• 제목/요약/키워드: $SiO_2$Microstructure

검색결과 521건 처리시간 0.028초

유기금속화학기상증착법으로 제조된 자성반도체 $Ti_{1-x}Co_xO_2$ 박막의 미세구조 및 자기적 특성 (Microstructure and Magnetic properties of $Ti_{1-x}Co_xO_2$ Magnetic semiconductor thin films by Metal Organic Chemical Vapor Deposition)

  • 성낙진;윤순길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.155-159
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    • 2003
  • Polycrystalline $Ti_{1-x}Co_xO_2$ thin films on $SiO_2$ (200 nm)/Si (100) substrates were prepared using liquid-delivery metalorganic chemical vapor deposition. Microstructures and ferromagnetic properties were investigated as a function of doped Co concentration. Ferromagnetic behaviors of polycrystalline films were observed at room temperature, and the magnetic and structural properties strongly depended on the Co distribution, which varied widely with doped Co concentration. The annealed $Ti_{1-x}Co_xO_2$ thin films with $x{\leq}0.05$ showed a homogeneous structure without any clusters, and pure ferromagnetic properties of thin films are only attributed to the $Ti_{1-x}Co_xO_2$ (TCO) phases. On the other hand, in case of thin films above x=0.05, Co clusters formed in a homogeneous $Ti_{1-x}Co_xO_2$ Phase, and the overall ferromagnetic (FM) properties depended on both $FM_{TCO}$ and $FM_{Co}$. Co clusters with about 10nm-150nm size decreased the value of Mr (the remanent magnetization) and increased the saturation magnetic field.

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절삭 공구용 세라믹의 소결조직에 따른 파괴인성과 경도의 평가 (Effect of Microstructure on Evaluation of Fracture Toughness and Hardness of Cutting Tool Ceramics)

  • 안동길;윤명진
    • 한국생산제조학회지
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    • 제9권6호
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    • pp.170-177
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    • 2000
  • Dense $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramic tool materials with various grain size were produced by sintering-HIP treatment and by gas-pressure sintering. The fracture toughness was measured by indentation fracture and indentation strength method for both ceramics with various grain size. The effect of the grain size on the fracture toughness was evaluated, and the correlation between fracture toughness and mechanical properties such as hardness, Young\`s modulus and flexural strength of these ceramic were also investigated. The highest fracture toughness of around 6.7 MPa.m(sup)1/2 was obtained in Si$_3$N$_4$ ceramics with grain size of 1.58${\mu}{\textrm}{m}$. With a larger grain size of $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramics, the fracture toughness was generally increased. The increased fracture toughness of these ceramic also improved the flexural strength although the hardness decreased considerably. Similar results were obtained in grain size and mechanical properties on both $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramic tool materials.

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MgO-Al2O3-SiO2-ZrO2계 글라스 세라믹의 제조 및 특성 평가 (Fabrication and Characterization of MgO-Al2O3-SiO2-ZrO2 Based Glass Ceramic)

  • 윤제정;전명표;신효순;남산
    • 한국전기전자재료학회논문지
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    • 제27권11호
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    • pp.712-717
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    • 2014
  • Glass ceramic has a high mechanical strength and low sintering temperature. So, it can be used as a thick film substrate or a high strength insulator. A series of glass ceramic samples based on MgO-$Al_2O_3-SiO_2-ZrO_2$ (MASZ) were prepared by melting at $1,600^{\circ}C$, roll-quenching and heat treatment at various temperatures from $900^{\circ}C$ to $1,400^{\circ}C$. Dependent on the heat treatment temperature used, glass ceramics with different crystal phases were obtained. Their nucleation behavior, microstructure and mechanical properties were investigated with differential thermal analysis (DTA), X-ray diffraction (XRD), scanning electron microscopy (SEM), and Vicker's hardness testing machine. With increasing the heat treatment temperature of MASZ samples, their hardness and toughness initially increase and then reach the maximum points at $1,300^{\circ}C$, and begin to decrease at above this temperature, which is likely to be due to the softening of glass ceramics. As the content of $ZrO_2$ in MAS glass ceramics increases from 7.0 wt.% to 13 wt.%, Vicker's hardness and fracture toughness increase from $853Kg/mm^2$ to $878Kg/mm^2$ and $1.6MPa{\cdot}m^{1/2}$ to $2.4MPa{\cdot}m^{1/2}$ respectively, which seems to be related with the nucleation of elongated phases like fiber.

