• Title/Summary/Keyword: $ZrSiO_4$

Search Result 309, Processing Time 0.024 seconds

Study of characteristics of SBT etching using $CF_4$/Ar Plasma ($CF_4$/Ar 플라즈마를 이용한 SBT 박막 식각에 관한 연구)

  • Kim, Dong-Pyo;Seo, Jung-Woo;Kim, Seung-Bum;Kim, Tae-Hyung;Chang, Eui-Goo;Kim, Chang-Il
    • Proceedings of the KIEE Conference
    • /
    • 1999.07d
    • /
    • pp.1553-1555
    • /
    • 1999
  • Recently, $SrBi_2Ta_2O_9$(SBT) and $Pb(ZrTi)O_3$(PZT) were much attracted as materials of capacitor for ferroelectric random access memory(FRAM) showing higher read/write speed, lower power consumption and nonvolartility. Bi-layered SBT thin film has appeared as the most prominent fatigue free and low operation voltage for use in nonvolatile memory. To highly integrate FRAM, SBT thin film should be etched. A lot of papers on SBT thin film and its characteristics have been studied. However, there are few reports about SBT thin film due to difficulty of etching. In order to investigate properties of etching of SBT thin film, SBT thin film was etched in $CF_4$/Ar gas plasma using magnetically enhanced inductively coupled plasma (MEICP) system. When $CF_4/(CF_4+Ar)$ is 0.1, etch rate of SBT thin film was $3300{\AA}/min$, and etch rate of Pt was $2495{\AA}/min$. Selectivities of SBT to Pt. $SiO_2$ and photoresist(PR) were 1.35, 0.6 and 0.89, respectively. With increasing $CF_4$ gas, etch rate of SBT thin film and $P_t$ decreased.

  • PDF

An Innovative Solution for the Power Quality Problems in Induction Motor by Using Silica and Alumina Nano Fillers Mixed Enamel for the Coatings of the Windings

  • Mohanadasse, K.;Sharmeela, C.;Selvaraj, D. Edison
    • Journal of Electrical Engineering and Technology
    • /
    • v.10 no.4
    • /
    • pp.1621-1625
    • /
    • 2015
  • Power quality has always been a concern of power engineers. Certainly an argument can be successfully made that most parts of power engineering have the ultimate objective to improve power quality. AC motors were widely used in industrial and domestic applications. Generally, AC motors were of two types: Induction and Synchronous motors. In motor many parameters like different load cycling, switching, working in hot weather and unbalances creates harmonics which creates major reasons for temperature rise of the motors. Due to high peak value of voltage, harmonics can weaken insulation in cables, windings and capacitors and different electronic components. Higher value of harmonics increase the motor current and decrease the power factor which will reduce the life time of the motor and increase the overall rating of all electrical equipments. Harmonics reduction of all the motors in India will save more power. Coating of windings of the motor with nano fillers will reduce the amount of harmonics in the motor. Based on the previous project works, actions were taken to use the enamel filled with various nano fillers for the coating of the windings of the different AC motors. Ball mill method was used to convert the micro particles of Al2O3, SiO2, TiO2, ZrO2 and ZnO into nano particles. SEM, TEM and XRD were used to augment the particle size of the powder. The synthesized nano powders were mixed with the enamel by using ultrasonic vibrator. Then the enamel mixed with the nano fillers was coated to the windings of the several AC motors. Harmonics were measured in terms of various indices like THD, VHD, CHD and DIN by using Harmonic analyzer. There are many other measures and indices to describe power quality, but none is applicable in all cases and in many instances, these indices may hide more than they show. Sometimes power quality indices were used as a basis of comparison and standardization. The efficiency of the motors was increased by 5 – 10 %. The thermal withstanding capacity of the motor was increased by 5º to 15º C. The harmonics of the motors were reduced by 10 – 50%.

