운 분역구조가 형성될때 {111} 쌍정면 주위에서는 대칭적 관계를 유지하면서 분역이 발달되며, 분역형성에 기인하는 표면변형도 {111} 쌍정에 대하여 항상 대칭적으로 발달된다. 이는 {111} 계면에서도 분극반향이 바뀌어지며 "머리-꼬리"의 전지적 안정성의 배향관계를 유지하는 것으로 설명할 수 있다.

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시장 지향성, 조직의 서비스 지향성, 경영성과의 관계 (The Relationships between Market Orientation, Organizational Service Orientation, and Performance)

  • 이용기;이석규;문형남
    • 한국경영과학회지
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    • 제26권2호
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    • pp.111-130
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    • 2001
  • This study aims to examine the difference between market orientation, organizational service orientation, performances (employee satisfactions and business performances) across the type of hotel grade, and investigate the effect on performances of market orientation, organizational service orientation, and interaction of these two factors. For these purposes the authors developed 13 research proposals. The data for this research which were collected from Korean hotel firms’ managers and employees were analyzed with one-way ANOVA, regression analysis. The findings can be summarized as follows. First, five-star hotels display higher levels of market orientation, organizational service orientation, performance (employee satisfaction, business performance) than four-star and three-star hotels. Second, market orientation, organizational service orientation, and interaction of these two variables have significant effects on performances(employee satisfaction, business performance).

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