• Title/Summary/Keyword: $Cu-Al_2O_3$

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자화된 $SF_6$ 유도결합형 플라즈마를 이용한 SiC 식각 특성에 관한 연구

  • 이효영;김동우;박병재;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.14-14
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    • 2003
  • Silicon carbide (SiC)는 높은 power 영역과 높은 온도영역에서도 작동 가능한 우수한 반도체 물질이다. 또한 우수한 열적 화학적, 안정성을 가지고 있어 가흑한 조건에서의 소자로써도 사용 가능하다. 현재 SiC 적용분야로는 우수한 전기적, 기계적 성질을 이용한 미세소자(MEMS)와 GaN 와 거의 유사한 격자상수를 가지는 것을 이용한 GaN epitaxial 성장의 기판으로도 사용되어진다. 그러나 SiC 는 기존의 습식식각 용매에 대해 화학적 안정성을 가지고 있기 때문에 전자소자의 제작에 있어서 플라즈마를 이용한 건식식각의 중요성이 대두되어지고 있다. 소자제작에 있어 이러한 건식식각시 식각 단면의 제어, 이온에 의한 낮은 손상 정도, 매끄러운 식각 표면, 그리고 고속의 식각 속도둥이 요구되어진다. 본 실험에서는 식각 속도의 증가와 수직한 식각 단면둥을 획득하기 위하여 SF6 플라즈마에서 Source power, dc bias voltage, 그리고 외부에서 인가되는 자속의 세기를 변화시쳐가며 식각 속도, 식각 마스크와의 식각 션택비, 식각 단면둥과 같은 SiC 의 식각 특성을 관찰하였다. 식각 후 식각 단면은 주사전자 현미경(SEM)을 통해 관찰하였다. 본 실험에서의 가장 높은 식각 속도는 분당 1850n 로써 이때의 공정조건은 1400W 의 inductive power, -600V 의 dc bias voltage, 20G 의 외부자속 세기이었다. 또한, 높은 inductive power 조건과 낮은 dc bias voltage 조건에서 Cu는 $SF_6$ 플라즈마 내에서 식각부산물의 증착으로 인해 SiC 와 무한대의 식각선택비를 보였다. 이러한 Cu 마스크를 사용한 SiC 의 식각에서는 식각 후 수직한 식각 단변을 관찰할 수 있었다. 것올 알 수 있다. 따라서, 기존의 pve 보다 세라믹 기판의 경우가 수분 흡수율이 높아 더 오랫동안 전류를 흐르게 하여 방식성이 개선된 것으로 판단된다.을 통해 경도가 증가한 시편의 경우 석출상의 크기가 5nm 이하로 매우 작고 대체로 기지와 연속적인 계면을 형성하나, 열처리가 진행될수록 석 출상의 크기가 커지고 임계크기 이상에 이르면 연속적인 계면은 거의 발견되지 않고, 대부 분 불연속적이고 확연한 계면을 형성함을 관찰 할 수 있었다. 알루미나(${\alpha}-Al_2O_3$) 기판 위에 증착한 $(Ti_{1-x}AI_{x})N$ 피막은 마찬가지로 (200) 우선 방위를 나타내었으나, 그 입자의 크기가 수십 nm로 고속도강위에 증착한 피막에 비해 상당히 크게 형성되었다. 또한 열처리 후에 AIN의 석출이 진행됨에도 불구하고 경도 증가는 나타나지 않고, 열처리가 진행됨에 따라 경도가 감소하는 양상만을 나타내었다. 결국 $(Ti_{1-x}AI_{x})N$ 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에

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Hydrochemical characteristics of ground and geothermal waters in the Haeundae hot-spring area, Pusan, Korea (부산 해운대지역 지하수와 지열수의 수리화학적 특성)