Petrochemistry and Environmental Geochemistry of Shale and Coal from the Daedong Supergroup, Chungnam Coal Field, Korea (충남탄전, 대동누층군의 셰일과 탄질암에 관한 암석화학 및 환경지구화학적 특성)

  • Lee, Chan Hee;Lee, Hyun Koo;Kim, Kyoung-Woong
    • Economic and Environmental Geology
    • /
    • v.30 no.5
    • /
    • pp.417-431
    • /
    • 1997
  • Characteristics of sedimentary rocks and enrichment of toxic elements in shale and coal from the Chungnam coal field were investigated based upon geochemistry of major, trace and rare earth elements. Shale and coal of the area are interbedded along the Traissic to the Jurassic Daedong Supergroup, which can be subdivided into grey shale, black shale and coal. The coal had been mined, however all the mines are abandonded due to the economic problems. The shale and coal are characterized by relatively low contents of $SiO_2$, and $Al_2O_3$ and high levels of loss-on-ignition (LOI), CaO and $Na_2O$ in comparison with the North American Shale Composite (NASC). Light rare earth elements (La, Ce, Yb and Lu) are highly enriched with the coal. Ratios of $Al_2O_3/Na_2O$ and $K_2O/Na_2O$ in shale and coal range from 30.0 to 351.8 and from 4.2 to 106.8, which have partly negative correlations against $SiO_2/Al_2O_3$ (1.24 to 6.06), respectively. Those are suggested that controls of mineral compositions in shale and coal can be due to substitution and migration of those elements by diagenesis and metamorphism. Shale and coal of the area may be deposited in terrestrial basin deduced from high C/S (39 to 895) and variable composition of organic carbon (0.39 to 18.40 wt.%) and low contents of reduced sulfur (0.01 to 0.05 wt.%). These shale and coal were originated from the high grade metamorphic and/or igneous rocks, and the rare earth elements of those rocks are slightly influenced with diagenesis and metamorphism on the basis of $Al_2O_3$ versus La, La against Ce, Zr versus Yb, the ratios of La/Ce (0.38 to 0.85) and Th/U (3.6 to 14.6). Characteristics of trace and rare earth elements as Co/Th (0.07 to 0.86), La/Sc (0.31 to 11.05), Se/Th (0.28 to 1.06), V/Ni (1.14 to 3.97), Cr/V (1.4 to 28.3), Ni/Co (2.12 to 8.00) and Zr/Hf (22.6~45.1) in the shale and coal argue for inefficient mixing of the simple source lithologies during sedimentation. These rocks also show much variation in $La_N/Yb_N$ (1.36 to 21.68), Th/Yb (3.5 to 20.0) and La/Th (0.31 to 7.89), and their origin is explained by derivation from a mixture of mainly acidic igneous and metamorphic rocks. Average concentrations in the shale and coal are As=7.2 and 7.5, Ba=913 and 974, Cr=500 and 145, Cu=20 and 26, Ni=38 and 35, Pb=30 and 36, and Zn=77 and 92 ppm, respectively, which are similar to those in the NASC. Average enrichment indices for major elements in the shale (0.79) and coal (0.77) are lower than those in the NASC. In addition, average enrichment index for rare earth elements in coal (2.39) is enriched rather than the shale (1.55). On the basis of the NASC, concentrations of minor and/or environmental toxic elements in the shale and coal were depleted of all the elements examined, excepting Cr, Pb, Rb and Th. Average enrichment indices of trace and/or potentially toxic elements (As, Cr, Cu, Ni, Pb, U and Zn) are 1.23 to 1.24 for shale and 1.06 to 1.22 for coal, respectively.

  • PDF

Characteristics of thick film Co2 sensors attached with Na2CO3-CaCO3 auxiliary phases (Na2CO3-CaCO3 보조상을 사용한 후막형 Co2 센서의 특성연구)

  • Shim, H.B.;Choi, J.W.;Kang, J.H.;Yoo, K.S.
    • Journal of Sensor Science and Technology
    • /
    • v.15 no.3
    • /
    • pp.168-172
    • /
    • 2006
  • Potentiometric $CO_{2}$ sensors were fabricated using a NASICON ($Na_{1+x}Zr_{2}Si_{X}P_{3-X}O_{12}$, 1.8 < x < 2.4) thick film and auxiliary layers. The powder of a precursor of NASICON with high purity was synthesized by a sol-gel method. By using the NASICON paste, an electrolyte was prepared on the alumina substrate by screen printing and then sintered at $1000^{\circ}C$ for 4 h. A series of $Na_{2}CO_{3}-CaCO_{3}$ auxiliary phases were deposited on the Pt sensing electrode. The electromotive force (emf) values were linearly dependent on the logarithm of $CO_{2}$ concentration in the range between 1,000 and 10,000 ppm. The device attached with $Na_{2}CO_{3}-CaCO_{3}$ (1:2 in mol.%) showed good sensing properties in the low temperatures.

