Properties of fluorine-doped $SnO_2$ films perpared by the in-line APCVD system
(In-line APCVD에 의해 제작된 $SnO_2(:F)$ film의 특성)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.4 no.2
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- pp.157-168
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- 1994