• Title/Summary/Keyword: $Zn_2SnO_4$

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Effect of the oxygen flow ratio on the structural and electrical properties of indium zinc tin oxide (IZTO) films prepared by pulsed DC magnetron sputtering

  • Son, Dong-Jin;Nam, Eun-Kyoung;Jung, Dong-Geun;Ko, Yoon-Duk;Choi, Byung-Hyun;Kim, Young-Sung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.168-168
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    • 2010
  • Transparent conduction oxides (TCOs) films is extensively reported for optoelectronic devices application such as touch panels, solar cells, liquid crystal displays (LCDs), and organic light emitting diodes(OLEDs). Among the many TCO film, indium tin oxide(ITO) is in great demand due to the growth of flat panel display industry. However, indium is not only high cost but also its deposits dwindling. Therefore, many studies are being done on the transparent conductive oxides(TCOs). We fabricated a target of IZTO(In2O3:ZnO:SnO2=70:15:15 wt.%) reduced indium. Then, IZTO thin films were deposited on glass substrates by pulsed DC magnetron sputtering with various oxygen flow ratio. The substrate temperature was fixed at the room temperature. We investigated the electrical, optical, structural properties of IZTO thin films. The electrical properties of IZTO thin films were dependent on the oxygen partial pressure. As a result, the most excellent properties of IZTO thin films were obtained at the 3% of oxygen flow rate with the low resistivity of $7.236{\times}10^{-4}{\Omega}cm$. And also the optical properties of IZTO thin films were shown the good transmittance over 80%. These IZTO thin films were used to fabricated organic light emitting diodes(OLEDs) as anode and the device performances studied. The OLED with an IZTO anode deposited at optimized deposition condition showed good brightness properties. Therefore, IZTO has utility value of TCO electrode although it reduced indium and we expect it is possible for the IZTO to apply to flexible display due to the low processing temperature.

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Performance of OLED devices with the surface characteristics of TCO thin films (투명전도성 박막의 표면 특성에 따른 OLED 소자의 특성)

  • Lee, Bong-Kun;Lee, Yu-Lim;Lee, Kyu-Mann
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.313-313
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    • 2009
  • OLED 소자는 직접발광, 광시야각, 그리고 빠른 응답속도 때문에 동영상에 적합하여 최근 각광받고 있는 디스플레이장치 중의 하나이다. OLED 소자의 양극재료로는 높은 광투과율과 $\sim10^{-4}{\Omega}\;cm$ 수준의 낮은 전기 비저항을 갖는 ITO (Sn-doped $In_2O_3$)가 널리 사용되고 있다. 하지만 원료 물질인 인듐의 수급량 부족으로 인한 문제점과 독성, 저온증착의 어려움, 스퍼터링시 음이온 충격에 의한 막 손상으로 저항의 증가의 문제점이 있고, 또한 액정디스플레이의 투명전극으로 사용될 경우 $400\;^{\circ}C$정도의 높은 온도와 수소 플라즈마 분위기에서 장시간 노출 시 열화로 인한 광학적 특성변화가 문제가 된다. 반면에 Al이 도핑 된 ZnO (AZO)박막은 넓은 밴드갭 (3.37eV)와 400nm에서 700nm 사이의 가시광 영역에서 80% 이상의 우수한 투과성을 지니고 있다. 특히 Al이 도핑된 ZnO는 박막의 전기적 특성이 크게 향상되어 디스플레이나 태양전지로의 응용이 가능하다. 또한 비교적 낮은 비용과 플라즈마에서의 안정성, 무독성, 그리고 전기전도성과 같은 많은 이점이 있다. 그 결과 AZO 박막은 ITO기판을 대안하는 지원물질로 활발히 연구가 진행되고 있다. 본 연구에서는 TCO 박막의 면 저항과 표면 거칠기에 따른 OLED 소자의 특성을 분석하였다. ITO와 AZO 박막은 챔버 내 다양한 가스 분위기(Ar, Ar+$O_2$ and Ar+$H_2$)에서 R.F Magnetron Sputtering방법으로 증착하였다. TCO 박막의 구조적인 이해를 돕기 위해서 X-ray diffraction 과 FESEM으로 분석하였다. 광학적 투과도와 박막의 두께는 ultraviolet spectrophotometer (Varian, cary-500)와 surface profile measurement system으로 각각 측정하였다. 면저항 charge carrier 농도, 그리고 TCO 박막의 이동도와 같은 전기적특성은 four-point probe와 hall effect measurement(HMS-3000)로 각각 측정하였다. TCO 박막의 표면 거칠기 조절을 위해 photo lithography 공정을 사용하여 TCO 박막을 화학에칭 하였다. 미세사이즈 패턴 마스크가 사용되었으며 에칭의 깊이는 에칭시간에 따라 조절하였다. TCO 박막의 표면 형태는 FESEM과 AFM으로 관찰하였다. 투명전극으로 사용되는 ITO 및 AZO 기판 상용화를 위해 ITO 및 AZO 기판 위에 ${\alpha}$-NPB, Alq3, LiF, Al 의 순서로 증착 및 패터닝함으로써 OLED 소자를 제작하였다. 전류밀도와 전압 그리고 발광휘도와 전압과 같은 전기적 특성은 spectrometer(minolta CS-1000A)를 이용하여 측정하였다.

