• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.233-233
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• 2010

Magnetic random access memory (MRAM), based on magnetic tunnel junction (MTJ) and CMOS, is a prominent candidate among prospective semiconductor memories because it can provide nonvolatility, fast access time, unlimited read/write endurance, low operating voltage and high storage density. The etching of MTJ stack with good properties is one of a key process for the realization of high density MRAM. In order to achieve high quality MTJ stack, the use of CoFeB and IrMn magnetic films as free layers was proposed. In this study, inductively coupled plasma reactive ion etching of CoFeB and IrMn thin films masked with Ti hard mask was investigated in a $Cl_2$/Ar gas mix. The etch rate of CoFeB and IrMn films were examined on varying $Cl_2$ gas concentration. As the $Cl_2$ gas increased, the etch rate monotonously decreased. The effective of etch parameters including coil rf power, dc-bais voltage, and gas pressure on the etch profile of CoFeB and IrMn thin film was explored, At high coil rf power, high dc-bais voltage, low gas pressure, the etching of CoFeB and IrMn displayed better etch profiles. Finally, the clean and vertical etch sidewall of CoFeB and IrMn free layers can be achieved by means of thin Ti hard mask in a $Cl_2$/Ar plasma at the optimized condition.

• Journal of Korean Society for Atmospheric Environment
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• v.30 no.4
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• pp.339-349
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• 2014

$CO_2$ emission has been gradually increased due to rising fossil fuel use. A gliding arc plasma scrubber (GAPS) was proposed to destruct $CO_2$. For optimum design of GAPS, a CFD analysis has been conducted in different configuration for the system. The parameters considered included gas injection velocity at the nozzle and gas flow rate to gap between electrodes. The reactor configuration affected velocity fields which caused changes in the mixture fraction and the retention time. The mixing effect of $CO_2$ and supplied gas ($CH_4$ and steam) was enhanced by installing a orifice baffle. This revealed that the orifice baffle is effective in $CO_2$ conversion by positioning the reactants in the gas into the center of plasma discharge.

• Journal of Electrical Engineering and Technology
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• v.11 no.4
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• pp.969-973
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• 2016

Interruption tests were conducted using the same circuit breaker for an initial pressure of SF₆ 0.5 MPa (gauge pressure) and CO₂ mixture 1.0 MPa, 0.8 MPa, and 0.6 MPa. The pressure-rises in the compression and thermal expansion chambers were measured for verifying the computational results using a simplified synthetic test facility. Further, the possibility of the CO₂ mixture substituting SF₆ gas was confirmed. Moreover, in view of the thermal recovery capability, it has also been confirmed that the pressure of the CO₂ mixture can be reduced almost to the same value as that of the SF₆ gas by optimizing the design parameters of the interrupter.

• Journal of the Korean Ceramic Society
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• v.36 no.5
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• pp.564-569
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• 1999

• Korean Journal of Food Science and Technology
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• v.26 no.3
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• pp.246-249
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• 1994

Shelf-life of pork packaged under $CO_{2}$ was observed and the optimal volume of $CO_{2}$ gas was determined. High gas barrier film, EVOH($CO_{2}$ permiability; 1 $cc/cm^{2}{\cdot}24\;h{\cdot}atm$) was used as packaging material and the volume ratios of sample to $CO_{2}$ of 1 : 1, 1 : 3 and 1 : 5 were tried using the control of vacuum packaged pork. To ev.3luate quality of pork cuts, total plate counts, TBA, color and sensory score were monitored during the storage at $4{\pm}1^{\circ}C$ for 31 days. TPC of vacuum packaged pork increased up to $4.6{\times}10^{6}\;CFU/cm^{2}$ in 24 days while that of $CO_{2}$ gas packaged pork $4.5{\times}10^{5}\;CFU/cm^{2}$ at the same storage period, and it took 7 days more for gas packaged pork to reach the same TPC count. There was no significant difference in TBA value between vacuum packaged and gas packaged pork. In the color L and a values were not affected by treatment but vacuum packaged pork cuts showed higher b value than gas packaged pork. According to sensory evaluation, gas packaged pork showed less off flavor, better flavor and freshness than vacuum packaged one (P<0.05).

