• Progress in Superconductivity
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• 제14권1호
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• pp.1-10
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• 2012

We fabricated a closed coils by using resistive-joint method and the joint resistance of the coils were estimated by field decay technique in liquid nitrogen. We used the Runge-kutta method for the numerical analysis to calculate the decay properties. The closed coil was wound by $(Bi,Pb)_2Sr_2Ca_2Cu_3O_x$/Ag tape. Both ends the tape were overlapped and soldered to each other. The current was induced in a closed coils by external magnetic flux density. Its decay characteristic was observed by means of measuring the magnetic flux density generated by induced current at the center of the closed coil with hall sensor. The joint resistance was calculated as the ratio of the inductance of the loop to the time constants. The joint resistances were evaluated as a function of critical current of loop, contact length, sweep time, and external magnetic flux density in a contact length of 7 cm. It was observed that joint resistance was dependent on contact length of a closed coil, but independent of critical current, sweep time, and external magnetic flux density. The joint resistance was measured to be higher for a standard four-probe method, compared with that for the field decay technique. This implies that noise of measurement in a standard four-probe method is larger than that of field decay technique. It was estimated that joint resistance was $8.0{\times}10^{-9}{\Omega}$ to $11.4{\times}10^{-9}{\Omega}$ for coils of contact length for 7 cm. It was found that 40Pb/60Sn solder are unsuitable for persistent mode.

• 한국표면공학회지
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• 제50권5호
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• pp.411-420
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• 2017

In this paper, two methods of making the Pd-added $SnO_2$ ($Pd-SnO_2$) powder with pure tetragonal phase by the hydrazine method were suggested and compared in terms of crystal structure, surface morphology, and alcohol gas response. One of the addition methods is to use $PdCl_2$ as a Pd source, the other is to use Pd-based organic with oleylamine (OAM). When Pd concentration was increased from 0 to 5 wt%, the average grain size of $Pd-SnO_2$ made with Pd-OAM were decreased from 32 to 12 nm. In the case of using with $PdCl_2$, grain size of the $PdCl_2$ fell to less than 10 nm. However, agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The crack-free $Pd-SnO_2$ thick films were able to successfully fill the $30{\mu}m$ gap of patterned Pt electrodes by optimized ink dropping method. Also, the 2 wt% $Pd-SnO_2$ thick film made with PdCl2 showed gas responses ($R_{air}/R_{gas}$) of 3.7, 5.7 and 9.0 at alcohol concentrations of 10, 50 and 100 ppm, respectively. On the other hand, the prepared 3 wt% $Pd-SnO_2$ thick film with Pd-OAM exhibited very excellent responses of 3.4, 6.8 and 12.2 at the equivalent measurement conditions, respectively. The 3 wt% $Pd-SnO_2$ thick film with Pd-OAM has a specific surface area of $31.39m^2/g$.

• 동력기계공학회지
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• 제19권3호
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• pp.11-15
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• 2015

In this paper, the multi-point hydrogen detection system based on the combination of the hetero-core optical fiber SPR hydrogen tip sensor and interrogator by pseudorandom noise (PN) code correlation reflectometry has been developed. In a light intensity-based experiment with an LED operating at 850 nm, it has been presented that a transmitted loss change of 0.32dB was induced with a response time of 25 s for 4% $H_2$ in $N_2$ in the case of the 25-nm Au, 60-nm $Ta_2O_5$, and 5-nm Pd multi-layers film. The proposed sensor characteristic shows excellent reproducibility in terms of loss level and time response for the in- and out- $H_2$ action. In addition, in the experiment for multi-point hydrogen detection, all sensors show the real-time response for 4% hydrogen adding with reproducible working. As a result, the real-time multi-point hydrogen detection could be realized by means of the combination of interrogating system and hetero-core optical fiber SPR hydrogen tip sensors.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.78-79
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• 2008

In this paper, poly 3C-SiC thin films were grown on $SiO_2$/Si by atmospheric pressure chemical vapor deposition (APCVD) using HMDS, $H_2$, and Ar gas at $1100^{\circ}C$ for 30 min, respectively. And then, palladium films were deposited on poly 3C-SiC by RF magnetron sputter. Thickness, uniformity, and quality of these samples were performed by SEM. Crystallinity and preferred orientationsof palladium were analyzed by XRD. And Pd/poly 3C-SiC schottky diodes were fabricated and characterized by current-voltage measurements. Its electric current density Js and barrier height voltage were measured as $2\times10^{-3}$ A/$cm^2$, 0.58 eV, respectively. And these devices operated about $350^{\circ}C$. From results, Pd/poly 3C-SiC devices are promising for high temperature hydrogen sensor and applications.

• Advances in materials Research
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• 제2권4호
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• pp.181-193
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• 2013

Description and theory of spin coating technique has been elaborately outlined and a spin coating machine designed and fabricated using affordable components. The system was easily built with interdisciplinary knowledge of mechanics, fluid mechanics and electronics. This equipment employs majorly three basic components and two circuit units in its operation. These include a high speed dc motor, a proximity sensor mounted at a distance of about 15 mm from a reflective metal attached to the spindle of the motor to detect every passage of the reflective metal at its front and generate pulses. The pulses are transmitted to a micro-controller which process them into rotational speed (revolution per minute) and displays it on a lead crystal display (LCD) which is also a component of the micro-controller. The circuit units are a dc power supply unit and a PWM motor speed controlling unit. The various components and circuit units of this equipment are housed in a metal casing made of an 18 gauge black metal sheet designed with a total area of 1, $529.2cm^2$. To illustrate the use of the spin-coating system, ZnO sol-gel films were prepared and characterized using SEM, XRD, UV-vis, FT-IR and RBS and the result agrees well with that obtained from standard equipment and a speed of up to 9000 RPM has been achieved.

