• Title/Summary/Keyword: $TiCl_3$

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Etch Characteristics of TiN Thin Films in the Inductively Coupled Plasma System (유도 결합 플라즈마를 이용한 TiN 박막의 식각 특성)

  • Um, Doo-Seung;Kang, Chan-Min;Yang, Xue;Kim, Dong-Pyo;Kim, Chang-Il
    • Journal of Surface Science and Engineering
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    • v.41 no.3
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    • pp.83-87
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    • 2008
  • This study described the effects of RF power, DC bias voltage, chamber pressure and gas mixing ratio on the etch rates of TiN thin film and selectivity of TiN thin film to $SiO_2$ with $BCl_3$/Ar gas mixture. When the gas mixing ratio was $BCl_3$(20%)/Ar(80%) with other conditions were fixed, the maximum etch rate of TiN thin film was 170.6 nm/min. When the DC bias voltage increased from -50 V to -200 V, the etch rate of TiN thin film increased from 15 nm/min to 452 nm/min. As the RF power increased and chamber pressure decreased, the etch rate of TiN thin film showed an increasing tendency. When the gas mixing ratio was $BCl_3$(20%)/Ar(80%) under others conditions were fixed, the intensity of optical emission spectra from radical or ion such as Ar(750.4 nm), $Cl^+$(481.9 nm) and $Cl^{2+}$(460.8 nm) was highest. The TiN thin film was effectively removed by the chemically assisted physical etching in $BCl_3$/Ar ICP plasma.

pH Dependence on the Degradation of Rhodamine B by Fe-ACF/$TiO_2$ Composites and Effect of Different Fe Precursors (Fe-ACF/$TiO_2$ 복합체에 의한 로다민 B 용액의 분해에 있어서 pH 의존성 및 여러 가지 Fe 전구체의 효과)

  • Zhang, Kan;Oh, Won-Chun
    • Elastomers and Composites
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    • v.44 no.4
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    • pp.408-415
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    • 2009
  • Iron-loaded activated carbon fibers (Fe-ACF) supported titanium dioxide ($TiO_2$) photocatalyst (Fe-ACF/$TiO_2$) was synthesized using a sol-gel method. Three different types of Fe-ACF/$TiO_2$ were obtained by treatment with different precursor of Fe, and characterized using BET, SEM, XRD and EDX analysis. The photocatalytic activity of Fe-ACF/$TiO_2$ was investigated by the degradation of Rhodamine B (Rh.B) solution under UV irradiation. From the experimental results, it was revealed that Fe-ACF/$TiO_2$ composites show considerable photocatalytic ability for the removal of Rh.B by comparing non-treated ACF/$TiO_2$ composites. And photo-Fenton reaction with Fe element was incoordinately influenced due to different precursor of Fe. It clearly indicates that Fe-ACF/$TiO_2$ composites prepared using $FeCl_3$ provided the highest photo-Fenton activity, then, which was affected by pH changes on the degradation of Rh.B.

A study on Electronic Properties of Passive Film Formed on Ti

  • Kim, DongYung;Kwon, HyukSang
    • Corrosion Science and Technology
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    • v.2 no.5
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    • pp.212-218
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    • 2003
  • Electronic properties of passive films formed on Ti at film formation potentials $(E_f)V_{SCE}$ in pH 8.5 buffer solution and in an artificial seawater were examined through the photocurrent measurement and Mott-Schottky analysis. The passive films formed on Ti in pH 8.5 buffer solution exhibited a n-type semiconductor with a band gap energys $(E_g);E_g^{n=2}=3.4$ eV for nondirect electron transition, and $E_g^{n=0.5}=3.7$ eV for direct electron transition. These band gap values were almost same as those for the passive films formed in artificial seawater, indicating that chloride ion ($Cl^-$ in solution did not affect the electronic structure of the passive film on Ti. $E_g$ for passive films formed on Ti were found to be greater than those ($E_g^{n=0.5}=3.1$ eV, $E_g^{n=2}=3.4$) for a thermal oxide film formed on Ti in air at $400^{\circ}C$. The disorder energy of passive film, determined from the absorption tail of photocurrent spectrum, was much greater than that for the thermal oxide film farmed on Ti in air at $400^{\circ}C$. The greater $E_g$ and the higher disorder energy for the passive film compared with those for the thermal oxide fIlm suggest that the passive film on Ti exhibited more disorded structure than the thermal oxide film. The donor density (about $2.4{\times}10^{20}cm^{-3}$) for the passive film formed in artificial seawater was greater than that (about $20{\times}10^{20}cm^{-3}$) formed in pH 8.5 buffer solution, indicating that $Cl^-$ increased the donor density for the passive film on Ti.

