• 접착 및 계면
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• 제7권4호
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• pp.32-38
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• 2006

A series of organic-inorganic hybrids, PCL/EP/$SiO_2$, involving epoxy resin and triethoxysilane-terminated polycaprolactone elastomer (PCL-TESi) were prepared via polymerization of diglycidyl ether of bisphenol A (DGEBA) with amine curing agent KB-2 and sol-gel process of PCL-TESi. The curing reactions were started from the initially homogeneous mixture of DGEBA, KB-2 and the PCL-TESi. The organicinorganic hybrids containing up to 4.95% (wt) of $SiO_2$ were obtained and characterized by FT-IR, transmission electron microscopy (TEM), differential scanning calorimetry (DSC) and thermogravimetry analysis (TGA). It was experimentally shown that the swelling property in toluene, morphologies and thermal properties of the resulting hybrids were quite dependent on the contents of $SiO_2$. The crosslink network density decreases with increasing of the PCL-TESi. And in TEM, the phase separated morphology of these hybrids was found, which resulted from the coagulation of Si-O-Si networks resulting from $-Si(OC_2H_5)_3$ of PCL-TESi self-curing by hydrolytic silanol condensation, with the advancement of the curing reaction in the modified epoxy resin systems. Meanwhile, the change of the $SiO_2$ content made the morphologies changed from aggregated particles of Si-O-Si in the hybrid to nanocluster of interconnected Si-O-Si particles, then to aggregated Si-O-Si dispersing in the continuous cured epoxy phase again, and last to co-continuous interpenetrating network. The glass transition behavior of the hybrid material was cooperative motion of large chain segments, which were hindered by the inorganic Si-O-Si network. And in TG analysis, the characteristic temperature at 5% of weight loss was evidently increased from $120.5^{\circ}C$ of pure cured epoxy to $277.6^{\circ}C$ of 3.84% (wt) of $SiO_2$ modified epoxy due to the existence of Si-O-Si when PCL-TESi was added in the hybrid.

• 한국재료학회지
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• 제24권12호
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• pp.715-719
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• 2014

(PDDA/$SiO_2$) thin films that consisted of positively charged poly (diallyldimethylammonium chloride) (PDDA) and negatively charged $SiO_2$ nanoparticles were fabricated on a glass substrate by an applying voltage layer-by-layer (LBL) self-assembly method. In this study, the microstructure and optical properties of the (PDDA/$SiO_2$) thin films coated on glass substrate were measured as a function of the applied voltage on the Pt electrodes. When 1.0 V was applied to a Pt electrode in a PDDA and $SiO_2$ solution, the thickness of the $(PDDA/SiO_2)_{10}$ thin film increased from 79 nm to 166 nm. The surface roughness also increased from 15.21 nm to 33.25 nm because the adsorption volume of the oppositely charged PDDA and $SiO_2$ solution increased. Especially, when the voltage was applied to the Pt electrode in the $SiO_2$ solution, the thickness increase of the (PDDA/$SiO_2$) thin film was larger than that obtained when using the PDDA solution. The refractive index of the fabricated (PDDA/$SiO_2$) thin film was ca. n = 1.31~1.32. The transmittance of the glass substrate coated by (PDDA/$SiO_2$)6 thin film with a thickness of 106 nm increased from ca. 91.37 to 95.74% in the visible range.

• 한국결정성장학회지
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• 제7권4호
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• pp.626-631
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• 1997

하동고령토($Al_2O_3-SiC-C$)를 출발원료로하여 AlSiCa내화재 원료를 합성하였다. 하동고령토와 탄소분말을 혼합하여 수소분위기하에서 반응시킨결과, $1300^{\circ}C$에서$Al_2O_3-SiC-C$ 복합체가 힙성되기 시작하여$1400^{\circ}C$에서 완전 합성되었고, $SiO_2$에 대한 최적carbon량은 mole비로 1:4이었다. 합성시 알루미나 용기에 탄소분말을 충전시키지 않을 때는 미합성부분이 없이 밝은 녹색을 띈 $\beta$-SiC(cubic form) 를 형성함을 확인하였다.

