• Title/Summary/Keyword: $CF_X$

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The reduction of etching damage in lead-zirconate-titanate thin films using Inductively Coupled Plasma (Inductively Coupled Plasma를 이용한 lead-zirconate-titanate 박막의 식각 손상 개선)

  • Lim, Kyu-Tae;Kim, Kyoung-Tae;Kim, Dong-Pyo;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.178-181
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    • 2003
  • In this work, we etched PZT films with various additive gases ($O_2$ and Ar) in $Cl_2/CF_4$ plasmas, while mixing ratio was fixed at 8/2. After the etching, the plasma induced damages are characterized in terms of hysteresis curves, leakage current, retention properties, and switching polarization. When the electrical properties of PZT etched in $O_2$ or Ar added $Cl_2/CF_4$ were compared, the value of remanent polarization in $O_2$ added $Cl_2/CF_4$ plasma is higher than that in Ar. added plasma. The maximum etch rate of the PZT thin films was 145 nm/min for 30% Ar added $Cl_2/CF_4$ gas having mixing ratio of 8/2 and 110 nm/min for 10% $O_2$ added to that same gas mixture. In order to recover the ferroelectic properties of the PZT thin films after etching, we annealed the etched PZT thin films at $550^{\circ}C$ in an $O_2$ atmosphere for 10 min. From the hysteresis curves, leakage current, retention property and switching polarization, the reduction of the etching damage and the recovery via the annealing was turned out to be more effective when $O_2$ was added to $Cl_2/CF_4$ than Ar. X-ray diffraction (XRD) showed that the structural damage was lower when $O_2$ was added to $Cl_2/CF_4$. And the improvement in the ferroelectric properties of the annealed samples was consistent with the increased intensities of the (100) and the (200) PZT peaks.

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Preparation of low refractive index $SiO_xF_y$ optical thin films by ion beam assisted deposition (이온빔보조증착으로 제작한 저굴절률 $SiO_xF_y$ 광학박막의 특성 연구)

  • 이필주;황보창권
    • Korean Journal of Optics and Photonics
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    • v.9 no.3
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    • pp.162-167
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    • 1998
  • $SiO_xF_y$ optical thin films of lower refractive indices than glass substrates were fabricated by the CF$_4$ ion beam assisted deposition method and the optical, structural and chemical properties of them were investigated. Refractive index of $SiO_xF_y$ films was varied from 1.455 to 1.394 by decreasing the anode voltage or from 1.462 to 1.430 by increasing the current density of end-Hall ion source. FT-IR and XPS analyses show that as the F concentration increases, the Si-O bond at $1080m^{-1}$ shifts to higher wavenumber, the OH bonds are reduced drastically, and the fluorine atoms at the air-film interface are desorbed out by reacting with $H_2O$ in the atmosphere. $SiO_xF_y$ thin films are amorphous by the XRD analysis and have the compressive stress below 0.3 GPa. As an application of $SiO_xF_y$ thin films a two-layer antireflection coating was fabricated using a $SiO_xF_y$ film as a low refractive index layer and a Si film as an absorbing one.

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Fabrication and Electrochemical Characterization of Carbon Fluoride-based Lithium-Ion Primary Batteries with Improved Rate Performance Using Oxygen Plasma (산소 플라즈마를 이용하여 율속 성능이 개선된 불화탄소 기반 리튬 일차전지의 제조 및 전기 화학적 특성)

  • Seoyeong Cheon;Naeun Ha;Chaehun Lim;Seongjae Myeong;In Woo Lee;Young-Seak Lee
    • Applied Chemistry for Engineering
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    • v.34 no.5
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    • pp.534-540
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    • 2023
  • The high-rate performance is limited by several factors, such as polarization generation, low electrical conductivity, low surface energy, and low electrolyte permeability of CFX, which is widely used as a cathode active material in the lithium primary battery. Therefore, in this study, we aimed to improve the battery performance by using carbon fluoride modified by surface treatment using oxygen plasma as a cathode for lithium primary batteries. Through XPS and XRD analysis, changes in the surface chemical characteristics and crystal structure of CFX modified by oxygen plasma treatment were analyzed, and accordingly, the electrochemical characteristics of lithium-ion primary batteries were analyzed and discussed. As a result, the highest number of semi-ionic C-F bonds were formed under the oxygen plasma treatment condition (7.5 minutes) with the lowest fluorine to carbon (F/C) ratio. In addition, the primary cell prepared under this condition using carbon fluoride as the active material of the cathode showed the highest 3 F/C(3 C rate-performance) rate-performance and maintained a relatively high capacity (550 mAh/g) even at high rates. In this study, it was possible to produce lithium primary batteries with high-rate performance by adjusting the fluorine contents of carbon fluoride and the type of carbon-fluorine bonding through oxygen plasma treatment.

