• Title/Summary/Keyword: $O_2$ Sensor

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Realization of gas sensor using LTCC(Low Temperature Cofired Ceramic) technology (LTCC 기술을 이용한 가스센서 구현)

  • Jeon, J.I.;Choi, H.J.;Lee, Y.B.;Kim, K.S.;Park, J.H.;Kim, M.Y.;Im, C.I.;Mun, J.D.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.369-370
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    • 2005
  • LTCC (Low Temperature Cofired Ceramic) technology is one of technologies which can realize SIP (System-In-a-Package). In this paper realization of gas sensor using LTCC technology was described. In the conventional gas sensor structure, wire bonding method is generally used as an interconnection method whereas in the LTCC sensor structure, via was used for the interconnection. As sensing materials, $SnO_2$ was adopted. The effect of frit glass portion on the adhesion of the sensing material to the LTCC substrate and the electrical conductivity of the sensing material were analyzed. AgPd, PdO, Pt was added to the sensing material as an additive for improving the gas sensitivity and electrical conductivity and the effect of the amount of additives in the sensing material on the electrical conductivity was investigated. The effect of the amount of frit glass in the termination on the sensor performance, especially mechanical integrity, was considered and the crack initiation and propagation in the boundary between the sensing material and the termination was studied.

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$NO_{2}$ Sensing Properties of Oxide Semiconductor Thick Films (산화물 반도체형 후막 가스 센서의 이산화질소 감지 특성)

  • Kim, Seung-Ryeol;Yun, Dong Hyun;Hong, Hyung-Ki;Kwon, Chul-Han;Lee, Kyu-Chung
    • Journal of Sensor Science and Technology
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    • v.6 no.6
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    • pp.451-457
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    • 1997
  • The thick films of oxide semiconductors such as $WO_{3}$, $SnO_{2}$ and ZnO for the $NO_{2}$ detection of sub-ppm range have been prepared and their characteristics were investigated. It is showed that the optimum operating temperatures of the sensors are $300^{\circ}C$ and $220{\sim}260^{\circ}C$ for $WO_{3}$-based and $SnO_{2}$-based thick films, and ZnO-based thick films, respectively. Since the resistance of ZnO-based thick films are extremely high($>10^{6}{\Omega}$), the signal to noise ratio was comparatively low. In order to determine the selectivity, the films are exposed to the interfering gases such as ozone, ammonia, methane and the mixture of carbon monoxide and propane. $WO_{3}$-ZnO(3 wt.%) and $SnO_{2}-WO_{3}$(3 wt.%) thick film sensors show high sensitivity, good selectivity, excellent reproducibility and the linearity of $NO_{2}$ concentration versus sensor resistance. The preliminary results clearly demonstrated that the sensor can be successfully applied for the detection of $NO_{2}$ in sub-ppm range.

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Analysis of Temperature Distribution using Finite Element Method for SCS Insulator Wafers (유한요소법을 이용한 SCS 절연 웨이퍼의 온도분포 해석)

  • Kim, O.S.
    • Journal of Power System Engineering
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    • v.5 no.4
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    • pp.11-17
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    • 2001
  • Micronization of sensor is a trend of the silicon sensor development with regard to a piezoresistive silicon pressure sensor, the size of the pressure sensor diaphragm have become smaller year by year, and a microaccelerometer with a size less than $200{\sim}300{\mu}m$ has been realized, In this paper, we study some of the bonding processes of SCS(single crystal silicon) insulator wafer for the microaccelerometer. and their subsequent processes which might affect thermal loads. The finite element method(FEM) has been a standard numerical modeling technique extensively utilized in micro structural engineering discipline for design of SCS insulator wafers. Successful temperature distribution analysis and design of the SCS insulator wafers based on the tunneling current concept using microaccelerometer depend on the knowledge about normal mechanical properties of the SCS and $SiO_2$ layer and their control through manufacturing processes.