Structure and Electric Properties of PZT Ceramics Substituted by La and Nd (La와 Nd가 치환된 PZT 세라믹의 구조 및 전기적 성질)

  • Jung, Soo-Cheol;Park, Hyu-Bum;Kim, Jeong;Kim, Keon;Kim, Si-Joong
    • Journal of the Korean Ceramic Society
    • /
    • v.31 no.2
    • /
    • pp.155-160
    • /
    • 1994
  • PZT ceramics substituted by La3+ and Nd3+ were fabricated according to the formula: [Pb1-x(La or Nd)x][Zr0.58Ti0.42]1-x/4$\square$x/4O3(x=0.00, 0.02, 0.05, 0.08, 0.15, 0.20). The crystal structure and microstructure were investigated by XRD and SEM. It was observed that the phase transitions among rhombohedral, tetragonal, and cubic symmetry occured as the substitutional quantity increased. Dielectric constant, dissipation factor and piezoelectric coefficient (d33), of each sample were measured. The dielectric properties were changed as the substitutional quanity of rare earth ion increased. These changes could be explained by crystal structure and compositional fluctuaction. Its d33 was higher at tetragonal region near to phase boundry between rhombohedral and tetragonal, which was explained by reorientation of domain wall.

  • PDF

Occurrence and Cenesis of Perlite from the Beomgockri Group in Janggi Area (장기지역 범곡리층군에 부존되는 진주암의 산출상태와 생성관계)

  • Noh Jin Hwan;Hong Jin-Sung
    • Journal of the Mineralogical Society of Korea
    • /
    • v.18 no.4 s.46
    • /
    • pp.277-288
    • /
    • 2005
  • Perlite, a hydrated volcanic glass, occurs mainly as a bed-like body, and is distributed intermittently along the unconformity surface between the Beomgockri Group and its lower formations, viz. Janggi Group. The perlite is intimately associated with surrounding pumiceous welded tuff and rhyodacites in space and time. Compared to the typical perlite, the perlite is rather silica-poor and impure, and thus, includes lots of phenocrysts and rock fragments. Nearly the perlite is compositionally rather close to a pitchstone than a perlite in water contents. Petrographic comparison between perlite and associated volcanic to volcaniclastic rocks indicates that pumiceous welded tuff and rhyodacite seem to be Protolith of the Perlite. A Zr/$TiO_{2}$-Nb/Y diagram and field occurrence of perlite and their protolithic rocks also conforms the above interpretation. Kn addition, remnant vesicles in perlite strongly reflect that the precursor of perlitic glass appeared to be pumice fragment as well as volcanic glass. The perlite was diagenetically formed by way of a pervasive water-rock interaction at the deposition of the Manghaesan Formation in lacustrine environment. During perlitization, $SiO_{2}$ and alkali tend to be consistently depleted. Preexisting system of the Beomgockri Group based on the perlite formation should be corrected, because the perlite was formed diagenetically without lateral persistence in its occurrence.

