• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.161-161
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• 2011

Titanium (IV) dioxide (TiO2) is one of the most attractive d-block transition metal functional oxides. Many applications of TiO2 such as dye-sensitized solar cells and photocatalyst have been widely investigated. To utilize solar energy efficiently, TiO2 should be well-aligned with a high surface area and promote the charge separation as well as electron transport. Herein, the TiO2 nanotubes were successfully fabricated by a template-directed method. The electrospun PEO(Polyethylene oxide, Molecular weight, 400k)fibers were used as a soft template for coating with titanium dioxide using an atomic layer deposition (ALD) technique. The deposition was conducted onto a template at 50$^{\circ}C$ by using titaniumisopropoxide [Ti(OCH(CH3)2)4; TTIP] as precursors of TiO2. While the as-deposited TiO2 layers onto PEO fibers were completely amorphous with atomic layer deposition, the TiO2 layers after calcination at 500$^{\circ}C$ for 1 h were properly converted into polycrystalline nanostructured hallow TiO2 nanotube. The TiO2 nanotube with high surface area can be easily handled and reclaimed for use in future applications related to solar cell fabrications.

• Journal of Ceramic Processing Research
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• v.20 no.4
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• pp.411-417
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• 2019

Graphene doped zinc oxide nanoparticles (G-ZnO) were prepared using modified hummer's technique together with the ultrasonic method and characterized by field emission scanning electron microscopy (FESEM), X-ray powder diffraction (XRD), fourier-transform infrared spectroscopy (FTIR) and high-resolution transmission electron microscopy (HRTEM). Different samples of epoxy resin nanocomposites reinforced with G-ZnO nanoparticles were prepared and were marked as F1 (without adding nanoparticles), F2 (1% w/w G-ZnO), and F3 (2% w/w G-ZnO) in combination of ≈ 56:18:18:8w/w% with epoxy resin/hardener, ammonium polyphosphate, boric acid, and Chitosan. The peak heat release rate (PHRR) of the epoxy nanocomposites was observed to decrease dramatically with the increasing G-ZnO nanoparticles. However, the LOI values increased significantly with the increase in wt % of G-ZnO nanoparticles. From the UL-94V data, it was confirmed that the F2 and F3 samples passed the flame test and were rated as V-0. The results obtained in the present work clearly revealed that the synthesized samples can be used as efficient materials in fire-retardant coating technology.

• Applied Chemistry for Engineering
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• v.10 no.3
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• pp.382-387
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• 1999

The processes and the kinetics of the lithium intercalation into the spin coated $V_2O_5$ xerogel prepared by the sol-gel processing have been studied employing impedance analyzer. Homogeneous and quasi-isotropic thin films of the xerogel can be obtained as a result of random distribution of the $V_2O_5$ gels on the substrate by the use of the spin coating. Effective diffusion coefficient and charge transfer resistance vary more than one order of magnitude at high and low lithium composition in $V_2O_5$ xerogel, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.351-351
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• 2013

