An Investigation on the Surface Reactions after the Etching of $CeO_2$ Thin Films using High Denstity Inductively Coupled $C1_2CF_4Ar$ Ar Plasmas
(고밀도 유도결합 $C1_2CF_4Ar$ 플라즈마를 이용한 $CeO_2$ 박막 식각후 표면반응에 관한 연구)
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- Proceedings of the International Microelectronics And Packaging Society Conference
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- 2002.05a
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- pp.255-258
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- 2002