• Bulletin of the Korean Chemical Society
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• v.33 no.7
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• pp.2325-2332
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• 2012

A series $[C_3Omim]$[X] of imidazolium cation-based ILs, with ether functional group on the alkyl side-chain have been synthesized and structure of the materials were confirmed by various techniques like $^1H$, $^{13}C$ NMR spectroscopy, MS-ESI, FTIR spectroscopy and EA. More specifically, the influence of changing the anion with same cation is carried out. The absorption capacity of $CO_2$ for ILs were evaluated at 30 and $50^{\circ}C$ at ambient pressure (0-1.6 bar). Ether functionalized ILs shows significantly high absorption capacity for $CO_2$. In general, the $CO_2$ absorption capacity of ILs increased with a rise in pressure and decreased when temperature was raised. The obtained results showed that absorption capacity reached about 0.9 mol $CO_2$ per mol of IL at $30^{\circ}C$. The most probable mechanism of interaction of $CO_2$ with ILs were investigated using FTIR spectroscopy, $^{13}C$ NMR spectroscopy and result shows that the absorption of $CO_2$ in ether functionalized ILs is a chemical process. The $CO_2$ absorption results and detailed study indicates the predominance of 1:1 mechanism, where the $CO_2$ reacts with one IL to form a carbamic acid. The $CO_2$ absorption capacity of ILs for different anions follows the trend: $BF_4$ < DCA < $PF_6$ < TfO < $Tf_2N$. Moreover, the as-synthesized ILs is selective, thermally stable, long life operational and can be recycled at a temperature of $70^{\circ}C$ or under vacuum and can be used repeatedly.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.7
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• The Bulletin of The Korean Astronomical Society
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• v.44 no.1
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• pp.69.3-69.3
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• 2019

The CHIMPS2 survey is to extend the JCMT HARP $^{13}CO/C^{18}O$ J=3-2 Inner Milky-Way Plane Survey (CHIMPS) and the ${12}^CO$ J=3-2 survey (COHRS) into the inner Galactic Plane, the Central Molecular Zone (CMZ), and a section of the Outer Plane. When combined with the complementary $^{12}CO/^{13}CO/C^{18}O$ J=1-0 survey at the Nobeyama 45m (FUGIN) at matching 15" resolution and sensitivity, and other current CO surveys, the results will provide a complete set of transition data with which to calculate accurate column densities, gas temperatures and turbulent Mach numbers. These will be used to: analyze molecular cloud properties across a range of Galactic environments; map the star-formation efficiency (SFE) and dense-gas mass fraction (DGMF) in molecular gas as a function of position in the Galaxy and its relation to the nature of the turbulence within molecular clouds; determine Galactic structure as traced by molecular gas and star formation; constrain cloud-formation models; study the relationship of filaments to star formation; test current models of the gas kinematics and stability in the Galactic center region and the flow of gas from the disc. It will also provide an invaluable legacy data set for JCMT that will not be superseded for several decades. In this poster, we will present the current status of the CHIMPS2.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.10 no.9
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• pp.1641-1647
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• 2006

A dual micro gas sensor way for detecting reducing gas and bad order was fabricated using nano sized $SnO_2$ thin film fabrication method. To make nano-sized thin gas sensitive $SnO_2$ thin rilm, thin tin metal layer $2500{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2,\;SnO_2(+Pt)\;and\;SnO_2(+CuO)$ were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2(Pt)$ and $SnO_2(+CuO)$ showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• 한국신재생에너지학회:학술대회논문집
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• 2008.10a
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• pp.153-156
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• 2008

MILD combustion has been successfully applied to gaseous fuels and few commercial systems are now in operation. Extending MILD combustion applicability to solid fuel of sawdust is the focus of the present work. The MILD combustion furnace at the University of Adelaide in Australia was used in this study. A measurement of $O_2$ and CO emissions have been carried out in parallel with consideration of NOx emission and compared in each modes of conventional natural gas combustion, natural gas MILD combustion, NOx emission in natural gas MILD combustion mode can be reduced to 20% in comparison with conventional combustion. Emission in cases of air carrying sawdust combustion and $CO_2$ carrying sawdust combustion were also compared. Air and $CO_2$ were sued as a carry gas for the sawdust. It was found that MILD conditions are possible for sawdust particles of less than $355{\mu}m$ without additional air pre-heating. It was also found that when using $CO_2$ as the carry gas the flame inside the furnace was not visible anymore and that NOx emission dropped to less than two folds.