• 제목/요약/키워드: $O_2$ Sensor

검색결과 1,272건 처리시간 0.033초

적외선 센서를 위해 흡수층으로서 rf Magnetron Sputtering에 의해 제조된 NiCr 박막의 특성 (Characteristics of NiCr Thin Films Prepared by rf Magnetron Sputtering as Absorption Layer for Infrared Sensors)

  • 허성기;최은석;윤순길
    • 한국재료학회지
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    • 제13권10호
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    • pp.640-644
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    • 2003
  • NiCr thin films were fabricated by rf magnetron sputtering for applying to both the top electrode and absorption layer on Pb(Zr, Ti)O$_3$(PZT) thin films for infrared sensors. The rms roughness and resistivity of NiCr films prepared with Ni power of 80 W and Cr power of 50 W showed the most stable oxidation resistance after annealing at $600^{\circ}C$ for 5 min in oxygen ambient. The rms roughness and resistivity of NiCr films annealed at $V^{\circ}C$ in oxygen ambient were about 2$0\AA$ and $70 \mu$Ω-cm, respectively. As-deposited Ni/PZT/Pt and NiCr (Ni 80 W, Cr 50 W)/PZT/Pt structures showed well saturated hysteresis loops. However, in case of the samples annealed at $500^{\circ}C$ in oxygen ambient, only NiCr/PZT/Pt showed saturated loops having a remanent polarization of 20$\mu$C/$\textrm{cm}^2$. Ultra-thin NiCr films showed a possibility as a top electrode for infrared sensors.

Conducting Metal Oxide Interdigitated Electrodes for Semiconducting Metal Oxide Gas Sensors

  • Shim, Young-Seok;Moon, Hi-Gyu;Kim, Do-Hong;Jang, Ho-Won;Yoon, Young-Soo;Yoon, Soek-Jin
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.65-65
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    • 2011
  • We report the application of conducting metal oxide electrodes for semiconducting metal oxide gas sensors. Pt interdigitated electrodes have been commonly used for metal oxide gas sensor because of the low resistivity, excellent thermal and chemical stability of Pt. However, the high cost of Pt is an obstacle for the wide use of metal oxide gas sensors compared with its counterpart electrochemical gas sensors. Meanwhile, relatively low-cost conducting metal oxides are widely being used for light-emitting diodes, flat panel displays, solar cell and etc. In this work, we have fabricated $WO_3$ and $SnO_2$ thin film gas sensors using interdigitated electrodes of conducting metal oxides. Thin film gas sensors based on conducting metal oxides exhibited superior gas sensing properties than those using Pt interdigitated electrodes. The result was attributed to the low contact resistance between the conducting metal oxide and the sensing material. Consequently, we demonstrated the feasibility of conducting metal oxide interdigitated electrodes for novel gas sensors.

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Surface and small scale effects on the dynamic buckling of carbon nanotubes with smart layers assuming structural damping

  • Farokhian, Ahmad;Salmani-Tehrani, Mehdi
    • Steel and Composite Structures
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    • 제37권2호
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    • pp.229-251
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    • 2020
  • In this paper, dynamic buckling of a smart sandwich nanotube is studied. The nanostructure is composed of a carbon-nanotube with inner and outer surfaces coated with ZnO piezoelectric layers, which play the role of sensor and actuator. Nanotube is under magnetic field and ZnO layers are under electric field. The nanostructure is located in a viscoelastic environment, which is assumed to obey Visco-Pasternak model. Non-local piezo-elasticity theory is used to consider the small-scale effect, and Kelvin model is used to describe the structural damping effects. Surface stresses are taken into account based on Gurtin-Murdoch theory. Hamilton principle in conjunction with zigzag shear-deformation theory is used to obtain the governing equations. The governing equations are then solved using the differential quadrature method, to determine dynamic stability region of the nanostructure. To validate the analysis, the results for simpler case studies are compared with others reported in the literature. Then, the effect of various parameters such as small-scale, surface stresses, Visco-Pasternak environment and electric and magnetic fields on the dynamic stability region is investigated. The results show that considering the surface stresses leads to an increase in the excitation frequency and the dynamic stability region happens at higher frequencies.

