• 한국세라믹학회지
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• 제35권3호
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• pp.264-272
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• 1998

The effect of catalytic condition on the properties of SiO2 aerogels has been investigated and then the dri-ed aerogels were partially densified to induce mechanical strength by heat treatment in order to prepare Type-VI silica by Sol-Gel method. Aerogel made by 1-step base process had the highest skeletal density lowest shrinkage and the smallest particle size. But in case of using acid catalyst in both 1st and 2nd step had the lowest skeletal density highest shrinkage and the largest particle size The aerogel synthesized by 1-step base process was most transparent because of its homogeneous microstructure. During heat treatments cracks occurred below 200$^{\circ}C$ for aerogel with the skeletal density lower than 1.9 g/cm3 but the with the higher skeletal density did not cracked up to 800$^{\circ}C$ shrinkage and skeletal density increased as heating temperature increased due to condensation and viscous sintering mechanism.

• 한국세라믹학회지
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• 제29권6호
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• pp.496-504
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• 1992

Alumina tubes suitable for the support of gas separation membranes have been prepared by the slipcasting technique. These supports have the average pore size of 0.1 ${\mu}{\textrm}{m}$ within the narrow distribution. The sol-gel dipcoating process of nanoparticulate sols is very sensitive to microstructure of the support, and the coating on the inside surface of the tube is found to be more successful than on the outside surface. Nanoparticulate silica sols (0.82 mol/ι) have been synthesized by an interfacial hydrolysis reaction between TEOS and high alkaline water. When coating an alumina tube with these sols, the minimum limits of the particle size and the aging time required for forming the coated gel layer at the given pH are provided. It is optimum to coat the support with less concentrated sols stabilized through aging for the appropriate time (more than 22 days) at the lower pH (pH 2.0) for producing a reproducible crack free thin film coating in composite membranes.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.905-908
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• 2001

The microstructure and the magnetic properties of Mn-Zn ferrite, which were power loss and saturation magnetic flux density, were investigated as the function of the process before firing. The highest initial permeability and the lowest power loss were attained to the specimen with CaO 400 ppm as a resulted from the highest solubility to SiO$_2$and the creation of liquid phase which improved sintering. The biggest grain size, the highest saturation magnetic flux density and the lowest power loss, which was resulted from that the eddy current loss increased as grain size increased but the hysteresis loss much more decreased and the hysteresis loss strongly influenced on the total power loss rather than the eddy current loss, were obtained to the Mn-Zn ferrite added 2wt% PVA. The power loss was lowest and the saturation magnetic flux density was highest in case of 1 ton/$\textrm{cm}^2$ and the grain size was not influenced.

• 한국재료학회지
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• 제20권11호
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• pp.623-627
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• 2010

Semiconducting metal oxides have been frequently used as gas sensing materials. While zinc oxide is a popular material for such applications, structures such as nanowires, nanorods and nanotubes, due to their large surface area, are natural candidates for use as gas sensors of higher sensitivity. The compound ZnO has been studied, due to its chemical and thermal stability, for use as an n-type semiconducting gas sensor. ZnO has a large exciton binding energy and a large bandgap energy at room temperature. Also, ZnO is sensitive to toxic and combustible gases. The NO gas properties of zinc oxide-single wall carbon nanotube (ZnO-SWCNT) composites were investigated. Fabrication includes the deposition of porous SWCNTs on thermally oxidized $SiO_2$ substrates followed by sputter deposition of Zn and thermal oxidation at $400^{\circ}C$ in oxygen. The Zn films were controlled to 50 nm thicknesses. The effects of microstructure and gas sensing properties were studied for process optimization through comparison of ZnO-SWCNT composites with ZnO film. The basic sensor response behavior to 10 ppm NO gas were checked at different operation temperatures in the range of $150-300^{\circ}C$. The highest sensor responses were observed at $300^{\circ}C$ in ZnO film and $250^{\circ}C$ in ZnO-SWCNT composites. The ZnO-SWCNT composite sensor showed a sensor response (~1300%) five times higher than that of pure ZnO thin film sensors at an operation temperature of $250^{\circ}C$.

• 한국분말재료학회지
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• 제14권6호
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• pp.372-379
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• 2007

The microstructure, mechanical and electrochemical properties of plasma electrolytic coatings (PEO) coatings on Mg-4.3 wt%Zn-1.0 wt%Y and Mg-1.0 wt%Zn-2.0 wt%Y alloys prepared by gas atomization, followed by compaction at 320 for 10 min under the pressure of 700 MPa and sintering at 380 and 420 respectively for 24 h, were investigated, which was compared with the cast Mg-1.0 wt%Zn alloy. All coatings consisting of MgO and $Mg_2SiO_4$ oxides showed porous and coarse surface features with some volcano top-like pores distributed disorderly and cracks between pores. In particular, the surface of coatings on Mg-1.0 wt%Zn-2.0 wt%Y alloy showed smaller area of pores and cracks compared to the Mg-4.3 wt%Zn-1.0 wt%Y and Mg-1.0 wt%Zn alloys. The cross section micro-hardness of coatings on the gas atomized Mg-Zn-Y alloys was higher than that on the cast Mg-1.0 wt%Zn alloy. Additionally, the coated Mg-1.0 wt%Zn-2.0 wt%Y alloy exhibited the best corrosion resistance in 3.5%NaCl solution. It could be concluded that the addition of Y has a beneficial effect on the formation of protective and hard coatings on Mg alloys by plasma electrolytic oxidation treatment.