Rediscovery of a Broad Array of Lewis Acids for Living Cationic Polymerization in the Presence of an Added Base

  • Kanaoka, Shokyoku;Kanazawa, Arihiro;Aoshima, Sadahito
    • Proceedings of the Polymer Society of Korea Conference
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    • 2006.10a
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    • pp.325-325
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    • 2006
  • Cationic polymerization of isobutyl vinyl ether using various metal halides was examined in toluene in the presence of an added base at $0^{\circ}C$. In conjunction with an appropriate weak base such as ethyl acetate or 1,4-dioxane, all metal halides but $FeBr_{3}\;and\;GaCl_{3}$ led to living cationic polymerization. The polymerization rates varied as follows: $FeBr_{3},\;GaCl_{3}\;>\;FeCl_{3}\;>\;SnCl_{4}\;>\;InCl_{3}\;>\;ZnCl_{2}\;>>\;AlCl_{3},\;HfCl_{4},\;ZrCl_{4}\;>\;EtAlCl_{2},\;BiCl_{3},\;TiCl4\;>>\;SiCl_{4}\;>\;GeCl_{4}$. This order partially corresponds to that of the equilibrium constant in the formation of a carbocation from a chloroalkane in the presence of a carbonyl compound. With extremely active Lewis acids, such as $FeBr_{3}\;and\;GaCl_{3}$, the use of a stronger base, THF, was required to achieve living polymerization.

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Corrosion Characteristics of $Al_3Ti-Cr$ Intermetallics (금속간 화합물 $Al_3Ti-Cr$의 부식특성)

  • Yu, Yong-Jae;Kim, Seong-Hun;Choe, Yun-Je;Kim, Jeong-Gu;Lee, Dong-Bok
    • Korean Journal of Materials Research
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    • v.10 no.6
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    • pp.398-402
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    • 2000
  • Three kinds of $Al_3Ti-Cr$ alloys, namely, $Al_{67}Ti_{25}Cr_8,\;Al_{66}Ti_{24}Cr_{10}\;and\;Al_{59}Ti_{26}Cr_{15}$, were prepared by induction melting followed by the thermomechanical treatment. The corrosion behavior in 3.5% NaCl solution and the high-temperature oxidation behavior at 1000, 1100 and $1200^{\circ}C$ for the prepared alloys were investigated. Electrochemical results indicated increased resistance to localized corrosion with increasing Cr content. Cr additions were found to prevent passive film from undergoing brittle fracture. XPS results revealed the passive films of $Al_3Ti-Cr$ alloys were composed mainly of $Al_2O_3$ that coexisted with $TiO_2$ and $Cr_2O_3$. The overall oxidation resistance of the prepared alloys were excellent. Specifically, the oxidation resistance increased in the order of $Al_{59}Ti_{26}Cr_{15},\;Al_{66}Ti_{24}Cr_{10}\;and\;Al_{67}Ti_{25}Cr_8$. As the Al content in the base alloys increased, the $Al_2O_3$ formation was facilitated leading to the increased oxidation resistance.

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Fabrication of $BaTiO_3-PTCR$ Ceramic Resister Prepared by Direct Wet Process (습식 직접합성법을 이용한 PTCR 소자개발 연구)

  • 이경희;이병하;이희승
    • Journal of the Korean Ceramic Society
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    • v.22 no.4
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    • pp.61-65
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    • 1985
  • $BaTiO_3$ powders doped with $BaTiO_3$ and $Nb_2O_5$ at 9$0^{\circ}C$ for 1hr. were synthesized by Direct Wet Process. These powders were very homogeneous and fine particle size. To obtain the highe PTCR effect AST($1/3Al_2O_3$.$3/4SiO_2$.$1/4TiO_2$) and $MnO_2$ were added in the semiconduc-ting $BaTiO_3$. In this case $Bi_2O_3$ and $MnO_2$ were used in the form of $Bi(NO)_3$ and $MnCl_2$.$4H_2O$ solution for Direct Wet Process. $BaTiO_3$ doped Nb2O5 and $MnO_2$ demostrated greater PTCR effect than $BaTiO_3$ doped $Nn_2O_5$ only.

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Preparationof High Purity, Submicron BaTiO3 Powder Prepared by Hydrothermal Reaction (수열반응에 의한 고순도 극미립자 BaTiO3 분말합성)

  • 김경용;김윤호;손용배
    • Journal of the Korean Ceramic Society
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    • v.26 no.4
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    • pp.493-498
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    • 1989
  • High purity, submicron BaTiO3 powder was prepared by a hydrothermal technique using Ba(OH)2.8H2O, TiCl4 and NH4OH as starting raw materials. The submicron BaTiO3 powder was synthesized at 130~23$0^{\circ}C$ for 2.5h to yield highly crystalline particles with a narrow particle distribution. The mole ratio of Ba(OH)2.8H2O/TiO(OH)2 was 1.5. It is possible to obtain BaTiO3 with Ba : Ti=1.00$\pm$0/01. The samples densified well at 13$25^{\circ}C$, showing a uniform and fine grain structure. The grain size ranged between 0.3 and 0.5${\mu}{\textrm}{m}$. The products obtained by hydrothermal treatment at various temperatures from 130 to 23$0^{\circ}C$ were characterized by XRD, DTA, BET and SEM etc.

