• Proceedings of the Materials Research Society of Korea Conference
• /
• 2003.03a
• /
• pp.141-141
• /
• 2003

전기-광 효과를 이용한 광변조기, 스위치 등의 소자 구현을 위해 고품질의 Ti:LiNbO$_3$ 광도파로 제작은 필수적이다. LiNbO$_3$ 광도파로는 양자교환(APE) 및 Ti 확산 법으로 제조할 수 있으며 전자의 경우 ne 는 증가, no는 감소되는 경향이 있어 편광도 파로의 제작에 용의하며 후자의 경우 ne 와 no 모두 증가하는 도파로 특성을 갖는다. 이러한, 도파로 소자의 특성 향상을 위해서는 Li out-diffusion 이 억제된 손실이 적은 도파로 제작이 필수적이다. 본 연구에서는 Ti 내부 확산법을 이용한 LiNbO$_3$ 광도파로를 확산분위기를 조건으로 하여 제작하였으며, 온도에 따른 각 이온의 반응 메커니즘에 관하여 관찰하였다.

• Korean Journal of Optics and Photonics
• /
• v.17 no.5
• /
• pp.430-436
• /
• 2006

Polarization-independent $Ti:LiNbO_3\;2{\times}2$ optical add/drop multiplexer for the 1550nm wavelength region is fabricated. The device consists of two input waveguides, two polarization beam splitters. two polarization conversion/electrooptic tuning waveguide sections, and two output waveguides. The single mode channel waveguides for both TE and TM polarizations are fabricated on a x-cut $Ti:LiNbO_3$substrate by Ti diffusion. Spectral section is based on phase-matched polarization conversion due to shear strain induced by a thick $SiO_2$ grating overlay film. An applied voltage tunes the device by changing the waveguide birefringence, hence the optical wavelength at which most efficient polarization conversion occurs. Tuning rate of 0.094nm/V with a maximum range of 17nm has been obtained. The nearest side-lobe is about 8.2dB. The FWHM is 3.72nm.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.16 no.2
• /
• pp.49-52
• /
• 2006

Periodic electric field assisted poling low loss (${\sim}0.1dB/cm$) single-mode Ti-diffused waveguides in $LiNbO_3$ has been achieved using a periodically patterned electrode on the +Z surface of Ti : $LiNbO_3$ crystal and homogeneous LiCl solution. Using selective chemical etching, we confirmed the periodic (${\sim}16{\mu}m$) domain inverted structure and measured SH (second harmonic) properties of fabricated periodically poled Ti : $LiNbO_3$ waveguides.

• Proceedings of the Optical Society of Korea Conference
• /
• 2003.02a
• /
• pp.168-169
• /
• 2003

Ti：LiNbO$_3$ 광도파로는 확산형 도파로이기 때문에 그 도파특성이 확산공정 조건에 크게 의존할 뿐만 아니라 굴절률 분포를 모델링하기가 어렵다. 이러한 이유로 설계된 Ti：LiNbO$_3$ 광도파로의 특성은 실제 제작된 소자와 큰 차이를 보이는 경우가 많은데, 이를 개선하기 위해서는 각 공정파라미터에 따른 도파 특성의 변화를 파악하는 작업이 우선적으로 수행되어야 한다. 본 논문에서는 서로 다른 너비를 갖는 Ti strip을 동일한 확산조건에서 확산시킨 후 제작된 광도파로의 도파손실 및 모드패턴을 측정하였다. (중략)

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.19 no.9
• /
• pp.1782-1792
• /
• 1994