  • Shim, Hyong-Soo;Yeong, We-Yeong;Sung, Ig-Hwa;Lee, Byeong-Dae;Cho, Byong-Wook;Hwang, Jin-Yeon
    • Journal of Environmental Science International
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    • v.9 no.3
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    • pp.241-252
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    • 2000
  • Twenty-two water samples(fifteen groundwater and seven geothermal water samples) were collected to elucidate chemical characteristics of the ground and geothermal waters in the Haeundae hot spring area and its vicinity. Major and honor elements were analyzed for ground and geothermal water samples. The concentrations of $K^+$, Na+$, $Ca^{2+}$, $SO_4^{2-}$, $Cl^-$, ^F^-$ and $SiO_2$ were higher in the geothermal water samples than the groundwater samples except $HCO_3^- and Mg^{2+}$ ions. Based on the contents of Fe, Zn, Cu, Al, Mn and Pb, some of the ground and geothermal water samples are contaminated by anthropogenic sources. The ground waters shown on the Piper diagram belong to $Ca-HCO_3$ type, while the geothermal waters Na-Cl type. The graphs of $Cl^-$ versus $Na^+$, $Ca^{2+}, Mg^{2+}, K^+, SO_4^{2-} and HCO_3^-$ indicate that the groundwater is related partly with mineral-water reaction and partly with anthropogenic contamination, while the geothermal water is related with saline water. On the phase stability diagram, groundwater and thermal water mostly fall in the field of stability of kaolinite. This indicates that the ground and geothermal waters proceed with forming kaolinite. Factor and correlation analyses were carried out to simplify the physicochemical data into grouping some factors and to find interaction between them. Based on the Na-K, Na-K-Ca and Na-K-Ca-Mg geothermometers and silica geothermometers, the geothermal reservoir is estimated to have equilibrium temperature between 125${$\mid$circ}C$ and 160${$\mid$circ}C$.

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AN EXPERIMENTAL STUDY ON SUPEROXIDE DISMUTASE- AND CATALASE- ACTIVITY IN GINGIVAL TISSUES IN DIABETIC PATIENTS (당뇨환자의 치은조직내 Superoxide Dismutase와 Catalase의 활성도에 관한 실험적 연구)

  • Kim, Byung-Ok;Lee, Kang-Jin;Park, Joo-Cheol
    • Journal of Periodontal and Implant Science
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    • v.24 no.3
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    • pp.597-606
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    • 1994
  • Oxygen derived radicals($O_2\;^-$, $H_2O_2$, and $OH^-$) are thought to play a role in a lot of human diseases. And it has been believed that antioxidant enzymes such as superoxide dismutase(SOD) and catalase could protect the tissues from damage resulting from the oxygen derived free radicals. The purpose of this study was performed to investigate the activity of the SOD(CuZn- and Mn-SOD) and catalase in inflammatory gingival tissues and the correlation between boold glucose level and antioxidants and age in non-insulin dependent diabetes mellitus(NI- DDM) patients. For this study, the patients were classified into normal, inflammatory, and diabetic, and ten their papillary bleeding index(PBI) and gingival index were checked. Subjects consisted of 11 healthy patients with no inflammatroy gingiva, 20 adult periodontitis patients, and 8 diabetic patients, aged 33 to 66(average: 44.62). The blood glucose level of diabetic group was ranged from 120ml/dl to 160ml/dl(physical status 0 : averge : 135.67ml/dl). Gingival tissues were surgically obtained from the patients during periodontal surgery, extraction, and clinical corwn lenghening procedure. The activity of CuZn and Mn- SOD and catalase in the gingival tissues was measured by using UV-spectrophotometer by the same methods that Crapo et al. And Aebi did, respectively. The results were as follows : 1. The Mn-SOD activity was significantly lower in inflammatory group in comparison to normal group(P<0.05), and the activities of antioxidants in diabetic group were not significant in comparison to normal inflammatory group(P>0.05). 2. The activities of antioxidants showed little variation among individuals of different ages (P>0.05). 3. The higher blood glucose level was, the higher gingival index was(P<0.05). 4. There was no correlation between blood glucoe level and activity of antioxidant in inflammatory gingival tissues of NIDDM patients(P>0.05). In conclusion, these results, within the limits of the present experiment, suggest that the activity of Mn-SOD might reflect the inflammatory status of gingival tissue, and the activity of antioxidants was independent of blood glucose level of diabetic patients in physical status 0.

