• Title/Summary/Keyword: $O_2$ Sensor

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Optical Voltage Sensor Using $SiO_2$ Pockels Cell ($SiO_2$ 포켈 소자를 이용한 광전압센서)

  • Shin, K.H.;Chun, J.P.;Cho, H.K.;Kim, S.K.;Kim, Y.H.;Kim, Y.S.;Park, H.S.
    • Proceedings of the KIEE Conference
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    • 1991.07a
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    • pp.846-849
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    • 1991
  • This paper reports the principle, system confiquration, test results of optical voltage sensor using quartz pockels cell. The Pockels effect of quartz material is used for designing optical voltage sensor. The quarts material has very high half-wave voltage, so, it can be applied to measure high voltage level. Experimental results show that the optical voltage sensor has excellent linear characteristics within the applied AC voltage of 1200V.

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Fabrication of Infrared Filters for Three-Dimensional CMOS Image Sensor Applications

  • Lee, Myung Bok
    • Transactions on Electrical and Electronic Materials
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    • v.18 no.6
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    • pp.341-344
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    • 2017
  • Infrared (IR) filters were developed to implement integrated three-dimensional (3D) image sensors that are capable of obtaining both color image and depth information at the same time. The combination of light filters applicable to the 3D image sensor is composed of a modified IR cut filter mounted on the objective lens module and on-chip filters such as IR pass filters and color filters. The IR cut filters were fabricated by inorganic $SiO_2/TiO_2$ multilayered thin-film deposition using RF magnetron sputtering. On-chip IR pass filters were synthetized by dissolving various pigments and dyes in organic solvents and by subsequent patterning with photolithography. The fabrication process of the filters is fairly compatible with the complementary metal oxide semiconductor (CMOS) process. Thus, the IR cut filter and IR pass filter combined with conventional color filters are considered successfully applicable to 3D image sensors.

Lithium Niobate (LiNbO3) Photonic Electric-Field Sensors

  • Jung, Hongsik
    • Journal of Sensor Science and Technology
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    • v.31 no.4
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    • pp.194-213
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    • 2022
  • This study comprehensively reviewed four types of integrated-optic electric-field sensors based on titanium diffused lithium-niobate waveguides: symmetric and asymmetric Mach-Zehnder interferometers, 1×2 directional couplers, and Y-fed balanced-bridge Mach-Zehnder interferometers. First, we briefly explain the crystal properties and electro-optic effect of lithium niobate and the waveguide fabrication process. We theoretically analyzed the key parameters and operating principles of each sensor and antennas. We also describe and compare the design, simulation, implementation, and performance tests: dc and ac characteristics, frequency response, dynamic range, and sensitivity. The experimental results revealed that the sensitivity of the sensor based on the Y-fed balanced bridge Mach-Zehnder interferometer (YBB-MZI) was higher than that of the other types of sensors.

Preparation of ZnO nanorods by hydrothermal method and their $NO_2$ sensing characteristics (수열합성법을 이용한 ZnO 나노로드의 제조 및 이산화질소 감응 특성)

  • Cho, Pyeong-Seok;Kim, Ki-Won;Lee, Jong-Heun
    • Journal of the Korean Vacuum Society
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    • v.15 no.5
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    • pp.506-511
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    • 2006
  • ZnO nanorods were prepared by the hydrothermal reaction of a solution containing $Zn(NO_3)_2{\cdot}6H_2O$, NaOH, cyclohexylamine, ethanol and water, and their $NO_2$ and CO sensing behaviors were investigated. By the control of water concentration in solution, the morphology and agglomeration of ZnO nanorods could be manipulated, which is associated with the variation of $[OH^-]$ resulted from an interaction between water and cyclohexylamine. Sea-urchin-like and well-dispersed ZnO nanorods were prepared at low and high water content, respectively. Well-dispersed ZnO nanorods showed 1.8 fold change in resistance at 1 ppm $NO_2$ while there was no significant change in resistance at 50 ppm CO. This selective detection of $NO_2$ in the presence of CO can be used in automated car ventilation systems.

Solid state gas sensors: improvement through material engineering

  • Han, Sang-Do;Korotcenkov, Ghenadii;Gwak, Ji-Hye
    • Journal of Sensor Science and Technology
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    • v.18 no.3
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    • pp.217-221
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    • 2009
  • Different methods of material engineering, used for improvement of solid state gas sensors parameters are reviewed in this report. The wide possibilities of material engineering in optimization of gas sensing properties were demonstrated on the example of $SnO_2,\;TiO_2\;and\;In_2O_3$-based sensors.