한국 전체 에너지 사용량 중약 24%의 에너지가 건축물 부분에 소비되고 있다. 건축물의 벽체나 유리창 등을 통해서 에너지 손실이 이루어지는데 유리창은 벽체에 비해 약 10배 이상 낮은 단열 특성을 가지고 있기 때문에 유리창을 통한 열손실량은 더 크다. 이러한 유리창 부분의 열손실 문제를 해결할 수 있는 방안으로 좋은 단열 특성 및 낮은 방사율을 가지고 있는 Low-e coating 방법을 사용하였다. 본 실험에서는 XG glass 기판 위에 IGZO/Ag/IGZO OMO 구조의 다층 박막을 증착하였다. RF magnetron sputtering방법을 이용하여 OMO 구조의 상부와 하부의 Oxide layer로 IGZO 박막을 증착하였다. 사용된 IGZO 타겟은 $In_2O_3$ (99.99%), $Ga_2O_3$ (99.99%), ZnO (99.99%)의 분말을 각각 1:1:1 mol% 조성비로 혼합하여 소결하여 제작하였다. Thermal Evaporator 장비를 이용하여 OMO 구조의 Metal layer로 Ag (99.999%)를 증착하였다. 실험 기판은 크기 $30{\times}30mm$의 0.7T XG glass를 사용하였다. OMO 구조의 산화층 IGZO 박막은 상/하층 동일 조건으로 기판 온도는 실온으로 고정하였으며, 초기 압력 $3.0{\times}10^{-6}$ Torr, 증착 압력 $3.0{\times}10^{-2}$ Torr, RF 파워 50W, Ar 유량 50 sccm로 고정시키고 증착 시간이 변화하면서 박막을 증착하였다. OMO 구조의 Metal layer로 Ag 증착 조건은 초기 진공도가 약 $6.0{\times}10^{-6}$ Torr 이하로 유지하고 기판을 2 Rpm의 속도로 회전시켰다. 이후 0.3 V로 Ag를 10분간 가열하여 충분히 녹인 후 Film Thickness Monitor로 두께를 확인하였다. OMO 다층 박막의 산화물층 변화에 따라 로이다층 박막의 구조적, 광학적 및 전기적 특성을 분석하였다. XRD 분석결과에 의하여 Bragg's 법칙을 만족하는 피크가 나타나지 않는 비정질 구조임을 확인할 수 있으며, AFM 분석결과에 통해서 최소 1.3 nm의 Roughness를 나타내었다. UV-Visible-NIR 분광광도계를 이용하여 다층 박막은 가시광선 영역에서 평균 80%의 광 투과성을 보여 IR 영역에서 평균 30% 투과하고 좋은 차단 특성을 나왔다. Low-e 특성을 갖는 유리창을 통해서 에너지 절약을 이룰 수 있는 것을 확인할 수 있었다.

• Journal of the Korean Ceramic Society
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• v.56 no.1
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• pp.98-103
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• 2019

Optical filters to control light wavelength of displays or cameras are fabricated by multi-layer stacking process of low and high index thin films. The process of multi-layer stacking of thin films has received much attention as an optimal process for effective manufacturing in the optical filter industry. However, multi-layer processing has disadvantages of complicated thin film process, and difficulty of precise control of film morphology and material selection, all of which are critical for transmittance and coloring effect on filters. In this study, the composite $TiO_2$, which can be used to control of UV absorption, coated on nano hollow silica sol, was synthesized as a coating material for optical filters. Furthermore, systematic analysis of the process parameters during the chemical reaction, and of the structural properties of the coating solutions was performed using SEM, TEM, XRD and photo spectrometry. From the structural analysis, we found that the 85 nm nano hollow silica with 2.5 nm $TiO_2$ shell formation was successfully synthesized at proper pH control and titanium butoxide content. Photo luminescence characteristics, excited by UV irradiation, show that stable absorption of 350 nm-light, correlated with a 3.54 eV band gap, existed for the $TiO_2$ shell-nano hollow silica reacted with 8.8 mole titanium butoxide solution. Transmittance observed on substrate of the $TiO_2$ shell-nano hollow silica showed effective absorption of 200-300 nm UV light without deterioration of visible light transparency.

• Korean Journal of Materials Research
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• v.14 no.10
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• pp.701-706
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• 2004

