• 한국표면공학회지
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• 제29권6호
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• pp.683-690
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• 1996

In this study, the diffusion barrier properties of $1000 \AA$ thick molybdenum compounds (Mo, Mo-N, $MoSi_2$, Mo-Si-N) were investigated using sheet resistance measurements, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Scanning electron microscopy (SEM), and Rutherford backscattering spectrometry (RBS). Each barrier material was deposited by the dc magnetron sputtering, and annealed at 300-$800^{\circ}C$ for 30min in vacuum. Mo and $MoSi_2$ barrier were failed at low temperature due to Cu diffusion through grain bound-aries and defects of Mo thin film and the reaction of Cu with Si within $MoSi_2$ respectively. A failure temperature could be raised to $650^{\circ}C$-30min in the Mo barrier system and to $700^{\circ}C$-30min in the Mo-silicide system by replacing Mo and $MoSi_2$ with Mo-N and Mo-Si-N, respectively. The crystallization temperature in the Mo-silicide film was raised by the addition of $N_2$. It is considered that not only the N, stuffing effect but also the variation of crystallization temperature affects the reaction of Cu with Si within Mo-silicide. It was found that Mo-Si-N is more effective barrier than Mo, $MoSi_2$, or Mo-N to copper penetration preventing Cu reaction with the substrate for 30min at a temperature higher than $650^{\circ}C$.

• 한국세라믹학회지
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• 제32권9호
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• pp.1085-1091
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• 1995

Molybdenum disilicide (MoSi2) was synthesized from Mo, MoO3, Si and Al powders by self-propagating high temperature synthesis (SHS). The effect of processing parameters such as Mo/MoO3 molar ratio, Ar gas pressure in the reactor and pressing pressure of compacts in synthesis of MoSi2 were investigated. h-MoSi2 was transformed into t-MoSi2 with increasing the Mo/MoO3 mole ratio, and only t-MoSi2 phase was identified above 3.5 : 1 (molar ratio). The synthesized phases did not change with the variation of Ar gas pressure and pressing pressure of compacts. It was found that the combustion temperature was above 2,50$0^{\circ}C$. The products were separated into MoSi2 (s) and $\alpha$-Al2O3 by the difference of their specific grativities. Bending strength, hardness and density of sintered specimen exhibited 82 MPa, 5.368 GPa and 5.43 g/㎤, respectively.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2001년도 추계학술발표회 초록집
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• pp.43-43
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• 2001

• The Korean Journal of Ceramics
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• 제5권2호
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• pp.115-118
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• 1999

Carbon composites with $MoSi_2$ dispersion were prepared by hot-pressing at $1700^{\circ}C$ under 30 MPa for 1 h using polysilazance as binding material. The composites consisted of C, $Mo_{4.8}Si_3C_{0.6}$ and SiC. Bulk density and porosity of the carbon composites with 10 vol% $MoSi_2$ was 1.8g.$\textrm{cm}^{-3}$ and 34%, respectively. This composite was oxidized about 0.05mm from the surface of the carbon composite after oxidation test at $1500^{\circ}C$ for 10h in air. Formation of the $SiO_2$ glass layer was observed by SEM. When this composite suffered damage in the coating layer, it had hardly farther oxidation because of its self-repairing property. The composite prepared in this study indicated good oxidation resistance.

• 폴리머
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• 제24권2호
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• pp.237-244
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• 2000

탄화 매트릭스의 전구체로 사용된 페놀수지에 세라믹 분말인 이규화몰리브덴 (MoSi$_2$)을 0, 4, 12, 20%의 중량비로 각각 고르게 분산시켜, 여기에 PAN계 탄소섬유를 함침하여 프리프레그법을 이용하여 일방향 탄소섬유/페놀수지 복합재료를 제조하였으며, 이를 다시 탄화(110$0^{\circ}C$) 시켜서 일방향 탄소/탄소 복합재료를 제작하였다. 본 연구에서는 난소/탄소 복합재료에 산화 억제제로 사용된 MoSi$_2$의 첨가량에 따른 복합재료의 산화거동을 산화분위기 하 600-100$0^{\circ}C$의 온도범위에서 조사하였다. 그 결과, MoSi$_2$를 함유한 탄소/탄소 복합재료는 복합재료 내치 기공 감소와 산소에 대한 유동 확산 방지막의 형성으로 인하여 카본 활성종이 방해를 받아 MoSi$_2$를 함유하지 않은 것에 비해 산화속도가 감소되어 내산화성이 향상되었다. 이는 산소의 공격에 대한 보호층을 형성하는 MoSi$_2$ 고유의 특성에 따른 영향이라 사료된다.

