• Title/Summary/Keyword: $Si_3\

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Thermal and Mechanical Properties of a N2 Doped Porous 3C-SiC Thin Film (질소가 도핑된 다공질 3C-SiC 박막의 열적, 기계적 특성)

  • Kim, Kang-San;Chung, Gwiy-Sang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.8
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    • pp.651-654
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    • 2010
  • This paper describes the thermal and mechanical properties of doped thin film 3C-SiC and porous 3C-SiC. In this work, the in-situ doped thin film 3C-SiC was deposited by using atmospheric pressure chemical vapor deposition (APCVD) method at $120^{\circ}C$ using single-precursor hexamethyildisilane: $Si_2(CH_3)_6$ (HMDS) as Si and C precursors. 0~40 sccm $N_2$ gas was used as doping source. After growing of doped thin film 3C-SiC, porous structure was achieved by anodization process with 380 nm UV-LED. Anodization time and current density were fixed at 60 sec and 7.1 mA/$cm^2$, respectively. The thermal and mechanical properties of the $N_2$ doped porous 3C-SiC was measured by temperature coefficient of resistance (TCR) and nano-indentation, respectively. In the case of 0 sccm, the variations of TCR of thin film and porous 3C-SiC are similar, but TCR conversely changed with increase of $N_2$ flow rate. Maximum young's modulus and hardness of porous 3C-SiC films were measured to be 276 GPa and 32 Gpa at 0 sccm $N_2$, respectively.

Properties of Liquid Phase Sintered SiC Materials Containing $Al_2O_3$ and $Y_2O_3$ Particles ($Al_2O_3$$Y_2O_3$ 입자를 함유한 액상소결 SiC 재료의 특성)

  • Lee, Sang-Pill;Lee, Moon-Hee;Lee, Jin-Kyung
    • Journal of Ocean Engineering and Technology
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    • v.22 no.4
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    • pp.59-64
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    • 2008
  • The mechanical properties of liquid phase sintered (LPS) SiC materials, with the addition of oxide powder, were investigated, in conjunction with a detailed analysis of their microstructures. LPS-SiC materials were fabricated at a temperature of 1820 $^{\circ}C$ under an argon atmosphere, using three different starting sizes of SiC particles. The sintering additive for the fabrication of the LPS-SiC materials was an $Al_2O_3-Y_2O_3$ mixture with a constant composition ratio ($Al_2O_3/Y_2O_3$: 1.5). The particle sizes of the commercial SiC powderswere 30 nm, 0.3 $\mu$m, and 3.0 $\mu$m. The flexural strength of the LPS-SiC materials was also examined at elevated temperatures. A decrease in the starting size of the SiC particles led to an increase in the flexural strength of the LPS-SiC materials, accompanying a highly dense morphology with the creation of a secondary phase. Such a secondary phase was identified as $Y_3Al_2(AlO_4)2$. The flexural strength of the LPS-SiC materials greatly decreased with an increase in the test temperature, due to the creation of a large amount of pores.

Mechanical Properties of Bulk Ti3SiC2 Synthesized by a Hot Press Sintering (가압 소결법으로 합성된 Ti3SiC2 소결체의 기계적 특성)

  • Cho, Gyoung-Sun;Hwang, Sung-Sic;Kwon, Huck-Bo;Park, Sang-Whan
    • Journal of the Korean Ceramic Society
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    • v.47 no.6
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    • pp.560-565
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    • 2010
  • Nano laminated bulk $Ti_3SiC_2$ was synthesized by hot press process using TiCx/Si powder mixture at the temperature range of $1300^{\circ}C\sim1500^{\circ}C$. pure $Ti_3SiC_2$ was synthesized by a hot pressing above $1400^{\circ}C$, while unreacted TiCx were remained in bulk $Ti_3SiC_2$ which synthesized below $1400^{\circ}C$. The sintering density of bulk $Ti_3SiC_2$ were varied with the amount of TiCx. It was found that the mechanical properties and micro structures of bulk $Ti_3SiC_2$ were closely related to the amounts of TiCx which was controlled by the hot pressing temperature. The TiCx increase the flexural strength of bulk $Ti_3SiC_2$, while the fracture toughness and thermal shock resistance of bulk $Ti_3SiC_2$ were decreased with the content of TiCx. The plastic deformations of bulk $Ti_3SiC_2$ were appeared above $1000^{\circ}C$.

