• Journal of the Korean Ceramic Society
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• v.35 no.12
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• pp.1336-1336
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• 1998

A twt -step carbothermal reduction scheme has been employed for the synthesis of SiC whiskers in an Ar or a H2 atmosphere via vapor-solid two-stage and vapor-liquid-solid growth mechanism respectively. It has been shown that the whisker growth proceed through the following reaction mechanism in an Ar at-mosphere : SiO2(S)+C(s)-SiO(v)+CO(v) SiO(v)3CO(v)=SiC(s)whisker+2CO2(v) 2C(s)+2CO2(v)=4CO(v) the third reaction appears to be the rate-controlling reaction since the overall reaction rates are dominated by the carbon which is participated in this reaction. The whisker growth proceeded through the following reaction mechaism in a H2 atmosphere : SiO2(s)+C(s)=SiO(v)+CO(v) 2C(s)+4H2(v)=2CH4(v) SiO(v)+2CH4(v)=SiC(s)whisker+CO(v)+4H2(v) The first reaction appears to be the rate-controlling reaction since the overall reaction rates are enhanced byincreasing the SiO vapor generation rate.

• Bulletin of the Korean Chemical Society
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• v.34 no.12
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• pp.3635-3640
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• 2013

We prepared Ni and Pd-modified $TiO_2@SiO_2$ core-shell nanostructures and then analyzed them by scanning electron microscopy, optical microscopy, X-ray diffraction crystallography, FT-IR and UV-Visible absorption spectroscopy. In addition, their CO oxidation performance was tested by temperature-programmed mass spectrometry. The CO oxidation activity showed an order of Ni-$TiO_2@SiO_2$ ($900^{\circ}C$) < Ni-$TiO_2@SiO_2$ ($90^{\circ}C$) < Ni-$TiO_2@SiO_2$ ($450^{\circ}C$) in the first CO oxidation run, and greatly improved activity in the same order in the second run. The $T_{10%}$ (the temperature at 10% CO conversion) corresponds to the CO oxidation rate of $2.8{\times}10^{-5}$ molCO $g{_{cat}}^{-1}s^{-1}$. For Ni-$TiO_2@SiO_2$ ($450^{\circ}C$), the $T_{10%}$ was observed at $365^{\circ}C$ in the first run and at $335^{\circ}C$ in the second run. For the Pd-$TiO_2@SiO_2$ ($450^{\circ}C$), the $T_{10%}$ was observed at a much lower temperature of $263^{\circ}C$ in the first CO oxidation run, and at $247^{\circ}C$ in the second run. The CO oxidation activities of transition metal modified $TiO_2@SiO_2$ core-shell nanostructures presented herein provide new insights that will be useful in developing catalysts for various environments.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.208-213
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• 1998

Silicidation of the Co/Ti/Si bilayer system in which Ti is used as epitaxy promoter for $CoSi_2$has recently received much attention. The Co/Ti bilayer on the spacer oxide of gate electrode must be thermally stable at high temperatures for a salicide transistor to be fabricated successfully. In the $SiO_2$substrate was rapid-thermal annealed. The Sheet resistances of the Co/Ti bilayer increased substantially after annealing at $600^{\circ}C$, which is due to the agglomeration of the Co layer to reduce the interface energy between the Co layer and the $SiO_2$substrate. In the bilayer system insulating Ti oxide stoichiometric Ti oxide and silicide were not found after annealing.