• 한국세라믹학회지
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• 제39권4호
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• pp.413-419
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• 2002

$Al_2O_3$/TiC/SiC, $Al_2O_3$/SiC 및 $Al_2O_3$/TiC 복합체들을 고온가압소결로 제조하여 이들의 균열저항거동과 기계적 성질을 비교해 보았다. $Al_2O_3$에 $0.8{\mu}m$의 TiC가 30vol% 첨가된 $Al_2O_3$/TiC는 단일체 $Al_2O_3$와 비슷한 균열저항거동을 보이며 파괴인성은 전반적으로 10% 이내의 증가를 보이는데 그쳤지만 강도는 약 30% 증가하였다. $Al_2O_3$에 $3{\mu}m$ SiC가 30vol% 첨가된 $Al_2O_3$/SiC는 SiC 입자의 균열 접속으로 인해 증가하는 균열저항거동을 뚜렷이 보이면서 파괴인성이 긴 균열에서 약 75% 증가하였으나 강도는 다소 감소했다. $Al_2O_3$/TiC에 SiC 입자가 30 vol% 첨가된 $Al_2O_3$/TiC/SiC 복합체의 경우 단일체 $Al_2O_3$에 비해 긴 균열 거리에서 파괴인성이 50% 이상 증가된 6.6 MP${\cdot}\sqrt{m}$에 이르렀으며 강도 값도 약 20% 상승하였다. 그러나 큰 SiC 입자의 첨가로 인해 TiC 입자만 첨가된 $Al_2O_3$/TiC 복합체보다는 강도가 다소 낮았다. 또한 SiC 입자만 첨가된 $Al_2O_3$/SiC 복합체보다는 파괴인성이 다소 낮았는데, 이는 작은 TiC 입자들이 SiC 입계를 거칠게 만들어 균열접속을 일으키는 SiC 입자의 뽑힘 현상을 방해하였기 때문이다.

• 한국세라믹학회지
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• 제29권6호
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• pp.431-440
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• 1992

• 한국결정성장학회지
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• 제7권4호
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• pp.658-664
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• 1997

자기질 도자기 소지조성에 필수적으로 함유되는 부산화물들($K_2O, MgO, CaO,Al_2O_3$, 그리고 $TiO_2$)이 순수한 $SiO_2$의 상형태에 미치는 영향을 조사하였다. 또한 장석, 도석, 카올린, 그리고 점토를 이용하여 조합된 자기질 도자기 소지 조성에서 $SiO_2/Al_2O_3$의 비를 조정하여 안정화된 $\beta$-cristobalite 상을 갖는 도자기 소지 조성을 개발하였으며, 여기에 첨가된 부산화물들이 $SiO_2$의 상형태에 미치는 영향을 조사하였다. $SiO_2$에 $K_2$O와 MgO를 첨가할 경우 준안정한 주상은 $\alpha$-cristobalite, CaO와 $Al_2$O$_3$를 첨가할 경우 $\alpha$-quartz, 그리고 $TiO_2$를 첨가할 경우는 비정질상이었다. 장석, 도석, 카올린, 그리고 점토를 사용하여 조합한 도자기 소지에서 $SiO_2/Al_2O_3$비가 작아질 수록 $\beta$-cristobalite 상의 안정화가 촉진되었으며, $\beta$-cristobalite 상이 안정화되는 임계의 $SiO_2/Al_2O_3$의 비는 68.10/22.75이었다. Cristobalite 상이 안정화된 실용 도자기 조성에 부산화물들이 첨가될 경우 $\alpha$, $\beta$-cristobalite 상생성이 억제되었다.

• 전자공학회논문지D
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• 제35D권3호
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• pp.39-45
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• 1998

SrBi$_{2}$Ta$_{2}$O$_{9}$ (SBT) ferroelectric thin films for nonvolatile memory were prepared on Pt/Ti/SiO$_{2}$/Si and RuO$_{2}$/SiO$_{2}$/Si substrates by RF magnetron sputtering. The dependences of crystalline and electrical properties on the lower electrode type(Pt and RuO$_{2}$) and the annealing temperatures were investigated. SBT films regardless of their electrode types showed typeical Bi layered peroviskite crystal structures. The crystalline quality of as-deposited SBT films was improved by the rapid thermal annealing at 650.deg. C for 30 sec. The remanetn polarization of 2Pr (Pr+-Pr-) of the annealed SBT films deposited on Pt/Ti/SiO$_{2}$/Si substrates were about 11 .mu.C/cm$^{2}$ and 3 .mu.C/cm$^{2}$, respectively. The leakage currents at 3 V bias voltage were about 0.8 .mu.A/cm$^{2}$ for SBT/ Pt/Ti/SiO$_{2}$/Si and about 1 .mu.A/cm$^{2}$ for SBT/RuO$_{2}$/SiO$_{2}$/Si sample. SBT films annealed at 650 .deg. C showed no degradation in Pr values after 10$^{11}$ polarization switching cycles, indicating good fatigue properties. In addition, for SBT samples deposited on Pt/Ti/SiO$_{2}$/Si, Pr values increased to more than that of initial state, suggesting the increament of leakage current caused by repeated polarization.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.880-883
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• 2003

