• Korean Journal of Environmental Agriculture
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• v.25 no.3
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• pp.247-256
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• 2006

This study has been conducted for the process of food wastes disposal using surplus capacity of established sewage treatment plant by co-digestion of fermented food wastes and sewage sludge after thermophilic acid fermentation of food wastes. The co-digestion of thermophilic acid fermented food wastes and sewage sludge was performed by semi-continous method in mesophilic anaerobic digestion reactor. It showed great digestion efficiency as the average SCOD and VS removal efficiency in organic loading rate 3.30g VS/L.d. were 74.2% and 73.6%, and the gas production rate and average methane content were 0.440 L/g $VS_{add}.d$ and 66.5%, respectively. Based on the results of this study, the co-digestion of thermophilic acid fermented food wastes and sewage sludge in sewage treatment plant is able to improve treatment efficiency of anaerobic digestion reactor and to dispose food wastes simultaneously, and was proved excellent economical efficiency comparing with any other treatment methods.

• Applied Chemistry for Engineering
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• v.22 no.3
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• pp.301-307
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• 2011

Optimal culture conditions of Spirulina platensis NIES 39 have been established using different types of light sources. Several types of photobioreactors were designed and the increase of biomass, the amount of $CO_2$, fixation and the production of chlorophyll content were studied. The result revealed that the input conditions of a 10 min period per 4 h at the condition of 5% $CO_2$ and 0.1 vvm, were excellent in the growth. The growth showing the maximum biomass accumulation is limited to 1.411 g/L when using the fluorescent bulb and the low powered surface mount device (SMD) type LEDs which were equipped-inside in the photobioreactor. However, the biomass exceeded up to 1.758 g/L level when a high powered red LED (color temperature : 12000 K) photobioreactor system was used. The $CO_2$ fixation speed and rate were increased. Although the total production of chlorophyll content undergoes a proportional increase in the biomass, the net content per dry cell weight (DCW) showed the higher production with a blue LED (color temperature : 7500 K) light than that of any other wavelengths. The carbon dioxide loss was marked as 0.15% of the inlet gas (5% $CO_2/Air$, v/v) at the maximum biomass culture condition.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.3
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• pp.587-595
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• 2000

The most problems of domestic sewage for BNR(Biological Nutrients Removal) process are deficiency of carbon source and low C/N ratio. Primary sludge fermentation is seemed to be one of the best solutions producing biodegradable organic substrates. Soluble organic materials from sludge fermentation are mainly SCFAs(Short-Chain Fatty Acids) with 2~5 carbon atoms. In this research, it was attempted to apply $A_2/O$ process with the side-stream acid fermenter to improve the nutrients removal efficiency. The result showed that proper SCFAs production is about 3.000mg/L with SRT of 4~5 days. SCFAs yield of approximately 0.10~0.16 mg SCFAs(as COD) per mg of primary sludge(as COD) were achieved. The ratio of acetic. propionic. butyric and valerie acid were 1, 0.7, 0.5 and 0.6. Significant improvements of nutrients removal over 70% in BNR process were observed. thus will reduce the demand for chemical dosing to increase nutrients removal efficiency. When the fermentate was entered $A_2/O$ process, the ratio of phosphate release to substrate uptake amounts to $0.34gPO_4-Pg^{-1}COD$.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.2
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• pp.48-54
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• 1999

We designed the optimal device parameters of the retrograde well and the gettering layer(buried layer) using the high energy ion implantation for the next generation of CMOS struoture and proposed two models and simulated these models with Athena and Atlas, Silvaco Co. We obtained trigger currents which is more than 600 ${\mu}A/{\mu}m$ when the structure has been combined the gettering layer and the retrograde well. And the second model(twin retrograde well) was obtained that holdingcurrents were over 2500${\mu}A/{\mu}m$. As results, the more heavier dose, the more improved the latch-up immunity. The n'-p' spacing was fixed a 2${\mu}m$ in both models.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.93-93
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• 2017