• Journal of Powder Materials
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• v.21 no.5
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• pp.377-381
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• 2014

This work describes the coloration, chemical stability of $SiO_2$ and $SnO_2$-coated blue $CoAl_2O_4$ pigment. The $CoAl_2O_4$, raw materials, were synthesized by a co-precipitation method and coated with silica ($SiO_2$) and tin oxide ($SnO_2$) using sol-gel method, respectively. To study phase and coloration of $CoAl_2O_4$, we prepared nano sized $CoAl_2O_4$ pigments which were coated $SiO_2$ and $SnO_2$ using tetraethylorthosilicate, $Na_2SiO_3$ and $Na_2SiO_3$ as a coating material. To determine the stability of the coated samples and their colloidal solutions under acidic and basic conditions, colloidal nanoparticle solutions with various pH values were prepared and monitored over time. Blue $CoAl_2O_4$ solutions were tuned yellow color under all acidic/basic conditions. On the other hand, the chemical stability of $SiO_2$ and $SnO_2$-coated $CoAl_2O_4$ solution were improved when all samples pH values, respectively. Phase stability under acidic/basic condition of the core-shell type $CoAl_2O_4$ powders were characterized by transmission electron microscope, X-ray diffraction, CIE $L^*a^*b^*$ color parameter measurements.

• Korean Journal of Materials Research
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• v.8 no.9
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• pp.791-796
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• 1998

self-aligned silicide(salicide)제조시 CoSi2의 에피텍셜 성장을 돕기 위하여 Co와 Si 사이에 내열금속층을 넣은 Co/내열금속/Si의 실리사이드화가 관심을 끌고 있다. Hf 역시 Ti와 마찬가지로 이러한 용도로 사용될 수 있다. 한편, Co/Hf 이중층 salicide 트랜지스터가 성공적으로 만들어지기 위해서는 spacer oxide 위에 증착된 Co/Hf 이중층이 열적으로 안정해야 한다. 이러한 배경에서 본 연구에서는 SiO2기판 위에 증착한 Co 단일층과 Co/Hf 이중층을 급속열처리할 때 Co와 SiO2간의 계면과 Co/Hf와 SiO2간의 계면에서의 상호반응에 대하여 조사하였다. Co 단일층과 Co/Hf 이중층은 각각 $500^{\circ}C$와 $550^{\circ}C$에서 열처리한 후 면저항이 급격하게 증가하기 시작하였는데, 이것은 Co층이 SiO2와의 계면에너지를 줄이기 위하여 응집되기 때문이다. 이 때 Co/Hf의 경우 열처리후 Hf에 의하여 SiO2 기판이 일부 분해됨으로써 Hf 산화물이 형성되었으나, 전도성이 있는 HfSix 등의 화합물은 발견되지 않았다.

• Resources Recycling
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• v.20 no.3
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• pp.55-61
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• 2011

In order to develop economical production process from metallurgical grade silicon(MG-Si) to solar grade(SOG-Si), removal of boron by slag treatment was investigated at 1823 K using CaO-$SiO_2$ based slags. In the present study boron removal ratio in CaO-$SiO_2$ stags and $CaCO_3-SiO_2$ slags were increased to 63% and 73% respectively with slag basicity (%CaO/$%SiO_2$). However, bubbling time with Ar gas of slag and metal was not affected on removal ratio of boron. The addition of $Na_2CO_3$ to CaO-$SiO_2$ slags did not improve the removal ratio of boron from molten silicon. Boron contend was decreased from 20.6 ppm to 1.03 ppm by three times treatment using $CaCO_3-SiO_2$ slag (basicity=1.2).

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.18-19
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• 2002

Si 웨이퍼제조 시 나오는 페슬러지에서 SiC 연마재와 절삭유를 분리해내면 Si 분말을 얻을 수 있다. 본 연구에서의 SiC는 폐슬러지 Si 분말에 C 분말을 혼합하여 제조할 수 있다. Si-C-O 3성분계는 Si, $SiO_2$, SiC, C 4개의 응축상과 CO, SiO, $CO_2$, $O_2$ 4개의 기체상이 가능하고 생성물들 간의 평형관계를 깁스 자유에너지에 의해 평형 반응식이 계산되어질 수 있다. 계산된 평형 반응식은 2개의 SiO, CO 분압이 각각 X, Y 좌표평면에 나타나는 상안정도를 그려볼 수 있다. 상안정도에서 자유도가 2인 경우는, $SiO_2$가 불안정하므로 SiC와 C가 공존하는 영역에서 온도를 독립 변수로 놓으면 나머지 독립 변수는 SiO 나 CO 기체 분압 둘 중 하나가 되어 하나의 직선으로 나타낼 수 있다. 직선을 경계로 각 응축상들의 안정영역을 하나의 좌표평면에 나타낸 후 온도에 따른 SiC의 안정영역을 알아본다.

