• Title/Summary/Keyword: $Ga_{2}O_{3}$

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대기압 플라즈마 표면 처리를 이용한 금속과 폴리이미드 필름의 접촉력 향상에 관한 연구

  • O, Jong-Sik;Park, Jae-Beom;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.264-264
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    • 2011
  • Poly [(N, N'-oxydiphenylene) pyromellitimide], polyimide (PI) film은 기계적 강도가 매우 우수하고 열적, 화학적 안정성이 뛰어난 재료로서 전자제품의 소형화, 경령화, 고성능화를 위한 차세대 flexible electronic device에 적용하기 위하여 많은 연구가 진행되고 있다. 그러나 PI의 특성상, 매우 낮은 표면에너지로 인해 금속과의 접촉력이 좋지 않은 단점을 가지고 있다. 본 연구에서는, 금속박막과 PI film 과의 접촉력을 증가시키기 위해 remote-type modified dielectric barrier discharge (DBD) module을 이용하여 대기압 플라즈마 표면처리를 하였다. 실험에 사용된 gas composition은 각각 $N_2$/ He/ $SF_6$, $N_2$/ He/ $O_2$, $N_2$/ He/ $SF_6$/ $O_2$, $N_2$/ He/ $SF_6$/ $O_2$ 이다. $N_2$/ He/ $SF_6$/ $O_2$ gas composition을 이용하여 PI 표면을 플라즈마 처리한 경우, C=O 결합이 PI film 위에 생성됨으로써, 접촉각이 매우 낮게 형성됨을 관찰할 수 있었다. 이와는 반대로 $N_2$/ He/ $SF_6$ gas composition 을 사용하였을 경우에는 C-Fx 화학적 결합이 생성되기 때문에 가장 높은 접촉각이 형성됨을 관찰할 수 있었다. 특히, $N_2$ (40 slm)/ He (1 slm)/ $SF_6$ (1.2 slm) gas composition에 $O_2$ gas를 0.2 slm부터 1.0 slm까지 변화시켜가며 PI film 표면을 처리한 결과, $O_2$ gas를 0.9 slm 첨가하였을 때, 가장 낮은 $9.3^{\circ}$의 접촉각을 얻을 수 있었다. 이는 0.9 slm의 $O_2$ gas를 첨가하였을 때, 가장 많은 양의 $O_2$ radical이 생성되기 때문에 많은 양의 C=O 결합이 생성되기 때문이다. 최적화된 $N_2$ (40 slm)/ He (1 slm)/ $SF_6$ (1.2 slm)/ $O_2$ (0.9 slm) gas composition 조건에서 Ag film과 PI film과의 접촉력을 관찰할 결과, 111 gf/mm를 얻을 수 있었다.

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Solution-Processed Anti Reflective Transparent Conducting Electrode for Cu(In,Ga)Se2 Thin Film Solar Cells (CIGS 박막태양전지를 위한 반사방지특성을 가진 용액공정 투명전극)

  • Park, Sewoong;Park, Taejun;Lee, Sangyeob;Chung, Choong-Heui
    • Korean Journal of Materials Research
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    • v.30 no.3
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    • pp.131-135
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    • 2020
  • Silver nanowire (AgNW) networks have been adopted as a front electrode in Cu(In,Ga)Se2 (CIGS) thin film solar cells due to their low cost and compatibility with the solution process. When an AgNW network is applied to a CIGS thin film solar cell, reflection loss can increase because the CdS layer, with a relatively high refractive index (n ~ 2.5 at 550 nm), is exposed to air. To resolve the issue, we apply solution-processed ZnO nanorods to the AgNW network as an anti-reflective coating. To obtain high performance of the optical and electrical properties of the ZnO nanorod and AgNW network composite, we optimize the process parameters - the spin coating of AgNWs and the concentration of zinc nitrate and hexamethylene tetramine (HMT - to fabricate ZnO nanorods. We verify that 10 mM of zinc nitrate and HMT show the lowest reflectance and 10% cell efficiency increase when applied to CIGS thin film solar cells.