• 한국재료학회지
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• 제6권1호
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• pp.57-66
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• 1996

MoSi2 heating elements were fabricated by sintering of MoSi2 powders which were synthesized through SHS(Self-propagating high-temperature synthesis). Their high-temperature oxidation behavior in air through SHS(Self-propagating high-temperature synthesis). Their high-temperature oxidation behavior on air at 1000-1600$^{\circ}C$ was investigated through a high-temperature X-ray diffractomer and isothermal heating in a muffle furnace. The thermal expansion of MoSi2 and SiO2 was studied by measuring their lattice parameters on heating. The linear expansion coeffcient of MoSi2 along c-axis was about 1.5 times larger than that along a-axis showing a strong thermal anisotropy. Few $\mu\textrm{m}$-thick Mo5Si3 layer was found beneath SiO2 layer suggesting that The major reaction products would be SiO2 and Mo5Si3. The Si-rich bentonite resulted in the faster growth of MoSi2 grains probably by enhancing the mass transport when they are melted during high-temperature oxidation.

• 한국분말재료학회지
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• 제14권4호
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• pp.245-250
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• 2007

Dense nanostructured $2MoSi_{2}-SiC$ composites were synthesized by the pulsed current activated combustion synthesis (PCACS) method within 3 minutes in one step from mechanically activated powders of $Mo_{2}C$ and 5Si. Simultaneous combustion synthesis and densification were accomplished under the combined effects of a pulsed current and mechanical pressure. Highly dense $2MoSi_{2}-SiC$ with relative density of up to 96% was produced under simultaneous application of a 60 MPa pressure and the pulsed current. The average grain size of $MoSi_{2}$ and SiC were about 120 nm and 90 nm, respectively. The hardness and fracture toughness values obtained were 1350 $kg/mm^{2}$ and 4 $MPa{\cdot}m^{1/2}$, respectively.

• 한국해양공학회지
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• 제23권6호
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• pp.93-98
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• 2009

The mechanical properties of $MoSi_2$ based composites containing various types of reinforcement, such as SiC, $ZrO_2$, and W, were investigated, based on detailed examinations of their microstructures. $MoSi_2$ based composites were fabricated at a temperature of $1350^{\circ}C$ using a hot-press device. The volume fraction of SiC and $ZrO_2$ particles in this composite system was fixed as 20%. The volume fraction of three types of W particles was changed from 10% to 30%. The characteristics of the $MoSi_2$ based composites were determined by means of optical microscopy and a three-point bending test. The addition of W particles to the $MoSi_2$ powders exhibited a sufficient improvement in the microstructure and mechanical property of the sintered $MoSi_2$ materials, compared to those of SiC and $ZrO_2$ particles. In particular, W/$MoSi_2$ composites containing W particles of 20 vol% represented a good flexural strength of about 530MPa at room temperature, accompanying a relative density of about 92%. The flexural strength of the W/$MoSi_2$ composites tended to decrease with an increase in the average size of the W particles.

• 공업화학
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• 제10권2호
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• pp.231-236
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• 1999

결정상과 분산도가 조절된 $MoO_3$/$SiO_2$ 담지촉매를 제조하여 촉매의 표면특성과 디벤조티오펜 탈황반응의 활성도를 고찰하였다. Mo의 표면담지량은 4 atoms $Mo/nm^2$이었으며, 실리카 표면 위에 형성된 $MoO_3$의 결정상은 sintered hexagonal, sintered orthorhombic, 및 dispersed hexagonal상이었다. XRD, Raman, 및 $O_2$ 흡착 결과 $MoO_3$의 표면분산도는 sintered hexagonal < sintered orthorhombic < dispersed hexagonal 순으로 증가하였다. TPR 결과 $MoO_3$ 결정은 $650^{\circ}C$에서 $MoO_2$로, $1000^{\circ}C$에서 Mo로 환원됨을 알 수 있었다. 디벤조티오펜 탈황반응을 30기압, $350{\sim}500^{\circ}C$ 온도범위에서 수행하였으며, 실험 결과 활성도는 $MoO_3$ 결정체의 $SiO_2$ 표면에서의 분산도에 비례하여 증가함을 알 수 있었다.

• Nuclear Engineering and Technology
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• 제43권2호
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• pp.159-166
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• 2011

Si-rich-layer-coated U-7 wt%Mo plates were prepared in order to evaluate the diffusion barrier performance of the Si-rich layer in U-Mo vs. Al interdiffusion. Pure Si powder was used for coating the U-Mo plates by annealing at $900^{\circ}C$ for 1 h under vacuum of approximately 1 Pa. Si-rich layers containing more than 60 at% of Si were formed on U-7 wt%Mo plates. Diffusion couple tests were conducted in a muffle furnace at $560-600^{\circ}C$ under vacuum using Si-rich-layer-coated U-Mo plates and pure Al plates. Diffusion couple tests using uncoated U-Mo plates and Al-(0, 2 or 5 wt%)Si plates were also conducted for comparison. Si-rich-layer coatings were more effective in suppressing the interaction during diffusion couple tests between coated U-Mo plate and Al, when compared with U-Mo vs. Al-Si diffusion couples, since only small amounts of Al in the coating could be found after the diffusion couple tests. Si-rich-layer-coated U-7wt%Mo particles were also prepared using the same technique for U-7 wt%Mo plates to observe the microsturctures of the coated particles.