• Journal of the Korean Ceramic Society
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• v.41 no.8
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• pp.593-598
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• 2004

To make the all-solid-state lithium thin film battery having less than 1 fm in thickness, LiCoO$_2$ thin films were deposited on Pt/TiO$_2$/SiO$_2$/Si substrate as a function of Li/Co mole ratio and the deposition temperature by Pulsed Laser Deposition (PLD). Especially, LiCoO$_2$ thin films deposited at 50$0^{\circ}C$ with target of Li/Co=1.2 mole ratio show an initial discharge capacity of 53 $\mu$Ah/cm$^2$-$\mu$m and capacity retention of 67.6％. The microstructural and electrochemical properies of (Li, La)TiO3 thin films grown on LiCoO$_2$Pt/TiO$_2$/SiO$_2$/Si structures by Pulsed Laser Deposition (PLD) were investigated at various deposition temperatures. The thin films grown at 10$0^{\circ}C$ show an initial discharge capacity of approximately 51 $\mu$Ah/cm$^2$-$\mu$m and moreover show excellent discharge capacity retention of 90％ after 100 cycles. An amorphous (Li, La)TiO$_3$ solid electrolyte is possible for application to solid electrolyte for all-solid-state lithium thin film battery below 1 $\mu$m.

• Korean Journal of Materials Research
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• v.8 no.10
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• pp.956-960
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• 1998

The interfacial reaction between the CoINb bilayer and the $SiO_2$ substrate in the temperature range of $330^{\circ}C$-$800^{\circ}C$ in a vacuum has been investigated by X-ray photoelectron spectroscopy, glancing angle XRD, Auger Electron Spectroscopy and Atomic force microscopy. The Co and Nb were actively interdiffused at $600^{\circ}C$, and the layer inversion completed at $700^{\circ}C$. NbO was formed by interfacial reaction between the Nb interlayer and the $SiO_2$ substrate, while $Nb_20_5$ was formed on the surface by reaction of Nb with oxygen in the ambients. Free Si atoms obtained by the reaction between Nb and $SiO_2$ formed silicides like CoSi and $Nb_5Si_3$ by reacting with Co and Nb remnants. The sheet resistance of the Co/Nb bilayer increased substantially after annealing at $800^{\circ}C$. which is due to the agglomeration of the Co layer to reduce its surface energy.

• Journal of the Korean Ceramic Society
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• v.35 no.12
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• pp.1329-1336
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• 1998

A twt -step carbothermal reduction scheme has been employed for the synthesis of SiC whiskers in an Ar or a H2 atmosphere via vapor-solid two-stage and vapor-liquid-solid growth mechanism respectively. It has been shown that the whisker growth proceed through the following reaction mechanism in an Ar at-mosphere : SiO2(S)+C(s)-SiO(v)+CO(v) SiO(v)3CO(v)=SiC(s)whisker+2CO2(v) 2C(s)+2CO2(v)=4CO(v) the third reaction appears to be the rate-controlling reaction since the overall reaction rates are dominated by the carbon which is participated in this reaction. The whisker growth proceeded through the following reaction mechaism in a H2 atmosphere : SiO2(s)+C(s)=SiO(v)+CO(v) 2C(s)+4H2(v)=2CH4(v) SiO(v)+2CH4(v)=SiC(s)whisker+CO(v)+4H2(v) The first reaction appears to be the rate-controlling reaction since the overall reaction rates are enhanced byincreasing the SiO vapor generation rate.