Ti : $LiNbO_3$ traveling-wave phase optical modulators at wavelength 1.3㎛ have been designed and fabricated, focusing on the optical waveguide and asymmetric coplanar electrode structure. To improve the phase-mismatch of traveling-wave ACPS electrode, the characteristic impedance, effective microwave index, and electrode loss have been presented as a function of geometric parameters including electrode and buffer layer thickness. Low-loss channel optical waveguides on $LiNbO_3$ were fabricated by the Ti diffusion method with $O_2$ water-vapor environment. $2.5{\mu}m$ thick electrode was successfully fabricated by double-spin image reversal process. Modulation bandwidth was limited by a resonance at 2.9 GHz and modulation bandwidth up to 2.5GHz was approxirnately measured.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.17 no.4
• /
• pp.371-378
• /
• 1992

In this paper we report the fabrication of a planar optical wavehuide lens on a Y-cut LiNbO3 substrate by Ti_indiffusion and Ti-indiffused proton-exchange(TIPE). LiNbo3 planar waveguides are fabricated and refractive indices of the waveguides are fabricated and refractive indices of the waveguides are measured. Based on the measured indices, palanr waveguide lenses are designed and fabricated. The measured focal point and spot size of the fabricated lens are in good agreement with those of the designed lens.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.11 no.5
• /
• pp.400-406
• /
• 1998

We investigated the preparation and guided-mode properties of $Ti:LiNbO_3$ waveguides which were fabricated by Ti in-diffusion. The diffusion method to reduce the Li out-diffusion was proposed. The optical guided-mode and propagation loss based on butt-coupling pigtailed with PMF-input were measured. How to improve the polishing grade of waveguide endfaces is newly proposed in this paper. To show the mode propagations, the BPM simulations of channel waveguide are described.

• Journal of the Korean Institute of Telematics and Electronics D
• /
• v.35D no.7
• /
• pp.109-116
• /
• 1998

In this work was produced and analyzed a z-cut Ti:LiNbO$_{3}$ optical waveguide which applies for various optical devices.A waveguide channel with a thickness 8 .mu.m and a length 66,000.mu.m and a mach-zehnder interferometer type waveguide were fabricated at a diffusion temperature 1050.deg. C for 6-8hours in a wet $O_{2}$ environment. The resulting Ti:LiNbO$_{3}$ optical waveguide was measured to have a Ti-strip thickness of 950.angs. and low loss. Surfaces and cross-sections of a fabricated waveguide were analysed. The mode pattern anaysis revealed that the waveguide showed a single mode at a 1550nm wavelength. The effective dimension of the waveguide was calculated by measuring a gaussian profile; Wx=10.95.mu. and Wy=9.14.mu.m. a propagation loss, of 0.50dB/cm for a TM mode and 0.45dB/cm for a TE mode, was low enough to be accepatable for optical devices.

• Electrical & Electronic Materials
• /
• v.10 no.7
• /
• pp.682-691
• /
• 1997

We have investigated the guided optical properties of a Ti:LiNbO$_3$optical waveguide which was fabricated by Ti-diffusion in an air atmosphere and proposed an effective polishing method of waveguide endfaces. And the results of guided optical mode and fabrication condition were obtained as follows; \circled1 propagation loss : 0.53 dB/cm \circled2 mode size : horizontal/vertical=12.5${\mu}{\textrm}{m}$ \circled3 mode mismatch : 1.7 dB \circled4 diffusion temperature : 105$0^{\circ}C$, time : 8 hours \circled5 atmosphere : air

• Journal of the Institute of Electronics and Information Engineers
• /
• v.49 no.10
• /
• pp.128-134
• /
• 2012

The performance evaluation and fabrication of integrated-optic electric-field sensor utilizing $Ti:LiNbO_3$ asymmetric Mach-Zehnder intensity modulator with a push-pull lumped electrode and a plate-type probe antenna to measure an electric field strength is described. The modulator has a small device size of $46{\times}7{\times}1\;mm$ and operates at a wavelength $1.3{\mu}m$. The devices are simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides. The minimum detectable electric field is 1.02 V/m and 6.91 V/m, corresponding to a dynamic range of ~35 dB and ~10 dB at the frequencies of 500 KHz and 5 MHz, respectively.