• 한국세라믹학회지
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• 제38권6호
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• pp.531-536
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• 2001

SiCl$_4$/CH$_4$/H$_2$계를 사용한 플라즈마 화학증착법(PECVD)으로 실리콘(100) 기판 위에 3C-SiC막을 117$0^{\circ}C$~1335$^{\circ}C$의 온도범위에서 증착하였다. 증착온도, 유입가스비, R$_{x}$ [=CH$_4$/(CH$_4$+H$_2$)], 그리고 r.f. power를 변화시켜 증착막의 결정성에 대해 검토하였다. Thermal CVD에 비해 PECVD법은 박막의 증착속도를 향상시켰다. 증착된 3C-SiC은 (111) 면으로 최대의 우선배향성을 지님을 알 수 있었다. 실리콘 기판 위의 3C-SiC막의 결정성은 R$_{x}$값에 의존하였으며, R$_{x}$가 감소할수록 결정성이 더욱 향상되었다. Free Si가 3C-SiC막과 함께 증착되었으나, 증착온도와 r.f power가 증가함에 따라 free Si의 함량은 감소하였다. 증착온도 127$0^{\circ}C$, 유입가스비 R$_{x}$=0.04, r.f. power가 60W에서 비교적 결정성을 가진 3C-SiC막을 얻을 수 있었다.

• 한국세라믹학회지
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• 제55권5호
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• pp.498-503
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• 2018

Using the thermal ablation method, the oxidation behavior of $SiC_f/SiC$ composites was investigated in air and in the temperature range of $1,300^{\circ}C$ to $2,000^{\circ}C$. At the relatively low temperature of $1,300^{\circ}C$, passive oxidation, which formed amorphous phase, predominantly occurred in the thermal ablation test. When the oxidation temperature increased, SiO (g) and CO (g) were formed by active oxidation and the dense oxide layer changed to a porous one by vaporization of gas phases. In the higher temperature oxidation test, both active oxidation due to $SiO_2$ decomposition on the surface of the oxide layer and active/passive oxidation transition due to interfacial reaction between oxide and base materials such as SiC fiber and matrix phase simultaneously occurred. This was another cause of high temperature degradation of $SiC_f/SiC$ composites.

• Composites Research
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• 제30권2호
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• pp.77-83
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• 2017

섬유강화 세라믹 복합재료 제조 방법 중 실리콘 용융 침투 공정법(Liquid Silicon Infiltration-LSI)은 낮은 제조단가 및 짧은 공정 시간 등의 장점을 가진다. 본 연구에서는 고온 내산 특성이 우수한 SiC 섬유를 LSI 공정에 적용하기 위해 결정화도와 산소함량이 다른 세 가지 SiC 섬유(Tyranno SA, LoxM, Tyranno S)를 이용하여 $SiC_f/SiC$ 복합재료를 제작하고 그 적용 가능성을 확인하였다. LSI 공정을 통해 제조된 $SiC_f/SiC$ 복합재료는 모두 2% 미만의 기공률로 치밀화 되었지만, 섬유의 결정화도와 산소함량에 따라 3점 굽힘강도는 큰 차이를 나타냈다. 이는 $1450^{\circ}C$ 이상의 높은 LSI 공정 온도에 SiC 섬유가 노출 될 경우 비정질 SiOC상이 결정화되며 수축하는 현상과 섬유 내 잔존 산소-모재 내 탄소의 반응으로 인한 미세구조 차이에 기인하는 것으로 판단된다. 이는 SEM, XRD 및 TEM 분석을 통해 섬유 종류별 공정온도에서의 특성 변화로 확인하였다.

• 한국세라믹학회지
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• 제51권5호
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• pp.430-434
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• 2014

$SiC_f$/SiC composites were prepared using the hybrid process of chemical vapor infiltration (CVI) and polymer impregnation and pyrolysis (PIP). Before the application of PIP, partially matrix-filled preform composites with different densities were fabricated by control of chemical vapor infiltration time and temperature. The changes of the final density of the $SiC_f$/SiC composites had a tendency similar to that of preform composites partially filled by CVI. Composites with lower density after the CVI process had a larger increment of density during the PIP process. Three types of microstructures were observed on the fractured surface of the composite: 1) well pulled-out fibers and lower density, 2) slightly pulled-out fibers and higher density, and 3) only bulk SiC. The different fractions and distributions of the microstructures could have an effect on the mechanical properties of the composites. In this study, $SiC_f$/SiC composites prepared using a hybrid process of CVI and PIP had density values in the range of $1.05{\sim}1.44g/cm^3$, tensile strength values in the range of 76.4 ~ 130.7 MPa, and fracture toughness values in the range of $11.2{\sim}13.5MPa{\cdot}m^{1/2}$.

• 한국진공학회지
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• 제1권1호
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• pp.145-152
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• 1992

Si surfaces exposed to CHF3/C2F6 gas plasmas ih reactive ion etching (RIE) have been characterized by X-ray photoelectron spectroscopy (XPS). CHF3/C2F6 gas plasma exposure of Si surface leads to the deposition of residual film containing carbon and fluorine. The narrow scan spectra of C 1s show various bonding states of carbon as C-Si, C-F/H, C-CFx(x $\leq$ 3), C-F, C-F2, and C-F3. The chemical bonding states of fluorine are described with F-Si, F-C and F-O. And the oxygen and silicon are also detected. The effects of parameters for reactive ion etching as CHF3/C2F6 gas ratio, RF power, and pressure are investigated.

