• Title/Summary/Keyword: $CF_X$

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Surface Analysis of Aluminum Bonding Pads in Flash Memory Multichip Packaging

  • Son, Dong Ju;Hong, Sang Jeen
    • Transactions on Electrical and Electronic Materials
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    • v.15 no.4
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    • pp.221-225
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    • 2014
  • Although gold wire bonding techniques have already matured in semiconductor manufacturing, weakly bonded wires in semiconductor chip assembly can jeopardize the reliability of the final product. In this paper, weakly bonded or failed aluminum bonding pads are analyzed using X-ray photoelectron spectroscopy (XPS), Auger electron Spectroscopy (AES), and energy dispersive X-ray analysis (EDX) to investigate potential contaminants on the bond pad. We found the source of contaminants is related to the dry etching process in the previous manufacturing step, and fluorocarbon plasma etching of a passivation layer showed meaningful evidence of the formation of fluorinated by-products of $AlF_x$ on the bond pads. Surface analysis of the contaminated aluminum layer revealed the presence of fluorinated compounds $AlOF_x$, $Al(OF)_x$, $Al(OH)_x$, and $CF_x$.

Ionic Conductivities of the LiCF$_3$SO$_3$Complexes with Liquid Crystalline Aromatic Polyesters Having Oligo(oxyethylene) Pendants

  • Lee, Jun-Woo;Joo, Sung-Hoon;Jin, Jung-Il
    • Macromolecular Research
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    • v.12 no.2
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    • pp.195-205
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    • 2004
  • We have synthesized new aromatic polyesters (DiPEG-HQ and DiPEG-BP) by condensation polymerization of a terephthalic acid derivative bearing a pendant oligo(oxyethylene) (DP = 7, MW = 350), which has a methoxy terminal group, and two different aromatic diols, hydroquinone and 4,4'-biphenoI. The synthesized polymers were characterized by differential scanning calorimetry (DSC), polarizing microscopy, and X-ray diffractometry for their liquid crystallinity (LC), thermal transitions, and structural morphologies in mesophases. The morphology of the LC phases depends strongly on the length of the rigid backbone repeating unit. The DiPEG-BP polymer having a longer repeating unit exhibits both layered and nematic structures before isotropization, whereas the DiPEG-HQ polymer having a shorter repeating unit shows only the layered structure in the mesophase. We found that the layer spacing for DiPEG-HQ is larger than that for DiPEG-BP. Both polymers easily form complexes with LiCF$_3$SO$_3$; we studied this complex formation by FT-IR spectroscopy. The layer spacing of the polymer-electrolyte composites increases upon increasing the amount of the lithium salt. The polymer/salt electrolyte mixtures we investigated at molar ratios of EO:salt in the range of 5-20 exhibit electrical conductivity values at 40$^{\circ}C$ of 2.4${\times}$10$\^$5/ and 1.1${\times}$10$\^$-5/ S/cm for DiPEG-HQ/LiCF$_3$SO$_3$ and DiPEG-BP/LiCF$_3$SO$_3$, respectively. At 80 $^{\circ}C$, these values are higher: 4.6${\times}$10$\^$-3/ and 1.1${\times}$10$\^$-4/ S/cm, respectively. The activation energy of conductivity depends strongly on the salt concentration.

Study on Damage Reduction of $(Ba_{0.6}Sr_{0.4})TiO_{3}$ Thin Films in $Ar/CF_{4}$ Plasma ($Ar/CF_{4}$ 유도결합 플라즈마에서 식각된 $(Ba_{0.6}Sr_{0.4})TiO_{3}$ 박막의 손상 감소)

  • Kang, Pil-Seung;Kim, Kyung-Tae;Kim, Dong-Pyo;Kim, Chang-Il;Hwang, Jin-Ho;Kim, Tae-Hyung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.171-174
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    • 2002
  • The barium strontium titannate (BST) thin films were etched in $CF_{4}/Ar$ inductively coupled plasma (ICP). The high etch rate obtained at a $CF_{4}(20%)/Ar(80%)$ and the etch rate in pure argon was twice higher than that in pure $CF_{4}$. This indicated that BST etching is sputter dominant process. It is impossible to avoid plasma-induced damages by the energetic particles in the plasma and the nonvolatile etch products. The plasma damages were evaluated in terms of leakage current density, residues on the etched sample, and the changes of roughness. After the BST thin films exposed in the plasma, the leakage current density and roughness increases. In addition, there are appeared a nonvolatile etch byproductsand from the result of X-ray photoelectron spectroscopy (XPS). After annealing at ${600^{\circ}C}$ for 10 min in $O_{2}$ ambient, the increased leakage current density, roughness and nonvolatile etch byproducts reduced. From the this results, the plasma induced damage recovered by annealing process owing to the relaxation of lattice mismatches by Ar ions and the desorption of metal fluorides in high temperature.