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Superoxide Dismutase Isoenzyme Activities in Plasma and Tissues of Iraqi Patients with Breast Cancer

  • Hasan, Hathama Razooki;Mathkor, Thikra Hasan;Al-Habal, Mohammed Hasan
    • Asian Pacific Journal of Cancer Prevention
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    • v.13 no.6
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    • pp.2571-2576
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    • 2012
  • Breast cancer is the first of the most common ten cancers in Iraq. Its etiology is multifactorial, oxidative stress and lipid peroxidation being suggested to play important roles in carcinogenesis. The purpose of this study was to investigate the oxidant-antioxidant status in breast cancer patients, by measuring SOD isoenzyme activities (total SOD, CuZn-SOD, Mn-SOD and EC-SOD) in plasma and breast tumors, and by estimating thiobarbituric reactive substances (TBRS) in tissue homogenates. General increase in total SOD activity was observed in plasma and tissue samples of breast tumors, greater in the malignant when compared to benign group (p<0.05). Mn-SOD showed a significant decrease in tissue malignant samples (p<0.05), and insignificant decrease in plasma malignant samples compared with control and benign samples. Plasma EC-SOD activity in both patient benign and malignant breast tumors demonstrated 3.5% and 22.8% increase, respectively. However, there was a decrease in tissue EC-SOD activity in malignant breast tumors when compared with benign. A similar tendency was noted for TBRS. We suggest that elevated total SOD might reflect a response to oxidative stress, and then may predict a state of excess reactive oxygen species in the carcinogenesis process. If there is proteolytic removal of the heparin binding domain, EC-SOD will lose its affinity for the extracellular matrix and diffuse out of the tissue. This will result in a decreased EC-SOD activity, thus leading to an increase in the steady-state concentration of $O^{2-}$ in this domain, and increase in EC-SOD activity in the extracellular fluid. This might explain the results recorded here concerning the decrease in tissue EC-SOD activity and increase in plasma of breast cancer patients.

Planar fuel cell design integrated with methanol reformer by using a high temperature membrane (고온형 멤브레인을 사용한 메탄올 개질 연료전지의 개질기 일체형 평판 설계)

  • Kim, Sung-Han;Jang, Jae-Hyuk;Gil, Jae-Hyoung;Lee, Hong-Ryul;Cha, Hye-Yeon;Ku, Bo-Sung;Jung, Chang-Ryul;Kundu, Arunaha;Miesse, Craig;Oh, Yong-Soo
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.467-470
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    • 2006
  • For a mobile application such as cellular phone, micro fuel cells should be extremely compact and thin. RHFC can be an alternative solution because RHFC gives higher power density than DMFC and does not need ahydrogen storage vessel In this paper, RHFC using methanol fuel is made as a novel planar design without a PROX. Both reformer and cell are made closely in a same plate to share the heater of reformer with the cell. The PBI membrane is used in the cell. The reason is that high temperature of reformer can cause a performance drop when perfluorosulfonic acid membrane such as Nafion is used such a high temperature operation also guarantees the higher CO tolerance to MEA catalyst. The cell is designed as an air-breathing type which the cathode of the cell is opened to the air. The commercial Cu/ZnO/Al2O3 steam reformer catalyst is packed in reformer channel. The active area of MEA is $11.9cm^2$ and the peak power density was $27.5mW/cm^2$.