The Electrochemical Behavior of Ni-base Metallic Glasses Containing Cr in H2SO4 Solutions

  • Arab, Sanaa.T.;Emran, Khadijah.M.;Al-Turaif, Hamad A.
    • Journal of the Korean Chemical Society
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    • v.56 no.4
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    • pp.448-458
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    • 2012
  • In order to develop alloy resistance in aggressive sulphat ion, the corrosion behavior of metallic glasses $Ni_{92{\cdot}3}Si_{4.5}B_{32}$, $Ni_{82,3}Cr_7Fe_3Si_{4.5}B_{3.2}$ and $Ni_{75.5}Cr_{13}Fe_{4.2}Si_{4.5}B_{2.8}$ (at %) at different concentrations of $H_2SO_4$ solutions was examined by electrochemical methods and Scanning Electron Microscope (SEM) and X-ray Photoelectron Microscopy (XPS) analyses. The corrosion kinetics and passivation behavior was studied. A direct proportion was observed between the corrosion rate and acid concentration in the case of $Ni_{92{\cdot}3}Si_{4.5}B_{32}$ and $Ni_{75.5}Cr_{13}Fe_{4.2}Si_{4.5}B_{2.8}$ alloys. Critical concentration was observed in the case of $Ni_{82,3}Cr_7Fe_3Si_{4.5}B_{3.2}$ alloy. The influence of the alloying element is reflected in the increasing resistance of the protective film. XPS analysis confirms that the protection film on the $Ni_{92{\cdot}3}Si_{4.5}B_{32}$ alloy was NiS which is less protective than that formed on Cr containing alloys. The corrosion rate of $Ni_{82,3}Cr_7Fe_3Si_{4.5}B_{3.2}$ and $Ni_{75.5}Cr_{13}Fe_{4.2}Si_{4.5}B_{2.8}$. alloys containing 7% and 13% Cr are $7.90-26.1{\times}10^{-3}$ mm/y which is lower about 43-54 times of the alloy $Ni_{92{\cdot}3}Si_{4.5}B_{32}$ (free of Cr). The high resistance of $Ni_{75.5}Cr_{13}Fe_{4.2}Si_{4.5}B_{2.8}$ alloy at the very aggressive media may due to thicker passive film of $Cr_2O_3$ which hydrated to hydrated chromium oxyhydroxide.

Effects of Hot Pressing Condition on the Properties of SiCf/SiC Composites (SiCf/SiC 복합체의 특성에 미치는 열간가압소결 조건의 영향)

  • Noviyanto, Alfian;Yoon, Dang-Hyok
    • Journal of the Korean Ceramic Society
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    • v.48 no.5
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    • pp.335-341
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    • 2011
  • Continuous SiC fiber-reinforced SiC-matrix composites ($SiC_f$/SiC) had been fabricated by electrophoretic infiltration combined with ultrasonication. Nano-sized ${\beta}$-SiC added with 12 wt% of $Al_2O_3-Y_2O_3$ additive and Tyranno$^{TM}$-SA3 fabric were used as a matrix phase and fiber reinforcement, respectively. After hot pressing at 5 different conditions, the density, microstructure and mechanical properties of $SiC_f$/SiC were characterized. Hot pressing at relatively severe conditions, such as $1750^{\circ}C$ for 1 and 2 h, resulted in a brittle fracture behavior due to the strong fiber-matrix interface in spite of their high flexural strength. On the other hand, toughened $SiC_f$/SiC composite could be achieved by hot pressing at milder condition because of the formation of weak interface in spite of the decreased flexural strength. These results proposed the importance of weak fiber-matrix interface in the fabrication of ductile $SiC_f$/SiC composite.

The Distribution Behavior of Alloying Elements in Matrices and Carbides of Chromium White Cast Iron (크롬백주철의 기지조직 및 탄화물에 있어서 합금원소의 거동)

  • Ryu, Seong-Gon
    • Korean Journal of Materials Research
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    • v.10 no.7
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    • pp.489-492
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    • 2000
  • Three different white cast irons alloyed with Cr and Si were prepared in order to study their distribution be-havior in matrices and carbides. The specimens were produced using a 15kg-capacity high frequency induction fur-nace. Melts were super-heated to $1600^{\circ}C$, and poured at $1550^{\circ}C$ into a pepset mold. Three combinations of the alloys were selected so as to observe the distribution behavior of Cr and Si : 0.5%C-25.0%Cr-1.0%Si(alloy No. 1), 0.5%C-5.0%Cr-1.0%Si(alloy No. 2) and 2.0%C-5.0%Cr-1.0%Si(alloy No. 3). Cellular $M_7C_3$ carbides-$\delta$ferrite eutectic were developed at $\delta$ferrite liquid interfaces in the alloy No. 1 while only traces of $M_7C_3$ carbides-$\delta$ferrite eutectic were precipitated in the alloy No. 2. With the addition of 2.0% C and 5.0% Cr, ledeburitic $M_3C$ carbides instead of cellular $M_7C_3$ carbides were precipitated in the alloy No. 3. Cr was distributed preferentially to the $M_7C_3$ carbides rather than to the matrix structure while more Si was partitioned in the matrix structure rather than the $M_7C_3$ carbides. $K^m$ for Cr was ranged from 0.56 to 0.68 while that for Si was from 1.12 to 1.28. $K^m$ for Cr had a lower value with increased carbon contents. The mass percent of Cr was higher in the $M_7C_3$ carbides with increased Cr contents.

