• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.9
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• pp.681-685
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• 2012

We investigated the dry etching characteristics of TiN in $TiN/Al_2O_3$ gate stack using a inductively coupled plasma system. TiN thin film is etched by BCl3/He plasma. The etching parameters are the gas mixing ratio, the RF power, the DC-bias voltages and process pressures. The highest etch rate is in $BCl_3/He$ (25%:75%) plasma. The selectivity of TiN thin film to $Al_2O_3$ is pretty similar with $BCl_3/He$ plasma. The chemical reactions of the etched TiN thin films are investigated by X-ray photoelectron spectroscopy. The intensities of the Ti 2p and the N 1s peaks are modified by $BCl_3$ plasma. Intensity and binding energy of Ti and N could be changed due to a chemical reaction on the surface of TiN thin films. Also we investigated that the non-volatile byproducts such as $TiCl_x$ formed by chemical reaction with Cl radicals on the surface of TiN thin films.

• Journal of Photoscience
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• v.1 no.2
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• pp.107-111
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• 1994

Photocatalytic ($\lambda$$_{ex}$ > 300 nm) reaction at room temperature by platinized titanium (IV) oxide particles produced 1-methyl-1, 2, 3, 4-tetrahydroisoquinolines (MIQ's) from phenethylamines in aqueous ethanol suspension under deaerated atmosphere. Among the phenethylamines, dopamine (2-(3, 4-dihydroxyphenyl) ethylamine) showed the highest reactivity to give MIQ almost selectively under the neutralized conditions. The other phenethylamines gave predominantly N-alkylated and N, N-dialkylated products in the methanol or ethanol solutions. The reaction mechanism includes a Schiff base intermediate to undergo either nucleophilic attack leading to MIQ or reduction to N-alkylated products.

• Applied Chemistry for Engineering
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• v.3 no.1
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• pp.119-129
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• 1992

The rates of mass transfer with the alkaline hydrolysis of ethyl acetate and n-butyl acetate were measured by using a modified Lewis cell. The rates of mass transfer with chemical reaction were independent of the speed of agitation, and the reaction enhancement factors were independent of the ionic strength. The second order reaction rate constants of ethyl acetate and n-butyl acetate could be obtained from an approximate solution of a diffusion equation by film theory, and their values were $0.041m^3/kg\;mol{\cdot}s$ and $0.338m^3/kgmol{\cdot}s$, respectively.

• Bulletin of the Korean Chemical Society
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• v.16 no.6
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• pp.479-483
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• 1995

The synergistic extraction of palladium(Ⅱ) was studied with 1,2-dichloroethane containing thenoyltrifluoroacetone (TTA; HA) and tri-n-octylphosphine oxide (TOPO; S). The main composition of synergistic adduct extracted into 1,2-dichloroethane phase was found to be PdA2S2. The equilibrium constants of the synergistic reaction were calculated. The application of this method to synthetic mixture for the separation of Pd from Pt was developed.

• YAKHAK HOEJI
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• v.38 no.4
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• pp.455-461
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• 1994

Each nitrogen and oxygen site isotope enriched the cyclophosphamide metabolite phosphoramide mustard was synthesized. Reaction of N,N-bis(2-chloroethyl)phosphoramidic dichloride$[Cl_2P(O)N(CH_2CH_2Cl)_2]$ with benzyl alcohol and ammonia gave N,N-bis(2-chloroethyl)phosphorodiamidic acid phenylmethyl ester $[BzO(H_2N)P(O)N(CH_2CH_2Cl)_2]$. Catalytic hydrogenation of this benzyl ester followed by the addition of cyclohexylamine provided PM. Incorporation of $^{15}NH_3$ into this general scheme gave PM with a $^{15}NH_2$ moiety. Glycine-$^{15}N$ was converted to bis(2-chloroethyl)amine-$^{15}N$ hydrochloride which, in turn, provided for N,N-bis(2-chloroethyl)phosphorodiamidic-$^{15}N$ dichloride. Use of this compound in the general synthetic pathway yielded PM CHA with $^{15}N$ in the mustard moiety. $^{17}O$-Enriched PM was generated through the use of benzyl alcohol-$^{17}O$. To obtain the alcohol, labelled benzaldehyde was made by exchange with $^{17}OH_2$ and was then reduced with sodium borohydride.

