• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.6
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• pp.276-281
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• 2021

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y₂O₃ and YF₃ as raw materials. Mixing ratio of the Y₂O₃ and YF₃ was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

• Clean Technology
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• v.12 no.1
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• pp.27-35
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• 2006

Main compositions of powder paint based on thermoset type epoxy resin consist of epoxy resin for powder coating, curing agent, filler and pigment. The curing system used in this study was based on diglycidyl ether of bisphenol-A (DGEBA) and dicyan diamide (DICY). The curing behavior and rheological properties of powder coating material were investigated using DSC and rheometer, respectively. And the adhesion strength between steel and powder coating material was measured using lap shear geometry. The optimum formulation of epoxy powder paint obtained from this study was base resin of 100 phr, DICY of 6 phr, $CaCO_3$ of 20 phr, and $TiO_2$ of 10 phr.

• New & Renewable Energy
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• v.1 no.1 s.1
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• pp.64-71
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• 2005

The stability of alumina-coated NiO cathodes was studied in $Li_{0.62}/K_{0.38}$ molten carbonate electrolyte. Alumina was effectively coated on the porous Ni plate using galvanostatic pulse plating method. The deposition mechanism of alumina was governed by the concentration of hydroixde ions near the working electrode, which was controlled by the temperature of bath solution. Alumina-coated NiO cathodes were formed to $A1_2O_3-NiO$ solid solution by the oxidation process and their Ni solubilities were were than that of NiO up to the immersion time of 100h. However, their Ni solubilities increased and were similar to that of the bare NiO cathode after 100h. It was because aluminum into the solid solution was segregated to $\alpha-LiAlO_2$ on the NiO and its Product did not Play a role of the Physical barrier against NiO dissolution.

• Journal of Power System Engineering
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• v.21 no.2
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• pp.5-13
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• 2017

This study has developed an organic/inorganic hybrid solution according to amount of $SiO_2$ polysilicate, and the amount of melamine is constant. The three types of cold rolled steel were evaluated a corrosion resistance properties by using these solutions. $US_3M_3$ and $US_{11}M_3$ solutions were generate a lot of corrosion. $US_7M_3$ solution was excellent in corrosion resistance, regardless of the steel type. The appearance of coating by $US_3M_3$ and $US_{11}M_3$ solutions were bumpy surface, and were a lot of fine defects. $US_7M_3$ solution was made a sophisticated molecular cross-linking structure inside the coating, it was a slick surface. Other characteristics are exhibited the excellent property for all solutions.

• Journal of the Korean Society for Heat Treatment
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• v.20 no.6
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• pp.299-305
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• 2007

The effect of spray deposition of oxide particles on oxidation behaviors of as-cast Mo-14.2Si-9.6B (at%) alloys at $1200^{\circ}C$ up to for 100 hrs has been investigated. Various oxide powders are utilized to make coatings by spray deposition, including $SiO_2,\;TiO_2,\;ZrO_2,\;HfO_2$ and $La_2O_3$. It is demonstrated that the oxidation resistance of the cast Mo-Si-B alloy can be significantly improved by coating with those oxide particles. The growth of the oxide layer is reduced for the oxide particle coated Mo-Si-B alloy. Especially, for the alloy with $ZrO_2$ coating, the thickness of oxide layer becomes only one fifth of that of uncoated alloys when exposed to in air for 100 hrs. The reduction of oxide scale growth of the cast Mo-Si-B alloy due to oxide particle coatings are discussed in terms of the change of viscosity of glassy oxide phases that form during oxidation at high temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.336-336
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• 2013

Zinc oxide (ZnO) based transparent oxide semiconductors have been studied due to their high transmittance and electrical conductivity. Pure ZnO have unstable optical and electrical properties at high temperatures but doped ZnO thin films can have stable optical and electrical properties. In this paper, transparent oxide semiconductors of Y-doped ZnO thin films prepared by sol-gel method. The ionic radius of $Y^{3+}$ (0.90 A) is close to that of $Zn^{2+}$ (0.74 A), which makes Y suitable dopant for ZnO thin films. The Sn-doped ZnO thin films were deposited onto quartz substrates with different atomic percentages of dopant which were Y/Zn = 0, 1, 2, 3, 4, and 5 at.%. These thin films were pre-heated at $150^{\circ}C$ for 10 min and then annealed at $500^{\circ}C$ or 1 h. The structural and optical properties of the Y-doped ZnO thin films were investigated using field-emission scanning electronmicroscopy (FE-SEM), X-ray diffraction (XRD), UV-visible spectroscopy, and photoluminescence (PL).

• Journal of the Korean Ceramic Society
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• v.31 no.7
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• pp.795-803
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• 1994

Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{\circ}C$ for 30 min. After the heat treatment, the film was 0.200$\pm$0.010 ${\mu}{\textrm}{m}$ thick and its grain size was 0.059 ${\mu}{\textrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{\circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.11
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• pp.2223-2228
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• 2009

Dye sensitized solar cells(DSCs) have been very economical and easy method to convert solar energy to electricity. DSC can reach low costs in future outdoor power applications. However, to commercialize the DSC, there are still many shortages to overcome such a low efficiency in a large size DSC. In this study, DSCs were fabricated by an electrospray coating method for the $TiO_2$ thin film. They were compared with DSCs prepared by conventional coating methods. We conducted an experiment to obtain the optimized parameters of voltage, flow rate, incident angle and distance in the electrospray method. After we fabricated $TiO_2$ film using that way, we investigated the characteristics of DSC through I-V Curve, SEM and EIS. This novel method shows stable performance with an energy conversion efficiency of 3.44 % under 1 sun illumination (AM 1, $P_{in}$ of $100\;mW/cm^2$).

• Journal of Welding and Joining
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• v.9 no.3
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• pp.18-25
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• 1991

The purpose of this paper was to investigate the effect of deposition configuration on the mechanical properties of the flame sprayed titania ceramic coating. The sprayed deposition configuration was made in different five types with titania ceramic and Ni-base alloy on the mild steel substrate. The composite coating exhibited superior mechanical properties such as hardness, adhesive strength, thermal shock resistance and corrosion resistance, whereas the mixed coating proved to be more resistant to erosion. Especially graded coating, which consist of Ni-base alloy undercost, intermediate grade coat and titania ceramic overcost, showed excellent mechanical properties.

• Journal of Power System Engineering
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• v.6 no.3
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• pp.24-30
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• 2002

The deformation and fracture behaviors of both Al2O3 and Ni 4.5wt.%Al plasma thermal spray coating were investigated by an acoustic emission method. Plasma thermal spray coating is formed by a process in which melted particles flying with high speed towards substrate, then crash and spread on the substrate surface cooled and solidified in a very short time, stacking of the particles makes coating. A tensile test is conducted on notch specimens in a stress range below the elastic limit of substrate. A bendind test is done on smooth specimens. The waveforms of AE generated from the both test coating specimens can be classified by FFT analysis into two types which low frequency(type I) and high frequency(type II). The type I waveform is considered to corresponds exfoliation of coating layers and type II waveform corresponds the plastic deformation of notch tip. The fracture of the coating layers can estimate by AE event and amplitude, because AE features increase when the deformation generates.