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The temperature effect on the electrical properties of W /Ta$_2$O$_5$/ Si structures (온도가 W /Ta$_2$O$_5$ 5/ Si 구조의 전기적 특성에 미치는 영향)

  • 장영돈;박인철;김홍배
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.11a
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    • pp.71-74
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    • 1996
  • Ta$_2$O$_{5}$ film ale recognized as promising capacitor dielectric for future DRAM\`s. The electrical properties of Ta$_2$O$_{5}$films greatly depend on the heating condition. In the practical fabrication process, several annealing process, such as the annealing of Al in H$_2$(about 40$0^{\circ}C$) and reflow of BPSG (borophosphosilicate glass) film in $N_2$(about 80$0^{\circ}C$), exist after deposition of Ta$_2$O$_{5}$ film. In this paper, we describe the temperature effect on the electrical properties of W/Ta$_2$O$_{5}$/Si structure. The thin film of Ta$_2$O$_{5}$ and tungsten have been deposited on p-si(100) wafer using the sputtering system. The heating temperature was varied from 500 to 90$0^{\circ}C$ in $N_2$for 30min and The degree of temperature is 100\`C. In a log(J/E$^2$) Vs 1/E plot of typical I-V data, we find a linear relationship for the temperature of 500, $600^{\circ}C$ and as deposition. This could indicate Fowler-Nordheim tunneling as the dominant mode of current transports. However, we can not find a linear relationship for the temperature above $700^{\circ}C$. This could not indicate Fowler-Nordheim tunneling as the dominant mode of current transport. The high frequency (1MHz) capacitance-voltage (C-V) of W/Ta$_2$O$_{5}$/Si Capacitor were investigated on the basis of shift in the threshold voltage and dielectric constant. The magnitude of the threshold voltage and dielectric constant depends on the heating temperature, and increases with heating temperature.temperature.

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Study on the Charge-Transfer Complexes Formed between the Derivatives of Nitrobenzene and Some Organic Solvent Molecules (용매성 유기분자와 니트로벤젠 및 그의 유도체와의 전하전이 착물에 관한 연구)

  • Doo-Soon Shin;Si-Joong Kim
    • Journal of the Korean Chemical Society
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    • v.17 no.2
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    • pp.85-94
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    • 1973
  • The stability constants of the charge-transfer complexes formed between three derivatives of nitrobenzene, i.e., 1,3,5-trinitrobenzene, m-dinitrobenzene, nitrobenzene and eleven organic molecules such as $\alpha-picoline$, pyridine, dimethylsulfoxide, N, N'-dimethylacetamide, tetrahydrofurane, 1, 4-dioxane, diethyl ether, acetonitrile, propylene oxide, epichlorohydrine, and methyl acetate, have been determined by ultraviolet absorption spectroscopy in carbon tetrachloride solution at 25.0$^{\circ}C$. The parameters of the electrostatic effect ($E_D$) and covalent effect ($C_D$) for the eleven organic compounds have been calculated from the modified equation of the double-scale enthalpy,$logK = E_AC_A+E_DC_D$ and also the shift of C=O vibrational frequency in infrared spectra for N,N'-dimethylacetamide have been measured from the solutions of above organic compounds. The empirical equation, ${\Delta}{\nu}_{C=O} = 37.4-5.47E_D+12.1C_D$, related to the parameters and the frequency shift has been derived. It seems that the stabilities of the complexes principally depend on the covalent effect. Especially it is found that $\pi$ orbitals in molecules, in addition to the parameters, play the important role in forming the charge-transfer complexes.

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Microcomputer Based Vacuum Drying System and its Application to the Vacuum Drying of Green Red Pepper (마이크로컴퓨터 감압건조(減壓乾燥)시스템의 제작운영(製作運營)과 풋고추의 감압건조특성(減壓乾燥特性))

  • Chun, Jae-Kun;Kang, Jun-Soo
    • Applied Biological Chemistry
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    • v.30 no.1
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    • pp.65-70
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    • 1987
  • In Girder to measure the pressure and weight decrease of drying sample during the vacuum drying process of food, sensing devices were designed and constructed with strain gauge. Microcomputer based vacuum drying system was made up of these devices interfaced to apple II microcomputer. The electrical output signal from vacuum sensor which constituted with Bourdon tube whereon strain gauge attached were digitalized and input to microcomputer through the MC 6821 interface I.C. chip. The relationship between read-out digital value (D) from microcomputer and readings of vacuum gauge (P, mmHg) was P=-146.136+3.620D'(r=0.9994) The pressure control of vacuum dryer was successfully conducted in the range of $400{\sim}600\;mmHg$ accuracy. The digitalized load cell output (D) could be correlated with the real weight (W, g) as W=-14,000+0.585D (r=0.9998) Drying curves of green red pepper under $64^{\circ}C$, $400{\sim}600\;mmHg$ was similar to those of red pepper and differently affected by the degree of vacuum pressure but was varied according to their shape (cut or whole). Moisture movement of green red pepper during the vacuum drying process was fitted to Page model. The empirical equations obtained were $M-M_e/M_o-M_e={\exp}\;(-0.0673{\theta}^{1.177})$ and $M-M_e/M_o-M_e={\exp}\;(-0.0655\;{\theta}^{1.477})$ for whole and cut green red pepper, respectively.