저온동시소성용 결정화 유리의 필러 사이즈가 열적 특성에 미치는 영향 (Effect of $Al_2O_3$ Particle Size on Thermal Properties of Glass-Ceramics for LTCC Material)

  • 김진호;황성진;이상욱;김형순
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.281-281
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    • 2007
  • Low Temperature Co-fired Ceramic (LTCC) technology has been used in electronic device for various functions. LTCC technology is to fire dielectric ceramic and a conductive electrode such as Ag or Cu thick film below the temperature of $900^{\circ}C$ simultaneously. The glass-ceramic has been widely used for LTCC materials due to its low sintering temperature, high mechanical properties and low dielectric constants. To obtain the high strength, addition of filler, the microstructure should have various crystals and low pores in a composite. In this study, two glass frits were mixed with different alumina size(0.5, 2, 3.7um) and sintered at the range of $850{\sim}950^{\circ}C$. The microstructure, crystal phases, thermal and mechanical properties of the composites were investigated using FE-SEM, XRD, TG-DTA, Dilatomer. When the particle size of $Al_2O_3$ filler increased, the starting temperatures for the densification of the sintered bodies, onset point of crystallization, peak crystallization temperature in the glass-ceramic composites decreased gradually. After sintered at $900^{\circ}C$, the glass frits were crystallized as $CaAl_2Si_2O_8\;and\;CaMgSi_2O_6$. The purpose of our study is to understand the relationship between the $Al_2O_3$ particle size and thermal properties in composites.

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액상소결법에 의한 탄화규소 제조시 소결조제와 온도의 영향 (Influence of Sintering Additives and Temperature on Fabrication of LPS-SiC)

  • 정헌채;윤한기
    • 한국해양공학회:학술대회논문집
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    • 한국해양공학회 2004년도 학술대회지
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    • pp.266-270
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    • 2004
  • SiC materials have been extensively studied for high temperature components in advanced energy system and advanced gas turbine because it has excellent high temperature strength, low coefficient of thermal expansion, good resistance to oxidation and good thermal and chemical stability etc. However, the brittle characteristics of SiC such as low fracture toughness and low strain-to fracture still impose a severe limitation on practical applications of SiC materials. For these reasons, SiC/SiC composites can be considered as a promising for various structural materials, because of their good fracture toughness compared with monolithic SiC ceramics. But, high temperature and pressure lead to the degradation of the reinforcing jiber during the hot pressing. Therefore, reduction of sintering temperature and pressure is key requirements for the fabrication of SiC/SiC composites by hot pressing method. In the present work, monolithic Liquid Phase Sintered SiC (LPS-SiC) was fabricated by hot pressing method in Ar atmosphere at $1800^{\circ}C$ under 20MPa using $Al_2O_3,\;Y_2O_3\;and\;SiO_2$ as sintering additives in order to low sintering temperature and sintering pressure. The starting powder was high purity $\beta-SiC$ nano-powder with all average particle size of 30mm. The characterization of LPS-SiC was investigated by means of SEM and three point bending test. Base on the composition of sintering additives-, microstructure- and mechanical property correlation, tire compositions of sintering additives are discussed.

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박막 두께에 따른 (Ba,Sr)TiO$_3$박막의 구조 및 유전특성 (Microstructure and Dielectric Properties of (Ba,Sr)TiO$_3$ Thin Film with Thickness)

  • 이상철;임성수;정장호;이성갑;배선기;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.121-124
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    • 1999
  • The (Ba,Sr)TiO$_3$[BST] thin film were fabricated on the Pt/Ti/SiO$_2$/Si substrate by RF sputtering technique. The structural properties of the BST thin films were investigated with deposition time and substrate temperature by XRD. In the case of the BST thin films which has the deposition thin of 20 min, second phases and BST (111) peaks were increased with increasing the temperature of substrate. The capacitance of the BST thin film (deposition time of 20 min.) was decreased with the substrate temperature and was 1500pF with applied voltage of 1V.

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RBAO 세라믹스 공정에서 어트리터 효율에 미치는 볼 크기의 영향 (The Effects of Ball Size on Attritor Efficiency in the Processing of RBAO Ceramics)

  • 김일수;강민수;박정현
    • 한국세라믹학회지
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    • 제35권4호
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    • pp.406-412
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    • 1998
  • The reaction bonded alumina ceramics was prepared through the addition of each SiC and ZrO2 powder to the mixture of Al metal powder and Al2O3 The mono sized (3mm) and biodal sized (3mm+5mm) balls were used in attrition milling of Al and starting powders. The milling efficiency of both cases was compared by the analysis of particle size and X-ray diffraction. After the forming and sintering of each powder batchs the weight gains dimensional changes and densities were determined. The specimens were investigated by X-ray diffraction analysis and scanning electron microscope. Bimodal sized balls had better milling effect than single ball size in the milling of Al powder. However in the milling which ceramic powders mono sized the green body during the reaction sintering at 1$600^{\circ}C$ for 5 hour was about 10% The densities attained the values of 92-98% theoretical. The SiC added specimen that was milled with 3mm ball media had 96% theoretical density and dense microstructure.