Geochemical Characteristics of Soils and Sediments at the Narim Mine Drainage, Korea: Dispersion, Enrichment and Origin of Heavy Metals (나림광산 수계의 토양과 퇴적물에 관한 지구화학적 특성: 중금속 원소의 분산, 부화 및 기원)

  • Lee, Chan Hee;Lee, Hyun Koo;Lee, Jong Chang
    • Economic and Environmental Geology
    • /
    • v.31 no.4
    • /
    • pp.297-310
    • /
    • 1998
  • Geochemical characteristics of environmental toxic elements at the Narim mine area were investigated on the basis of major, minor, rare earth element geochemistry and mineralogy. Ratios of $Al_2O_3/Na_2O$ and $K_2O/Na_2O$ in soils and sediments range from 11.57 to 22.21 and from 1.86 to 3.93, and are partly negative and positive correlation against $SiO_2/Al_2O_3$ (3.41 to 4.78), respectively. These suggested that sediment source of host granitic gneiss could be due to rocks of high grade metamorphism originated by sedimentary rocks. Characteristics of some trace and rare earth elements of V/Ni (0.33 to 1.95), Ni/Co (2.00 to 6.50), Zr/Hf (11.27 to 53.10), La/Ce (0.44 to 0.55), Th/Yb (4.07 to 7.14), La/Th (2.35 to 3.93), $La_N/Yb_N$ (6.58 to 13.67), Co/Th (0.63 to 2.68), La/Sc (3.29 to 5.94) and Sc/Th (0.49 to 1.00) are revealed a narrow range and homogeneous compositions may be explained by simple source lithology. Major elements in all samples are enriched $Al_2O_3$, MgO, $TiO_2$ and LOI, especially $Fe_2O_3$ (mean=7.36 wt.%) in sediments than the composition of host granitic gneiss. The average enrichment indices of major and rare earth elements from the mining drainage are 2.05 and 2.91 of the sediments and are 2.02 and 2.60 of the soils, normalizing by composition of host granitic gneiss, respectively. Average composition (ppm) of minor and/or environmental toxic elements in sediments and soils are Ag=14 and 1, As=199 and 14, Cd=22 and 1, Cu=215 and 42, Pb=1770 and 65, Sb=18 and 3, Zn=3333 and 170, respectively, and extremely high concentrations are found in the subsurface sediments near the ore dump. Environmental toxic elements were strongly enriched in all samples, especially As, Cd, Cu, Pb, Sb and Zn. The level of enrichment was very severe in mining drainage sediments, while it was not so great in the soils. Based on the EPA value, enrichment index of toxic elements is 8.63 of mining drainage sediments and 0.54 of soils on the mining drainage. Mineral composition of soils and sediments near the mining area were partly variable being composed of quartz, mica, feldspar, amphibole, chlorite and clay minerals. From the gravity separated mineralogy, soils and sediments are composed of some pyrite, arsenopyrite, chalcopyrite, sphalerite, galena, goethite and various hydroxide minerals.

  • PDF

Fabrication and Properties of Piezoelectric Microcantilever for Gas Sensor Application (가스 센서 응용을 위한 압전 마이크로 칸티레버의 제작 및 특성)

  • 신상훈;송상근;백준규;박효덕;이재찬
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2003.11a
    • /
    • pp.75-75
    • /
    • 2003
  • 본 연구에서는 대기 중 극 미량으로 존재하는 환경 유해 가스 성분을 검출할 수 있는 미세 소자로의 응용을 위해 마이크로 칸티레버를 제작하고 가스 센서로의 활용 가능성을 검토하였다. 마이크로 칸티레버는 크게 구동층 캐패시터로서 대표적인 압전 재료인 Pb(Zr,Ti)O$_3$ (PZT)를 사용하고 SiNx 박막을 지지층으로 하는 형태로 제작되었다. 제작된 마이크로 칸티레버는 치수 및 형상에 따라 17~29 KHz 의 기본 공진 주파수 값을 나타내었다. Electron beam evaporator를 이용한 copper (Cu) 박막의 단계적인 증착을 통해 칸티 레버 표면에 질량을 증가시키고 그에 따른 마이크로 칸티레버의 공진주파수 변화를 관찰한 결과 질량 증가에 대해 34 Hz/ng의 선형적인 주파수 감소를 나타내었으며, 이로부터 694.4 $\textrm{cm}^2$/g 의 gravimetric sensitivity factor를 얼을 수 있었다. 마이크로칸티레버의 가스 감지능력 시험을 위해 가스 흡착층으로 일차 알콜류의 vapor를 흡착 하는 것으로 보고된 poly methyl metacrytate (PMMA)를 마이크로 칸티레버 표면에 코팅하였다. 마이크로칸티 레버의 기본 공진 주파수 및 PMMA 흡착층 형성과 가스의 흡착에 따른 주파수 변화는 마이크로 칸티 레버로부터 의 전기적 신호를 이용하는 복소 임피던스 분석에 의해 측정되었다. PMMA가 코팅된 마이크로 칸티레버는 ethanol 및 methanol vapor 의 농도가 증가함에 따라 선형적인 공진주파수 감소를 나타내었으며, methanol vapor 의 경우 0.06 Hz/ppm 의 가스 검출 감도를 얻을 수 있었다.

