• Journal of the Microelectronics and Packaging Society
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• v.27 no.2
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• pp.11-17
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• 2020

In this study, Ag-functionalized SnO₂ nanowires are presented for NO₂ gas sensitive sensors at low temperatures (50℃). SnO₂ nanowires were synthesized using vapor-liquid-solid method, and Ag metal particles were functionalized on the surface of SnO₂ nanowires using flame chemical vapor deposition method. As a result of the sensing test about Ag-functionalized SnO₂ nanowires based sensor, the response (R_g/R_a) to 10 ppm NO₂ was 1.252 at 50℃. We believe that metal-functionalizing is a one of good way to increase the feasibility about semiconductor gas sensor.

• Journal of Sensor Science and Technology
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• v.5 no.6
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• pp.7-14
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• 1996

In order to develop gas sensor operating at low temperature, thick film $Co_{3}O_{4}$ sensor was fabricated. $Co_{3}O_{4}$ powder was prepared by precipitation from cobalt nitrate solution and the powders containing ethylene glycol as a binder was screen-printed on alumina substrate. Characteristics of sensitivity, response time, and recovery were investigated in terms of binder content and heat treating conditions. The $Co_{3}O_{4}$ sensor contained 15% ethylene glycol and heat-treated at $300^{\circ}C$ for 24hr showed the highest sensitivity at the operating temperature of $250^{\circ}C$. Its sensitivity of 1.1 to 5000ppm butane gas was very high, as compared with $0.8{\sim}0.85$ at the operating temperature of $350{\sim}400^{\circ}C$ for a commercial $SnO_{2}$ gas sensor. It is found that response time was fast, but recovery was poor for the sensor.

• Journal of the Korean institute of surface engineering
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• v.50 no.2
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• pp.125-130
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• 2017

ZnO nanowires were synthesized and annealed at various temperatures of $500-800^{\circ}C$ in oxygen atmosphere to investigate hydrogen gas sensing properties. The diameter and length of the synthesized ZnO nanowires were approximately 50-100 nm and a few $10s\;{\mu}m$, respectively. $H_2$ gas sensing performance of the ZnO nanowires sensor was measured with electrical resistance changes caused by $H_2$ gas with a concentration of 0.1-2.0%. The response of ZnO nanowires at room temperature to 2.0% $H_2$ gas is found to be two times enhanced by annealing process in $O_2$ atmosphere at $800^{\circ}C$. In the current study, the effect of heat treatment in $O_2$ atmosphere on the gas sensing performance of ZnO nanowires was studied. And the underlying mechanism for the sensing improvement of the ZnO nanowires was also discussed.

• Journal of Sensor Science and Technology
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• v.4 no.3
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• pp.71-79
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• 1995

For the fabrication of high sensitive intrinsic fiber optic Fabry-Perot interferometeric sensor, the deposition conditions of $TiO_{2}$ thin film used to the internal mirrors of the sensor were investigated. The $TiO_{2}$ film deposited by RF magnetron sputter had higher refractive index ($2.36{\sim}2.48$) and better stoiciometry (O/Ti = 2) than that deposited bye-beam evaporator. In the case of forming $TiO_{2}$ internal mirror by using fusion splicing technique, the $TiO_{2}$ reflection mirror deposited by RF magnetron sputter in the condition of 120W RF power showed high. reflectance and excellent controllability of reflection power. The fabricated intrinsic fiber optic Fabry-Perot interferometer with two $TiO_{2}$ internal mirrors deposited under the condition showed very stable fringe patterns. It is, therefore, expected that the interferometer will be applicable to various high precision sensors.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.5
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• pp.429-434
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• 2003

The magnetic field sensor was fabricated with superconducting ceramics of BiPbSrCaCuO system. The sensor at liquid nitrogen temperature showed the increase of electrical resistance by applying magnetic field. Actually, the voltage drop across the sensor was changed from zero to a value more than 100 $\mu\textrm{V}$ by the applied magnetic field. The change of electrical resistance depended on magnetic field. The sensitivity of this sensor was 2.9 $\Omega$/T. The sensing limit was about 1.5${\times}$10$\^$-5/ T. The increase of electrical resistance by the magnetic field was ascribed to a modification of the Josephson junctions due to the penetrating magnetic flux into the superconducting material. Considering the observed properties of the superconductor with trapped magnetic flux, a magnetic sensor was fabricated to detect simultaneously both the intensity and the direction of the magnetic field.

