• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.211-211
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• 1999

Titanium nitride (TiN) thin films have useful properties including high hardness, good electrical conductivity, high melting point, and chemical inertness. The applications have included wear-resistant hard coatings on machine tools and bearings, decorative coating making use of the golden color, thermal control coatings for widows, and erosion resistant coatings for spacecraft plasma probes. For all these applications as feature sizes shrink and aspect ratios grow, the issue of good step coverage becomes increasingly important. It is therefore essential to manufacture conformal coatings of TiN. The growth of TiN thin films by chemical vapor deposition (CVD) is of great interest for achieving conformal deposition. The most widely used precursor for TiN is TiCl4 and NH3. However, chlorine impurity in the as-grown films and relatively high deposition temperature (>$600^{\circ}C$) are considered major drawbacks from actual device fabrication. To overcome these problems, recently, MOCVD processes including plasma assisted have been suggested. In this study, therefore, we have doposited Ti(C, N) thin films on Si(100) and D2 steel substrates in the temperature range of 150-30$0^{\circ}C$ using tetrakis diethylamido titanium (TDEAT) and titanium isopropoxide (TIP) by pulsed DC plamsa enhanced metal-organic chemical vapor deposition (PEMOCVD) method. Polycrystalline Ti(C, N) thin films were successfully grown on either D2 steel or Si(100) surfaces at temperature as low as 15$0^{\circ}C$. Compositions of the as-grown films were determined with XPS and RBS. From XPS analysis, thin films of Ti(C, N) with low oxygen concentration were obtained. RBS data were also confirmed the changes of stoichiometry and microhardness of our films. Radical formation and ionization behaviors in plasma are analyzed by optical emission spectroscopy (OES) at various pulsed bias and gases conditions. H2 and He+H2 gases are used as carrier gases to compare plasma parameter and the effect of N2 and NH3 gases as reactive gas is also evaluated in reduction of C content of the films. In this study, we fond that He and H2 mixture gas is very effective in enhancing ionization of radicals, especially N resulting is high hardness. The higher hardness of film is obtained to be ca. 1700 HK 0.01 but it depends on gas species and bias voltage. The proper process is evident for H and N2 gas atmosphere and bias voltage of 600V. However, NH3 gas highly reduces formation of CN radical, thereby decreasing C content of Ti(C, N) thin films in a great deal. Compared to PVD TiN films, the Ti(C, N) film grown by PEMOCVD has very good conformability; the step coverage exceeds 85% with an aspect ratio of more than 3.

• Journal of Korean Society for Atmospheric Environment
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• v.17 no.2
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• pp.193-201
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• 2001

Acidic air pollutants were collected to characterize indoor air quality in a residential area in the summer. All indoor and outdoor samples were measured simultaneously using an annular denuder system(ADS) in Seoul. The data set was collected from July 26 to September 11, 1997. The mean indoor/outdoor ratios measured from this study were : 0.34 for $HNO_3$; 0.91 for $HNO_2$; 0.22 for $SO_2$; 1.34 for $NH_3$; 0.78 for $PM_{2.5}(d_p$ <2.5 $mutextrm{m}$); 0.90 for $SO_{4}^{2-}$; 0.68 for $NO_{3}^{-}$ and 0.79 for $NH_{4}^{+}$. Indoor concentrations of $HNO_3$, $SO_2$ and $PM_{2.5}$ were highly correlated with the outdoor concentrations. The relationship between indoor and outdoor air is dependent, to a large extent, on the rate of air exchange between these two environments. A tracer-gas decay technique with sulfur hexafluoride ($SF_{6}$) as a tracer gas was used to estimate the air exchange of a private home in the summer. The average air exchange rate was estimated to be 23.7 hr(sup)-1. The deposition velocities for $SO_{4}^{2-}$, $NO_{3}^{-}$ and $NH_{4}^{+}$ calculated were 0.17, 0.69 abd 0.39 cm/sec, respectively.