ZnO thin films for Film Bulk Acoustic Resonator(FBAR) were prepared by FTS (Facing Target Sputtering) system. The FTS methode enable to generate high density plasma, and it has a high deposition rate at 1mTorr pressure. Therefore, the ZnO thin films were deposited on $AZO/SiO_2/Si$ substrates with oxygen gas flow rate, and the other sputtering conditions were fixed such as a sputtering current of 0.8A, a substrate temperature at room temperature. AZO bottom electrode were deposited on $SiO_2/Si$ substrate and by Zn:Al(Al:2wt%) metal target. ZnO thin film thickness and the c-axis preferred orientation of ZnO thin film were evaluated by ${\alpha}-step$ and XRD.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.364.1-364.1
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• 2014

고효율 태양전지로 가기 위해서는 태양전지의 후면 패시베이션은 중요한 역할을 한다. 후면 패시베이션 막으로 사용되는 $Al_2O_3$ 막은 $Al_2O_3/Si$ 계면에서 높은 화학적 패시베이션과 Negative Fixed Charge를 가지고 있어 적합한 Barrier막으로 여겨진다. 하지만 이후에 전면 Metal paste의 소성 공정에 의해 $800^{\circ}C$이상 온도를 올려주게 됨에 따라 $Al_2O_3$ 막 내부에 결합되어 있던 수소들이 방출되어 blister가 생성되고 막 질은 떨어지게 된다. 우리는 blister가 생성되는 것을 방지하기 위한 방법으로 PECVD 장비로 SiNx를 증착하는 공정 중에 $N_2O$ 가스를 첨가하여 SiON 막을 증착하였다. SiON막은 $N_2O$가스량을 조절하여 막의 특성을 변화시키고 변화에 따라 소성시 막에 미치는 영향에 대하여 조사하였다. 공정을 위해 $156{\times}156mm2$, $200{\mu}m$, $0.5-3.0{\Omega}{\cdot}cm$ and p-type 단결정 실리콘 웨이퍼를 사용하였고, $Al_2O_3$ 막을 올리기 전에 RCA Cleaning 실행하였다. ALD 장비를 통해 $Al_2O_3$ 막을 10nm 증착하였고 RF-PECVD 장비로 SiNx막과 SiON막을 80nm 증착하였다. 소성로에서 $850^{\circ}C$ ($680^{\circ}C$) 5초동안 소성하고 QSSPC를 통해 유효 반송자 수명을 알아보았다.

• 한국세라믹학회지
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• 제30권9호
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• pp.731-739
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• 1993

R-curve measurements were performed on Al2O3(matrix)-ZrO2-SiC whisker composite and Al2O3-ZrO2, Al2O3-SiC whisker composites in the favor of comparing the effect of ZrO2 and SiC whisker, as a second phase, to Al2O3 matrix. Al2O3-SiC whisker and Al2O3-ZrO2-SiC whisker were fabricated by hot pressing at 1$700^{\circ}C$, 15MPa and Al2O3-ZrO2 by pressureless sintering at 1$600^{\circ}C$. A controlled flaw/strength technique was utilized to determine fracture resistance as a function of crack extension and R-curve behaviour was determined from the relationship which is KR=K0(Δa)m. R-curveresults were KR=6.173$\times$Δa0.031 for Al2O3-ZrO2, KR=18.796$\times$Δa0.172 for Al2O3-SiC whisker and KR=11.96$\times$Δa0.110 for Al2O3-ZrO2-SiC whisker composite. From the analysis of R-curve and expeirmental data above three composites, it is found that R-curve behaviour of Al2O3-ZrO2-SiC whisker composite was dominated initially by the strengthening effect of ZrO2 and after, some extended crack were influenced by the effect of SiC whisker. Analysis of SEM and X-ray data revealed that whisker bridging in the crack wake and whisker pull-out mechanisms were the main mechanism for the R-curve behaviour.