• 제목/요약/키워드: $In_2O_3$ gas sensor

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Encapsulation of Semiconductor Gas Sensors with Gas Barrier Films for USN Application

  • Lee, Hyung-Kun;Yang, Woo Seok;Choi, Nak-Jin;Moon, Seung Eon
    • ETRI Journal
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    • 제34권5호
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    • pp.713-718
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    • 2012
  • Sensor nodes in ubiquitous sensor networks require autonomous replacement of deteriorated gas sensors with reserved sensors, which has led us to develop an encapsulation technique to avoid poisoning the reserved sensors and an autonomous activation technique to replace a deteriorated sensor with a reserved sensor. Encapsulations of $In_2O_3$ nanoparticles with poly(ethylene-co-vinyl alcohol) (EVOH) or polyvinylidene difluoride (PVDF) as gas barrier layers are reported. The EVOH or PVDF films are used for an encapsulation of $In_2O_3$ as a sensing material and are effective in blocking $In_2O_3$ from contacting formaldehyde (HCHO) gas. The activation process of $In_2O_3$ by removing the EVOH through heating is effective. However, the thermal decomposition of the PVDF affects the property of the $In_2O_3$ in terms of the gas reactivity. The response of the sensor to HCHO gas after removing the EVOH is 26%, which is not significantly different with the response of 28% in a reference sample that was not treated at all. We believe that the selection of gas barrier materials for the encapsulation and activation of $In_2O_3$ should be considered because of the ill effect the byproduct of thermal decomposition has on the sensing materials and other thermal properties of the barrier materials.

고농도 $NO_x$ 감지용 $In_2O_3$ 후막가스센서의 Al, Ru 및 $SnO_2$ 첨가에 의한 특성 향상 (Gas Sensing Characteristics of Catalyst-added $In_2O_3$ Thick Film for Detecting $NO_x$ of High Concentration)

  • 박종현;김동현;이종영;김광호
    • 한국세라믹학회지
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    • 제36권12호
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    • pp.1322-1326
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    • 1999
  • In2O3 thick film gas sensor for detecting NOx gas of high concentration was fabricated by a screen printing technique. This work focussed on investigation of the change of sensitivity to NOx gas with firing temperatures of sensing layer and on improvement of the sensitivity by adding catalysts such as Al,. Ru, and SnO2 The cross sensitivites of sensor to CO, H2, CH4 and i-C4H10 gases were also examined under NO2 gas concentration of 200ppm Pure In2O3 gas sensor prepared at a firing temperature of 50$0^{\circ}C$ showed a maximum sensitivity to NOx gas at the operating temperature of 40$0^{\circ}C$ Al(0.004 wt%)-In2O3 sensor largely improved the sensitivities to both NO2 and NO gas and showed a superior selectivity compared with other gas sensors.

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In2O3 에탄올 가스 센서의 가스 감응 특성에 미치는 첨가물 효과 (Effects of Additives on Gas Sensing Properties of In2O3 Ethanol Gas Sensor)

  • 최동한
    • 센서학회지
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    • 제23권3호
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    • pp.192-196
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    • 2014
  • The effects of additives on gas sensing properties of $In_2O_3$ ethanol gas sensor were investigated. Gas sensors were fabricated by the painting method. The $In_2O_3-La_2O_3-Pt$ sensor heat treated $400^{\circ}C$ displayed fast response and recovery behavior with a maximum sensitivity to ethanol gas in air at an operating temperature of $300^{\circ}C$.

Improvement of Long-term Stability in $SnO_2$ Based Gas Sensor for Monitoring Offensive Odor

  • Park, Jong-Hun;Kim, Kwang-Ho
    • The Korean Journal of Ceramics
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    • 제6권3호
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    • pp.304-308
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    • 2000
  • WO$_3$/SnO$_2$ceramics has been suggested as an effective sensing material for monitoring offensive odor or pollutant gases. This work was focussed on improving long-term stability, which has been a principal problem generally taking place in SnO$_2$semiconductor gas sensor. Miniaturized thick film gas sensors were fabricated by screen printing technique. Two types of sensor materials, W doped SnO$_2$and WO$_3$mixed SnO$_2$, were comparatively investigated on those long-term stability and sensitivites to several gases. Small amount of W doping(0.1 mol%) into SnO$_2$largely improved the long-term stability. The W(0.1 mol%) doped SnO$_2$gas sensor had higher sensitivities to both acetone and alcohol compared with WO$_3$(5 wt%) mixed SnO$_2$gas sensor. On the contrary, WO$_3$(5 wt%) mixed SnO$_2$gas sensor showed more superior sensitivity to cigarette smoke due to larger W content.

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Sensing Characterization of Metal Oxide Semiconductor-Based Sensor Arrays for Gas Mixtures in Air

  • Jung-Sik Kim
    • 한국재료학회지
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    • 제33권5호
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    • pp.195-204
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    • 2023
  • Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NOx), ammonia (NH3), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO2 for CO, In2O3 for NOx, Ru-WO3 for NH3, and SnO2-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.