Effect of Priming and Preimbibition on Germination of Zoysiagrass Seeds (Priming과 침지처리가 들잔디의 종자발아에 미치는 영향)

  • 김태일;구자형
    • Asian Journal of Turfgrass Science
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    • v.8 no.1
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    • pp.1-11
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    • 1994
  • Studies were conducted to evaluate the effect of priming and preimbibition on gerraination of unscarified and KOH-scarified zoysiagrass (Zoysia japonica Steud.) seeds, respectively. Germi-nation percentages at 35˚C of seeds primed in $KNO_3$ and Ca($NO_3$)$_2$ were significantly higher than that of untreated seeds. The optimum conditions for priming unscarified seeds were in aerated $KNO_3$ solution at O4 M for 4 days at 20˚C. No additional benefit of $GA_3$ on increasing germination was not found in seed priming with solution of $KNO_3$ + $GA_3$ or in seeds preimbibed with $GA_3$ after priming. Scarified seeds preimbibed with distilled water(DW) for 4 days at 20˚C germinated higher and with fewer days to 50% of total germination(T 50) than untreated seeds. Preimbibition with $GA_3$ solution at 50 ppm for 4 days at 5, 10, 15 and 20˚C enabled up to 97% of seeds to germinate and reduced days to T 50 about 1.1 to 1.2 days at 35˚C Especially, seeds preimbibed with $GA^2$˚$_3_2_1$$\times$ had greatly higher germination and lower T 50 than untreated or DW-preimbibibed seeds at 30˚C, which is inadequate to germination in general. Preimbibed seed performance was unchanged after storage at room temperature for 50 days. Seeds preimbibed with GA $_3$ had higher rate of seedling emergence and faster growth of shoot than untreated seeds after sowing at 30˚C in growing medium in growth chamber.

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Effect of MoSe2 on Contact Resistance of ZnO/Mo Junction in Cu(In,Ga)Se2 Thin Film Solar Module (MoSe2가 Cu(In,Ga)Se2 박막 태양전지 모듈의 ZnO/Mo 접합의 접촉 저항에 미치는 영향)

  • Cho, Sung Wook;Kim, A Hyun;Lee, Gyeong A;Jeon, Chan Wook
    • Current Photovoltaic Research
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    • v.8 no.3
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    • pp.102-106
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    • 2020
  • In this paper, the effect of MoSe2 on the contact resistance (RC) of the transparent conducting oxide (TCO) and Mo junction in the scribed P2 region of the Cu(In,Ga)Se2 (CIGS) solar module was analyzed. The CIGS/Mo junction becomes ohmic-contact by MoSe2, so the formation of the MoSe2 layer is essential. However, the CIGS solar module has a TCO/MoSe2/Mo junction in the P2 region due to structural differences from the cell. The contact resistance (RC) of the P2 region was calculated using the transmission line method, and MoSe2 was confirmed to increase RC of the TCO/Mo junction. B doped ZnO (BZO) was used as TCO, and when BZO/MoSe2 junction was formed, conduction band offset (CBO) of 0.6 eV was generated due to the difference in their electron affinities. It is expected that this CBO acts as a carrier transport barrier that disturbs the flow of current, resulting in increased RC. In order to reduce the RC caused by CBO, MoSe2 must be made thin in a CIGS solar module.

Various Shape of Carbon Layer on Ga2O3 Thin Film by Controlling Methane Fraction in Radio Frequency Plasma Chemical Vapor Deposition (Ga2O3박막 상에서의 RF 플라즈마 화학기상증착법의 메테인 분율 조절에 의한 탄소층의 다양한 형상 제어 연구)

  • Seo, Ji-Yeon;Shin, Yun-Ji;Jeong, Seong-Min;Kim, Tae-Gyu;Bae, Si-Young
    • Journal of the Korean Society for Heat Treatment
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    • v.35 no.2
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    • pp.51-56
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    • 2022
  • In this study, we controlled the shape of a carbon layer on gallium oxide templates. Gallium oxide layers were deposited on sapphire substrates using mist chemical vapor deposition. Subsequently, carbon layers were formed using radio frequency plasma chemical vapor deposition. Various shapes of carbon structures appeared according to the fraction of methane gas, used as a precursor. As methane gas concentration was adjusted from 1 to 100%, The shapes of carbon structures varied to diamonds, nanowalls, and spheres. The growth of carbon isotope structures on Ga2O3 templates will give rise to improving the electrical and thermal properties in the next-generation electronic applications.