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A Study on Heavy Metals at the Consumer s Tap in Seoul (서울市 一部 水道栓水中 重金屬에 관한 調査硏究)

  • Lee, Byung Mu
    • Journal of Environmental Health Sciences
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    • v.10 no.2
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    • pp.41-51
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    • 1984
  • This study was performed using samples collected at Myungryundong and at Reservoirs. The purpose of this study was to investigate the differences of water quality between tap and raw water, and to analyse drinking water quality by Fe, Zn from corroded galvanized steel pipe. Results were as follows 1. The older the pipe was, the higher the concentration of Ferrum and Zinc was (t-test : p<0.05). Ferrum and Zinc also exceeded the limits in the older galvanized steel pipe. I think that this comes from the corrosion of pipe. 2. Mercury, Arsenic, Cadmium, Lead, Chomium, Argentum and Aurum not detected in raw water were not detected in tap water. Cobalt, Bismuth and Molybudenum detected in raw water were not detected in tap water. I think that this comes from the quality of raw water, the result of water treatment and the improbability of detection of above metals in water delivery system. 3. Silicon measured 2.4698ppm in raw water, but it ranged from 0.4769ppm to 1.982 ppm in tap water. Manganese measured 0.0638ppm in raw water, but it ranged from 0.0026ppm to 0.0198ppm in 17cases(31%) out of 55samples in tap water. I think that this comes from the water treatment. 4. Aluminium not detected in raw water was found in 17 cases (31%) out of the samples (55cases). It may be considered as the use of coagulants $Al_2(SO_4)_3$. $18H_2O$ and PAC (Poly Aluminium Chloride). The concentration of copper in tap water was much higher in 2 cases(3.6%) out of the samples(55) than that of copper in raw water. I think that this may come from the use of ${CuSO}_4$, the preventive of algae growth, and the result of chlorination, but further study must be necoessary to support the proof.

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Dyeability and Antimicrobial Activity of Lycopus lucidus Turcz (택란의 염색성 및 항균성)

  • Yea, Su-Jeong;Song, Wha-Soon
    • Journal of the Korean Society of Clothing and Textiles
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    • v.36 no.3
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    • pp.324-334
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    • 2012
  • In this research, the dyeing properties of $Lycopus$ $lucidus$ Turcz on cotton and silk fabrics were evaluated to establish a scientific database of natural dyes. The optimum dyeing conditions were identified with K/S values depending on the dyeing concentration, temperature, time, and pH. For the optimum conditions, the color changes for different synthetic mordants were observed as L, $a^*$, $b^*$ and H, V, C. The color fastness after dyeing and mordanting was also examined. Additionally, the antibiosis of $Lycopus$ $lucidus$ Turcz was examined. The results were as follows: For the cotton, the optimized dyeing conditions were 300% (o.w.f.), $50^{\circ}C$, 40 min., and pH 5. For the silk fabric, the conditions were 450% (o.w.f.), $70^{\circ}C$, 60 min., and pH 4. The K/S value of dyed cotton improved about 1.03-2.78 folds after mordanting. The fabric color was yellow in the absence of mordanting, while it was reddish yellow after post-mordanting with FFC. Although the color changed with the mordanting method and mordant, the overall hue was yellow. Thus, $Lycopus$ $lucidus$ Turcz appears to have the potential for use as a natural dyeing material for a yellow hue. The K/S value of the dyed silk fabric improved about 1.05-1.40 folds after mordanting. The fabric showed a reddish yellow color when pre-mordanted with Al and Cu. The washing and dry-cleaning fastness of the cotton and silk fabrics were at the 4-5 level. The light fastness of the cotton improved after mordanting; however, pre-mordanting was more effective than post-mordanting or the absence of mordanting. The dyed cotton, silk fabrics showed excellent antibiosis.