• 센서학회지
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• 제8권2호
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• pp.115-123
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• 1999

PSG(800nm)/$Si_3N_4$ (150nm)로 구성된 유전체 membrane 윗면에 heater와 감지전극을 등일면상에 동시에 형성하였다. 제작된 소자의 전체 면적은 $3.78{\times}3.78mm^2$이고, diaphragm의 면적은 $1.5{\times}1.5mm^2$이며, 감지막치 면적은 $0.24{\times}0.24mm^2$였다. 그리고 diaphragm내의 열분포 분석을 유한요소법을 이용하여 수행하였으며, 실제로 제작된 소자의 열분포와 비교하였다. 소비전력은 동작온도 $350^{\circ}C$에서 약 85mW였다. Sn 금속막을 상온과 $232^{\circ}C$의 두 가지 기판온도에서 열증착하였고, 이를 $650^{\circ}C$의 산소분위기에서 3시간 열산화함으로써 $SnO_2$ 감지막을 형성하였다. 그리고 이를 SEM과 XRD로 특성을 분석하였다. 제작된 소자에 대해서 온도 및 습도에 대한 감지막의 영향 및 부탄가스에 대한 반응특성도 조사하였다.

• 센서학회지
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• 제11권3호
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• pp.132-137
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• 2002

본 연구에서는 온도에 따른 압전특성이 매우 안정적인 $LiTaO_3$ ($x-112^{\circ}$ y) 단결정을 이용하여 압전변압기를 제작하고 그 특성을 분석하였다. 제작시 $LiTaO_3$ 단결정의 변환효율이 낮은 단점을 보완하기 위해 Lame'-mode를 이용하여 길이와 폭의 비가 2:1인 압전변압기를 제작하고 PSpice를 이용하여 진동 모드 해석, 입력전압에 따른 출력전압특성 및 진동속도특성을 분석하였다. 제작한 압전변압기는 길이방향의 제 2차 고조파 주파수와 폭방향의 기본공진주파수가 결합된 290.83[kHz]에서 입력전압에 대한 최대출력전압이 나타났으며, 약 10배 정도의 승압비를 얻을 수 있었다.

• 한국진공학회지
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• 제18권4호
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• pp.259-265
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• 2009

본 연구에서는 열증착법을 이용하여 합성된 단결정의 산화아연 나노선들을 이용하여 전계효과트랜지스터를 제작하여 광학, 표면반응 및 전기화학적인 거동들에 대한 기초 연구들을 수행하였다. 100 nm의 지름과 길이 5 um 길이를 갖는 단결정 산화아연나노선의 전자 농도와 이동도는 각각 $1.30{\times}10^{18}cm^{-3}$과 $15.6cm^2V^{-1}s^{-1}$이었으며, 자외선을 나노선에 조사한 경우 약 400배 정도 전류가 증가하였다. 또한 나노선들은 여러 농도의 수소와 일산화탄소에 대해 잘 알려진 표면반응으로 기인한 기체 감지 특성을 보였고, 0.1 M NaCl 전해질 내에서 전형적인 산화아연의 나노선의 전기적 특성을 유지함을 확인하였다.

• The Korean Journal of Ceramics
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• 제7권1호
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• pp.36-40
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• 2001

In order to fabricate uncooled IR sensors for pyroelectric applications, multilayered thin films of Pt/PbTiO$_3$/Pt/Ti/Si$_3$N$_4$/SiO$_2$/Si and thermally isolating membrane structures of square-shaped/cantilevers-shaped microstructures were prepared. Cavity was also fabricated via direct silicon wafer bonding and etching technique. Metallic Pt layer was deposited by ion beam sputtering while PbTiO$_3$ thin films were prepared by sol-gel technique. Micromachining technology was used to fabricate microstructured-membrane detectors. In order to avoid a difficulty of etching active layers, silicon-nitride membrane structure was fabricated through the direct bonding and etching of the silicon wafer. Although multilayered thin film deposition and device fabrications were processed independently, these could b integrated to make IR micro-sensor devices.

• 한국정보전자통신기술학회논문지
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• 제12권4호
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• pp.366-372
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• 2019

본 논문에서는 불소가 함유된 상용 폴리이미드를 사용하여 빗살형 전극을 갖는 정전용량형 습도센서를 제작하고 특성 측정 및 분석을 수행하였다. 먼저 상용 폴리이미드의 성분 분석을 위해 실리콘 웨이퍼 상에 패턴닝을 하고 열처리 공정을 수행한 후 EDS 분석을 수행하였다. 분석 결과 탄소(C) 62.48 Wt%, 산소(O) 9.38 Wt% 그리고 불소(F) 성분이 평균 8.44 Wt% 포함되어있는 것을 알 수 있었다. IDT구조에 대한 설계값을 토대로 제작된 습도센서의 면적은 $1.56{\times}1.66mm^2$이며, 전극의 넓이와 전극간 폭은 동일하게 각각 $3{\mu}m$, 센서의 감도를 높이기 위해 전극 수를 166개, 길이를 1.294mm로 제작하였다. 제작된 센서에 대한 기본특성 측정 결과 감도는 24 fF/%RH, 선형 특성 < ${\pm}2.5%RH$ 그리고 히스테리시스는 < ${\pm}4%RH$로 나타났으며, 주파수 특성은 10kHz, 20kHz, 50kHz, 100kHz에서 습도변화에 따른 용량값 변화를 측정한 결과 주파수가 증가할수록 동일 습도에서 용량값은 작아지는 것을 확인할 수 있었으며 10kHz와 100kHz의 습도변화에 따른 용량값 편차는 평균 0.3pF으로 측정되었다.