A Study of the Crystallographic Properties of $ZnO/SiO_{2}/Si$ Thin Film for FBAR
(FBAR 용 $ZnO/SiO_{2}/Si$ 박막의 결정학적 특성에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.11a
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- pp.140-143
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- 2002