• 제목/요약/키워드: $ZrF_4$

검색결과 123건 처리시간 0.034초

MEMS 부품을 위한 다결정 박막의 탄성 물성치 추출 시스템과 다결정 재료의 적용 (Elastic Property Extraction System of Polycrystalline Thin-Films for Micro-Electro-Mechanical System Device and Application to Polycrystalline Materials)

  • 정향남;최재환;정희택;이준기
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2004년도 추계학술발표대회 논문집
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    • pp.19-22
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    • 2004
  • A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is already developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, the effective elastic properties of polysilicon, $BaTiO_3\;and\;ZrTiO_4$ are extracted using this system and by employing the fraction of the potential site($f_P$) as a kinetics parameter for the microstructure evolution, the statistical tendency of these materials is studied.

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Vanadium Oxide 나노구조 형성 (Anodic Growth of Vanadium Oxide Nanostructures)

  • 이현권;이기영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.68-68
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    • 2018
  • Nanoporous or nanotubular metal oxide can be fabricated by anodization of metal substrate in fluoride contained electrolytes. The approach allows various transition metals such as Zr, Hf, Nb, Ta to form highly ordered oxide nanostructures. These oxide nanostructures have various advantages such as high surface area, fast electron transport rate and slow recombination in semiconductive materials. Recently, vanadium oxide nanostructures have been drawn attentions due to their superior electronic, catalytic and ion insertion properties. However, anodization of vanadium metal to form oxide layers is relatively difficult due to ease formation of highly soluble complex in water contained electrolyte during anodization. Yang et al. reported $[TiF_6]^{2-}$ or $[BF_4]^-$ in electrolyte helps to formation of stable oxide layer [1, 2]. However, the reported approaches are very sensitive in other parameters. In this presentation, we deal with the other important key parameters to form ordered anodic vanadium oxide such as pH, temperatures and applied potential.

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고 신뢰성 MLCC 제조 및 전기적 특성 (The Electric Properties and Fabrication of MLCC with High Reliability)

  • 윤중락;이병호;이헌용
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.364-367
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    • 2003
  • [ $(Ba_{0.93}Ca_{0.07})_{1.009}(Ti_{0.82}Zr_{0.18})O_{2.}$ ] 이고 첨가제로 $MnO_2$ 0.2wt%, $Y_2O_3$ 0.18wt%, $SiO_2$ 0.15wt% 유리프릿으로 $(Ba_{0.4}Ca_{0.6})SiO_3$ 1 wt%를 첨가한 조성을 이용하여 각 공정별 최적화를 통해 고 신뢰성이면서 고용량 MLCC를 제작하였다 고 신뢰성 MLCC 제작에서 있어 최적의 소성온도를 확인 할 수 있었으며 외부 전극을 통한 도금액 침투를 방지하여 절연저항 특성을 향상할 수 있음을 확인하였다. 또한 1608 크기의 1.13uF의 용량을 가지는 고 신뢰성 MLCC를 제작하였다.

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Pt/Ti/Si 기판위에 형성시킨 PZT박막의 특성 (Characterizations of Sputtered PZT Films on Pt/Ti/Si Substrates.)

  • 황유상;백수현;백상훈;박치선;마재평;최진석;정재경;김영남;조현춘
    • 한국재료학회지
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    • 제4권2호
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    • pp.143-151
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    • 1994
  • $(PbZr_{52},Ti_{48})O_{3}$인 composite ceramic target을 사용하여 R. F. 마그네트론 스퍼터링 방법으로 기판온도 $300^{\circ}C$에서 Pt/Ti/Si 기판위에 PZT 박막을 증착하였다. 페롭스 카이트 PZT박막을 얻기 위하여 PbO분위기에서 로열처리를 행하였다. 하부전극으로 Pt를 사용하였으며 Pt(205$\AA$)/Ti(500 $\AA$)/Si 및 Pt(1000$\AA$)/Ti(500$\AA$)/Si기판을 준비하여 Pt두께화 Ti층이 산소의sink로 작용함으로서 이를 가속화하였다. Ti층의 상부는 산소의 확산으로 인하여 TiOx층으로 변태하였고 하부는 in diffused Pt와 함께 실리사이드층을 형성하였다. TiOx 층의 형성은PZT층의 방향성에 영향을 주었다. 유전상수 (10kHz), 누설전류, 파괴전압, 잔류분극 및 항전계는 각각 571, 32,65$\mu A /\textrm{cm}^2$, 0.40MV/cm, 3.3$\mu C /\textrm{cm}^2$, 0.15MV/cm이었다.