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Characteristics of Expanded Graphite Filled Conductive Polymer Composites for PEM Fuel Cell Bipolar Plates

  • Oh, K.S.;Heo, S.I.;Yun, J.C.;Yang, Y.C.;Han, K.S.
    • Advanced Composite Materials
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    • v.17 no.3
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    • pp.259-275
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    • 2008
  • This study aims to optimize the mechanical and electrical properties of electrically conductive polymer composites (CPCs) for use as a material of bipolar plates for PEM fuel cells. The thin CPCs consisting of conductive fillers and polymer resin were fabricated by a preform molding technique. Expanded graphite (EG), flake-type graphite (FG) and carbon fiber (CF) were used as conductive fillers. This study tested two types of CPCs, EG/FG filled CPCs and EG/CF filled CPCs, to optimize the material properties. First, the characteristics of EG/FG filled CPCs were investigated according to the FG ratio for 7 and $100{\mu}m$ sized FG. CPCs using $100{\mu}m$ FG showed optimal material properties at 60 wt% FG ratio, which were an electrical conductivity of 390 S/cm and flexural strength of 51 MPa. The particle size was an important parameter to change the mechanical and electrical behaviors. The flexural strength was sensitive to the particle size due to the different levels of densification. The electrical conductivity also showed size-dependent behavior because of the different contributions to the conductive network. Meanwhile, the material properties of EG/CF filled CPCs was also optimized according to the CF ratio, and the optimized electrical conductivity and flexural strength were 290 S/cm and 58 MPa, respectively. The electrical conductivity of this case decreased similarly to the EG/FG filled case. On the other hand, the behavior of the flexural strength was more complicated than the EG/FG filled case, and the reason was attributed to the interaction between the strengthening effect of CF and the deterioration of voids.

HYERS{ULAM STABILITY OF FUNCTIONAL INEQUALITIES ASSOCIATED WITH CAUCHY MAPPINGS

  • Kim, Hark-Mahn;Oh, Jeong-Ha
    • Journal of the Chungcheong Mathematical Society
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    • v.20 no.4
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    • pp.503-514
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    • 2007
  • In this paper, we investigate the generalized Hyers-Ulam stability of the functional inequality $$||af(x)+bf(y)+cf(z)||{\leq}||f(ax+by+cz))||+{\phi}(x,y,z)$$ associated with Cauchy additive mappings. As a result, we obtain that if a mapping satisfies the functional inequality with perturbing term which satisfies certain conditions then there exists a Cauchy additive mapping near the mapping.

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GENERALIZED AFFINE DEVELOPMENTS

  • Park, Joon-Sik
    • Journal of the Chungcheong Mathematical Society
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    • v.28 no.1
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    • pp.65-72
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    • 2015
  • The (affine) development of a smooth curve in a smooth manifold M with respect to an arbitrarily given affine connection in the bundle of affine frames over M is well known (cf. S.Kobayashi and K.Nomizu, Foundations of Differential Geometry, Vol.1). In this paper, we get the generalized affine development of a smooth curve $x_t$ ($t{\in}[0,1]$) in M into the affine tangent space at $x_0$ (${\in}M$) with respect to a given generalized affine connection in the bundle of affine frames over M.

The Preparation and Reactions of Some Fluorinated Cyclobutane Carboxylic Acids

  • J. D. Park;F. E. Rogers
    • Journal of the Korean Chemical Society
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    • v.16 no.3
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    • pp.178-188
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    • 1972
  • Diethyl itaconate was found to react tetrafluoroethylene, trifluorochloroethylene, and 1,1-difluoro-2,2-dichloroethylene quite rendily at $180^{\circ}C$ to form 1-carboxy-2,2,3,3,-tetrahalo-cyclobutane ethanoic acid derivatives ${C{\underline{X_2-CF_2-CH_2-}}C-(COOEt)-CH_2COOEt$, where X is Cl or F). Diethylcitraconate failed to yeild any cycloaddition products. The Physical and Chemical properties of the above esters and their dericatives are characterized and compared with other similar ring compounds.

