• 제목/요약/키워드: $SiO_2$ coating

검색결과 647건 처리시간 0.025초

CaO-Al2O3-SiO2 계 벌크 유리와 스프레이 코팅막의 CF4/O2/Ar 플라즈마 식각 시 내식성 비교 (Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching)

  • 나혜인;박제원;박재혁;김대근;최성철;김형준
    • 한국결정성장학회지
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    • 제30권2호
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    • pp.66-72
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    • 2020
  • 본 연구에서는 CaO-Al2O3-SiO2(CAS) 계 유리 벌크와 유리 분체를 알루미나 소결체 표면에 스프레이 코팅막 적용 시 내플라즈마 특성에 대하여 비교하였다. CAS 유리 벌크와 유리 코팅막을 CF4/O2/Ar 플라즈마 가스에 노출시켰을 때의 식각율과 표면의 미세구조 분석을 통해 내플라즈마 특성을 확인하였다. CAS 유리 소성막은 유리 벌크와 비교하여 에칭속도가 최대 25배 빠른 것을 확인하였다. 유리 소성막의 표면 조도 값과 식각율 간의 통계학적으로 높은 상관성을 도출하였고, 이에 따라 소성막의 높은 표면조도가 빠른 식각을 유발하는 것으로 판단하였다. 그리고 유리 소성막은 Ca 성분의 함량이 적고, Si 함량이 많은 크리스토발라이트(cristobalite) 결정의 형성으로 인하여 Ca과 Ca 불화물에 의한 내플라즈마 효과가 감소한 것으로 판단된다. 따라서 CAS 유리 소성막은 유리 벌크에 비해 낮은 내플라즈마 특성을 갖는 것으로 판단된다.

p-type (100) Cz 단결정 실리콘 태양전지의 $MgF_2/CeO_2$ 반사 방지막에 관한 연구 ($MgF_2/CeO_2$ AR Coating on p-type (100) Cz Silicon Solar Cells)

  • 이수은;최석원;박성현;강성호;이준신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.593-596
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    • 1999
  • This paper presents a process optimization of antireflectiun (AR) coating on crystalline Si solar cells. Theoretical and experimental investigations were performed on a doble-layer AR(DLAR) coating of MgF$_2$/CeO$_2$, We investigated CeO$_2$ films as an All layer because they hale a proper refractive index of 2.46 and demonstrate the same lattice constant as Si substrate. RF sputter grown CeO$_2$ film showed strong dependence on a deposition temperature. The CeO$_2$ film deposited at 400 $^{\circ}C$ exhibited a strong (111) preferred orientation and the lowest surface roughness of 6.87 $\AA$. Refractive index of MgF$_2$ film was measured as 1.386 for the most of growth temperature. An optimized DLAR coating showed a reflectance as low as 2.04 % in the wavelengths ranged from 0.4 7m to 1.1 7m. We achieved the efficiencies of solar cells greater than 15% with 3.12 % improvement with DLAR coatings . Further details on MgF$_2$, CeO$_2$ films, and cell fabrication Parameters are presented in this paper.

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단결정 실리콘 태양전지의 MgF$_2$/CeO$_2$ 반사 방지막에 환한 연구 (A Study on MgF$_2$/CeO$_2$ AR Coating of Mono-Crystalline Silicon Solar Cell)

  • 유진수;이재형;이준신
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권10호
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    • pp.447-450
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    • 2003
  • This paper presents a process optimization of antireflection (AR) coating on crystalline Si solar cells. Theoretical and experimental investigations were performed on a double-layer AR (DLAR) coating of MgF$_2$/CeO$_2$. We investigated CeO$_2$ films as an AR layer because they have a proper refractive index of 2.46 and demonstrate the same lattice constant as Si substrate. RF sputter grown CeO$_2$ film showed strong dependence on a deposition temperature. The CeO$_2$ deposited at 40$0^{\circ}C$ exhibited a strong (111) preferred orientation and the lowest surface roughness of 6.87 $\AA$. Refractive index of MgF$_2$ film was measured as 1.386 for the most of growth temperature. An optimized DLAR coating showed a reflectance as low as 2.04% in the wavelengths ranged from 0.4${\mu}{\textrm}{m}$ to 1.1${\mu}{\textrm}{m}$. We achieved the efficiencies of solar cells greater than 15% with 3.12% improvement with DLAR coatings. Further details on MgF$_2$, CeO$_2$ films, and cell fabrication parameters are presented in this paper.

