• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.11a
• /
• pp.267-268
• /
• 2006

전력소모를 감소시키기 위해 MEMS 기술을 이용하여 마이크로 히터를 제작하고 그 위에 감지물질을 도포하여 마이크로 센서를 제작하였다. 마이크로 가스센서는 $SnO_2$를 모물질로 하였으며 가스 감도를 향상시키기 위해 Pd와 Rh, ${\alpha}-Fe_2O_5$, $V_2O_5$를 첨가하여, CO 가스 강도를 조사하였다. $SnO_2$에 촉매로서 Pd만을 첨가하였을 때보다 Rh, ${\alpha}-Fe_2O_5$. $V_2O_5$등을 첨가하였을 때 CO가스에 대한 감도 반응이 우수하였다. 마이크로 가스센서의 소비전력은 42mW이었다.

• Journal of the korean Society of Automotive Engineers
• /
• v.18 no.1
• /
• pp.16-23
• /
• 1996

• Journal of Sensor Science and Technology
• /
• v.3 no.3
• /
• pp.22-27
• /
• 1994

Design of potentiostat and I-V converter for micro pO2 sensor is described. Also, The operation of the designed circuit, in connection with the eqivalent model of micro pO2 sensor, is simulated. The potentiostat showed low output resistance of $l.1k{\Omega}$ and input voltage range of $-3{\sim}2.5V$. And the I-V converter showed low input resistance of $30{\Omega}$ and good linearity between input and output.

• Bulletin of the Korean Chemical Society
• /
• v.26 no.11
• /
• pp.1881-1884
• /
• 2005

• Proceedings of the IEEK Conference
• /
• 1998.10a
• /
• pp.601-604
• /
• 1998

NOX detecting gas sensors using TiO2 doped tungsten oxide semiconductor were prepared and their electrical and sensing characteristics have been investigated. In normal air condition, the sensors of WO3, TiO2 doped WO3 show grain boundary heights of 0.34 eV, 0.25 eV, respectively. The grain boundary barrier energy variation was increased by doping TiO2 into large variation of resistance to NOX gases. And doping the TiO2 4 wt.%, the particle size of WO3 polycrystal films showed higher sensitivity and better sorption characteristics to NOX gas than the pure WO3 films material in air at operating temperature of $350^{\circ}C.$ The TiO2 doped WO3 semiconductor gas sensor shows nano-sized particle size and good sensitivity to sub-ppm concentration of NOX.

• The Journal of Korea Robotics Society
• /
• v.11 no.3
• /
• pp.140-145
• /
• 2016

In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various $O_2$ plasma treatment conditions. Through the tests, we can confirm that non-$O_2$ plasma treated PVP layer and $O_2$ plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).

• Journal of Sensor Science and Technology
• /
• v.17 no.2
• /
• pp.147-150
• /
• 2008

Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.

• Journal of Sensor Science and Technology
• /
• v.11 no.5
• /
• pp.279-285
• /
• 2002

Two $SnO_2$ based sensing films(pure $SnO_2$ and $SnO_2$/Pt) and a Pt thin film for temperature sensor on an alumina substrate were designed and fabricated for classifying the indoor environmental gases. By controlling the heating power in the shape of trapezoid, unique four sensing response curves created from both $SnO_2$ film and $SnO_2$/Pt film. Then, various parameters were extracted from sensing response curves and carried out principal component analysis(PCA). The results confirm that a sensor array with the proposed operating mode was extremely effective in classifying indoor environmental gases such as $CO_2$, $C_3H_8$, $C_4H_{10}$.

• Journal of information and communication convergence engineering
• /
• v.7 no.1
• /
• pp.72-77
• /
• 2009

Three different procedures for adding Pd compounds to $SnO_2$ particles have been investigated. These processes are: (1) coprecipitation; (2) dried powder impregnation; and (3) calcined powder impregnation. The microstructures of $SnO_2$ particles have been analyzed by X-ray diffraction (XRD), Brunauer-Emmett-Teller (BET), scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS). In the coprecipitaion method, the process does not restrain the growth of $SnO_2$ particles and it forms huge agglomerates. In the dried powder impregnation method, the process restrains the growth of $SnO_2$ particles and the surfaces of the agglomerates have many minute pores. In the calcined powder impregnation method, the process restrains the growth of $SnO_2$ particles further and the agglomerates have a lot more minute pores. The sensitivity ($S=R_{air}/R_{gas}$) of the $SnO_2$ gas sensor made by the calcined powder impregnation process shows the highest value (S = 21.5 at 5350 ppm of $C_3H_8$) and the sensor also indicates the lowest operating temperature of around $410^{\circ}C$. It is believed that the best result is caused by the plenty of minute pores at the surface of the microstructure and by the catalyst Pd that is dispersed at the surface rather than the inside of the agglomerate. Schematic models of Pd distribution in and on the three different $SnO_2$ particles are presented.

• Korean Chemical Engineering Research
• /
• v.61 no.2
• /
• pp.196-201
• /
• 2023

In this study, a CNT fiber flexible electrode grafted with CuO nanoparticles (CuO NPs) and polyaniline (PANI) was developed and applied to a nonenzymatic electrochemical sensor for H₂O₂ detection. CuO NPs/PANI/CNT fiber electrode was fabricated through the synthesis and deposition of PANI and CuO NPs on the CNT fiber surface using an electrochemical method. Surface morphology and elemental composition of the CuO NPs/PANI/CNT fiber electrode were characterized by scanning electron microscope with energy dispersive X-ray spectrometry. And its electrochemical characteristics were investigated by cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS) and chronoamperometry (CA). Compared with a bare CNT fiber as a control group, the CuO NPs/PANI/CNT fiber electrode showed a 4.78-fold increase in effective surface area and a 8.33-fold decrease in electron transfer resistance, which leads to excellent electrochemical properties such as a good electrical conductivity and an efficient electron transfer. These improved characteristics were due to the synergistic effect through the grafting of CNT fiber, PANI and CuO NPs. As a result, this electrode enhanced the H₂O₂ sensing performance.