Mitigation of Greenhouse Gas Emissions (GHGs) by Water Management Methods in Rice Paddy Field

  • Kim, Gun-Yeob;Park, Woo-Kyun;Lee, Sun-Il;Lee, Jong-Sik;Choi, Eun-Jung;Na, Un-sung;Jang, Hee-Young;Suh, Sang-Uk
    • Korean Journal of Soil Science and Fertilizer
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    • v.48 no.5
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    • pp.477-484
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    • 2015
  • Environmental effect of water-saving irrigation on the emissions of greenhouse gases (GHGs) has not been well investigated. The objective of this study was to measure the effect of water-saving irrigation on GHGs as well as water use and rice production yield in paddy field condition in Korea. Four experimental runoff plots of 4x35 m in size were prepared at an existing paddy field. GHGs emission was measured during the 2012~2013 growing seasons while a Japonica rice variety was cultivated. Four different water management methods, 1) Continuous Flooding (CF), 2) Intermittent Drainage (ID), 3) Water Saving (WS), and 4) CF+WS, were used during a rice growing season to compare the effects of water management methods on GHGs emission. CF method is flooding all the time, ID method makes paddy water drained 40 days after transplanting for about two weeks, WS method maintains 2~3 cm water-level, which should be refilled when the water-level decreased to about 0 cm, and CF+WS method combines CF method before 30 days after transplanting (DAT) and WS method after 30 DAT. Regardless of water management methods, paddy field water was drained about 30 days before harvest. Amount of GHGs emission from WS plot was reduced by 69.3% compared to that from CF plot and by 59.0% compared to that from ID plot. Amount of GHGs emission from CF+WS plot was reduced by 60.7% compared to that from CF plot and by 47.5% compared to that from ID plot. Weed occurrence in CF+WS plots was reduced to 62.2% in comparison with the WS plot, implying that CF+WS plot showed the best effect to mitigation of the greenhouse gas emission in the atmosphere.

STABILITY OF QUADRATIC FUNCTIONAL EQUATIONS IN RANDOM NORMED SPACES

  • Schin, Seung Won;Ki, DoHyeong;Chang, JaeWon;Kim, Min June;Park, Choonkil
    • Korean Journal of Mathematics
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    • v.18 no.4
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    • pp.395-407
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    • 2010
  • In this paper, we prove the generalized Hyers-Ulam stability of the following quadratic functional equations $$cf\(\sum_{i=1}^{n}x_i\)+\sum_{j=2}^{n}f\(\sum_{i=1}^{n}x_i-(n+c-1)x_j\)\\=(n+c-1)\(f(x_1)+c\sum_{i=2}^{n}f(x_i)+\sum_{i<j,j=3}^{n}\(\sum_{i=2}^{n-1}f(x_i-x_j\)\),\\Q\(\sum_{i=1}^{n}d_ix_i\)+\sum_{1{\leq}i<j{\leq}n}d_id_jQ(x_i-x_j)=\(\sum_{i=1}^{n}d_i\)\(\sum_{i=1}^{n}d_iQ(x_i)\)$$ in random normed spaces.

The Effect of Substituents on LC Behavior of Bis(p-substituted phenyl) 2-Decyloxyterephthalate (Bis(p-substituted phenyl) 2-decyloxyterephthalate의 액정 특성에 대한 치환기 효과)

  • Park, Joo-Hoon;Lee, Jong-Kyu;Choi, Ok-Byung;So, Bong-Keun;Lee, Soo-Min;Lee, Jun-Woo;Jin, Jung-Il
    • Journal of the Korean Chemical Society
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    • v.44 no.2
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    • pp.127-137
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    • 2000
  • Eleven new compounds that are composed of bis(p-substituted phenyl) terephthalate unitand the decyloxy pendant as lateral were synthesized and their thermal and liquid crystalline properties were studied by the differential scanning calorimetry (DSC) and on a hot-stage of a polarizing microscope. The ter-minal substituent groups of the compound were varied; X= -H(II-H), -F(lI-F), -CII(II-CI), -Br(ll-Br), -I(II-I), -$NO_2(lI-NO_2$), $-CF_3(II-CF_3$), -$OC_2H_5(II-OC_2H_5$), -$OC_4H_9(II-OC_4H_9$), -$C_6H_5(Il-C_6H_5$). The compounds of $II-OC_2H_5,\;II-OC_4H_9$ and $II-C_6H_5$ were monotropically nematic. In contrast, the compounds of Il-H, II-F, II-Cl, II-Br, II-I, $lI-NO_2$, $II-CF_3$, and II-CN did not show liquid crystalline properties.