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A study on the delectric and piezoelectric properties of the Pb($Zn_{1}$3$Nb_{2}$3/)$_{3}$-Ba($Zn_{1}$3/$Nb_{2}$3/)$P_{3}$-PbT$iO_{3}$ ceramics (Pb($Zn_{1}$3/$Nb_{2}$3/)$O_{3}$-Ba($Zn_{1}$3/$Nb_{2}$3)$O_{3}$ - PbT$iO_{3}$ 세라믹의 유전 및 압전특성에 관한 연구)

  • 박혜옥;이성갑;배선기;이영희
    • Electrical & Electronic Materials
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    • v.3 no.3
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    • pp.233-241
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    • 1990
  • 본 연구에서는 xPb(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$-yBa(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$-zPbTiO(0.50.leq.x.leq.0.60, 0.10.leq.y.leq.0.20, 0.20.leq.z.leq.0.40)세라믹을 1050.deg.C에서 2시간동안 유지시켜 일반소성법으로 제작하였다. 시편 제작시 조성은 조성변태 상경계부근을 선택하였으며 Ba(Zn$_{1}$3/ Nb$_{2}$3/)O$_{3}$ 고용량에 따른 purochlore상의 억제 및 그 영향을 조사하고 구조적, 유전적 및 압전적 특성을 측정하였다. X-선 회절분석 및 미세구조의 관찰 결과, Ba(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$의 고용량에 따라 pyrochlore상 및 미반응 물질등은 억제되어 0.20mol 고용된 시편에서는 균질한 perovskite상이 형성되었다. Ba(Zn$_{1}$3/Nb$_{2}$3/)O$_{3}$의 고용량이 증가함에 따라 유전상수는 증가하여 0.50PZN-0.20BZN-0.30PT시편의 경우 6880.9의 높은 값을 나타내었으며 정전용량의 온도계수는 감소하여 0.383[%/.deg.C]의 양호한 값을 나타내었다. 큐리온도는 PbTiO$_{3}$의 고용량이 0.20mol에서 0.40mol로 증가함에 따라 30.deg.C에서 170.deg.C로 증가하였다. 전기기계 결합계수 (K$_{p}$), 기계적 품질계수(Qm) 및 압전전하 계수 (d$_{33}$)는 조성변태 상경계 부근의 조성에서 크게 나타났으며 0.60PZN-0.15BZN-0.25PT 시편의 경우 각각 58.5%, 120.5, 150x$10^{-12}$[C/N]의 값을 나타내었다.다.다.

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Thermal stabilityof fluorine doped silicon oxide films

  • Lee, Seog-Heong;Yoo, Jae-Yoon;Park, Jong-Wan
    • Journal of Korean Vacuum Science & Technology
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    • v.2 no.1
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    • pp.25-31
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    • 1998
  • The reliability of fluorine doped silicon oxide (SiOF) films for intermetal dielectrics in multilevel interconnections of ultra-large scale integrated circuits (ULSIs) is investigated. SiOF films were deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECRPECVD) using H-free source gases, i.e., SiF4 and O2. The effect of post plasma treatment on the moisture absorption and dielectric properties of SiOF films was carried out I terms of air exposure time, The reliability test of Cu/TiN/SiOF/Fi specimen was carried out in terms of temperature by rapid thermal annealing (RTA) in N2 ambient. After O2 plasma treatment,, no appreciable peak directly related to moisture absorption was detected. The capacitance-voltage (C-V) characteristics of the O2 plasma treated SiOF film showed that the film remained to hold the sound dielectric properties even after boiling treatment. The Cu/TiN/SiOF/Si system was found to be reliable up to $600^{\circ}C$.