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Preparation of $\textrm{BaTiO}_3$ Thin Films by Electrochemical Method (전기화학법을 이용한 $\textrm{BaTiO}_3$박막의 제조)

  • Gong, Pil-Gu;Yoo, Young-Sung;Lee, Jong-Kook;Kim, Hwan;Park, Soon-Ja
    • Korean Journal of Materials Research
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    • v.7 no.2
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    • pp.114-120
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    • 1997
  • Perovskite $BaTiO_3$ thin films on stainless steel substrate were prepared by using electrochemical reduction method in solution of $TiCl_4\;and\;Ba(N0_3)_2$. According to current density and electrolysis time. the morphology and thickness of film were varied. Ra/'Ti atomic ratio in $BaTiO_3$ film was controlled by Ha/Ti atomic ratio in solution. Although the excess $TiO_2{\cdot}nH_2O$ film was coated in initial stage of electrolysis. UiilTi atomic ratio in film was nearly constant in later stage. $BaTiO_3$ film precursor was obtained under the condition of $1OmA/cm^2$ current density and Smin electrolysis time. $BaTiO_2$ thin films with perovskite phase were formed 11,. the heat treatment above $500^{\circ}$.

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Damages of etched BST fins by high density plasmas (고밀도 플라즈마에 의한 BST 박막의 damage에 관한 연구)

  • 최성기;김창일;장의구;서용진;이우선
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2000.11a
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    • pp.45-48
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    • 2000
  • High dielectric (Ba,Sr)TiO$_3$thin films were etched in an inductively coupled plasma (ICP) as a function of C1$_2$/Ar gas mixing ratio. Under Cl$_2$(20)/Ar(80), the maximum etch rate of the BST films was 400$\AA$/min and selectivities of BST to Pt and PR were obtained 0.4 and 0.2, respectively. We investigated the etched surface of BST by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and x-ray diffraction (XRD). From the result of XPS analysis, we found that residues of Ba-Cl and Ti-Cl bonds remained on the surface of the etched BST for high boiling point. The surface roughness decreased as Cl$_2$increases in C1$_2$/Ar plasma because of non-volatile etching products. This changed the nature of the crystallinity of BST. From the result of XRD analysis, the crystallinity of etched BST film maintained as similar to as-deposited BST under Ar only and Cl$_2$(20)/Ar(80). However, (100) orientation intensity of etched BST film abruptly decreased at Cl$_2$only plasma. It was caused that Cl compounds were redeposited on the etched BST surface and damaged to crystallinity of BST film during the etch process.

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Preparationand Characterization of Rutile-anatase Hybrid TiO2 Thin Film by Hydrothermal Synthesis

  • Kwon, Soon Jin;Song, Hoon Sub;Im, Hyo Been;Nam, Jung Eun;Kang, Jin Kyu;Hwang, Taek Sung;Yi, Kwang Bok
    • Clean Technology
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    • v.20 no.3
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    • pp.306-313
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    • 2014
  • Nanoporous $TiO_2$ films are commonly used as working electrodes in dye-sensitized solar cells (DSSCs). So far, there have been attempts to synthesize films with various $TiO_2$ nanostructures to increase the power-conversion efficiency. In this work, vertically aligned rutile $TiO_2$ nanorods were grown on fluorinated tin oxide (FTO) glass by hydrothermal synthesis, followed by deposition of an anatase $TiO_2$ film. This new method of anatase $TiO_2$ growth avoided the use of a seed layer that is usually required in hydrothermal synthesis of $TiO_2$ electrodes. The dense anatase $TiO_2$ layer was designed to behave as the electron-generating layer, while the less dense rutile nanorods acted as electron-transfer pathwaysto the FTO glass. In order to facilitate the electron transfer, the rutile phase nanorods were treated with a $TiCl_4$ solution so that the nanorods were coated with the anatase $TiO_2$ film after heat treatment. Compared to the electrode consisting of only rutile $TiO_2$, the power-conversion efficiency of the rutile-anatase hybrid $TiO_2$ electrode was found to be much higher. The total thickness of the rutile-anatase hybrid $TiO_2$ structures were around $4.5-5.0{\mu}m$, and the highest power efficiency of the cell assembled with the structured $TiO_2$ electrode was around 3.94%.