반도체형 열중성자 선량 측정센서 개발 (The development of a thermal neutron dosimetry using a semiconductor)

  • 이남호;김양모
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
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    • pp.789-792
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    • 2003
  • pMOSFET having 10 ${\mu}um$ thickness Gd layer has been tested to be used as a slow neutron sensor. The total thermal neutron cross section for the Gd is 47,000 barns and the cross section value drops rapidly with increasing neutron energy. When slow neutrons are incident to the Gd layer, the conversion electrons are emitted by the neutron absorption process. The conversion electrons generate electron-hole pairs in the $SiO_2$ layer of the pMOSFET. The holes are easily trapped in Oxide and act as positive charge centers in the $SiO_2$ layer. Due to the induced positive charges, the threshold turn-on voltage of the pMOSFET is changed. We have found that the voltage change is proportional to the accumulated slow neutron dose, therefore the pMOSFET having a Gd nuclear reaction layer can be used for a slow neutron dosimeter. The Gd-pMOSFET were tested at HANARO neutron beam port and $^{60}CO$ irradiation facility to investigate slow neutron response and gamma response respectively. Also the pMOSFET without Gd layer were tested at same conditions to compare the characteristics to the Gd-pMOSFET. From the result, we have concluded that the Gd-pMOSFET is very sensitive to the slow neutron and can be used as a slow neutron dosimeter. It can also be used in a mixed radiation field by subtracting the voltage change value of a pMOSFET without Gd from the value of the Gd-pMOSFET.

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TSDC 방법을 이용한 AC 폴링된 PMN-PT 단결정의 디폴링 메커니즘 분석 (Depolarization Mechanism of Alternating-current-poled Pb(Mg1/3Nb2/3)O3-PbTiO3 Single Crystals Measured using in-situ thermally Stimulated Depolarization Current)

  • 이건주;김황필;이상구;이호용;조욱
    • 센서학회지
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    • 제29권1호
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    • pp.59-62
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    • 2020
  • Currently, increasing attention is being paid to relaxor-based ferroelectric single crystals in photoacoustic images, especially for high-end applications. Among the crystals are (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-100xPT) single crystals located near their morphotropic phase boundary (x = 0.30-0.35) because of their ultrahigh piezoelectric and electromechanical coupling properties. The alternating current poling (ACP) treatment, rather than the conventional direct current poling treatment, has recently been spotlighted due to its effectiveness in enhancing the piezoelectric properties. So far, it has been suggested that the enhanced piezoelectricity originates from either a domain miniaturization to nanodomains or from an electric-field-induced monoclinic symmetry. In this study, we demonstrate by thermally stimulated depolarization current measurements that the effect of ACP is too complex to be explained using a single mechanism and that the proposed electric-field-induced monoclinic symmetry is unlikely to exist.

복합전이금속(Ni, Co, Mn) 기반 스피넬계 산화물의 소결 거동 및 온도센서 특성 연구 (Sintering behavior and electrical properties of transition metal (Ni, Co, Mn) based spinel oxides for temperature sensor applications)

  • 소영희;이은서;이진영;민성욱;이빈;김형태
    • 한국결정성장학회지
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    • 제34권2호
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    • pp.73-77
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    • 2024
  • 스피넬계 산화물 중 (Nix, Mny, Co3-x-y)O4(NMC)는 부온도계수 온도센서 소재로 활용되어 전기자동차용 배터리 관리 시스템을 포함한 다양한 산업적 응용이 가능하다. 일반적으로 NMC는 Ni, Mn, Co 화합물 분말을 이용하여 고상반응법을 통해 제조되는데 이 중 소결 공정을 통한 치밀화 과정이 온도센서 소재의 온도에 따른 전기적 특성을 결정하는 중요한 인자로 알려져 있다. 본 연구에서는 NMC 펠렛을 고상반응법을 통해 제조하고 결정구조 및 미세구조를 관찰하였다. 또한, 소결 과정 동안의 치밀화 거동 분석을 위한 활성화 에너지를 도출하였다. 분석 결과에 따르면, NMC 펠렛의 상온 저항은 10.03 Kohm이었으며 센서민 감도인 B-value는 3601.8 K로 다양한 산업군에 온도센서로 적용이 가능할 것으로 기대된다. 또한, 치밀화를 위한 활성화 에너지는 273.3 ± 0.4kJ/mol로 도출되었으며, 이는 소결 과정의 열역학적 특성을 이해하는데 중요한 정보를 제공할 것으로 기대된다.