The Study on Classification of Aromatic Herbs in Oriental Medicine for Aromatherapy (방향성(芳香性) 본초(本草) 분류를 통한 향기요법(香氣療法) 연구(硏究))

  • Uhm, Ji-Tae;Kim, Kyoung-Shin;Kang, Jung-Soo;Kim, Byoung-Soo
    • Journal of Haehwa Medicine
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    • v.20 no.1
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    • pp.39-50
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    • 2011
  • In western, aromatherapy uses essential oils to prevent and treat disease, and is one of the ways to stay healthy. In oriental medicine, there was also a similar medical treatment using aromatic herbs for a long ago. The exisiting research of oriental medical herbs is mainly focused on the theory of qi and flavor(氣味論). But on aromatherapy used with aromatic herbs, it is necessary to study the aromatic herbs by aroma. So "xi$\bar{a}$ng p$\check{u}$, 香譜" and "b$\check{e}$n c$\check{a}$o g$\bar{a}$ng m$\grave{u}$, 本草綱目" mainly contain the study about clinical effects of aromatic herbs. And "b$\check{e}$n c$\check{a}$o p$\check{i}$n hu$\grave{i}$ j$\bar{i}$ng y$\grave{a}$o, 本草品彙精要"mainly explains the effects of medical herbs with five aroma classification of x$\bar{i}$ng(腥), sh$\bar{a}$n(膻), xi$\bar{a}$ng(香), ch$\grave{o}$u(臭), xi$\check{u}$(朽). The former one makes more clinical uses of medical herbs, and the latter one grows up the theory of medical herbs. This study is expected to have a good influence on aromatherapy and classification of oriental medical herbs.

Microwave Dielectric Properties of Sr-Substituted Ba(Mg0.5W0.5)O3 Ceramics

  • Yoon, Sang-Ok;Choi, Dong-Kyu;Oh, Jun-Hyuk;Kim, Shin
    • Journal of the Korean Ceramic Society
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    • v.55 no.4
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    • pp.364-367
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    • 2018
  • The phase evolution, microstructure, and microwave dielectric properties of Sr-substituted $Ba(Mg_{0.5}W_{0.5})O_3$ ceramics, i.e., $(Ba_{1-x}Sr_x)(Mg_{0.5}W_{0.5})O_3$ ($0{\leq}x{\leq}0.30$), sintered at $1700^{\circ}C$ for 1 h were investigated. All compositions showed a 1 : 1 ordered perovskite structure. In all the compositions, $BaWO_4$ was detected as the secondary phase. With increasing x in ($Ba_{1-x}Sr_x$) $(Mg_{0.5}W_{0.5})O_3$, the lattice parameter increased linearly, indicating that a substitutional solid solution occurred. All compositions exhibited a dense microstructure. The value of ${\varepsilon}_r$ increased slightly with increasing x. The value of $Q{\times}f_0$ increased with the increase in x up to x = 0.10 and reached a saturated value of about 100,000 GHz. The composition for x = 0.20, i.e., $(Ba_{0.80}Sr_{0.20})(Mg_{0.5}W_{0.5})O_3$, sintered at $1700^{\circ}C$ for 1 h exhibited superior microwave dielectric properties of ${\varepsilon}_r=19.6$, $Q{\times}f_0=99,358GHz$, and ${\tau}_f=0.0ppm/^{\circ}C$, respectively.

A Study on the Development and Application of Slow Releasing Fertilizer using Korean Natural Clay Minerals-I. Characterization of Korean Natural Clay (점토광물을 이용한 완효성비료의 개발 및 응용에 관한 연구-I. 점토광물의 특성)

  • Park, Jung-Chul;Choy, Jin-Ho;Park, Kuen-Woo
    • Korean Journal of Environmental Agriculture
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    • v.3 no.2
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    • pp.50-54
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    • 1984
  • For the development of slow releasing K-fertilizer, K-ion exchanged montmorillonite was evaluated and characterized by layer charge determination with n-alkylammonium method. By this method it was possible to discern inhomogenous charge distribution within the crystals and to estimate the upper and lower limit of the layer charge(layer charge limit for Young-il bentonite in Korea: ${\xi}=0.39-0.28$ $e/(SiAl)_4O_{10}$, ${\xi}=0.34$) and the mean value of interlayer cation exchange capacity of 0.915meq/100g.

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Effect of Additive Composition on Mechanical Properties of Silicon Carbide Sintered with Aluminum Nitride and Erbium Oxide

  • Lee, Sung-Hee;Kim, Young-Wook
    • Journal of the Korean Ceramic Society
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    • v.42 no.1
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    • pp.16-21
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    • 2005
  • The effect of additive composition, using AlN and $Er_{2}O_{3}$ as sintering additives, on the mechanical properties of liquid-phase-sintered, and subsequently annealed SiC ceramics was investigated. The microstructures developed were quantitatively analyzed by image analysis. The average thickness of SiC grains increased with increasing the $Er_{2}O_{3}/(AlN + Er_{2}O_{3})$ ratio in the additives whereas the aspect ratio decreased with increasing the ratio. The mechanical properties versus $Er_{2}O_{3}/(AlN + Er_{2}O_{3})$ ratio curve had a maximum; i.e., there was a small composition range at which optimum mechanical properties were realized. The best results were obtained when the ratio ranged from 0.4 to 0.6. The flexural strength and fracture toughness of the SiC ceramics were $550\~650\;MPa$ and $5.5\~6.5$ MPa${\cdot}m^{1/2}$, respectively.