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졸-겔법을 이용한 광증폭기의 Er 이온 캡슐화 및 광학적 특성 (Encapsulation and optical properties of Er3+ ions for planar optical amplifiers via sol-gel process)

  • Kim, Joo-Hyeun;Seok, Sang-Il;Ahn, Bok-Yeop
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.135-135
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    • 2003
  • The fast evolution in the fold of optical communication systems demands powerful optical information treatment. These functions can be performed by integrated optical systems. A key component of such systems is erbium doped waveguide amplifier(EDWA). The intra 4f radiative transition of Er at 1.5 $\mu\textrm{m}$ is particularly interesting because this wavelength is standard in optical telecommunications. The fabrication of waveguide amplifier for integrated optics using sol-gel process has received an increasing attention. Potential advantage of lower cost by less capital equipment and easy processing makes this process an attractive alternatives to conventional technologies like flame hydrolysis deposition, ion exchange and chemical vapor deposition, etc. In addition, sol-gel process has been found to be extremely suitable for the control of composition and refractive index related directly with optical properties. The main drawback of such an amplifier with respect to the EDWA is the need for a much higher Er3+ concentration to compensate for the smaller interaction length. However, the high doping of Er might be resulted in the non-radiative relaxation by clustering of Er ions End co-operative upconversion. In order to solve this problem, we investigate the possibility of avoiding short Er-Er distances by encapsulation of Er3+ ions in hosts such as organic-inorganic hybrid materials. For inorganic-organic hybrid sols, methacryloxypropyltrimethoxysilane (MPTS), zirconyl chloride octahydrate and erbium(III) chloride hexahydrate were used as starting materials, followed by conventional sol-gel process. It was observed by TEM that nano sols having core/shell toplology were formed, depending on the mole ratio of Zr/Er. The surface roughness for the coatings on Si substrate was investigated by AFM as a function of Zr/Er ratio. The local environment and vibrational Properties of Er3+ ions were studied using Near-IR, FT-IR, and UV/Vis spectroscopy. Nano hybrid coatings derived from polymer and Er doped encapsulation Eave the good luminescence at 1.55$\mu\textrm{m}$.

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Oxide Nanolayers Grown on New Ternary Ti Based Alloy Surface by Galvanic Anodizing-Characteristics and Anticorrosive Properties

  • Calderon Moreno, J.M.;Drob, P.;Vasilescu, C.;Drob, S.I.;Popa, M.;Vasilescu, E.
    • Corrosion Science and Technology
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    • 제16권5호
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    • pp.257-264
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    • 2017
  • Film of new Ti-15Zr-5Nb alloy formed during galvanic anodizing in orthophosphoric acid solution was characterized by optical microscope, scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), and Raman micro-spectroscopy. Its anticorrosive properties were determined by electrochemical techniques. The film had a layer with nanotube-like porosity with diameters in 500-1000 nm range. The nano layer contained significant amounts of P and O as well as alloying element. Additionally, Raman micro-spectroscopy identified oxygen as oxygen ion in $TiO_2$ anatase and phosphorous as $P_2O_7{^{4-}}$ ion in phosphotitanate compound. All potentiodynamic polarization curves in artificial Carter-Brugirard saliva with pH values (pH= 3.96, 7.84, and 9.11) depending on the addition of 0.05M NaF revealed nobler behavior of anodized alloy and higher polarization resistance indicating the film is thicker and more compact nanolayer. Lower corrosion rates of the anodized alloy reduced toxicity due to less released ions into saliva. Bigger curvature radii in Nyquist plot and higher phase angle in Bode plot for the anodized alloy ascertain a thicker, more protective, insulating nanolayer existing on the anodized alloy. Additionally, ESI results indicate anodized film consists of an inner, compact, barrier, layer and an outer, less protective, porous layer.

Reprocessing of fluorination ash surrogate in the CARBOFLUOREX process

  • Boyarintsev, Alexander V.;Stepanov, Sergei I.;Chekmarev, Alexander M.;Tsivadze, Aslan Yu.
    • Nuclear Engineering and Technology
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    • 제52권1호
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    • pp.109-114
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    • 2020
  • This work presents the results of laboratory scale tests of the CARBOFLUOREX (CARBOnate FLUORide EXtraction) process - a novel technology for the recovery of U and Pu from the solid fluorides residue (fluorination ash) of Fluoride Volatility Method (FVM) reprocessing of spent nuclear fuel (SNF). To study the oxidative leaching of U from the fluorination ash (FA) by Na2CO3 or Na2CO3-H2O2 solutions followed by solvent extraction by methyltrioctylammonium carbonate in toluene and purification of U from the fission products (FPs) impurities we used a surrogate of FA consisting of UF4 or UO2F2, and FPs fluorides with stable isotopes of Ce, Zr, Sr, Ba, Cs, Fe, Cr, Ni, La, Nd, Pr, Sm. Purification factors of U from impurities at the solvent extraction refining stage reached the values of 104-105, and up to 106 upon the completion of the processing cycle. Obtained results showed a high efficiency of the CARBOFLUOREX process for recovery and separating of U from FPs contained in FA, which allows completing of the FVM cycle with recovery of U and Pu from hardly processed FA.