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Palladium(II) Aryloxides of Pd(2,6-(CH2NMe2)2C6H3)(OC6H4-X-p) (X = Me, NO2): Synthesis, Property and Reactivity towards Diphenyliodium Chloride

  • Jung, Hyun-Sang;Park, Yun-Sik;Seul, Jung-Min;Kim, Jong-Sook;Lee, Ho-Jin;Park, Soon-Heum
    • Bulletin of the Korean Chemical Society
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    • v.32 no.8
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    • pp.2711-2716
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    • 2011
  • para-Substituted phenoxide derivatives of Pd(II) having an NCN pincer, Pd(NCN)($OC_6H_4$-p-X) (NCN = 2,6-$(CH_2NMe_2)_2C_6H_3$; X = $NO_2$ (1), Me (2)) were prepared by the reaction of Pd(NCN)($OSO_2CF_3$) with equi-molar amount of $NaOC_6H_4$-p-X. Treatment of Pd(NCN)($OSO_2CF_3$) with an excess amount of $NaOC_6H_4$-p-Me affords the hydrogen-bonding adduct complex 3 ($2{\cdot}HOC_6H_4$-p-Me). Complex 3 can also be obtained from benzene solution of 2 in the presence of free $HOC_6H_4$-p-Me. Complex 1 does not undergo adduct formation with $HOC_6H_4-p-NO_2$ neither from metathesis reaction of Pd(NCN)($OSO_2CF_3$) with an excess amount of $NaOC_6H_4-p-NO_2$ nor from treatment of 1 with free $HOC_6H_4-p-NO_2$. Complex 3 undergoes fast exchange of the coordinated p-cresolate with the hydrogen-bonding p-cresol. Complex 2 undergoes ${\sigma}$-ligand exchange reaction with $HOC_6H_4-p-NO_2$ to give 1. The exchange reaction, however, is irreversible as readily anticipated from their respective $pK_a$ values of the phenol derivatives. Reaction of 2 with diphenyliodium chloride quantitatively produced Pd(NCN)Cl and PhI along with liberation of O-phenylated product $PhOC_6H_4$-p-Me which was identified by GC/MS spectroscopy.

Study of dry etching chrateristics of freeoelectric $YMnO_{3}$ thin films (강유전체 $YMno_{3}$ 박막의 건식식각 특성연구)

  • Kim, In-Pyo;Park, Jae-Hwa;Kim, Kyoung-Tae;Kim, Chang-Il;Jang, Eui-Goo;Eom, Joon-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.159-162
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    • 2002
  • Ferroelectric $YMnO_{3}$ thin films were etched with $Ar/Cl_{2}$ and $CF_{4}/Cl_{2}$ inductivly coupled plasma (ICP). The maximum etch rate of $YMnO_{3}$ thin film was $300{\AA}/min$ at a $Ar/Cl_{2}$ gas mixing ratio of 2/8, a RF power of 800 W, a dc bias of 200 V, a chamber pressure of 15 mTorr, and a substrate temperature of ${30^{\circ}C}$. From the X-ray photoelectron spectroscopy (XPS) analysis , yttrium not only etched by chemical reactions with Cl radicals, but also assisted by Ar ion bombardments in $Ar/Cl_{2}$ plasma. In $CF_{4}/Cl_{2}$ plasma, yttrium are remained on the etched surface of $YMnO_{3}$ and formed of nonvolatile YFx compounds Manganese etched effectively by chemical reactions with Cl and F radicals. From the X-ray diffraction (XRD) analysis, the (0004) diffraction peak intensity of the $YMnO_{3}$ thin film etched in $Ar/Cl_{2}$ plasma shows lower value than that in $CF_{4}/Cl_{2}$ plasma. It is indicates that the crystallinty of $YMnO_{3}$ thin film is more easily damaged by the Ar ion bombardment than the changes of stoichiometry due to nonvolatile etch by-products.

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Chromosomal Analysis of Meiosis and Mitosis in New Zealane White Rabbit (New Zealand White 토끼의 생식세포 및 체세포 분열에 의한 염색체 분석)

  • 신선희;김희수;최영현;이원호
    • Journal of Life Science
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    • v.11 no.4
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    • pp.354-361
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    • 2001
  • Chromosomal characteristics of New Zealane White rabbit was studied at meiosis and mitosis. The meiotic chromosomal preparations were mad with the modified air-drying method and karyotype analysis was performed with the G-banding technique, using isolated mitotic metapase chromosomes of the New Zealand White rabbit. Chromosomes, sex vesicles and centromeres could be classified in the zygotene and the pachytene of the meiosis I. The hair-like processes projecting laterally from the axes of bivalent chromosomes at the mid-to-late pachytene were observed and made the appearance of the lampbrush chromosome structure. Chromosomes could be classified onthe basis of the numbers and locations of chiasma in the diakinesis. Twenty-one autosomal bivalents and a single unequal terminally associated X-Y bivalent were observe during the late prophase and the metaphase of the meiosis I. Most of the bivalent types observed in the New Zealand White rabbit spermatrocytes were 1CH, 1TAl, and 2TA bivalents. The mean chiasma frequency(CF) of the male New Zealand White rabbit was 30.2 and it was found that the CF value tended to decrease through diakinesis and the metaphase I. The karyotype of the New Zealand White rabbit was a male chromosome number of 44(2n=44) comprising 8 pairs of metacentric, 9 pairs of submetacentric, 4 pairs o acrocentric autosomes, metacentric X chromosome and acrocentric Y chromosome.

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