Microtube Light-Emitting Diode Arrays with Metal Cores

  • Tchoe, Youngbin;Lee, Chul-Ho;Park, Junbeom;Baek, Hyeonjun;Chung, Kunook;Jo, Janghyun;Kim, Miyoung;Yi, Gyu-Chul
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.287.1-287.1
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    • 2016
  • Three-dimensional (3-D) semiconductor nanoarchitectures, including nano- and micro- rods, pyramids, and disks, are emerging as one of the most promising elements for future optoelectronic devices. Since these 3-D semiconductor nanoarchitectures have many interesting unconventional properties, including the use of large light-emitting surface area and semipolar/nonpolar nano- or micro-facets, numerous studies reported on novel device applications of these 3-D nanoarchitectures. In particular, 3-D nanoarchitecture devices can have noticeably different current spreading characteristics compared with conventional thin film devices, due to their elaborate 3-D geometry. Utilizing this feature in a highly controlled manner, color-tunable light-emitting diodes (LEDs) were demonstrated by controlling the spatial distribution of current density over the multifaceted GaN LEDs. Meanwhile, for the fabrication of high brightness, single color emitting LEDs or laser diodes, uniform and high density of electrical current must be injected into the entire active layers of the nanoarchitecture devices. Here, we report on a new device structure to inject uniform and high density of electrical current through the 3-D semiconductor nanoarchitecture LEDs using metal core inside microtube LEDs. In this work, we report the fabrications and characteristics of metal-cored coaxial $GaN/In_xGa_{1-x}N$ microtube LEDs. For the fabrication of metal-cored microtube LEDs, $GaN/In_xGa_{1-x}N/ZnO$ coaxial microtube LED arrays grown on an n-GaN/c-Al2O3 substrate were lifted-off from the substrate by wet chemical etching of sacrificial ZnO microtubes and $SiO_2$ layer. The chemically lifted-off layer of LEDs were then stamped upside down on another supporting substrates. Subsequently, Ti/Au and indium tin oxide were deposited on the inner shells of microtubes, forming n-type electrodes of the metal-cored LEDs. The device characteristics were investigated measuring electroluminescence and current-voltage characteristic curves and analyzed by computational modeling of current spreading characteristics.

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Growth of Gallium Oxide Thin Film on c-, a-, m-, r-Plane Sapphire Substrates Using Mist Chemical Vapor Deposition System (미스트 화학기상증착법을 이용한 c면, a면, m면, r면 사파이어 기판 위의 산화갈륨 박막 성장 연구 )

  • Gi-Ryeo Seong;Seong-Ho Cho;Kyoung-Ho Kim;Yun-Ji Shin;Seong-Min Jeong;Tae-Gyu Kim;Si-Young Bae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.36 no.1
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    • pp.74-80
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    • 2023
  • Gallium oxide (Ga2O3) thin films were grown on c-, a-, m-, r-plane sapphire substrates using a mist chemical vapor deposition system. Various growth temperature range of 400~600℃ was applied for Ga2O3 thin film deposition. Then, several structural properties were characterized such as film thickness, crystal phase, lattice orientation, surface roughness, and optical bandgap. Under the certain growth temperature of 500℃, all grown Ga2O3 featured rhombohedral crystal structures and well-aligned preferred orientation to sapphire substrate. The films grown on c-and r-plane sapphire substrates, showed low surface roughness and large optical bandgap compared to those on a-and m-plane substrates. Therefore, various sapphire orientation can be potentially applicable for future Ga2O3-based electronics applications.

Growth of Bi:YIG Thick Films by Change of PO/Bi2O3 Molar Ratio (PO/Bi2O3 변화에 따른 Bi:YIC 단결정 후박의 성장)

  • 윤석규;김근영;김용탁;정현민;임영민;윤대호
    • Journal of the Korean Ceramic Society
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    • v.39 no.6
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    • pp.589-593
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    • 2002
  • The single crystalline thick fi1ms of Bi:Y$_3$Fe$_{5}$ $O_{12}$(Bi:YIG) were grown on (GdCa)$_3$(GaMgZr)$_{5}$ $O_{12}$(SGGG) by Liquid Phase Epitaxy (LPE). The changes of lattice mismatch and Bi concentration were investigated in the thick film growth as a function of PO/Bi$_2$ $O_3$ molar ratio, with keeping constant of substrate rotation speed, supercooling and growth time. It was grown that the lattice constant of the garnet single crystalline thick films and Bi content increased with decreasing of PO/Bi$_2$ $O_3$ molar ratio. Bi concentration decreased with increasing of the film thickness.