Composite PEO-Coatings as Defence Against Corrosion and Wear: A Review

  • Gnedenkov, S.V.;Sinebryukhov, S.L.;Sergienko, V.I.;Gnedenkov, A.S.
    • Corrosion Science and Technology
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    • 제18권5호
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    • pp.212-219
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    • 2019
  • This paper reviews recent approaches to develop composite polymer-containing coatings by plasma electrolytic oxidation (PEO) using various low-molecular fractions of superdispersed polytetrafluoroethylene (SPTFE). The features of the unique approaches to form the composite polymer-containing coating on the surface of MA8 magnesium alloy were summarized. Improvement in the corrosion and tribological behavior of the polymer-containing coating can be attributed to the morphology and insulating properties of the surface layers and solid lubrication effect of the SPTFE particles. Such multifunctional coatings have high corrosion resistance ($R_p=3.0{\times}10^7{\Omega}cm^2$) and low friction coefficient (0.13) under dry wear conditions. The effect of dispersity and ${\xi}$-potential of the nanoscale materials ($ZrO_2$ and $SiO_2$) used as electrolyte components for the plasma electrolytic oxidation on the composition and properties of the coatings was investigated. Improvement in the protective properties of the coatings with the incorporated nanoparticles was explained by the greater thickness of the protective layer, relatively low porosity, and the presence of narrow non-through pores. The impedance modulus measured at low frequency for the zirconia-containing layer (${\mid}Z{\mid}_{f=0.01Hz}=1.8{\times}10^6{\Omega}{\cdot}cm^2$) was more than one order of magnitude higher than that of the PEO-coating formed in the nanoparticles-free electrolyte (${\mid}Z{\mid}_{f=0.01Hz}=5.4{\times}10^4{\Omega}{\cdot}cm^2$).

충주지역 계명산층 내에 산출하는 알카리 화강암의 지구화학적 연구 (A Geochemical Study of the Alkali Granite in the Kyeomyeongsan Formation)

  • 김진섭;박맹언;김근수
    • 자원환경지질
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    • 제31권4호
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    • pp.349-360
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    • 1998
  • The alkali granite occurred as small stock and dyke is distributed in the Kyeomyeongsan Formation in the vicinity of the Chungju city. Geochemical characteristics in major and trace element of alkali granite in the Kyeomyeongsan Formation indicate that the alkali granites are peralkaline and have similar geochemical features to the A-type alkali granite. The rock enriched in HFSE such as Zr, Nb, Y, REE etc. According to the discrimination diagram the alkali granites mostly belong to the within-plate granite field, and to the $A_1$ group of A-type granite. This suggests that they might be emplaced in a extentional rift environment. The alkali granites are characterized by remarkably high total REE content, and enriched, relatively flat to somewhat HREE-depleted patterns with large negative Eu anomaly. The Sm-Nd age of the alkali granite is $338{\pm}30Ma$ with ${\varepsilon}_{Nd(t)}$ beings -7.3 to -8.5. On the basis of the geochemical studies the source magma was derived from a enriched mantle-like source and had a few or clearly interaction with sialic continental crust. In conclusion, the alkali granitic rock of the Kyeomyeongsan Formation might be formed from the high F peralkaline magma that was emplaced in continental rift environment, and generated at the early Carboniferous.

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ICP를 이용한 Ar/$Cl_2/BCl_3$ 플라즈마에서 PZT 식각 특성 (The etching characteristics of PZT thin films in Ar/$Cl_2/BCl_3$ plasma using ICP)

  • 안태현;김경태;이영희;서용진;김창일;장의구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.848-850
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    • 1999
  • In this study, PZT etching was performed using planar inductively coupled Ar(20)/$Cl_2/BCl_3$ plasma, The etch rate of PZT film was 2450 $\AA/min$ at Ar(20)/$BCl_3$(80) gas mixing ratio and substrate temperature of $80^{\circ}C$. X-ray photoelectron spectroscopy (XPS) analysis for film composition was utilized. The chemical bond of PbO is broken by ion bombardment, and the peak of metal Pb in a Pb 4f peak begins to appear upon etching, decreasing Pb content faster than Zr and Ti. As increase content of additive $BCl_3$, the relative content of oxygen decreases rapidly. We thought that abundant Band BCl radicals made volatile oxy-compound such as $B_{x}O_{y}$ and/or $BClO_x$ bond. To understand etching mechanism, Langmuir probe and optical emission spectroscopy (OES) analysis were utilized for plasma diagnostic.

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