• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.3
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• pp.85-91
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• 1999

$H:LiNbO_3$ optical modulator with Cu/parylene electrode layer, which has a merits in the bandwidth, power consumption and fabrication conditions as compared with conventional Au/Cr/$SiO_2$, is proposed and fabricated. Analysis and design of optical modulator is performed by finite element calculation. Various unit processes for fabricating the proposed modulator, 1550nm $H:LiNbO_3$ optical waveguide, parylene buffer layer, and CPW Cu electrode, were developed, After dicing and end-face polishing of fabricated modulator chip, optical modulation responses as sawtooth electrical driving voltage has been measured at low frequencies. Properties of optical waveguide had not been changed before and after Cu/parylene electrode processes, which make confirm the reproducible fabrication of optical modulator.

• Proceedings of the Optical Society of Korea Conference
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• 1990.02a
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• pp.269-273
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• 1990

The proton conserving effect of diffusion with self-aligned SiO2-cladding is investigated by infrared transmission spectra. Based on the proton conserving effect, proton-diffused channel waveguides with self-aligned SiO2-cladding substrates. And an electro-optic cutoff modulator with self aligned electrode that utilizes a single-mode proton-diffused channel waveguide in a Y-cut XX-propagating LiNbO3 substrate is fabricated. Over 20 dB extinction has been achieved with applied voltage of 15V.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.962-965
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• 1999

We designed and fabricated a travelingwave CPW(coplanar waveguide) electrode for LiNbO$_3$ optical modulator. To Investigate the variation of microwave refractive index of these electrodes, we prepared the CPW electrode samples as a function of electrode thickness and measured the TDR and S-parameter. From this results, we could know the electrode conditions of index matching to 2.20 for 1550nm optical wave index for applying LiNbO$_3$ optical modulator and described. Also, we discussed the some properties of CPW electrode for applying LiNbO$_3$ optical modulator.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1131-1133
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• 1999

본 연구에서는 $LiNbO_3$ 변조기에 사용되는 진행파형 coplanar-waveguide 형 전극을 제작하였다. 전극 전극두께를 변화시켜 전극을 제작하여 마이크로파 유효굴절율을 조사하였다. $LiNbO_3$ 광변조기 도파로의 유효굴절율과 정합되는 조건인유효굴절율 2.2에 근접합을 알 수 있었다. 또한 진행파형 전극의 반사손실$(S_{11})$, 삽입 손실($S_{21}$) 등을 측정하여 광변조기에 적용할 수 있는 최적조건에 관하여 논의하였다.

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.145.1-145
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• 2003

• Journal of the Korean Ceramic Society
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• v.42 no.4
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• pp.232-236
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• 2005

The etching characteristics of a $LiNbO_{3}$ optical waveguide structure have been investigated using neutral loop discharge plasma with the mixture of $C_{3}F_{8}$ and Ar and the bias power parameters. The etching rate and profile angle of optical waveguide with etching parameters were evaluated by scanning electron microscopy. Also, the etching RMS roughness was evaluated by atomic force microscopy. From the results of optimum etching conditions are the $C_{3}F_{8}$ gas flow ratio of 0.2 and the bias power of 300 W.

• Proceedings of the KIEE Conference
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• 1989.11a
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• pp.502-504
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• 1989

An electro-optic cutoff modulator with self-aligned electrode that utilizes a single-mode proton-diffused well-guided channel waveguide in a X-cut Y-propagating $LiNbO_3$ substrate is reported. The self-aligned electrode is formed during proton diffusion process of itself. Nearly linear voltage-intensity relationship has been observed. Over 90 % modulation has been achieved with applied voltage of 25 V.

• Korean Journal of Optics and Photonics
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• v.7 no.1
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• pp.51-59
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• 1996

In this paper, we propose a new type of a planar waveguide lens, a meniscus lens instead of a plano-convex lens used widely for the optical integrated circuits such as optical numerical processors. A plano-convex lens has a spherical aberration caused by the linear boundary. In the proposed meniscus lens, this linear boundary is replaced by a circular-boundary, and the spherical aberration is removed. To test the performance of the proposed lens, a meniscus lens is designed using Fermat principle and fabricated on the Y-cut $LiNbO_3$ substrate. First a $Ti:LiNbO_3$ planar waveguide is fabricated on the $LiNbO_3$ substrate by Ti indiffusion. Then a meniscus lens is fabricated on the planar waveguide by TIPE(Ti indiffued proton-exchange) method. A plano-convex lens is also fabricated on the same substrate to compare the spot size at the focal point. The measured spot size of the meniscus lens is reduced to 59% that of the plano-convex lens. This result shows that the proposed meniscus lens is more effective for optical integrated circuits than the plano-convex lens.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.16 no.2
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• pp.49-52
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• 2006

Periodic electric field assisted poling low loss (${\sim}0.1dB/cm$) single-mode Ti-diffused waveguides in $LiNbO_3$ has been achieved using a periodically patterned electrode on the +Z surface of Ti : $LiNbO_3$ crystal and homogeneous LiCl solution. Using selective chemical etching, we confirmed the periodic (${\sim}16{\mu}m$) domain inverted structure and measured SH (second harmonic) properties of fabricated periodically poled Ti : $LiNbO_3$ waveguides.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.77-79
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• 1997

A 5Gbps LiNb $O_3$ optical phase modulator was packaged and described. A APE(annealed proton exchange) method was employed for the optical waveguide and the electrode of ACPS (asymmetric coplanar strip) type was formed by electro-plating on LiNb $O_3$ fort applying microwave signal. The resulted phase modulator exhibited a single mode at a 1550nm wavelength and Its modulation bandwidth, Insertion loss and driving voltage showed 7$^{GHz}$, 3. $O^{dB}$ and 6V. respectively.y.