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Characteristics of silicon etching related to $He-O_2,\; SiF_4$for trench formation (실리콘 트렌치 식각 특성에 미치는 $He-O_2,\; SiF_4$첨가 가스의 영향)

  • 김상기;이주욱;김종대;구진근;남기수
    • Journal of the Korean Vacuum Society
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    • v.6 no.4
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    • pp.364-371
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    • 1997
  • Silicon trench etching has been carried out using a magnetically enhanced reactive ion etching system in HBr plasma containing He-$O_2$, $CF_4$. The changes of etch rate and etch profile, the degree of residue formation, and the change of surface chemical state were investigated as a function of additive gas flow rate. A severe lateral etching was observed when pure HBr plasma was used to etch the silicon, resulted in a pot shaped trench. When He-$O_2$, $SiF_4$ additives were added to HBr plasma, the lateral etching was almost eliminated and a better trench etch profile was obtained. The surface etched in HBr/He-$O_2/SiF_4$ plasma showed relatively low contamination and residue elements compared to the surface etched in HBr/He-$O-2/CF_4$plasma. In addition, the etching characteristics including low residue formation and chemically clean etched surface were obtained by using HBr containing He-$O_2$ or $SiF_4$ additive gases instead of $CF_4$ gas, which were confirmed by X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscopy (AFM).

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FIXED POINTS AND FUZZY STABILITY OF QUADRATIC FUNCTIONAL EQUATIONS

  • Lee, Jung Rye;Shin, Dong Yun
    • Journal of the Chungcheong Mathematical Society
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    • v.24 no.2
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    • pp.273-286
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    • 2011
  • Using the fixed point method, we prove the Hyers-Ulam stability of the following quadratic functional equations $${cf\left({\displaystyle\sum_{i=1}^n\;xi}\right)+{\displaystyle\sum_{i=2}^nf}{\left(\displaystyle\sum_{i=1}^n\;x_i-(n+c-1)x_j\right)}\\ {=(n+c-1)\;\left(f(x_1)+c{\displaystyle\sum_{i=2}^n\;f(x_i)}+{\displaystyle\sum_{i in fuzzy Banach spaces.

Determination of output factors by 1D method for 6MeV electron (1D 방법에 의한 6MeV 전자선의 output 인자 결정)

  • 유명진
    • Progress in Medical Physics
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    • v.13 no.1
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    • pp.27-31
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    • 2002
  • Output factors for 6MeV electron were directly measured under the condition of an individual beam cutout and these factors were compared with the output factors by 1D method which is an easy means to predict the output factors of electron beam. Output factors by 1D method are defined as output factors of rectangular fields where one side is always equal to the side of the square reference field and the output of an arbitrary rectangular field X, Y is given by the product of the 1D output factors. The output of very large square fields is overestimated using 1D method for the 6MeV electron, but it results in agreement with measured data under the condition of an individual cutout within 1% error adopting a correction factor $CF=C\times$[(X-10)(Y-10)/$\mid$(X-10)(Y-10)$\mid^{1/2}]$.

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Neutron Dose Response of Tradescantia Stamen Hair Pink Mutations and RBE (자주달개비 수술털 분홍돌연변이의 중성자 선량반응과 RBE)

  • Kim, Jin-Kyu;Kim, Won-Rok
    • Journal of Radiation Protection and Research
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    • v.23 no.1
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    • pp.17-23
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    • 1998
  • Dose response relationships for one of biological end-points (gene mutation) in somatic cells of Tradescantia 4430 clones were studied using neutrons coming out of a californium-252 isotopic source. And the relative biological effectiveness (RBE) of neutrons in relation to X-rays in the induction of TSH pink mutations was assessed. Inflorescences were irradiated with X-ray from X-ray generator and neutrons from $^{252}Cf$ source. Irradiated cuttings were incubated with aeration in neutrient solution under the controlled condition. For more than 4 weeks after irradiation cell mutations were scored. Pink mutation frequencies were calculated from the pooled data for the peak interval (days 6 to 13 post-irradiation). Somatic cell mutations in TSH showed linear dose response relationships in the range of neutron doses available for the experiment. The RBE values estimated for neutrons in relation to X-rays were in the range 3.1 to 6.8, which were much lower than normally recognized value.

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