초소형 비행체 Quad Rotor를 이용한 USN 환경 가스 센싱 시스템 (USN Environmental Gas Sensing System using Quad Rotor)

  • 이병석;이준화;김규식;김조천
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 심포지엄 논문집 정보 및 제어부문
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    • pp.45-46
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    • 2008
  • There are various polluting emissions related to the air quality such as $NO_x$, $CO_2$, CO, VOCs, $O_3$, $SO_2$, $CH_4$, $H_2S$, $NH_3$, etc. We need the system that reduces emission of these environment gases and detects risk factors in modern society. Therefore, if we use the USN(Ubiquitous Sensor Network) technology and a MAV(Micro Air Vehicle) Quad Rotor which can be hovering and moving free for setting up the environment gas sensing system, the realtime measurement on environment gases is facilitated and by extension, in application of traffic watchdog, forest fire surveillance and counter-terrorism efforts, we anticipate making better use of a Quad Rotor.

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소변검사와 생체센서를 이용한 치매 스크리닝 애플리케이션 개발 (Development of Dementia Screening Application Using Urine Test and Bionic Sensors)

  • 김준영;조면균
    • 대한임베디드공학회논문지
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    • 제10권2호
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    • pp.109-117
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    • 2015
  • In this paper, we have developed smart-phone App(application) for screening Dementia using bionic sensors, urine test and questionnaire. Since small amounts of urinary protein strongly predict faster cognitive decline in the elderly, smart-phone based urinalysis is adopted to screen dementia more accurately as well as bionic sensors such as $SpO_2$ and HRV(Heart Rate Variability). Firstly, DI(Dementia Index) is calculated from urinalysis, two bionic sensors and electric questionnaire, and then compared to the threshold from clinical test. Finally the results of Dementia screening is shown in your smart-phone and useful information to prevent or relieve Dementia is also given. We performed simple testing on persons aged over 60 and found out the proposed application can be useful devices for screening Dementia easily and quickly.

A Dipstick-Type Electrochemical Immunosensor for The Detection of The Organophosphorus Insecticide Fenthion

  • Cho, Young-Ae;Cha, Geun-Sig;Lee, Yong-Tae;Lee, Hye-Sung
    • Food Science and Biotechnology
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    • 제14권6호
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    • pp.743-746
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    • 2005
  • A dipstick-type immunochemical biosensor for the detection of the organophosphorus insecticide fenthion was developed using a screen-printed electrode system as an amperometric transducer with polyclonal antibodies against fenthion as a bioreceptor. The assay of the biosensor involved competition between the pesticide in the sample and pesticide-glucose oxidase conjugate for binding to the antibody immobilized on the membrane. This was followed by measurement of the activity of the bound enzyme by the supply of the enzyme substrate (glucose) and amperometric determination of the enzyme reaction product ($H_2O_2$). The activity of the bound enzyme was inversely proportional to the concentration of pesticide. The optimized sensor system showed a linear response against the logarithm of the pesticide concentration ranging from $10^{-2}$ to $10^3\;{\mu}g/L$.

실리콘웨이퍼 공정용 알루미나 정전척의 제작과 특성에 관한 연구 (A study on the Fabrication and Characterization of Alumina Electrostatic Chuck for Silicon Wafer Processing)

  • 정광진;박용균;이영섭;조동율;천희곤
    • 센서학회지
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    • 제8권6호
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    • pp.481-486
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    • 1999
  • Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of $TiO_2$ addition(0, 1.3, 2.0, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discussed.

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