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Design and Fabrication of a Micro Gas Sensor Using Nano Sensing Materials on Multi-layer Type Micro Platform with Low Power Consumption (마이크로 플랫폼 상에 나노 감지 재료를 이용한 저전력 NOX 센서의 설계 및 제조)

  • Park, Sang-Il;Park, Joon-Shik;Lee, Min-Ho;Park, Kwang-Bum;Kim, Seong-Dong;Park, Hyo-Derk;Lee, In-Kyu
    • IEMEK Journal of Embedded Systems and Applications
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    • v.2 no.2
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    • pp.76-81
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    • 2007
  • A novel multi-layer type micro gas sensor for $NO_X$ detection was designed and fabricated. Micro platform defined as type II-1 in this article for micro gas sensor was fabricated using the MEMS technology to meet the demanding needs of lower power consumption. Nano composite materials were fabricated with nanosized tin oxide powder and $\underline{m}$ulti-$\underline{w}$all $\underline{c}$arbon $\underline{n}$ano $\underline{t}$ube (MWCNT) to improve sensitivity. We investigated characteristics of fabricated multi-layer type micro gas sensor with $NO_2$ concentration variations at constant 2.2 V. Sensitivity (S) of micro gas sensor were observed to increase from 2.9, to 7.4 and 11.2 as concentrations of $NO_2$ gases increased from 2.4 ppm, to 3.6 ppm and 4.9 ppm. When 2.4 ppm of $NO_2$ gas was applied, response time and recovery time of micro gas sensor were recorded as 101 seconds and 142 seconds, respectively.

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Study on the Seam Tracking by Using Fiber Sensor and X-Y Robot (Fiber Sensor와 X-Y Robot을 이용한 용접선 추적에 관한 연구)

  • 배철오;박영산;이성근;김윤식;안병원
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.5 no.1
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    • pp.144-149
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    • 2001
  • There are many types of seam tracking methods actually used in industrial spot. Lately, Non-contact sensor technics are mostly used because non-contact sensor has more advantage than contact sensor in many parts. This paper also concerned about fiber sensor a kind of non-contact sensor. X-Y robot and fiber sensor scan the seam tracking to be weld. After scanning, X-Y robot moves the first working point of being scanned and welding starts automatically. It makes an experiment on some types of Seam tracking like straight line tracking, leaned line tracking and curved line tracking to confirm how well the fibers sensor tracks the seam pass to be weld. And the seam pass that had been tracked was welded by inverter $CO_2$ voiding machine.

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Study on the Seam Tracking by Using Fiber Sensor and X-Y Robot (Fiber Sensor와 X-Y Robot을 이용한 용접선 추적에 관한 연구)

  • 배철오;이성근;김윤식;안병원;박영산
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2000.10a
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    • pp.558-561
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    • 2000
  • There are many types of seam tracking methods actually used in industrial spot. Lately, Non-contact sensor technics are mostly used because non-contact sensor has more advantage than contact sensor in many parts. This paper also concerned about fiber sensor a kind of non-contact sensor. X-Y robot and fiber sensor scan the seam tracking to be weld. After scanning, X-Y robot moves the first working point of being scanned and welding starts automatically. It makes an experiment on some types of Seam tracking like straight line tracking, leaned line tracking and curved line tracking to confirm how well the fibers sensor tracks the seam pass to be weld. And the seam pass that had been tracked was welded by inverter CO2 welding machine.

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A study of DSC using Ultrasonic and Thermal treatment on Photo-Electrode (염료감응형 태양전지 광전극 초음파 열처리에 관한 연구)

  • Hong, Ji-Tae;Kim, Mi-Jeong;Sim, Ji-Yong;Seo, Hyun-Woong;Kim, Hee-Je
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1291-1292
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    • 2007
  • Recently, there were many researches for efficiency improvement of DSC. Among of these works, research of surface treatment is still a prerequisite for electron diffusion, light-harvesting and surface state of DSC.[1] Using of the surface treatment, it can be raise up porosity of $TiO_2$ nano-crystalline structure on photo-electrode. There are chemical, physical, electrical and optical methods which raise up its porosity. In this paper, we have designed and manufactured MOPA-type ultrasonic circuit (100W, frequency and duty variable). Manufactured ultrasonic circuit to use to force cavity density and power into $TiO_2$ paste. Then, we have optimized forcing time, frequency and duty of ultrasonic irradiation for surface treatment of photo-electrode of DSC. In I-V characteristic test of DSC, ultrasonic and thermal treated DSC shows 19% improved its efficiency against monolithic DSC. And it shows stability of light-harvesting from drastically change of light irradiation test.