ZnO Nanorod UV Sensor Graphene Using Hydrothermal

  • Kim, Jeong-Hyeok;Park, Jun-Seo;Kim, Eun-Gyeom;Han, Il-Gi;Go, Hyeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.638-638
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    • 2013
  • ZnO는 넓은 밴드갭(3.37 eV)를 가지기 때문에 UV detector로 유용하게 쓰일 수 있다. 본 연구에서는 Graphene 위에 ZnO nanorod를 hydrothermal 방법을 사용하여 성장한 후 Graphene 위에 전극을 형성한 후 UV 센서를 제작하였다. Si의 기판위에 SiO2의 막을 증착을 하고 그 위에 Graphene을 전도시킨다. Graphene위에 ZnO nanorod의 성장을 위해서 ZnO seed layer를 sputtering 방법으로 얇게 증착을 시킨다. ZnO nanorod의 성장은 hydrothermal의 방법으로 Zinc nitrate hexahydrate와 암모니아를 수용액에 넣은 후 $80^{\circ}C$에서 성장하였다. Graphene 위에 ZnO가 없는 부분에 전극을 형성하여 UV의 세기에 따른 IV 전기적 특성의 변화를 관측한다.

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Highly Sensitive and Selective Ethanol Sensors Using Magnesium doped Indium Oxide Hollow Spheres

  • Jo, Young-Moo;Lee, Chul-Soon;Wang, Rui;Park, Joon-Shik;Lee, Jong-Heun
    • Journal of the Korean Ceramic Society
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    • v.54 no.4
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    • pp.303-307
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    • 2017
  • Pure $In_2O_3$, 0.5 and 1.0 wt% Mg doped $In_2O_3$ hollow spheres were synthesized by ultrasonic spray pyrolysis of a solution containing In-, Mg-nitrate and sucrose and their gas sensing characteristics to 5 ppm $C_2H_5OH$, p-xylene, toluene, and HCHO were measured at 250, 300 and $350^{\circ}C$. Although the addition of Mg decreases the specific surface area and the volume of meso-pores, the gas response (resistance ratio) of the 0.5 wt% Mg doped $In_2O_3$ hollow spheres to 5 ppm $C_2H_5OH$ at $350^{\circ}C$ (69.4) was significantly higher than that of the pure $In_2O_3$ hollow spheres (24.4). In addition, the Mg doped $In_2O_3$ hollow spheres showed the highest selectivity to $C_2H_5OH$. This was attributed to the dehydrogenation of $C_2H_5OH$ assisted by basic MgO into reactive $CH_3CHO$ and $H_2$.

Ultra Sensitive Detection of H2 in ZnO QD-based Sensors (ZnO양자점 기반 센서의 초고감도 수소 검지 특성)

  • Lee, Hyun-Sook;Kim, Wonkyung;Lee, Wooyoung
    • Journal of Sensor Science and Technology
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    • v.29 no.2
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    • pp.105-111
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    • 2020
  • Interest and demand for hydrogen sensors are increasing in the field of H2 leakage detection during storage/transport/use and detection of H2 dissolved in transformer oil for safety issues as well as in the field of breath analysis for non-invasively diagnosing a number of disease states for a healthy life. In this study, various ZnO-based sensors were synthesized by controlling the reduction in crystallite size, decoration of Pt nanoparticles, doping of electron donating atoms, and doping of various atoms with different ionic radii. The sensing response of the various prepared ZnO-based nanoparticles and quantum dots (QDs) for 10 ppm H2 was investigated. Among the samples, the smallest-sized (3.5 nm) In3+-doped ZnO QDs showed the best sensing response, which is superior to those in previously reported hydrogen sensors based on semiconducting metal oxides. The higher sensing response of In-doped ZnO QDs is attributed to the synergic effects of the increased number of oxygen vacancies, higher optical band gap, and larger specific surface area.

AE Signal Analysis of Yttria($Y_2O_3$) Ceramic Lapping Process (이트리아($Y_2O_3$) 세라믹 래핑가공의 AE 신호 분석)

  • Cha, Ji-Wan;Hwang, Sung-Chul;Shin, Tae-Hee;Lee, Eun-Sang
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.19 no.1
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    • pp.7-14
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    • 2010
  • AE(acoustic emission) sensor has been used for a state monitoring and observation during a ultra-precision machining because AE signal, which has high frequency range, is sensitive enough. In case of ceramic fabrication, a monitoring of machining state is important because of its hard and brittle nature. A machining characteristic of ceramic is susceptibly different in accordance with variable machining conditions. In this study, Yttria($Y_2O_3$) ceramic was fabricated using the ultra-precision lapping process with in-process electrolytic dressing(IED) method. And the surface machining characteristic and AE sensor signal were compared and analyzed.

The characteristics of ZnO/$PdCl_2$ gas sensor to CO gas (Co gas 검지용 ZnO/$PdCl_2$계 가스센서의 특성)

  • Hong, H.K.;Kim, B.H.;Cheon, Y.I.;Lee, C.J.;Sung, Y.K.
    • Proceedings of the KIEE Conference
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    • 1990.11a
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    • pp.139-142
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    • 1990
  • A gas sensor, comprised of both ZnO and $PdCl_2$ powders, has been developed to sense the CO gas of low concentration (100 ppm). When the weight ratio of ZnO/$PdCl_2$ element sintered at $600^{\circ}C$ was 99.5/0.5, the maximum sensitivity to CO gas was obtained at the operating temperature of $200^{\circ}C$. Also, the response characteristics of this element were examined, and then the response time was decreased from 90 to 45 sees, with operating temperature increase in the range of $100-400^{\circ}C$.

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