• Environmental Analysis Health and Toxicology
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• v.6 no.3_4
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• pp.133-141
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• 1991

Vermistabilization is the stabilization of organic wastes using earthworms. The worms maintain aerobic conditions in the waste, accelerating and enhancing the biological decomposition of the waste. This study was carried out to find out fundamental factors affecting the performance of the process such as temperature, moisture content and pH condition of nightsoil sludge, and to evaluate the worms excreta (casting) as fertilizer. The results could be summarized as follows; the optimum range of temperature was observed 10~3$0^{\circ}C$ while survival rate of eathworm decreased rapidly at 35$^{\circ}C$ within 6 days and death occurred at 5$^{\circ}C$. Those of moisture content and pH condition were 50~70% and 5~8, respectively. Earthworms were revealed to change the composition of N in nightsoil sludge consisting of$NH_3$-N (71%), $NO_2$-N (2%) and $NO_3$-N (27%) into that $NH_3$-N (24%), $NO_2$-N (1%), $NO_3$-N (75%) in earthworm excreta, respectively The concentrations of NH$_3$and H$_2$S gas in pig manure were reduced by 59.2% and 45.2% in case of mixing pig manure with casting.

• Journal of Magnetics
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• v.12 no.2
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• pp.81-83
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• 2007

Etching of NiFe films covered with an organic photo-resist or Ti was successfully performed by an inductively coupled plasma-reactive ion etching (ICP-RIE) system using $CHF_3/O_2/NH_3$ discharges exchanging $CHF_3$ for $CH_4$ gas gradually. Experimental results showed that the organic photo-resist mask can be applied to the NiFe etching. In the case of the Ti metal mask, it was found that the etching-selectivity Ti against NiFe was significantly varied from 7.3 to ${\sim}0$ by changing $CHF_3/CH_4/O_2/NH_3$ to $CH_4/O_2/NH_3$ discharges used in the ICP-RIE system. These results show that the present RIE of NiFe was dominated by a chemical reaction rather than a physical sputtering.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2251-2253
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• 2000

MEMS기술을 이용하여 단층 실리콘 나이트라이드($Si_{3}N_4$) 다이아프램을 제조하고, 이 다이아프램상에 저항성 가열 진공증착법과 고주파 마그네트론 스퍼터링법을 이용하여 차례로 In막과 ZnO막을 증착하고, In의 도핑을 위해 열처리하여 $NH_3$ 가스 감지용 마이크로센서를 제작하였다. 감지막의 열처리온도에 따른 구조적 및 전기적 특성은 XRD, SEM, AFM, 4-point probe 및 Electrometer를 통하여 각각 조사하였다. 제작된 센서의 열처리온도와 인가전력에 따라 $NH_3$ 가스에 대한 감도, 선택성 및 시간응답 특성을 조사하였다. 감지막 두께 3000 ${\AA}$, 열처리온도 400$^{\circ}C$로 제조된 마이크로 센서가 히터 인가전력 366 mW에서 100 ppm의 $NH_3$ 가스농도에서 대하여 16 %, 350 ppm의 가스농도에서 대하여 23 %의 가장 우수한 감도를 나타내었다. 그러나 CO 가스 및 $NO_x$ 가스에 대한 감지특성은 관찰되지 않았다.

• Journal of Sensor Science and Technology
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• v.20 no.6
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• pp.406-411
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• 2011

$Co_3O_4$ thick film gas sensor using the powder prepared by hydrothermal reaction method(HRM) was fabricated. For comparison study, we also prepared the sensor using commercial $Co_3O_4$ powder under the same fabrication conditions. Sensitivity, time response, and selectivity of them to variable gases such as iso-$C_4H_{10}$, CO, $NH_3$, and $CH_4$ were investigated. The sensor from the powder prepared by HRM showed higher sensitivity to every gas than those from commercial powder. For iso-$C_4H_{10}$ gas, the sensitivities of both sensor to 100 ppm are 160 % and 40 %, respectively. Time response and selectivity of the sensor using the powder prepared by HRM were better than those of the sensor using commercial powder.