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Electrical and Optical Properties of Amorphous ITZO Deposited at Room Temperature by RF Magnetron Sputtering (RF 마그네트론 스퍼터링법으로 상온 증착된 비정질 ITZO 산화물의 전기적 및 광학적 특성)

  • Lee, Ki Chang;Jo, Kwang-Min;Lee, Joon-Hyung;Kim, Jeong-Joo;Heo, Young-Woo
    • Journal of the Korean institute of surface engineering
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    • v.47 no.5
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    • pp.239-243
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    • 2014
  • The electrical and optical properties of amorphous In-Tin-Zinc-Oxide(ITZO) deposited at room temperature using rf-magnetron sputtering were investigated. The amorphous ITZO thin films were obtained at the composition of In:Sn:Zn = 6:2:2, 4:3:3, and 2:4:4, but the ITZO (8:1:1) showed a crystalline phase of bixbyite structure of In2O3. The resistivity of ITZO could be controlled by oxygen pressure in the sputtering ambient. The resistivity of post-annealed ITZO thin films exhibited the dependence on the amount of Indium. Optical energy band gap and transmittance increased as the amount of indium in ITZO increased. For the device application with ITZO, the bottom-gated thin-film transistor using ITZO as a active channel layer was fabricated. It showed a threshold voltage of 1.42V and an on/off ratio of $5.63{\times}10^7$ operated with saturation field-effect mobility of $14.2cm^2/V{\cdot}s$.

Janggunite, a New Mineral from the Janggun Mine, Bonghwa, Korea (경북(慶北) 봉화군(奉化郡) 장군광산산(將軍鑛山産) 신종광물(新種鑛物) 장군석(將軍石)에 대(對)한 광물학적(鑛物學的) 연구(硏究))