• 반도체디스플레이기술학회지
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• 제21권3호
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• pp.57-62
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• 2022

The plasma resistance of multi-component glasses containing La, Gd, Ti, Zn, Y, Zr, Nb, and Ta was analyzed in this study. The plasma etching was performed via inductively coupled plasma-reactive ion etching (ICP-RIE) using CF₄/O₂/Ar mixed gas. After the reaction, the glass with a low fluoride sublimation temperature and high content of P, Si, and Ti elements showed a high etching rate. On the other hand, the glass containing a high fluoride sublimation temperature component such as Ca, La, Gd, Y, and Zr exhibited high plasma resistance because the etch rate was lower than that of sapphire. Glass with low plasma resistance increased surface roughness after etching or nanoholes were formed on the surface, but glass with high plasma resistance showed little change in surface microstructure. Thus, the results of this study demonstrate the potential for the development of plasma-resistant glasses (PRGs) with other compositions besides alumino-silicate glasses, which are conventionally referred to as plasma-resistant glasses.

• 한국재료학회지
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• 제9권12호
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• pp.1196-1204
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• 1999

(hfac)Cu(vtmos) [$C_{10}H_{13}O_{5}CuF_{6}$Si: 1,1,1,5,5,5-hexafluoro-2,4- pentadionato (vinyltrimethoxysilane) copper (I)] 구리원을 액체분사법으로 공급하여 반응성 스퍼터 증착된 PVD-TiN과 급속열처리 변환된 RTP-TiN 기판상에 구리를 유기금속 화학증착법으로 성장시키고, 증착조건과 기판 종류가 박막의 증착율, 결정구조 및 미세조직, 전기비저항 등에 미치는 영향을 분석하였다. 구리원 유량 0.2ccm에서 증착반응은 Ar 유량 200sccm까지 물질전달 지배과정과 전압 1.0Torr 이상에서 기화기에서의 공급율속을 보였다. 전압 0.6Torr일 때 활성화에너지는 155~225$^{\circ}C$의 표면반응 지배영역에서 12.7~14.1kcal/mol의 값을 나타내었으며, 225$^{\circ}C$ 이상의 기판온도에서는 $H_2$ 첨가에 따른 증착율 개선이 간응한 것으로 판단되었다. 증착층은 기판온도 증가에 따라 3차원 island 양식으로 성장하였으며, 증착초기 구리 핵생성밀도가 큰 RTP-TiN상 증착층이 PVD-TiN상보다 현저한 (111) 우선방위와 낮은 전기비저항값을 나타내었다. 구리박막의 전기비저항은 결정립간 연결성이 양호한 165$^{\circ}C$에서 가장 낮았으며, 증착온도에 따른 박막 미세구조 변화로 인해 그 거동은 3개의 영역으로 구분되어 나타났다.

• 한국건설순환자원학회논문집
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• 제9권4호
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• pp.553-560
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• 2021

본 연구에서는 순수시료를 사용한 시멘트 클링커와 석탄재를 7% 적용한 클링커를 1050~1500℃의 온도로 소성하여 소성온도별 시멘트 광물의 함량 변화와 미세구조의 변화를 검토하였다. 시멘트 클링커의 원료로서 석탄재의 적용은 알루미나 및 규산질의 공급원으로 적용이 가능하였으며, 석탄재를 적용한 시멘트 클링커는 1350℃ 이상의 소성온도에서 순수원료를 적용한 시멘트 클링커와 동등 수준의 광물량을 나타내었고, 미세구조 또한 유사한 상태를 나타내어 시멘트 원료로서 석탄재의 활용이 가능함을 확인하였다. XRD-Reitveld 분석에서 1250℃에서 Belite의 최대량이 생성되어 1350℃에서부터 Belite에서 Alite로의 전환이 나타났다. 1350℃에서부터 간극상과 Alite로 추정되는 광물상이 구분되며, 1400℃에서부터 명확하게 구분되었다. 소성온도가 증가함에 따라 결정상의 형상과 경계가 명확해지며, 결정상의 크기도 증가되는 것이 나타났다.

• 한국세라믹학회지
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• 제55권6호
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• pp.527-555
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• 2018

High-temperature thermal insulation materials challenge extensive oxide candidates such as porus $SiO_2$, $Al_2O_3$, yttria-stabilized zirconia, and mullite, due to the needs of good mechanical, thermal, and chemical reliabilities at high temperatures simultaneously. Recently, porous rare earth (RE) silicates have been revealed to be excellent thermal insulators in harsh environments. These materials display attractive properties, including high porosity, moderately high compressive strength, low processing shrinkage (near-net-shaping), and very low thermal conductivity. The current critical challenge is to balance the excellent thermal insulation property (extremely high porosity) with their good mechanical properties, especially at high temperatures. Herein, we review the recent developments in processing techniques to achieve extremely high porosity and multiscale strengthening strategy, including solid solution strengthening and fiber reinforcement methods, for enhancing the mechanical properties of porous RE silicate ceramics. Highly porous RE silicates are highlighted as emerging high-temperature thermal insulators for extreme environments.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1229-1231
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• 1997

In this work, PZT(20/80)/(80/20) heterolayered thin film that has the tetragonal and rhombohedral structure was fabricated by Sol-Gel method spin-coated on the Pt/Ti/$SiO_2$/Si substrate by turns. The thickness of PZT-1 film obtained by six-times of drying/sintering process was about 480[nm]. This procedure was repeated several times to form PZT heterolayered thim film. PZT-5 thin films with top layer of tetragonal PZT(20/80) thin film showed dense grain structure and PZT-6 thin film with top layer of rhombohedral PZT(80/20) thin film showed the microstructure without rosette. Dielectric constant increased with increasing the number of coatings, and it was about 13S5 at PZT-6 thin film. Dielectric loss was not depend on the number of coatings.