하이브리드 코팅시스템에 의한 Cr-Si-O-N 코팅막 합성 및 기계적 성질 (Syntheses and Mechanical Properties of Quaternary Cr-Si-O-N Coatings by Hybrid Coating System)

  • 이정두;왕치민;김광호
    • 한국표면공학회지
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    • 제43권5호
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    • pp.238-242
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    • 2010
  • In the present work, the influence of oxide on the Cr-Si-N coatings was investigated for the Cr-Si-O-N coatings on AISI 304 and Si wafer deposited by hybrid system, which combines the DC magnetron sputtering technique and arc ion plating (AIP) using Cr and Si target in an $Ar/N_2/O_2$ gaseous mixture. As the O content in the Cr-Si-N coatings increased, the diffraction patterns of the Cr-Si-O-N coatings showed CrN and $Cr_2O_3$ phases. However, as the O content increased to 28.8 at.%, diffraction peak of $Cr_2O_3$ was disappeared in the Cr-Si-O-N coating. The $d_{200}$ value was decreased with increasing of O content. The average grain size increased from about 40 nm to 65 nm as the O content increased. The maximum micro-hardness of the Cr-Si-O-N coating was obtained 4507 Hk at the O content of 24.8 at.%. The average friction coefficient of the Cr-Si-O-N coatings was gradually decreased by increasing the O content and the average friction coefficient decreased from 0.37 to 0.25 by increasing the O content. These results indicated that amorphous phase was increased in the Cr-Si-O-N coatings by increasing of O content.

Cu-5% Sn합금(合金)의 주조조직(鑄造組織)에 미치는 도형재(塗型材)의 영향(影響)에 관(關)한 연구(硏究) (Effect of Mold Coatings on the Macrostructures of Cu-5%Sn Alloy)

  • 최영승;최창옥
    • 한국주조공학회지
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    • 제5권3호
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    • pp.19-26
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    • 1985
  • This study has been carried out to examine into wettability of Cu-5%Sn alloy in $Al_2O_3$, MgO, $SiO_2$ and graphite, respectively and investigated into the change in macrostructure of Cu-5%Sn alloy according to kind and mixing rate of mold-coating. The results obtained from the experiment are summerized as follows; 1. Cu Cu-5%Sn alloy, wettabilities of $Al_2O_3$ and MgO were good, on the other hand, wettabilities of $SiO_2$ and graphite were bad. 2. The fine equiaxed zone was created because of the role of $Al_2O_3$ and MgO as preferential nucleation sites. 3. Notwithstanding change of mixing rate of $SiO_2$ in mold coating the equixed zone was not created. 4. The area of equiaxed zone was varied according to mixing rate in the case of using $Al_2O_3$ and MgO in mold-coating.

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극미세 입자 Aluminosilicate계 졸의 합성 및 응용 (II) Al_2O_3-SiO_2$계 혼합졸 (Synthesis and Application of Nanoparticulate Aluminosilicate Sols (II) Mixed Al_2O_3-SiO_2$ Sols)

  • 현상훈;김승구;이성철
    • 한국세라믹학회지
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    • 제32권1호
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    • pp.63-70
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    • 1995
  • A crack-free ceramic composite membrane with micropores has been synthesized by the pressurized sol-gel coating technique using the mixed Al2O3-SiO2 sols. The mixed sols were prepared by mixing nanoparticulate SiO2 and boehmite sols. These sols were more stable at lower pH, but very unstable when their copositions were in the range of 50~75mol% of SiO2 at the same pH. The mixed Al2O3-SiO2 membrane prepared from the mixed sol (0.2mol/$\ell$ of solid content and pH=2) containing 40mol% of SiO2 had the mean pore radius of 0.80nm and the specific surface area of 280$m^2$/g. The nitrogen permeability through the coated Al2O3-SiO2 layer was 42$\times$107mol/$m^2$.s.Pa. It was found that the thermal stability of aluminosilicate membranes, even through similar to that of SiO2 membranes, was much improved in comparison with ${\gamma}$-alumina membranes.

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The Oxide Coating Effects on the Magnetic Properties of Amorphous Alloys

  • 배영제;Jang, Ho G.;Chae, Hee K.
    • Bulletin of the Korean Chemical Society
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    • 제17권7호
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    • pp.621-625
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    • 1996
  • A variety of metal oxides were coated by sol-gel process from their metal alkoxides on the ribbons of Co-based and Fe-based amorphous alloys, and the effects of surface oxide coating on the magnetic properties of the alloy are investigated. The core loss is found to be reduced significantly by the oxide coating, the loss reduction becoming more prominent at higher frequencies. The shape of the hystersis loop is also dependent upon the kind of the coated metal oxide. The coatings of MgO, SiO2, MgO·SiO2 and MgO·Al2O3 induce tensile stress into the Fe-based ribbon whereas those of BaO, Al2O3, CaO·Al2O3, SrO·Al2O3 and BaO·Al2O3 induce compressive stress. These results may be explained by the modification of domain structures via magnetoelastic interactions with the shrinkage stress induced by the sol-gel coating.