• Archives of Pharmacal Research
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• v.15 no.4
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• pp.292-297
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• 1992

Coupling of naphthacylpyridinium bromide 2 [1-(2-naphthyl) ethanone-2-pyridinium bromide] with N-nitrosoacetarylamides afforded C-(2-naphthoyl)-N-arylmethanohydrazonoylpyridinium bromides 3A-C. Treatment of 3A-C with base afforded the corresponding tetrazines 6A-C. Cycloaddition of nitrilimines 5A-C to N-arylmaleimides, acrylonitrile, ethyl acrylate, acrylamide, fumaronitrile, $\alpha$-cyanocinnamonitriles, ethyl $\alpha$-cyano-p-nitrocinnamates and $\alpha$-cyano-p-nitrocinnamamide afforded the corresponding cycloadducts 7-14, respectively. The cycloadducts 11-14 undergo a facile thermal elimination of hydrogen cyanide to give the corresponding pyrazoles 18-21 respectively.

• Journal of the Korean Chemical Society
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• v.31 no.4
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• pp.352-358
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• 1987

Rate constants for the hydrolysis of para-substituted phenyl N-(p-chlorobenzoyl)chloroformimidate (I) derivatives in 1 : 4 dioxane-water at $25^{\circ}C$ have been determined. Rate data, substituent effect $(\rho\>{\rho}^+)$, product analysis and MO calculation indicate that the uncatalyzed reaction proceeds through an $S_N1$ mechanism involving the formation of azocarbonium ion (II) below pH 3.0, and the base-catalyzed reaction proceeds through an $S_N2$ mechanism via transition state (III) above pH 4.0. The relative stability of four peri planar conformational isomers were (E-ap) > (Z-ap) > (E-sp) > (Z-ap), respectively, and the most stable stereo structures shows that the Y-substituted phenyl group $(C_6H_4-Y)$ occupy vertical $(90^{\circ})$ position on the plane of the benzimidochloroformyl group in (E-ap) conformer. The nucleophilic substitution of water molecule occurs by sigma attack to the activatived azomethine carbon atom of (I) derivatives.

• Journal of the Korean Chemical Society
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• v.28 no.3
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• pp.155-162
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• 1984

Kinetic studies for the nucleophilic substitution reactions of para-substituted benzyl bromides and benzyl iodide with anilines were carried out in MeOH-MeCN mixtures at 35.0$^{\circ}$C. Hammett $ {\rho}_N,\;{\rho}_C$, Bronsted $ {\beta}$ and solvatochromic correlation coefficient a, s values were determined in order to clarify the transition state variations caused by changing nucleophiles, substituents, leaving group and solvents. The results of solvatochromic equation showed that ${\pi}^{ast}$effect was a dominant factor for the reaction systems studied. It was shown that the reaction proceeds via the dissociative $S_N$2 mechanism using the potential energy surface model approach. The potential energy surface model approach however failed to account for the transition state variation due to leaving group changes. The quatum mechanical approach showed that kinetic results were consistent with proposed dissociative $S_N$2 mechanism.

• Korean Chemical Engineering Research
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• v.56 no.4
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• pp.600-606
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• 2018

The influence of acidity in MTT zeolite of different Si/Al molar ratio's on the catalyst activity in methanol-to-olefin (MTO) reaction has been investigated. The Si/Al ratio was controlled with the Al content in the gel when N,N,N',N'-tetramethyl-1,3-diaminopropane was used as a structure directing agent (SDA). The gel composition was controlled to $20SiO_2$ : 30SDA : x (=0.25~1.25)$NaAlO_2$ : 2NaOH : $624H_2O$, which was subject to the hydrothermal synthesis at 433 K for 4 days. As the composition of sodium aluminate decreased, the particle size of MTT zeolite increased, and also the amount of acid sites decreased. To investigate the catalytic performance, MTO reaction was carried out at 673 K with $1.2h^{-1}$ WHSV. It was found that the H-MTT (1.00Al) catalyst with a Si/Al molar ratio of 24 maintained the methanol conversion over 90% for 900 min.

• Journal of Korean Society of Water and Wastewater
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• v.18 no.2
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• pp.121-127
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• 2004

It is necessary to supply external carbon source for enhancement of biological nitrogen removal from domestic wastewater with low influent C/N ratio. Sulfide was chosen as a cost effective electron donor and reaction stoichiometry for autotrophic denitrification was investigated by conducting bench-scale experiments in this study. Higher sulfur to nitrogen (S/N) ratio than the calculated value from theoretical reaction stoichiometry was required when the anoxic reactor was operated at open condition because dissolved oxygen introduced by surface aeration reacted with sulfide with ease. In addition, higher sulfate production and lower yield of microorganism could be observed under the same condition. It was possible to obtain reliable reaction stoichiometry for autotrophic denitrification by establishing pure anoxic condition. Linear relationship between bacterial growth and consumption of nitrate, sulfide, alkalinity, and sulfate production enabled to derive a relatively correct reaction stoichiometry for autotrophic denitrification when sulfide was used as an electron donor.