Study on elemental analysis of metal and ceramic samples by using laser ablation ion trap mass spectrometry(LAITMS) (레이저 이온화 이온트랩 질량분석법을 이용한 금속 및 세라믹 시료의 원소분석에 관한 연구)

  • Song, Kyuseok;Park, Hyunkook;Cha, Hyungki;Lee, Sang Chun
    • Analytical Science and Technology
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    • v.15 no.1
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    • pp.7-14
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    • 2002
  • Laser ablation ion trap mass spectrometry (LAITMS) was developed for the analysis of metal and ceramic samples. For this study, XeCl excimer laser (308 nm) was used for ablating the samples and ITMS was used as a detector. Samples were introduced from outside of a ring electrode and this way of sample introduction was very effective for solid samples when laser ablation was employed. Helium gas was used as a buffer gas, and its effect on sensitivity and some parameters (buffer gas pressure, ion storage time, and cut-off RF voltage) were studied. The optimized conditions were $1{\times}10^{-4}$ Torr of buffer gas pressure, 100 ms of ion storage time and $1150V_{p-p}$ of cut-off RF voltage. From that results, copper (Cu) and molybdenum (Mo) metals were tested with LAITMS and the mass spectra of these pure metals were compared with the natural abundance of isotope ratio. We also examined ceramic samples ($Al_2O_3$, $ZrO_2$) and represented the result of elemental analysis.

Direct Growth of CNT on Cu Foils for Conductivity Enhancement and Their Field Emission Property Characterization (전도성 향상을 위한 구리호일 위 CNT의 직접성장 및 전계방출 특성 평가)

  • Kim, J.J.;Lim, S.T.;Kim, G.H.;Jeong, G.H.
    • Journal of the Korean Vacuum Society
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    • v.20 no.2
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    • pp.155-163
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    • 2011
  • Carbon nanotubes (CNT) have been attracted much attention since they have been expected to be used in various areas by virtue of their outstanding physical, electrical, and chemical properties. In order to make full use of their prominent electric conductivity in some areas such as electron emission sources, device interconnects, and electrodes in energy storage devices, direct growth of CNT with vertical alignment is definitely beneficial issue because they can maintain mechanical stability and high conductivity at the interface between substrates. Here, we report direct growth of vertically aligned CNT (VCNT) on Cu foils using thermal chemical vapor deposition and characterize the field emission property of the VCNT. The VCNT's height was controlled by changing the growth temperature, growth time, and catalytic layer thickness. Optimum growth condition was found to be $800^{\circ}C$ for 20 min with acetylene and hydrogen mixtures on Fe catalytic layer of 1 nm thick. The diameter of VCNT grown was smaller than that of usual multi walled CNT. Based on the result of field emission characterization, we concluded that the VCNT on Cu foils can be useful in various potential applications where high conductivity through the interface between CNT and substrate is required.

Effects of Passivation Thin Films by Spray Coatings on Properties of Flexible CIGS Solar Cells (스프레이코팅법에 의한 패시베이션 박막이 플렉시블 CIGS 태양전지의 특성에 미치는 영향)

  • Lee, Sang Hee;Park, Byung Min;Kim, Ki Hong;Chang, Young Chul;Pyee, Jaeho;Chang, Ho Jung
    • Journal of the Microelectronics and Packaging Society
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    • v.23 no.3
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    • pp.57-61
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    • 2016
  • In order to protect the solar cells from the moisture and oxygen, we evaluated the electrical and optical properties for the $Cu(In,Ga)Se_2$ (CIGS) solar cells which were prepared by the spray coating method. Generally, the EVA (ethylene-vinyl acetate) films are laminated to protect the CIGS flexible solar cells, which results in a high cost process due to complicated devices. In this study, we tried to prepare the protection layers of the flexible CIGS flexible solar cells by using spray coating method instead of conventional laminating films in order to reduce the device weight as well as the process time. The CIGS solar cells with spray coating method showed an enhanced efficiency than the before treated sample (2.77% to 2.93%) and relatively proper water vapor transmission rate of the solar cells about 62.891 gm/[$m^2-day$].