• Journal of Sensor Science and Technology
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• v.3 no.2
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• pp.40-49
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• 1994

Potentiometric cell oxygen sensors using $CaF_{2}$ were fabricated for monitering the oxygen partial pressure in the low temperature range ($300^{\circ}C{\sim}$500^{\circ}C). The disk type oxygen sensors consist of a reference electrode: Air($O_{2}:21%$)|Pt, a solid electrolyte $CaF_{2}$, and a sensing metel Pt electrode. And the change in open circuit emf of the disk type cell was about 45mV for the oxygen concentration range, $0.1%{\sim}10%$, at the cell temperature of $400^{\circ}C$. Also, the reference electrode incorporated type sensor showed the change of 40mV for 0.1% to 10% oxygen partial pressure range.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.3
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• pp.57-65
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• 2003

In this study, we carry out reliability tests and investigate the failure mechanisms of the anodically bonded wafer level vacuum packaging (WLVP) MEMS gyroscope sensor. There are three failure mechanisms of WLVP: leakage, permeation and out-gassing. The leakage is caused by small dimension of the leak channel through the bonding interface and internal defects. The larger bonding width and the use of single crystalline silicon can reduce the leak rate. Silicon and glass wafer itself generates a large amount of outgassing including $H_2O$, $C_3H_5$, $CO_2$, and organic gases. Epi-poly wafer generates 10 times larger amount of outgassing than SOI wafer. The sandblasting process in the glass increases outgassing substantially. Outgassing can be minimized by pre-baking of the wafer in the vacuum oven before bonding process. An optimum pre-baking temperature of the wafers would be between $400^{\circ}C$ and $500^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.4
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• pp.205-209
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• 2016

In this paper, piezoelectric ceramics with the composition of $(Na_{0.525}K_{0.4425}Li_{0.0375})(Nb_{0.8975}Sb_{0.065}Ta_{0.0375})O_3+0.3wt%\;CoO+x\;CuO$ ($0.005{\leq}x{\leq}0.025$) (abbreviated to NKL-NST) were fabricated for ultrasonic sensor application. The effects of CuO addition and sintering on the microstructure and the piezoelectric properties of the NKL-NST ceramics were systematically studied. Excellent piezoelectric properties such as electromchanical coupling $factor(k_p)=0.415$, piezoelectric constant $(d_{33})=166pC/N$ and piezoelectric figure of merit $d_{{33}*}g_{33}=5.47pm^2/N$ were obtained from the 2.5 mol% CuO doped NKL-NST+0.3 wt%CoO ceramics sintered at $1,000^{\circ}C$ for 3 h.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1657-1659
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• 1999

Our $CO_2$ sensor is based on an electrochemical reaction involving NASICON, Ba-Stabilized $Na_2CO_3$, two Pt electrodes, $O_2$, and $CO_2$.. NASICON thin films were deposited by pulsed laser deposition(PLD). The sensitive electrode made of Ba-stabilized sodium carbonate was magnetron sputtered. An emf between two Pt electrodes was proportional to the logarism of the concentration of $CO_2$ in the ambient. This sensor has a sensitivity of 3.82mV/decade and does not show any saturation for $CO_2$ concentration as high as 200,000 ppm.

• Journal of Sensor Science and Technology
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• v.32 no.3
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• pp.169-173
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• 2023

With the increasing concern of global warming caused by greenhouse gases owing to the recent industrial development, there is a growing need for advanced technology to control these emissions. Among the various greenhouse gases, nitrogen dioxide (NO₂) is a major contributor to global warming and is mainly released from sources, such as automobile exhaust and factories. Although semiconductor-type NO₂ gas sensors, such as SnO₂, have been extensively studied, they often require high operating temperatures and complicated manufacturing processes, while lacking selectivity, resulting in inaccurate measurements of NO₂ gas levels. To address these limitations, a novel sensor using PbS quantum dots (QDs) was developed, which operates at low temperatures and exhibits high selectivity toward NO₂ gas owing to its strong oxidation reaction. Furthermore, the use of P3HT conductive polymer improved the thin film quality, reactivity, and reaction rate of the sensor. The sensor demonstrated the ability to accurately measure NO₂ gas concentrations ranging from 500 to 100 ppm, with a 5.1 times higher sensitivity, 1.5 times higher response rate, and 1.15 times higher recovery rate compared with sensors without P3HT.

• Electrical & Electronic Materials
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• v.3 no.1
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• pp.20-28
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• 1990

Pb(Zr, Ti)O$_{3}$-Pb(Ni, Nb)O$_{3}$계 세라믹스에 Ba를 치완시켜 Ba치환량의 증가에 따른 유전율, 전기기계결합계수 및 압전 d정수의 변화를 고찰하였다. 또한 Ba치환에 따른 세라믹스 소자의 송신감도 특성을 조사하고 큐리온도 이동에 따른 온도안정성을 고려하여 초음파 송신기용 압전소자에 응용가능함을 보였다.

• Proceedings of the Korean Vacuum Society Conference
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• 1997.02a
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• pp.69-69
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• 1997

• Journal of Sensor Science and Technology
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• v.5 no.6
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• pp.51-59
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• 1996

A flow sensor has been fabricated by preparing thin film Pt-heater and Bi-Sb thermocouples array on 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ dielectric diaphragm which has low thermal conductivity and balanced stress with silicon substrate for the purpose of improving the thermal isolation between heater and silicon substrate. Pt-heater showed nonlinear I-V characteristics due to the thermal isolation effect of the diaphragm. Its temperature coefficient of resistance was about $0.00378\;/^{\circ}C$ and Seebeck coefficient of Bi-Sb thermocouple was about $97\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and flow sensitivity increased as heater voltage increased or as the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_{2}$-flow sensitivity and thermal response time of the sensor were about $1.27\;mV{\cdot}(sccm)^{-1/2}$ and 0.13 sec., respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.447-449
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• 2004

The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.

• Journal of Sensor Science and Technology
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• v.4 no.2
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• pp.37-44
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• 1995

A coprecipitation method was used for preparing Ca and Pt doped $SnO_{2}$-based material. Crystallite size and specific surface area were investigated by TEM, XRD and BET analysis. $SnO_{2}(Ca)/Pt$ based thick film devices were prepared by a screen printing technique for hydrocarbon gas detecting. Then the electrical and sensing characteristics of devices were investigated. As Ca and Pt addition, the crystal growth of $SnO_{2}$ was suppressed during calcining and sintering, and the sensitivity of $SnO_{2}(Ca)/Pt$ thick film to gas was enhanced. Also any difference in the sensing properties has to be attributed to the Pt and Au electrode. For the 2000 ppm $CH_{4}$, the sensitivity of $SnO_{2}(Ca)/Pt$ thick film devices were about 83% at an operating temperature of $400^{\circ}C$.