• 한국세라믹학회지
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• 제54권4호
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• pp.340-348
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• 2017

$SiC_f/SiC$ composites were joined using a $60{\mu}m-thick$ $Ti_3AlC_2$ or $Ti_3SiC_2$ MAX phase tape. The filler tape was inserted between the $SiC_f/SiC$ composites containing a 12 wt.% $Al_2O_3-Y_2O_3$ sintering additive. The joining was performed to a butt-joint configuration at $1600^{\circ}C$ or $1750^{\circ}C$ in an Ar atmosphere by applying 3.5 MPa using a hot press. Microstructural and phase analyses at the joining interface confirmed the decomposition of $Ti_3AlC_2$ and $Ti_3SiC_2$, indicating the joining by solid-state diffusion. The results showed sound joining interface without the presence of cracks. Joining strengths higher than 150 MPa could be obtained for the joints using $Ti_3AlC_2$ or $Ti_3SiC_2$ at $1750^{\circ}C$, while those for joined at $1600^{\circ}C$ decreased to 100 MPa approximately without the deformation of the joining bodies. The thickness of initial filler tape was reduced significantly after joining because of the decomposition and migration of MAX phase owing to the plasticity at high temperatures.

• 한국세라믹학회지
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• 제50권6호
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• pp.359-363
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• 2013

Silicon carbide and its composites are being considered as a nuclear fuel cladding material for LWR nuclear reactors because they have a low neutron absorption cross section, low hydrogen production under accident conditions, and high strength at high temperatures. The SiC composite cladding tube considered in this study consists of three layers, monolith CVD SiC - $SiC_f$/SiC composite -monolith CVD SiC. The volume fraction of SiC fiber and surface roughness of the composite layer affect mechanical and corrosion properties of the cladding tube. In this study, various types of SiC fiber preforms with tubular shapes were fabricated by a filament winding method using two types of Tyranno SA3 grade SiC fibers with 800 filaments/yarn and 1600 filaments/yarn. After chemical vapor infiltration of the SiC matrix, the surface roughness and fiber volume fraction were measured. As filament counts were changed from 800 to 1600, the surface roughness increased but the fiber volume fraction decreased. The $SiC_f$/SiC composite with a bamboo-like winding pattern has a smaller surface roughness and a higher fiber volume fraction than that with a zigzag winding pattern.

• Composites Research
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• 제36권3호
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• pp.180-185
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• 2023

본 논문에서는 스프레딩된 SiC 섬유를 적용해 SiC_f/SiC를 제조하였을 경우, 섬유의 분산도가 복합소재의 내부구조 및 기계적 강도에 어떠한 영향을 주는지를 연구하였다. Spread SiC 섬유를 적용한 시편의 섬유 체적비는 non-spread 시편 대비 9%p 감소하였으며, 수지 슬러리가 섬유 사이로 더 원활히 함침되어 기지내 기공도 거의 발견되지 않았다. 각 시편의 섬유 분산도를 비교하기 위해, 복합소재 내 섬유간 이격거리를 수치화하고 평가하는 방법을 제안하였다. 그 결과 spread 시편의 섬유간 중심거리는 non-spread 시편 대비 2.23 ㎛ 증가하였으며, 섬유 표면 사이 거리는 42.6%로 대폭 증가하였다. 3점 굽힘시험을 통해 spread 시편의 굽힘강도가 non-spread 시편 대비 49.3% 가량 높으며, 시험 데이터의 편차도 더 균일함을 확인하였다. 따라서 복합소재 기지내 SiC 섬유의 분산도 향상이 SiC_f/SiC의 균일한 기지상 치밀화와 기계적 강도 증가에 매우 큰 영향을 미친다는 점을 알 수 있다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.204-209
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• 2004

SiC materials have been extensively studied for high temperature components in advanced energy system and advanced gas turbine. However, the brittle characteristics of SiC such as low fracture toughness and low strain-to fracture still impose a severe limitation on practical applications of SiC materials. For these reasons, $SiC_f/SiC$ composites can be considered as a promising for various structural materials, because of their good fracture toughness compared with monolithic SiC ceramics. But, high temperature and pressure lead to the degradation of the reinforcing fiber during the hot pressing. Therefore, reduction of sintering temperature and pressure is key requirements for the fabrication of $SiC_f/SiC$ composites by hot pressing method. In the present work, Monolithic LPS-SiC was fabricated by hot pressing method in Ar atmosphere at 1760 $^{\circ}C$, 1780 $^{\circ}C$, 1800 $^{\circ}C$ and 1820 $^{\circ}C$ under 20 MPa using $Al_2O_3-Y_2O_3$ system as sintering additives in order to low sintering temperature. The starting powder was high purity ${\beta}-SiC$ nano-powder with an average particle size of 30 nm. Monolithic LPS-SiC was evaluated in terms of sintering density, micro-structure, flexural strength, elastic modulus and so on. Sintered density, flexural strength and elastic modulus of fabricated LPS-SiC increased with increasing the sintering temperature. In the micro-structure of this specimen, it was found that grain of sintered body was grown from 30 nm to 200 nm.

• 한국세라믹학회지
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• 제51권5호
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• pp.453-458
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• 2014

SiC and its composites have been considered for use as nuclear fuel cladding materials of pressurized light water reactors. In this study, a $SiC_f$/SiC composite as a constituent layer of SiC triplex fuel cladding was fabricated using a chemical vapor infiltration (CVI) process in which tubular SiC fiber preforms were prepared using a filament winding method. To enhance the matrix density of the composite layer, winding patterns, deposition temperature, and gas input ratio were controlled. Fiber arrangement and porosity were the main parameters influencing densification behaviors. Final density of the composites decreased as the SiC fiber volume fraction increased. The CVI process was optimized to densify the tubular preforms with high fiber volume fraction at a high $H_2$/MTS ratio of 20 at $1000^{\circ}C$; in this process, surface canning of the composites was effectively retarded.