  • PDF

High Temperature Fade Behavior of Brake Friction Materials at Extreme Braking Conditions (실험통계법을 이용한 마찰재의 고온 마찰특성에 대한 고찰)

  • Ko, Kil-Ju;Park, Sang-Jin;Jang, Ho
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
    • /
    • 2001.11a
    • /
    • pp.117-126
    • /
    • 2001
  • Tribological properties of high temperature fade were investigated by changing relative amounts of ingredients in the brake friction material. Based on a simple experimental formulation containing 10 ingredients, friction materials were tested using a pad-on-disk type friction tester. Twenty-five friction material specimens with different relative amounts of the ingredients were manufactured according to the constrained mixture design .The difference ($\Delta$${\mu}$=${\mu}$$\sub$max/. -${\mu}$$\sub$min/. ) of friction coefficients was measured to represent the high temperature fade. Results from elevated temperature tests showed that five ingredients including cashew, graphite, Sb$_2$S$_3$, ZrSiO$_4$, and Cu fibers played important roles on $\Delta$${\mu}$. In order to find relative importance on fade phenomena among these ingredients, ANOVA(analysis of variance) was performed in this investigation. Thirty-two friction material specimens by changing ${\pm}$50vol.% of these five ingredients were tested to examine the relative importance. Results showed that cashew, graphite '||'&'||' Sb$_2$S$_3$, and cashew '||'&'||' graphite aggravated the fade behavior and Cu fibers improved on fade resistance.

  • PDF

Geochemistry of the Kwanaksan alkali feldspar granite: A-type granite\ulcorner (관악산 알칼리 장석 화강암의 지구화학 : A-형 화강암\ulcorner)

  • S-T.Kwon;K.B. Shin;H.K. Park;S.A. Mertzman
    • The Journal of the Petrological Society of Korea
    • /
    • v.4 no.1
    • /
    • pp.31-48
    • /
    • 1995
  • The Jurassic Kwanaksan stock, so far known to be composed of biotite granite only, has the mineral assemblage of quartz+K-feldspar+plagioclase+biotite${\pm}$gernet. The lithology of the stock is classified as alkali feldspar granite by their mode and plagioclase compositions (An<5). Subsolvus feldspars, rather early crystallization of biotite, and shallow emplacement depth estimated from Q-Ab-Or diagram suggest hydrous nature of the magma, which contrasts with anhydrous A-type like geochemistry described below. Major and trace element compositions of the Kwanaksan stock are distinct from those of the adjacent Seoul batholith, suggesting a genetic difference between the two, The Kwanaksan stock shows geochemical characteristics similar to A-type granite in contrast to most other Mesozoic granites in Korea, in that it has high $SiO_2$(73~78wt%), $Na_2O+K_2O$, Ga(27~47 ppm). Nb(22~40 ppm), Y(48~95 ppm), Fe/Mg and Ga/Al, and low CaO(<0.51 wt%). Ba (8~75 ppm) and Sr(2~23 ppm). However, it has lower Zr and LREE and higher Rb(384~796 ppm) than typical A-type granite. LREE-depleted rare earth element pattern with strong negative Eu anomaly of previous studies is reinterpreted as representing source magma characteristics. The residual material during partial melting is not compatible with pyroxenes, amphibole or garnet, while significant amount of plagioclase is required. Similarity of geochemistry of the Kwanaksan stock to A-type granite suggests the origin of the stock has a chose relationship with that of A-type granite. These observations lead us to propose that the Kwanaksan stock was formed by partial melting of felsic source rock.

  • PDF