함침 방법의 차이에 따른 Pd, Pt-$SnO_2$의 프로판 가스 감응성 변화 (C3H8 Gas Sensitivity of Pd, Pt-$SnO_2$ Gas Sensor with Varying Impregnation Method)

  • 이종흔;박순자
    • 한국세라믹학회지
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    • 제27권5호
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    • pp.638-644
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    • 1990
  • The C3H8 gas sensitivities of SnO2, Pd-SnO2, Pt-SnO2 gas sensor are looked over with the impregnation method of PdCl2, H2PtCl6 solution on SnO2. The Cl- ion due to incomplete decomposition of PdCl2 at 80$0^{\circ}C$ for 30 min decrease the C3H8 gas sensitivity of SnO2, and the sensitivity is increased by the impreganation of H2PtCl6 solution on SnO2 because of its lower decomposition temperature compared with PdCl2. The C3H8 gas sensitivities of Pd-SnO2, Pt-SnO2 impregnated slightly after 1st sintering are larger than that of pure SnO2 sensor because very small amount of Cl- ion exist in sample due to smaller amount of impregnaiton.

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Thick-film ammonia gas sensor with high sensitivity and excellent selectivity

  • Lee, Kyuchung;Ryu, Kwang-Ryul;Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • 제2권1호
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    • pp.22-25
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    • 2004
  • A highly sensitive ammonia gas sensor using thick-film technology has been fabricated and examined. The sensing material of the gas sensor is FeOx-$WO_{3}-SnO_{2}$ oxide semiconductor. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. A novel method for detecting ammonia gas quite selectively utilizing a sensor array consisting of an ammonia gas sensor and a compensation element has been proposed and developed. The compensation element is a Pt-doped $WO_{3}-SnO_{2}$gas sensor which shows opposite direction of resistance change in comparison with the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array having two sensing elements.

Fabrication and characterization of a small-sized gas identification instrument for detecting LPG/LNG and CO gases

  • Lee Kyu-Chung;Hur Chang-Wu
    • Journal of information and communication convergence engineering
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    • 제4권1호
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    • pp.18-22
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    • 2006
  • A small-sized gas identification system has been fabricated and characterized using an integrated gas sensor array and artificial neural-network. The sensor array consists of four thick-film oxide semiconductor gas sensors whose sensing layers are $In_{2}O_{3}-Sb_{2}O_{5}-Pd-doped\;SnO_2$ + Pd-coated layer, $La_{2}O_{5}-PdCl_{2}-doped\;SnO_2,\;WO_{3}-doped\;SnO_{2}$ + Pt-coated layer and $ThO_{2}-V_{2}O_{5}-PdCl_{2}\;doped\;SnO_{2}$. The small-sized gas identification instrument is composed of a GMS 81504 containing an internal ROM (4k bytes), a RAM (128 bytes) and four-channel AD converter as MPU, LEDs for displaying alarm conditions for three gases (liquefied petroleum gas: LPG, liquefied natural gas: LNG and carbon monoxide: CO) and interface circuits for them. The instrument has been used to identify alarm conditions for three gases among the real circumstances and the identification has been successfully demonstrated.

$MgO-Cr_2O_3-TiO_2$ 산화물의 가스감지 특성 (Gas Sensing Properties of $MgO-Cr_2O_3-TiO_2$ Oxide)

  • 양천회;홍필선;유일증;임병오
    • 한국안전학회지
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    • 제1권1호
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    • pp.21-26
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    • 1986
  • Gas sensing materials for detecting inflammable gas such as alcohol, propane, acetic acid, carbon monoxide, hydrogen were developed by utiliting $MgO-Cr_2O_3-TiO_2$ system. Between 30$0^{\circ}C$ and 50$0^{\circ}C$, reversible chemisorption becomes dominant and the electrical canduction of P-type semiconductive with the gas chemisorption. The ceramic sensor exhibits a high sensitivity to particular reducing gas such as alcohol, whereas propane and butane have little effect on the resistivity. The time response of adsorption is estimated to be about 20 sec. On the other hand, the desorption process, which corresponds to oxidation due to oxygen adsorption, take more than 60 sec. Thus the ceramic sensor can be used as a alcohol sensor in an ambient aunosphere. As the oxygen concentration is increased from 0.1 to 10 precent($10^3-10^6ppm$), the resistance decreases rapidly but stabilizes at higher concentration.

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Low temperature-operating NiO-CoO butane gas sensors

  • 정동호;최순돈;민봉기
    • 센서학회지
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    • 제17권4호
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    • pp.303-307
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    • 2008
  • $NiO,\;Cu_2O,\;Mn_2O_3$ and $Cr_2O_3$ as p-type semiconductors were added in CoO with 15 wt.% ethylene glycol binder and measured the butane gas sensing characteristics. The highest sensitivity is obtained for the NiO-CoO sensors. CoO-20 at.% NiO sensor with 15 wt.% ethylene glycol binder sintered at $1100^{\circ}C$ for 24 h exhibits high sensitivity of 90 % to 5000 ppm butane gas at the sensor temperature of $250^{\circ}C$, compared to low sensitivities at the low operating temperature for commercial sensors. Response and recovery times are, respectively, within few seconds and 1min in the static flow system, indicating rapid adsorption and desorption of butane gas on sensor surface even at this low temperature.