고전력 펄스 전원공급장치를 이용한 마그네트론 스퍼터링(high-power impulse magnetron sputtering; HiPIMS)과 직류(direct current; DC) 전원공급장치를 이용한 마그네트론 스퍼터링(DC 스퍼터링)을 이용하여 제조한 티타늄 질화물(titanium nitride; TiN) 박막의 특성을 비교하였다. HiPIMS와 DC 스퍼터링 공정 중에 빗각증착을 적용하여 TiN 박막의 미세구조와 기계적 특성의 변화를 확인하였다. TiN 박막을 코팅하기 위한 기판으로 스테인리스 강판(SUS304)과 초경(cemented carbide; WC-10wt.%Co)을 사용하였다. 기판은 알코올과 아세톤으로 초음파 처리를 실시하여 기판 표면의 불순물을 제거하였다. 기판 청정 후 진공용기 내부의 기판홀더에 기판을 장착하고 $2.0{\times}10^{-5}torr$의 기본 압력까지 진공배기를 실시하였다. 진공 용기의 압력이 기본 압력에 도달하면 아르곤(Ar) 가스를 진공용기 내부로 ${\sim}10^{-2}torr$의 압력으로 주입하고 기판홀더에 라디오 주파수(radio frequency; rf) 전원공급장치를 이용하여 - 800 V의 전압을 인가하여 글로우 방전을 발생시켜 30 분간 기판 표면의 산화막을 제거하는 기판청정을 실시하였다. 기판청정이 완료되면 기본 압력까지 진공배기를 실시하고 Ar과 질소($N_2$)의 혼합 가스를 진공용기 내부로 ${\sim}10^{-3}torr$의 압력으로 주입하여 HiPIMS와 DC 스퍼터링으로 TiN 박막 제조를 실시하였다. 빗각의 크기는 $45^{\circ}$와 $-45^{\circ}$이었다. 제조된 TiN 박막은 주사전자 현미경, 비커스 경도 측정기 그리고 X-선 회절 분석기를 이용하여 특성을 분석하였다. HiPIMS로 제조한 TiN 박막은 기판 전압을 인가하지 않아도 색상이 노란색을 보이지만, DC 스퍼터링으로 제조한 TiN 박막은 기판 전압을 인가하지 않으면 노란색을 보이지 않고 어두운 갈색에 가까운 색을 보였다. TiN 박막의 경도는 HiPIMS로 제조한 TiN 박막이 DC 스퍼터링으로 제조한 TiN 박막보다 높았다. 이러한 TiN 박막의 특성 차이는 DC 스퍼터링과 비교하여 높은 HiPIMS의 이온화율에 의한 결과로 판단된다. 빗각을 적용한 TiN 박막은 미세구조 변화를 보였으며 이러한 미세구조 변화는 TiN 박막의 특성에 영향을 미치는 것을 확인하였다.

• Korean Chemical Engineering Research
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• v.49 no.2
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• pp.256-262
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• 2011

Amine can undergo irreversible reactions by $O_{2}$ and high temperature in amine scrubbing process and these phenomena are called "degradation". Degradation causes not only a loss of valuable amine, but also operational problems such as foaming, corrosion and fouling. In this study, using various chemical absorbents(MEA; monoethanolamine, AMP; 2-amino-2-methyl-1-propanol, DAM; 1,8-diamino-p-menthane), we examined the following variable. I) loading ratio of $CO_{2}$ at $50^{\circ}C$ and $120^{\circ}C$, ii) concentration variation and initial degradation rate constant of absorbent in $CO_{2}$ and $CO_{2}/O_{2}$ system, and iii) effect of degradation by $O_{2}$. The $CO_{2}$ loading of 20 wt% DAM was 400% and 270% higher than that of 20 wt% MEA and AMP at 50, respectively and was the largest the difference of $CO_{2}$ loading between absorption $(50^{\circ}C)$ and regeneration $(120^{\circ}C)$ condition. The initial degradation rate constant of 20 wt% DAM was $2.254{\times}10^{-4}cycle^{-1}$ which was slower than that of MEA $(2.761{\times}10^{-4}cycle^{-1})$ and AMP $(2.461{\times}10^{-4}cycle^{-1})$ in $CO_{2}$ system. Also, it was increased 30% by $O_{2}$ that effects on the degradation by $O_{2}$ was less than 100% increased. these degradation reactions was able to identify by formation of new peak in GC and FT-IR spectrum analysis.

• Resources Recycling
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• v.15 no.5 s.73
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• pp.47-51
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• 2006

The total amount of ash generated from the municipal solid waste incineration(MSWI) in Korea was approximately 420,000 tons in 2005 including 68,000 tons of fly ash. Fly ash from MSWI generally contains high amount of CaO (upto ${\sim}50%$) due to the treatment of flue gas by spraying CaO-base materials. Currently, most of fly ash generated is finally ended up with specially designed landfill sites and only less then 20% of fly ash is recycled. In the present work, preparation of $CaCO_3$ from the MSWI ny ash was studied to promote the fly ash recycling. Fly ash obtained from the dust collector in stoker-type MSWI is used to selectively dissolve CaO by using the sugar solution. Then, $CO_2$ gas was passed through the dissolved solution to pro- duce $CaCO_3$ powder. The optimum conditions for CaO dissolution were solid content 10%, reaction time 15 minutes, sugar concentration $10{\sim}15%\;and\;pH\;10.5{\sim}11.0$. The high grade $CaCO_3$ powder was obtained and the experimental conditions are also discussed.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.84-84
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• 2012