Bismuth layered structure ferroelectric thin films, La-substituted $Bi_{4}Ti_{3}O_{12}$ ($Bi_{1-x}La_{x}Ti_{3}O_{12}$, x=0.75, BLT) were prepared on the $Pt(111)/Ti/SiO_2/Si(100)$ substrates by a sol-gel spin coating process. The thin films were annealed in various conditions, i.e., oxygen, nitrogen and vacuum atmospheres for various annealing time. We investigated the annealing condition effects on the grain orientation and ferroelectric properties. The measured XRD patterns revealed that the BLT thin films showed only $Bi_{4}Ti_{3}O_{12}$-type phase with random orientation. $La^{3+}$ ion substitution for $Bi^{3+}$ ion in perovskite layers of $Bi_{4}Ti_{3}O_{12}$ decreased the degree of c-axis orientation and increased the remanent polarization ($2P_{r}$). The remanent polarization ($2P_{r}$) and the coercive field ($2E_{c}$) of the BLT thin film annealed at $650^{\circ}C$ for 5 min in oxygen atmosphere were $87{\mu}C/cm^2$ and 182 kV/cm, respectively, at an applied electric field of 240 kV/cm. For all of the BLT thin films annealed in various conditions, the fatigue resistance was shown. The improvement of ferroelectric properties with La substitution in $Bi_{4}Ti_{3}O_{12}$ could be attributed to the changes in space charge densities and grain orientation in the thin film.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.175-179
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• 1996

Ferroelectric SrBi$_2$Ta$_2$$O_{9}$ thin films were fabricated by tole Sol-Gel method using a spin-on coating with MOD(Metal Organic Dccomposition) solution on Pt/Ti/SiO$_2$/Si(100) substratcs. The films were anncalcd at 80$0^{\circ}C$ for one hour in oxygen atmosphere. The effects of Bi/Ti mole ratios on crystalline orientations, surface morphologies, and subface composition SBT thin films with a Bi/Ta mole ratios from 1.1 to 1.3 were investigated using X-ray Diffractometry (XRD). Atomic Force (AFM), X-Ray Photoelectron Spectroscopy(XPS). Ferroelectric properties of these films were also measured.d.

• KIEE International Transactions on Electrophysics and Applications
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• v.11C no.2
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• pp.18-22
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• 2001

The thin films of high permitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)TiO$_3$ thin as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Sio$_2$/Si substrate at 4,000 [rpm] for 10 seconds. The structural characteristics of the surface were analyzed by fractal dimension. The thickness of BST ceramics thin films was about 260∼280 [nm]. The property of the leakage current was stable with 10-9∼10-11[A] when the applied voltage was 0∼3[V]. BST thin films ha low leakage current properties when fractal dimension was low and a coating area was high.

• Bulletin of the Korean Chemical Society
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• v.26 no.10
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• pp.1515-1519
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• 2005

Tungsten oxide-modified TiO2 thin films were formed on a glass substrate by sol-gel and dip coating processes using acetyl acetone as a chelating agent. The hydrophilic properties of the thin films were investigated with illumination of UV light. The dependence of water contact angle on material composition and morphology of the film is established with SEM image and AFM profile. The surface morphology was controlled with the change of precursor concentration. 0.01 M of tungsten oxide-modified Ti$O_2$ have shown the highest hydrophilicity after UV-irradiation. The effect of composition on photoinduced hydrophilicity of the W$O_3$-Ti$O_2$ films was also investigated. The films were characterized by XRD, SEM, AFM and XPS.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.335-337
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• 1995

In this study, $Pb(Zr_{0.52}Ti_{0.48})O_3$ ceramic thin films were fabricated from an alkoxide-based by Sol-Gel method. $Pb(Zr_{0.52}Ti_{0.48})O_3$ stock solution was made and spin-coated on the $Pt/SiO_2/Si$ substrate at 4000[rpm] for 30[sec]. Coated specimens were dried at 400[$^{\circ}C$] for 10 [min]. The coating process was repeated 4 times and then heat-treated at 500$\sim$800[$^{\circ}C$], 1 hour. The final thickness of the thin films were about 3000[A]. The crystallinity and microstructure of the thin films were investigated for varing the sintering condition. The ferroelectric perovskite' phases precipitated under the sintering of 700[$^{\circ}C$] for 1 hours. In the $Pb(Zr_{0.52}Ti_{0.48})O_3$ thin films sintered at 700[$^{\circ}C$] for 1 hour, dielectric constant and dielectric loss were 2133, 2.2[%] at room temperature, respectively. $Pb(Zr_{0.52}Ti_{0.48})O_3$ thin film capacitors having good dielectric and electrical properties are expected for the application to the dielectric material of DRAM.