• Journal of Sensor Science and Technology
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• v.30 no.3
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• pp.175-180
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• 2021

In this paper, methods for improving the sensitivity of gas sensors to NO₂ gas are presented. A gas sensor was fabricated based on an SnO₂ nanowire network using the vapor-phase-growth method. In the gas sensor, the Au electrode was replaced with a fluorinedoped tin oxide (FTO) electrode, to achieve high sensitivity at low temperatures and concentrations. The gas sensor with the FTO electrode was more sensitive to NO₂ gas than the sensor with the Au electrode: notably, both sensors were based on typical SnO₂ nanowire network. When the Au electrode was replaced by the FTO electrode, the sensitivity improved, as the contact resistance decreased and the surface-to-volume ratio increased. The morphological features of the fabricated gas sensor were characterized in detail via field-emission scanning electron microscopy and X-ray diffraction analysis.

• Journal of Sensor Science and Technology
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• v.7 no.4
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• pp.271-278
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• 1998

A ISFET-based glucose sensor has inherent problems such as low sensitivity, drift effect and long response time. For that reason, a amperometric actuation technique was introduce to make a highly sensitivity of the ISFET glucose sensor with a Pt actuator, which electrolyzes $H_2O_2$, one of the by a by-products of the oxidation reaction of glucose. Moreover, a potential-step measurement method detecting response by only the electrolysis of $H_2O_2$ was developed for eliminating a drift problem. The operation characteristics of ISFET-based glucose sensor was improved by using the amperometric actuation and a measurement techniques. The fabricated ISFET glucose sensor is shown good operation such as characteristics(30mM PBS, about 26mV/decade) and linearity. A portable glucose meter with a highly resolution by using the fabricated ISFET-based glucose sensor with Pt actuation was developed and its characteristics investigated.

• Journal of the Korean institute of surface engineering
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• v.48 no.5
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• pp.238-244
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• 2015

$TiO_2$ nanowires were synthesized by hydrothermal method for the application to ethanol gas sensor. $TiO_2$ nanowires were decorated with Au nanoparticles to improve the sensitivity to ethanol gas. Scanning electron microscopy and Transmission electron microscopy revealed that the synthesized nanowires had diameters and lengths of approximately 100 - 200 nm and a few micrometers, respectively. Size of the Au nanoparticles decorated on the $TiO_2$ nanowires was observed to be in the range of 10 - 20 nm. X-ray diffraction confirmed that the decorated nanowires were composed of anatase-, rutile-$TiO_2$, and Au. The sensitivities of $TiO_2$ nanowires sensors decorated with Au were approximately 1.1 - 3.65 times as high as those of as-synthesized $TiO_2$ sensors for the ethanol concentration of 5 - 100 ppm at $200^{\circ}C$. The mechanism of the improved ethanol gas sensing of the $TiO_2$ nanowires decorated with Au nanoparticles is discussed.

• Korean Journal of Materials Research
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• v.4 no.2
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• pp.159-165
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• 1994

Two kinds of humidity sensor are made, one by anodizing pure aluminum and the other by evaporation Sn02 on the anodized pure alumia film, and their electrical characteristics are investigated in various humidity atmosphere. The change of surface resistance with humidity of $AI_2O_3/AI$ and $SnO_2-AI_2O_3/Al$ sensors are found to be $1.40 \times 10^{-2}\Omega$/RH and $1.56 \times 10^{-2}\Omega$/RH, respectively. The hysteresis phenomena associated with the irreversibility of surface resistance-humidity is less in $SnO_2-AI_2O_3/Al$ sensor than in $AI_2O_3/AI$. It is concluded that $SnO_2-AI_2O_3/Al$ film can be used as humidity sensor in room temperature region because temperature dependence of surface resistance of the film is found to be as $0.56 \times 10^{-2} \Omega /^{\circ}C$ in O~ $20^{\circ}C$ range, where as $2.50 \times 10^{-2} \Omega /^{\circ}C$ in 40-$50^{\circ}C$.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2000.05a
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• pp.125-128
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• 2000

Recently, development of advanced soil monitoring technology has became essential for effective site remediation. Soil gas evaluation is simple and powerful technology which can reduce the environmental impact during the survey of VOC contaminated area. In this research, the feasibility test of SnO$_2$ceramic gas sensor is conducted to improve soil gas measurement technology. As a result, it is successfully proved that this gas sensor has an possibility for soil gas monitoring.