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Growth of Single Crystalline 3C-SiC Thin Films for High Power Devices by CVD (CVD에 의한 고전력 디바이스용 단결정 3C-SiC 박막 성장)

  • Chung, Gwiy-Sang;Shim, Jae-Cheol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.2
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    • pp.98-102
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    • 2010
  • This paper describes that single crystalline 3C-SiC (cubic silicon carbide) thin films have been deposited on carbonized Si(100) substrates using hexamethyldisilane (HMDS, $Si_2(CH_3){_6}$) as a safe organosilane single precursor and a nonflammable mixture of Ar and $H_2$ gas as the carrier gas by APCVD at $1280^{\circ}C$. The deposition was performed under various conditions to determine the optimized growth condition. The crystallinity of the 3C-SiC thin film was analyzed by XRD (X-ray diffraction). The surface morphology was also observed by AFM (atomic force microscopy) and voids between SiC and Si interfaces were measured by SEM (scanning electron microscopy). Finally, residual strain and hall mobility was investigated by surface profiler and hall measurement, respectively. From these results, the single crystalline 3C-SiC film had a good crystal quality without defects due to viods, a low residual stress, a very low roughness.

Deposition of 3C-SiC Films by Plasma-enhanced Chemical Vapor Deposition (II): Mechanical Properties of SiC Films by Nanoindentation Technique (PECVD법에 의한 3C-SiC막 증착(II): Nanoindentation 방법을 이용한 SiC 막의 기계적성질)

  • ;;;;Koichi Niihara
    • Journal of the Korean Ceramic Society
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    • v.38 no.4
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    • pp.365-369
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    • 2001
  • 플라즈마 화학증착법(PECVD)에 의해 실리콘 (100) 기판 위에 3C-SiC막을 증착하였다. 증착반응시 유입가스비, R$_{x}$[=CH$_4$/(CH$_4$+H$_2$)]에 따른 증착막의 결정성에 대해 검토하였다. 증착된 3C-SiC막의 결정성은 R$_{x}$ 값이 감소할수록 더욱 향상되었으며, 형성된 결정상은 (111) 면으로 최대의 우선배향성을 가졌다. Nanoindentation 방법을 이용하여 3C-SiC막의 압입깊이에 따른 경도 및 탄성계수를 측정하였으며, 유입가스비(R$_{x}$)의 변화에 따라서 막의 경도 및 탄성계수가 뚜렷이 변화하였다.

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Microstructure and Mechanical Properties of the $Al_2O_3-SiC$ Ceramics Produced by Melt Oxidation (용융산화법으로 제조한 $Al_2O_3-SiC$ 세라믹스의 미세구조와 기계적 성질)

  • ;H. W. Hennicke
    • Journal of the Korean Ceramic Society
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    • v.31 no.10
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    • pp.1169-1175
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    • 1994
  • Five Al2O3/SiC/metal composites with four different particle sizes of green SiC abrasive grains are grown by the directed oxidation of an commercially available Al-alloy. Oxidation was conducted in air at 100$0^{\circ}C$, 96 hours long. Slip casted SiC-fillers were placed on the alloy or SiC powder deposited up to the required layer thickness. Their microstructures are described and measurements of density, elastic constants, frexural strength, fracture toughness and work of fracture are reported. The results are compared with those of commercial dense sintered Al2O3. The properties of produced materials have a strong relationship to not only the properties of Al2O3, SiC, Al and Si but also to the phase share and phase distribution. The composite materials are dense (0.5% porosity), tough (KIC = 3.4~6.4 MPa{{{{ SQRT { m} }}), strong ({{{{ sigma }}B = 170~345 MPa) and reasonably shrinkage free producible. The reinforcements is attained mainly through the plastic deformation of ductile metal phase.

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