흡수층을 이용한 무반사, 무정전용 광학박막의 설계 (The design of the optical film for absorbent ARAS coating)

  • 박문찬;손영배;정부영;이인선;황보창권
    • 한국안광학회지
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    • 제5권1호
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    • pp.7-11
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    • 2000
  • ITO, $TiN_xW_y$, Ag 등의 전도성 흡수층으로 무반사, 무정전 광학박막을 Essential Macleod 프로그램을 이용하여 설계했다. 그 결과 [공기 ${\mid}SiO_2{\mid}TiN_xW{\mid}$ 유리] 층은 단 두층코팅막으로 가시광선 파장영역(45~700nm)에서 넓게 무반사 코팅이 되었다. 이 때 반사률과 투과률은 각각 0.5% 미만과 약 75%이다. [공기 $SiO_2{\mid}TiO_2{\mid}SiO_2{\mid}ITO {\mid}$ 유리] 층은 약 0.5% 미만의 반사률이 있는 무반사 코팅이 되며 투과률은 97% 이상이며, 450nm 파장 영역부근에서 투과률이 비교적 낮은 것은 ITO의 흡수계수 영향 때문이다. 또한 [공기 $SiO_2{\mid}TiO_2{\mid}SiO_2{\mid}Ag{\mid}$ 유리] 층은 반사률이 1~2%인 AR코팅이며 투과률은 96% 이상이다.

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CaO-Al2O3-SiO2 계 유리 스프레이 코팅막의 소성 거동에 대한 연구 (A study of sintering behavior of spray coating in CaO-Al2O3-SiO2 glasses on Al2O3 substrate)

  • 나혜인;박제원;박재혁;김대근;최성철;김형준
    • 한국결정성장학회지
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    • 제29권6호
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    • pp.298-307
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    • 2019
  • 본 연구에서는 Al2O3 소결체 표면에 두 종류의 CaO-Al2O3-SiO2(CAS) 계 유리 분말을 스프레이 코팅(spray coating) 후 소성 거동에 대하여 연구하였다; (1) Si-rich, SiO2 함량이 높은 유리, (2) Ca-rich, CaO 함량이 높은 유리. Ca-rich 유리는 점도가 약 107~109 poise일 때 유리 내부에 잔존하는 기포들의 심한 발포 현상이 일어났고 이에 따라 소결 방해에 따른 수축율이 감소하였으며 조도는 증가하였다. 반면, Si-rich 유리의 경우, 1000℃ 이하에서는 Ca-rich와 같은 심각한 발포현상은 없었으나, 1200℃에서 밀도가 낮은 크리스토발라이트(cristobalite) 결정 발생과 함께 기포의 재발포 현상이 일어나 수축율이 감소하였으며 조도가 증가하는 이상 소성 거동을 보였다. 이는 저밀도 크리스토발라이트 결정 생성으로 인한 유리질의 칼슘 함량 증가에 의한 점도 감소로 생각된다. 따라서 CAS계 유리의 경우 저온 소성에서는 발포 현상에 의한 표면조도 상승과 소결 방해를 고려해야 하며, 특히 SiO2 함량이 높을 경우, 고온에서 결정화에 의한 이상 발포 현상도 생각해야 한다.

반응소결 물라이트를 위한 \$alpha-Al_2O_3/SiO_2$ 복합분말의 합성 및 그 특성 (Synthesis of \$alpha-Al_2O_3/SiO_2$ Composite Powders for Reaction-Sintered Mullite and its Properties)

  • 김희수;이종국;김환
    • 한국세라믹학회지
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    • 제32권8호
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    • pp.909-914
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    • 1995
  • From alumina powder and TEOS, $\alpha$-Al2O3/SiO2 composite powder for reaction-sintered mullite was synthesized by heterogeneous coagulation and surface coating, and investigated the mullitization reaction and sintering behavor of these powders. In $\alpha$-Al2O3/SiO2 composite powder prepared by heterogeneous coagulation, each alumina particles were surrounded by silica particles of 50~60 nm in size. And the alumina particles in composite powder prepared by surface coating were coated by uniform silica layer with thickness of 50 nm. In both methods, mullitization reaction was completed at 1$650^{\circ}C$ for 3h, and specimen sintered above 145$0^{\circ}C$ was about 95% fo the theoretical relative density. Mullite grains formed from the reaction with composite powders showed spherical shape with a size of 1~2${\mu}{\textrm}{m}$.

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