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The CO sensing properties of thick film gas sensor using Co3O4 powders prepared by hydrothermal reaction method (수열합성법으로 제조된 Co3O4 분말을 사용한후막 가스센서의 CO 감지 특성)

  • Kim, Kwang-Hee;Kim, Jeong-Gyoo;Park, Ki-Cheol
    • Journal of Sensor Science and Technology
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    • v.19 no.5
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    • pp.385-390
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    • 2010
  • CO sensing thick film gas sensors using $Co_3O_4$ powders prepared by hydrothermal reaction method, were fabricated, and their structural, electrical and CO gas sensing properties were investigated. The specific surface area of the $Co_3O_4$ powders obtained from BET analysis was about 79.0 $m^2/g$. XRD and SEM results show that the thick films heat-treated at $500^{\circ}C$ for 30 min after screen printing had the preferred orientation of (311) direction and the crystalline size was calculated to 221 $\AA$. The maximum activation energy obtained from the temperature-resistance characteristics was 3.11 eV in the temperature range of $290^{\circ}C$ to $310^{\circ}C$. The sensitivity to 1,000 ppm CO was about 150 %. The specific surface area, crystalline size, and maximum activation energy were increased significantly and the sensitivity for CO gas was improved largely.

$In_2O_3$ Thin Film Ozone Sensor Prepared by Sol-Gel Method (졸-겔법을 이용한 $In_2O_3$ 박막의 오존 센서)

  • Lee, Yun-Su;Song, Kap-Duk;Choi, Nak-Jin;Joo, Byung-Su;Kang, Bong-Hwi;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
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    • v.10 no.2
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    • pp.101-107
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    • 2001
  • A highly selective, sensitive and reliable ozone sensing $In_2O_3$ thin film was fabricated by a sol-gel method. The fabricated film is operated at a relatively lower temperature than ever developed thin films and saved operating power. $In_2O_3$ films deposited by sol-gel technique has been recently attracted because it is an economical and energy saving method and precisely controlled microstructure. Indium alkoxide precursor was synthesized from the reaction between indium hydroxide and butanol. PVA binder was used to improve adhesion of the films. The $In_2O_3$ thin films were obtained by spin coating from 1 to 5 times followed by drying at $100^{\circ}C$ and calcining at $600^{\circ}C$ for 1h. The film thickness was controlled by the number of coating time. The morphology and the thickness of the $In_2O_3$ films were examined by a SEM and XRD. The $In_2O_3$ thin films show a high sensitive to ozone gas at operating temperature of $250^{\circ}C$. The $In_2O_3$ sensor has very good selectivity to $CH_4$, CO, $C_4H_{10}$ and ethanol.

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Determination of quinine in aqueous solution by chemiluminescence method (화학발광법에 의한 수용액 중의 퀴닌 정량)

  • Lee, Hyun-Sook;Kim, Tae-Yeon;Choi, Kyoung-Hye;Karim, Mohammad Mainul;Bae, Hyun-Sook;Lee, Sang-Hak
    • Journal of Sensor Science and Technology
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    • v.15 no.5
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    • pp.317-322
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    • 2006
  • A method to determine quinine in aqueous solution by chemiluminescence method using a stopped flow system has been studied. The method is based on the increased chemiluminescence intensity with the addition of quinine to a solution of lucigenin and hydrogen peroxide. The effects of KOH concentration, flow rate of reagents, $H_{2}O_{2}$ concentration used for the masking of quinine on the chemiluminescence intensity have been investigated. The calibration curve for quinine was linear over the range from $1.0{\times}10^{-7}$ M to $1.0{\times}10^{-3}$ M, coefficient of correlation was 0.993 and the detection limit was $3.0{\times}10^{-8}$ M under the optimal experimental conditions of 1.0 M, 1.5 M, 3.0 mL/min for the concentration of $H_{2}O_{2}$, KOH and flow rate of reagents, respectively.