소자가 고집적화 됨에 따라, 비저항이 낮고 electro migration (EM), Stress Migration (SM) 특성이 우수한 구리(Cu)를 배선재료로서 사용하고 있다. 그러나, 구리는 Si과 $SiO_2$의 내부로 확산이 빠르게 일어나, Si 소자 내부에 deep donor level을 형성하고, 누설 전류를 증가시키는 등 소자의 성능을 저하시킬 수 있는 문제점을 가지고 있다. 그러나, electroplating 을 이용하여 증착한 Cu 박막은 일반적으로 확산 방지막으로 쓰이는 TiN, TaN, 등의 물질과의 접착 (adhesion) 특성이 나쁘다. 따라서, Cu CMP 에서 증착된 Cu 박막의 벗겨지거나(peeling), EM or SM 저항성 저하 등의 배선에서의 reliability 문제를 야기하게된다. 따라서 Cu 와 접착 특성이 좋은 새로운 확산방지막 또는 adhesion layer의 필요성이 대두되고 있다. 본 연구에서는 이러한 Cu 배선에서의 접착성 문제를 해결하고자 Metal organic chemical vapor deposition (MOCVD)을 이용하여 제조한 코발트(Co) 박막을 $Cu/TaN_x$ 사이의 접착력 개선을 위한 adhesion layer로 적용하려는 시도를 하였다. Co는 비저항이 낮고, Cu 와 adhesion이 좋으며, Cu direct electroplating 이 가능하다는 장점을 가지고 있다. 하지만, 수소 분위기에서 $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) 전구체에 의한 MOCVD Co 박막의 경우 탄소, 산소와 같은 불순물이 다량 함유되어 있어, 비저항, surface roughness 가 높아지게 된다. 따라서 구리 전착 초기에 구리의 핵 생성(nucleation)을 저해하고 핵 생성 후에도 응집(agglomeration)이 발생하여 연속적이고 얇은 구리막 형성을 방해한다. 이를 해결하기 위해, MOCVD Co 박막 증착 시 수소 반응 가스에 암모니아를 추가로 주입하여, 수소/암모니아의 분압을 1:1, 1:6, 1:10으로 변화시켜 $Co/TaN_x$ 박막의 특성을 비교 분석하였다. 각각의 수소/암모니아 분압에 따른 $Co/TaN_x$ 박막을 TEM (Transmission electron microscopy), XRD (X-ray diffraction), AES (Auger electron spectroscopy)를 통해 물성 및 조성을 분석하였고, AFM (Atomic force microscopy)를 이용하여, surface roughness를 측정하였다. 실험 결과, $Co/TaN_x$ 박막은 수소/암모니아 분압 1:6에서 90 ${\mu}{\Omega}-cm$의 낮은 비저항과 0.97 nm 의 낮은 surface roughness 를 가졌다. 뿐만 아니라, MOCVD 에 의해 증착된 Co 박막이4-6 % concentration 의 탄소 및 산소 함량을 가지는 것으로 나타났고, 24nm 크기의 trench 기판 위에 약 6nm의 $Co/TaN_x$ 박막이 매우 균일하게 형성된 것을 확인 할 수 있었다. 이러한 결과들은, 향후 $Co/TaN_x$ 박막이 Cu direct electroplating 공정이 가능한 diffusion barrier로서 성공적으로 사용될 수 있음을 보여준다.

• Korean Journal of Materials Research
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• v.1 no.3
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• pp.125-131
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• 1991

Boron penetration phenomenon of $p^{+}$ silicon gate with as-deposited amorphous or polycrystalline Si upon high temperature annealing was investigated using high frequency C-V (Capacitance-Volt-age) analysis, CCST(Constant Current Stress Test), TEM(Transmission Electron Microscopy) and SIMS(Secondary Ion Mass Spectroscopy), C-V analysis showed that an as-deposited amorphous Si gate resulted in smaller positive shifts in flatband voltage compared wish a polycrystalline Si gate, thus giving 60-80 percent higher charge-to-breakdown of gate oxides. The reduced boron penetration of amorphous Si gate may be attributed to the fewer grain boundaries available for boron diffusion into the gate oxide and the shallower projected range of $BF_2$ implantation. The relation between electron trapping rate and flatband voltage shift was also discussed.

• Clean Technology
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• v.20 no.4
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• pp.359-366
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• 2014

Attrition characteristics of PKM1-SU particles, $CO_2$ absorbents for pre-combustion $CO_2$ capture process, and FCC particles, catalytic particles for hydro cracking of crude oil, were investigated at high temperature and high pressure conditions. Particle attrition tests were executed at various kinds of temperature ($0-400^{\circ}C$) and pressure (0-20 bar) conditions in a cylinder type bubbling fluidized bed with 15.1 cm diameter, 120 cm height and 1 mm orifice-sparger tube. Attrited particles before and after tests were analyzed by BET, optical microscopy, and particle size analyzer. Effects of bed material height (solid inventory) and steam injection were also verified by using ASTM D5757-95, conventional attrition test method.