  • Kim, Soo Jin
    • Economic and Environmental Geology
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    • v.8 no.3
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    • pp.117-124
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    • 1975
  • Wet chemical analysis (for $MnO_2$, MnO, and $H_2O$(+)) and electron microprobe analysis (for $Fe_2O_3$ and PbO) give $MnO_2$ 74.91, MnO 11.33, $Fe_2O_3$ (total Fe) 4.19, PbO 0.03, $H_2O$ (+) 9.46, sum 99.92%. 'Available oxygen determined by oxalate titration method is allotted to $MnO_2$ from total Mn, and the remaining Mn is calculated as MnO. Traces of Ba, Ca, Mg, K, Cu, Zn, and Al were found. Li and Na were not found. The existence of (OH) is verified from the infrared absorption spectra. The analysis corresponds to the formula $Mn^{4+}{_{4.85}}(Mn^{2+}{_{0.90}}Fe^{3+}{_{0.30}})_{1.20}O_{8.09}(OH)_{5.91}$, on the basis of O=14, 'or ideally $Mn^{4+}{_{5-x}}(Mn^{2+},Fe^{3+})_{1+x}O_{8}(OH)_{6}$ ($x{\approx}0.2$). X-ray single crystal study could not be made because of the distortion of single crystals. But the x-ray powder pattern is satisfactorily indexed by an orthorhombic cell with a 9.324, b 14.05, c $7.956{\AA}$., Z=4. The indexed powder diffraction lines are 9.34(s) (100), 7.09(s) (020), 4.62(m) (200, 121), 4.17(m) (130), 3.547(s) (112), 3.212(vw) (041), 3.101(s) (300), 2.597(w) (013), 2.469(m) (331), 2.214(vw)(420), 2.098(vw) (260), 2.014 (vw) (402), 1.863(w) (500), 1.664(w) (314), 1.554(vw) (600), 1.525(m) (601), 1.405(m) (0.10.0). DTA curve shows the endothermic peaks at $250-370^{\circ}C$ and $955^{\circ}C$. The former is due to the dehydration: and oxidation forming$(Mn,\;Fe)_2O_3$(cubic, a $9.417{\AA}$), and the latter is interpreted as the formation of a hausmannite-type oxide (tetragonal, a 5.76, c $9.51{\AA}$) from $(Mn,\;Fe)_2O_3$. Infrared absorption spectral curve shows Mn-O stretching vibrations at $515cm^{-1}$ and $545cm^{-1}$, O-H bending vibration at $1025cm^{-1}$ and O-H stretching vibration at $3225cm^{-1}$. Opaque. Reflectance 13-15%. Bireflectance distinct in air and strong in oil. Reflection pleochroism changes from whitish to light grey. Between crossed nicols, color changes from yellowish brown with bluish tint to grey in air and yellowish brown to grey through bluish brown in oil. No internal reflections. Etching reactions: HCl(conc.) and $H_2SO_4+H_2O_2$-grey tarnish; $SnCl_2$(sat.)-dark color; $HNO_3$(conc.)-grey color; $H_2O_2$-tarnish with effervescence. It is black in color. Luster dull. Cleavage one direction perfect. Streak brownish black to dark brown. H. (Mohs) 2-3, very fragile. Specific gravity 3.59(obs.), 3.57(calc.). It occurs as radiating groups of flakes, flower-like aggregates, colloform bands, dendritic or arborescent masses composed of fine grains in the cementation zone of the supergene manganese oxide deposits of the Janggun mine, Bonghwa-gun, southeastern Korea. Associated minerals are calcite, nsutite, todorokite, and some undetermined manganese dioxide minerals. The name is for the mine, the first locality. The mineral and name were approved before publication by the Commission on New Minerals and Mineral Names, I.M.A.

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The Effect of Hydrogen Reduction Treatment on Properties of Ba-ferrite (환원처리가 Ba-ferrite의 물성에 미치는 영향)

  • 홍양기;정홍식;김현준
    • Journal of the Korean Magnetics Society
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    • v.7 no.1
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    • pp.25-30
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    • 1997
  • Physical and magnetic behaviors of reduced Co-Zn-Ti-Sn substituted Ba-ferrite particles with hydrogen are different from those of reduced-pure Ba-ferrite particles. The coercivity of substituted Ba-feffite particles shows a peaking effect with the reduction temperature ranging from 250 to 520 $^{\circ}C$, while the coercivity of pure Ba-ferrite decreases monotonically. The reduction process of substituted Ba-ferrite has been found to be devided into three steps. At the first and second steps, the magneto-plumbite structure maintained. When the reduced-substituted Ba-ferrite particles are reoxidized, the coercivity is reversible at the first step but irreversible at the second step. During the third step of reduction process above 410 $^{\circ}C$. The magneto plumbite structure was collapsed with formation of $\alpha$-Fe and $BaFeO_{3-x}$ phases and consequently the coercivity distribution is broaden and the coercivity irreversible. The coercivity and saturation magnetization decreases and increases up to 130 emu/g respectively. In this study, it is found that the substituted elements prevent the magneto-plumbite structure from collapse during the reduction process and furthermore migrate from the magnetic sites of $2a+4f_{IV}$, 2b, and 12k to $4f_{VI}$ and 12k'. An increase in the coercivity before the collapse of magneto-plumbite structure is attributed to the migration of cations in hexagonal Ba-ferrite structure.