• Journal of the Korean Chemical Society
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• v.6 no.2
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• pp.148-154
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• 1962

The reactions between organic halides$(CCl_4,\;C_6H_5Br,\;C_6H_5Cl,\;C_6H_5I)$ and amines $(C_6H_5NH_2,\;R_2NH,\;R_3N,\;(CH_2)_5NH,\;pyridine)$ were studied under mixed u.v. irradiation. The modes of reactions were examined by means of gas chromatography and product-reactant ratio determination. The reaction of $CCl_4$ with amines give chloroform and hexachloroethanes, and the reaction of aromatic halides with amines gave biphenyl and benzene. In each series of reaction there obtained mainly corresponding amine hydrohalides, but no amination products. The reactivity was in the order of the basicity of amines and of the reactivity of organic hahides, except in the case of cyclic tertiary amine. The result was interpreted as a non-chain photodecomposition process. A competitive proton abstraction reaction path via the formation of a change transfer complex was proposed as the reaction mechanism.

• Journal of environmental and Sanitary engineering
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• v.11 no.1
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• pp.63-70
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• 1996

The synthesis of high purity and ultra-fine $BaTiO_3$ by precipitation with gaseous $NH_3$ as precipitator was investigated to find an alternative process to solve various problems of recent wet methods. A synthesis process for $BaTiO_3$ powder using $NH_3$ gas as a precipitator in a bubble column reactor was experimentally successful in developing the production process of piezoelectric ceramic $BaTiO_3$ powder. And a 2.33m1/sec is approprite for the feed flow rate, $BaTiO_3$ powder produced under above the condition is spherical type, its particle size was about $0.2{\mu}m$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.826-829
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• 2002

$MoO_3$ thin films were deposited on electrode and heater screen-printed alumina substrates in en atmosphere by RF reactive sputtering. The deposition was performed at $300^{\circ}C$ with 350W of a forward power in an $Ar-O_2$ atmosphere. The working pressure was maintained at $3{\times}10^{-2}$mtorr and all deposited films were annealed at $500^{\circ}C$ for 5hours. The surface morphology of films was observed by using a SEM and crystalline phases were analyzed by XRD. The sensing properties were investigated in term of gas concentration under exposure of reducing gases such as $H_2$, $NH_3$ and CO.

• Asian-Australasian Journal of Animal Sciences
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• v.25 no.8
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• pp.1178-1183
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• 2012

A 5-wk trial with 96 ($(Landrace{\times}Yorkshire){\times}Duroc$) pigs ($BW=26.56{\pm}0.42kg$) was conducted to investigate the effect of eugenol and cinnamaldehyde as feed additive in growing pigs. Pigs were assigned to 1 of 3 treatments in a randomized complete block design according to their sex and BW. Each treatment contained 8 replications with 4 pigs (2 gilts and 2 barrows) per pen. Treatments included: control (basal diet; CON); (basal diet+1,000 mg eugenol/kg; ET); (basal diet+1,000 mg cinnamaldehyde/kg; CT). Administration of eugenol and cinnamaldehyde did not did not affect (p>0.05) the growth performance and apparent total tract digestibility. Dietary CT and ET led to a higher (p<0.05) lymphocyte concentration compared with CON. The inclusion of CT and ET decreased (p<0.05) the fecal E. coli concentration (p>0.05). Pigs fed the diets supplemented with eugenol and cinnamaldehyde had reduced (p<0.05) $NH_3$ and $H_2S$ concentration throughout the experiment. In conclusion, results obtained in the present study indicated that supplementation of eugenol and cinamaldehyde had no effect on growth performance of pigs but exhibited lymphocyte-enhancing activity and decreased the fecal E. coli concentration and fecal noxious gas content ($NH_3$ and $H_2S$).