• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.267-268
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• 2006

전력소모를 감소시키기 위해 MEMS 기술을 이용하여 마이크로 히터를 제작하고 그 위에 감지물질을 도포하여 마이크로 센서를 제작하였다. 마이크로 가스센서는 $SnO_2$를 모물질로 하였으며 가스 감도를 향상시키기 위해 Pd와 Rh, ${\alpha}-Fe_2O_5$, $V_2O_5$를 첨가하여, CO 가스 강도를 조사하였다. $SnO_2$에 촉매로서 Pd만을 첨가하였을 때보다 Rh, ${\alpha}-Fe_2O_5$. $V_2O_5$등을 첨가하였을 때 CO가스에 대한 감도 반응이 우수하였다. 마이크로 가스센서의 소비전력은 42mW이었다.

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.402-407
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• 2012

We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of $3-5{\mu}m$ and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a $V_2O_5$-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as $CH_4$, $CO_2$, $N_2O$ and CO in the spectral range of $3-5{\mu}m$. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

• Transactions of the Korean Society of Automotive Engineers
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• v.23 no.5
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• pp.515-523
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• 2015

In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and $NO_X$ gas among the vehicle exhaust emission gasses. The $SnO_2$ (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and $NO_X$ gas, where the device with the thinner $SnO_2$ layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and $NO_X$ gases, which can be applied to measure those gases from the vehicle emissions.

• Horticultural Science & Technology
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• v.30 no.5
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• pp.501-508
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• 2012

Reducing carbon dioxide ($CO_2$) exhaust has become a major issue for society in the last few years, especially since the initial release of the Kyoto Protocol in 1997 that strictly limited the emissions of greenhouse gas for each country. One of the primary sectors affecting the levels of atmospheric greenhouse gases is agriculture where $CO_2$ is not only consumed by plants but also produced from various types of soil and agricultural ecosystems including greenhouses. In greenhouse cultivation, $CO_2$ concentration plays an essential role in the photosynthesis process of crops. Optimum control of greenhouse $CO_2$ enrichment based on accurate monitoring of the added $CO_2$ can improve profitability through efficient crop production and reduce environmental impact, compared to traditional management practices. In this study, a sensor-based control system that could estimate the required $CO_2$ concentration considering emission from soil for cucumber greenhouses was developed and evaluated. The relative profitability index (RPI) was defined by the ratio of growth rate to supplied $CO_2$. RPI for a greenhouse controlled at lower set point of $CO_2$ concentration (500 ${\mu}mol{\cdot}mol^{-1}$) was greater than that of greenhouse at higher set point (800 ${\mu}mol{\cdot}mol^{-1}$). Evaluation tests to optimize $CO_2$ enrichment concluded that the developed control system would be applicable not only to minimize over-exhaust of $CO_2$ but also to maintain the crop profitability.

• Transactions on Electrical and Electronic Materials
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• v.13 no.6
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• pp.305-309
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• 2012

In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

• Proceedings of the Korean Ceranic Society Conference
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• 2000.04a
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• pp.74.1-74.1
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• 2000

• Progress in Medical Physics
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• v.13 no.1
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• pp.44-50
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• 2002

CsI(T1) single crystal was grown in a Bridgman growing apparatus, which has the diameter of 11 mm and the mole ratio of 0.001 mol%. Radiation sensors were made with CsITl)crystal and two photodiodes, and measured spectroscopic characteristics and linearity for gamma-ray and X-ray. The energy resolution of CsI(T1) radiation sensor has been measured with $^{22}$ Na, $^{137}$ Cs and $^{60}$ Co gamma standard sources. Also output linearity of CsITl) sensor was measured for diagnostic radiation region. The energy resolutions of CsI(T1) radiation sensor for 0.511MeV gamma-ray from Na-22 source, 0.662MeV from Cs-137 source, and 1.17MeV and 1.332MeV from Co-60 source were 13.2%, 8.3%, 6.7%, and 5.1% respectively. Also the output linearity up to 80mAs current for 60kVp, 80kvp, 100kVp, 120kVp tube voltages has been studied.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.4
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• pp.325-330
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• 2005

A lever type CO micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material, $SnO_2$, to a target temperature, a micro heater was built on the gas sensor. The heater and electrodes were hanged on the air as a bridge type to minimize the heat loss to the silicon base. The sensing material laid on the heater and electrodes and did not contact with the silicons base. The temperature distribution of micro gas sensor was analyzed by a CFD program, FLUENT. The results showed that the temperature of silicon wafer base was almost similar to that of the room temperature, which indicates that the heat generated at the micro heater heated up effectively the sensing material. The required electric current of micro heater to heat up the sensing material to the target temperature could be predicted.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.347-350
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• 1995

In this paper, we fabricated fuel shortage detecting sensor, utilizing NTC thermistor concerned with Mn-Ni-Co system. We would be obtained B constant value of 1930∼2080 and resistivity 387∼430(ohm-cm) additive Bi$_2$O$_3$0∼0.5 wt% to Mn$_3$O$_4$:9wt%, Co$_3$O$_4$:61wt%, NiO:28wt% under 1150∼1250$^{\circ}C$ of sintering temperature. In sensor, we obtained characteristics, which we want, in resistance range 850∼l150$\Omega$, B constant 2000${\pm}$5%. we can see 15 multiplied differences between gasoline and heat dissipation coefficient of air condition.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.137-141
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• 2010

In this paper, we fabricated silicon piezoresistive pressure sensor with dry etching technology which used Deep-RIE and etching delay technology which used SOI(silicon-on-insulator) wafer. We improved pressure sensor offset and its temperature dependence by removing oxidation layer of SOI wafer which was used for dry etching delay layer. Sensitivity of the fabricated pressure sensor was about 0.56 mV/V${\cdot}$kPa at 10 kPa full-scale, and nonlinearity of the fabricated pressure sensor was less than 2 %F.S. The zero off-set change rate was less than 0.6 %F.S.