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Study on the Contents of Trace Elements in Foods (on the Trace Element Contents of Shellfish in Korean coastal Water) (식품중의 미량금속에 관한 연구조사 (연안 견류중의 중금속 함유량에 관하여))

  • 백덕우;권우창;원경풍;김준한;김오한;소유섭;김영주;박건상;성덕화
    • Journal of Food Hygiene and Safety
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    • v.3 no.1
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    • pp.7-18
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    • 1988
  • In 1987, the level of heavy metals were determined ina total of 200 samples of 9 species of shellfish of Korea. The samples were collected at the fish. markets by 10 Public Institute of Health. The samples were whelk (Buccinum striatiBBimum), oyster (Crassostrea gigas), ark shell(Tegillarca granesa), shartnecked clam (Venerupis semidecussta), hard clam (Meretrix lusoria), top shell (Turbo cornutus), abalone (Haliotis gigantea), ark shell (Scapharea broughtonii), sea-mussel (Mytilus conuscus gould), respectively. The levels of total mercury, lead, cadmium, arsenic, copper, zinc and manganese were determined. The total mercury levels were determined by mercury analyzer using the combustion gold amalgamation method. The arsenic level were determined by spectrophotometry using colorimetric sil ver diethyldithiocarbamate method after dry ash dige8tion of the samples with magnesium oxide and magnesium nitrate. The levels of other metals were determined by inductively coupled pluma spectrophotometry after wet digestion of the samples with nitric acid and su1furic acid. The results were summerized as follows; 1. The overallranges and mean(ppm) were; Hg, ND-O.221 (0.036); Pb, 0.05-1.51 (0.37); Cd, 0.02-1.86 (0.61); As, 0.5-3.97 (1.22); Cu, 0.14-54.16 (4.93); Zn, 7.40-207.17 (30.09); Mn, 0.13-s.72 (3.40). 2. The levels of all 6 metals were found to be below the maximum permissible Iimits set by the Japan lor mercury, the Netherland for lead the Hong Kong for cadmium. The Finland for Arsenic no statutory Iimits for Zn and Mn in shellfish in any countries. 3. The results show that all the 9 species of shellfish studied, none have accumulated levels dangerous enough to pose a health problem.roblem.

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Geochemical Characteristics and Trace Metal Speciation of Soils in Major Source Area of Asian Dust (주요 황사발원지 토양의 지구화학적 특성 및 미량원소 존재형태 연구)

  • Lee, Pyeong-Koo;Youm, Seung-Jun;An, Gi-O
    • Economic and Environmental Geology
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    • v.45 no.1
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    • pp.9-21
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    • 2012
  • In this study, we investigated the chemical characteristics of soils collected from the several deserts and loess in China known as the typical source areas of Asian dust (the Taklamakan desert, the Alashan desert, the Ordos desert and the Loess Plateau). Based on our analysis, we examined the possibility of adverse effects on environments and human health. In each desert and loess, major elemental compositions of soils did not show large variations, implying that the long-periodic mixing of soils in each area made their chemical compositions homogeneous. Minor elements of soils in each desert and loess showed more complicated patterns with strong correlations each other (e.g., Cr, Cu, As, Co, Ni, V, Y, Sc, Sn, Pb, Zn, Cd, Cs, Li, Th, U). These results thus enable us to discriminate the soil of the Loess Plateau from those of the other deserts in China. The results of sequential extraction experiments for soils showed that the chemical speciation of Fe was dominant in residual fraction (>85%) in all deserts and loess, but the fractions of Mn and Ca chemical speciations were very different in each area. In the case of Mn, the fraction of amorphous Fe-Mn hydroxides (55.4%) in the Central Loess Plateau and the carbonate fraction (33.8%) in Taklamakan desert were higher as much as 2 to 5 times than other deserts. The chemical speciations of Ca are dominant in carbonate fraction in Taklamakan (75.9%) and Alashan (50.5%) deserts, but carbonate fractions of Ca in the Loess Plateau and Ordos deserts were low (6.6% and 2.1%, respectively). According to the mobility of trace elements inferred from the results of sequential extraction procedure, we could classify them into five groups, and the mobility of Cd, Pb and Cu are more than 87%, 33% and 30%, respectively. Therefore, Cd, Pb and Cu in soils of deserts and loess could be easily dissolved when interacted with surface water. As such, they could give adverse effects on surficial environments and human health.