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CaO-SiO2-B2O3계 결정화 유리의 제조와 in-vitro법을 이용한 생체활성 평가 (Preparation of CaO-SiO2-B2O3 Glass-ceramics and Evaluation of Bioactivity Using in-vitro Test)

  • 류현승;서준혁;김환;홍국선;김득중;이재협;이동호;장봉순;이춘기
    • 한국세라믹학회지
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    • 제39권5호
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    • pp.490-497
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    • 2002
  • $CaO-SiO_2-B_2O_3$계의 결정화유리의 소결 특성 및 기계적 특성, 생체활성을 알아보았다. 이 조성의 결정화유리는 750-830${\circ}$ 사이에서 소결 되었으며 치밀한 미세구조를 보였다. 이 결정화 유리는 단사정계 월라스토나이트(monoclinic wollastonite), 칼슘보레이트(Calcium borate, $CaB_2O_4$) 결정상과 보로실리케이트(borosilicate) 유리 기지상(matrix)의 3상으로 구성되었다. 기계적 강도는 지금까지 알려진 다른 생체활성 세라믹스보다 우수하였으며 특히 압축강도(2813 MPa), 파괴인성($3.12 MPa{\cdot}m^{1/2}$)이 높았다. 생체활성은 결정화유리 중 calcium borate와 보로실리케이트 유리의 양에 의존하였는데, 용해도가 높은 calcium borate는 의사체액(SBF)의 칼슘이온의 과포화도를 상승시키고 borosilicate 유리는 탄산아파타이트 핵생성에 필요한Si-OH기를 형성시켜 탄산아파타이트 층이 빨리 생성되기 때문으로 판단된다. 따라서 $CaB_2O_4$와 borosilicate 유리가 많을수록 결정화유리의 생체활성이 뛰어난 것으로 생각된다.

졸-겔법으로 제조한 $PbTiO_3$ Interlayered PZT 박막의 미세구조와 강유전 특성 (Microstructure and Ferroelectric Properties of Sol-gel Derived $PbTiO_3$ Interlayered PZT Thin Films)

  • 임동길;최세영;정형진;오영제
    • 한국세라믹학회지
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    • 제32권12호
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    • pp.1408-1416
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    • 1995
  • Microstructure and ferroelectric properties of sol-gel derived PZT(52/48) and PT interlayered PZT(52/48) thin films on Pt/Ti/SiO2/Si substrates were investigated. Films were fabricated using Acetylacetone chelated PT and PZT(52/48) sols. PZT(52/48) thin films annealed at $700^{\circ}C$ for 20 min showed the rosette structure with the size of 1.2~1.6${\mu}{\textrm}{m}$ and the pyrochlore phse was contained. PT interlayered PZT thin films, which is inserted by PbTiO3 thin layer with the thickness of 130 $\AA$ between PZT thin film and electrode, consisted of a single perovskite phase after annealing above 55$0^{\circ}C$. They exhibited the uniform and columnar grains of 0.1~0.16${\mu}{\textrm}{m}$, which are applicable for microelectronic device including non-volatile memory. Typical P-E hysteresis loops could be obtained from PT interlayered PZT thin film at as low as the annealing temperature of 50$0^{\circ}C$. Ferroelectric properties of PT interlayered PZT thin films were improved as increasing annealing temperature up to $700^{\circ}C$, and then deteriorated at 75$0^{\circ}C$. PZT(52/48) and PT interlayered PZT(52/48) thin film annealed at $700^{\circ}C$ for 20 min displayed Ps=38.8$\mu$C/$\textrm{cm}^2$, Pr=10.0$\mu$C/$\textrm{cm}^2$, Ec=65.3 kV/cm and Ps=28.5$\mu$C/$\textrm{cm}^2$, Pr=9.8$\mu$C/$\textrm{cm}^2$, Ec=76.1 kV/cm, respectively.

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SiC세라믹스 동종재 접합재의 전단강도 특성 평가 (Characteristics of Shear Strength for joined SiC-SiC Ceramics)

  • 윤한기;정헌채
    • 대한기계학회논문집A
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    • 제38권5호
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    • pp.483-487
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    • 2014
  • SiC/SiC복합재료는 뛰어난 고온특성, 내산화성 및 크립(Creep)에 대한 저항성이 우수하고 또한 중성자에 의한 조사 손상이 다른 세라믹스에 비해서 적게 받는다는 장점으로 인하여 핵융합로의 블랑켓(Blanket), 제1벽(First-wall) 및 다이버터(Di-vertor)등의 후보재료로 적용이 기대되고 있다. SiC/SiC복합재료 제조시 가장 큰 문제점은 높은 소결온도와 압력으로 인하여 탄화규소 섬유가 손상되어 복합재료의 특성이 저하되는 것이므로 이들 재료의 전단강도 특성 평가는 매우 중요하다, 본 연구에서는 SiC제조특성과 소결온도에 대한 전단강도 특성의 평가한다.