• 센서학회지
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• 제31권5호
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• pp.348-352
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• 2022

Hydrogen gas (H₂) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H₂ gas sensor with high performance. In this paper, we confirmed that H₂ gas detection ability of SnO₂ based H₂ gas sensor along with thermal treatment effect of SnO₂. Proposed SnO₂ based H₂ gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO₂ thin films are thermally treated in various thermal treatement temperature in range of 500-900 ℃ and their H₂ gas detection ability is estimatied by measuring output current of H₂ gas sensor. Based on experimental results, fabricated H₂ gas sensor with SnO₂ thin film which is thermally treated at 700 ℃ has a superior H₂ gas detection ability, and it can be expected to utilize at the practical applications.

• Transactions on Electrical and Electronic Materials
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• 제13권1호
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• 제어로봇시스템학회논문지
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• 제13권7호
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• 한국세라믹학회지
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• 제27권5호
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• pp.638-644
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• 1990

The C3H8 gas sensitivities of SnO2, Pd-SnO2, Pt-SnO2 gas sensor are looked over with the impregnation method of PdCl2, H2PtCl6 solution on SnO2. The Cl- ion due to incomplete decomposition of PdCl2 at 80$0^{\circ}C$ for 30 min decrease the C3H8 gas sensitivity of SnO2, and the sensitivity is increased by the impreganation of H2PtCl6 solution on SnO2 because of its lower decomposition temperature compared with PdCl2. The C3H8 gas sensitivities of Pd-SnO2, Pt-SnO2 impregnated slightly after 1st sintering are larger than that of pure SnO2 sensor because very small amount of Cl- ion exist in sample due to smaller amount of impregnaiton.

• 한국표면공학회지
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• 제48권6호
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• pp.309-314
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• 2015

Multiwall carbon nanotubes are synthesized by using VLS mechanism for the application to $H_2$ gas sensor. MWCNT is not suitable for hydrogen gas sensor due to its low response to the gas. To enhance the gas sensing performance, multiwall carbon nanotubes are coated with $TiO_2$ nanoparticles. Scanning electron microscopy and Transmission electron microscopy showed that the synthesized MWCNT were well dispersed with the diameter and wall thickness of approximately 10-30nm and 5nm, respectively. The MWCNT sensor showed the sensitivities of 1.33-9.5% for the $H_2$ concentration of 100-5000ppm at room temperature. These sensitivities are significantly improved to 6.64-46.65% by coating $TiO_2$ nanoparticles to the MWCNT sensor. The mechanisms of $H_2$ gas sensing improvement of the MWCNT sensor coated with $TiO_2$ nanoparticles are discussed.

• 센서학회지
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• 제29권6호
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• pp.388-393
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• 2020

In this study, a PbS quantum dots (QDs)-based H₂ gas sensor with a Pd electrode was proposed. QDs have a size of several nanometers, and they can exhibit a high surface area when forming a thin film. In particular, the NH₂ present in the ligand of PbS QDs and H₂ gas are combined to form NH₃⁺, subsequently the electrical characteristics of the QDs change. In addition to the resistance change owing to the reaction between Pd and H₂ gas, the resistance change owing to the reaction between the NH₂ of PbS QDs and H₂ gas increases the current signal at the sensor output, which can produce a high output signal for the same concentration of H₂ gas. Using the XRD and absorbance properties, the synthesis and particle size of the synthesized PbS QDs were analyzed. Using PbS QDs, the sensitivity was significantly improved by 44%. In addition, the proposed H₂ gas sensor has high selectivity because it has low reactivity with heterogeneous gases such as C₂H₂, CO₂, and CH₄.

• 센서학회지
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• 제31권5호
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• pp.337-342
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• 2022

Hydrogen (H₂) gas is widely preferred for use as a renewable energy source owing to its characteristics such as environmental friendliness and a high energy density. However, H₂ can easily reverse or explode due to minor external factors. Therefore, H₂ gas monitoring is crucial, especially when the H₂ concentration is close to the lower explosive limit. In this study, metal oxide materials and their p-n heterojunctions were synthesized by a hydrothermal-assisted dip-coating method. The synthesized thin films were used as sensing materials for H₂ gas. When the H₂ concentration was varied, all metal oxide materials exhibited different gas sensitivities. The performance of the metal oxide gas sensor was analyzed to identify parameters that could improve the performance, such as the choice of the metal oxide material, effect of the p-n heterojunctions, and operating temperature conditions of the gas sensor. The experimental results demonstrated that a CuO/ZnO gas sensor with a p-n heterojunction exhibited a high sensitivity and fast response time (134.9% and 8 s, respectively) to 5% H₂ gas at an operating temperature of 300℃.

• 센서학회지
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• 제31권3호
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• pp.168-174
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• 2022

Hydrogen sulfide(H₂S) gas is a high-risk gas that can cause suffocation or death in severe cases, depending on the concentration of exposure. Various studies to detect this gas are still in progress. In this study, we demonstrate a colorimetric sensor that can detect H₂S gas using its direct color change. The proposed nanofiber sensor containing a dye material named Lead(II) acetate, which changes its color according to H₂S gas reaction, is fabricated by electrospinning. The performance of this sensor is evaluated by measuring RGB changes, ΔE value, and gas selectivity. It has a ΔE value of 5.75 × 10^-3 ΔE/s·ppm, showing improved sensitivity up to 1.4 times that of the existing H₂S color change detection sensor, which is a result of the large surface area of the nanofibers. The selectivity for H₂S gas is confirmed to be an excellent value of almost 70 %.

• 한국전기전자재료학회논문지
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• 제25권2호
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• pp.91-95
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• 2012

ZnO thin films were deposited on p-type 4H-SiC substrate by pulsed laser deposition. ZnO nanowires were formed on p-type 4H-SiC substrate by furnace. Ti/Au electrodes were deposited on ZnO thin film/SiC and ZnO nanowire/SiC structures, respectively. Structural and crystallographical properties of the fabricated ZnO thin film/SiC and ZnO nanowire/SiC structures were investigated by field emission scanning electron microscope and X-ray diffraction. In this work, resistance and sensitivity of ZnO thin film/SiC gas sensor and ZnO nanowire/SiC gas sensor were measured at $300^{\circ}C$ with various CO gas concentrations (0%, 90%, 70%, and 50%). Resistance of gas sensor decreases at CO gas atmosphere. Sensitivity of ZnO nanowire/SiC gas sensor is twice as big as sensitivity of ZnO thin film/SiC gas sensor.

• Applied Science and Convergence Technology
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• 제23권6호
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• pp.392-397
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• 2014

CuO nanotubes are synthesized using $TeO_2$ nanorod templates for application to $H_2S$ gas sensors. $TeO_2$ nanorod templates were synthesized by using the VS method through thermal evaporation. Scanning electron microscopy, transmission electron microscopy and X-ray diffraction showed that the synthesized nanotubes were monoclinic-structured polycrystalline CuO with diameter and wall thickness of approximately 100~300 nm and 5~10 nm, respectively. The CuO nanotube sensor showed responses of 136~325% for the $H_2S$ concentration of 0.1~5 ppm at room temperature. These response values are approximately twice as high as that of the CuO nanowire sensor for the same concentrations of $H_2S$ gas. Along with the investigation of the performance of the sensors, the mechanisms of $H_2S$ gas sensing of the CuO nanotubes are also discussed in this study.