건식식각을 이용한 n-GaN 표면의 Cylinderical Trapezoid 형성과 식각깊이 변화에 따른 수직형 발광다이오드 특성 연구

  • Kim, Seok-Hwan;Lee, Hyeong-Cheol;Yeom, Geun-Yeong;Jeon, Yeong-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.418-418
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    • 2010
  • 최근 친환경 저전력 차세대 조명소자로 발광다이오드가 각광을 받고 있다. 하지만 종래의 수평형 발광다이오드는 사파이어 기판의 열악한 열전도도 및 전기전도도 특성으로 인하여 효율적인 열방출의 저하가 생기게 되고, 양전극과 음전극의 수평배치에 기인한 심각한 전류쏠림현상 등이 수평형 발광다이오드의 고전력 소자로서의 응용에 걸림돌로 작용하고 있다. 근래에 수평형 발광다이오드의 대안 중 하나로 수직형 발광다이오드에 대한 연구가 활발히 진행되고 있다. 수직형 발광다이오드에서는, 수평형 발광다이오드에서의 전류쏠림현상을 향상시키기 위해 얀전극과 음전극을 수직으로 배치시킨다. 그리고 열전도도 및 전기전도도 특성이 떨어지는 사파이어를 제거하기 위해 LLO(Laser Lift Off)공정이 사용된다. LLO공정으로 인해 수직형 발광다이오드의 구조는 수평형 발광다이오드와 달리 n-GaN이 위로 배치되는 특성을 가진다. 본 연구에서는, 수직형 발광다이오드의 광추출 효율을 증가시키기 위해 SiO2 나노입자를 이용한 GaN 표면요철 형성기술을 개발, 적용 하였다. SiO2 나노입자를 n-GaN상에 단일층으로 분산시키기 위해 PR(PhotoResist), 나노입자, IPA(Isopropyl Alcohol)이 혼합된 용액을 스핀코팅시켰고 그 결과를 SEM으로 확인할 수 있었다. GaN 식각을 위해 SiO2 나노입자를 마스크로 사용하였고, BCl3가스를 사용한 건식식각을 진행하였다. 그 결과 조밀하고 균일한 크기의 Cylinderical Trapezoid 식각 형상이 n-GaN표면에 형성되었음을 SEM으로 확인할 수 있었다. 우리는 표면요철이 없는 발광다이오드와 SiO2 나노입자를 이용한 표면요철이 형성된 발광다이오드의 특성을 비교하였다. 그 결과 표면요철이 있을 때 광출력이 증가함을 확인할 수 있었다. 거기에 더하여 표면요철의 높이가 300nm~1000nm로 변화함에 따른 소자의 특성변화 또한 관찰할 수 있었다.

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Zn Diffusion using by Open-tube Method into n-type $GaAS_{0.60}P_{0.40}$ and the Properties of Electroluminescence (Open-tube 방식을 이용한 n-type $GaAS_{0.60}P_{0.40}$에 Zn 확산과 전계발광 특성)

  • Pyo, Jin-Goo;So, Soon-Jin;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.63-66
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    • 2003
  • To diffuse Zn at solid-state, the $SiO-2$/ZnO/$SiO_2$ wafers was made by PECVD and RF Sputter. Thicknesses of bottom $SiO_2$ and cap $SiO_2$ was about 500 ${\AA}$ and about 3500 ${\AA}$. Diffusion temperatures were $760^{\circ}C$, $780^{\circ}C$, and $800^{circ}C$, and diffusion times were 1, 2, 3, 4, 5, and 6 hr. LED chips were fabricated by the diffused wafers at Fab. The peak wavelength of all chips showed about 625~650 nm and red color. Main reason for Iv change was by diffusion temperature not diffusion time. The lower temperature was the higher Iv. We thick that these properties is because of the very high diffusion temperature.

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